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IEEE International Conference on Interconnect Technology

作者： Kyung-Mun Byun Deok-Young Jung Jun-Won Lee Seungheon Lee Hyongsoo Kim Mun-Jun Kim Eunkee Hong Mansug Gang Seok-Woo Nam Joo-Tae Moon Chilhee Chung Jung-Hoo Lee Hyo-Sug Lee Process Development Team Semiconductor Research and Development Center USA Manufacturing Technology Team Infra Technology Service Center Semiconductor Business Samsung Electronics Company Limited Hwasung Gyeonggi South Korea Material Application Group Materials Research Center Samsung Advanced Institute of Technology Samsung Electronics Company Limited Yongin si Gyeonggi South Korea

ISBN: (纸本)9781424476763;9781424476770

A highly robust gap-fill process technology of spin-on glass (SOG) was developed for the interlayer dielectric (ILD) in sub-30 nm devices. We revealed that the filling behavior of SOG within gaps during spin-coating is mainly dependent on the capillary effect. The highly wettable surface treatment prior to SOG coating was found to enhance the gap-fill performance remarkably. This technique plays a key role in maximizing capillary effect by raising surface wettability. The filling capability was also improved by optimization of baking temperature to minimize the viscosity of SOG. It was finally found that the defects of contact bridges due to poor filling of SOG were reduced to be almost free by those unique process refinements.

关键词： Robustness Glass Filling Bridges Coatings Dielectric devices Dielectric materials Semiconductor materials Surface treatment Plasma temperature

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Life cycle strain mapping of composite airframe structures for health monitoring by using FBG sensors

Life cycle strain mapping of composite airframe structures f...

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作者： Takahashi, Ichiya Sekine, Kazushi Takeya, Hajime Iwahori, Yutaka Minakuchi, Shu Takeda, Nobuo Koshioka, Yasuhiro Advanced Technology R and D Center Mitsubishi Electric Corporation 8-1-1 Tsukaguchi-Hommachi Amagasaki Hyogo 661-8661 Japan Advanced Composite Group Aerospace Research and Development Directorate Japan Aerospace Exploration Agency 6-13-1 Osawa Mitaka Tokyo 181-0015 Japan Graduate School of Frontier Sciences University of Tokyo 5-1-5 Kashiwanoha Kashiwa Chiba 277-8561 Japan Materials Process Technology Center 3-5-8 Shibakoen Minato-ku Tokyo 105-0011 Japan

ISBN: (纸本)9781934551080

The purpose of this research is to develop structural health monitoring technology based on the strain mapping of composite airframe structures through their life cycles. We conducted the evaluation tests for damage detection in CFRP pressure bulkheads using FBG sensors and verified the damage detection ability and accuracy of FBG sensors on various modes of damages and deformation. As a result, damages and deformation can be detected as the changes in strain distribution measured by FBG sensors. Moreover, these changes agree well with numerical simulation. These results demonstrate that the strain mapping by FBG sensors can be used for damage detection of the CFRP pressure bulkhead.

关键词： Damage detection

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SCR calibration using design of experiments

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MTZ worldwide 2010年第6期71卷 24-28页

作者： Seabrook, Justin Rebhan, Martin He, Yongsheng Battiston, Paul A. He, Xin Calibration Process Ricardo UK Ltd. Shoreham-by-Sea Great Britain Performance and Calibration Department Ricardo Deutschland GmbH Schwäbisch Gmünd Germany GM Global Research & Development Warren USA Advanced Engineering Department GM Powertrain Warren USA CIDI Engine Group GM Powertrain Systems Research Lab Warren USA

NOx catalysts play a key role in reducing oxides of nitrogen. Further degrees of freedom are introduced into the calibration process when a selective catalytic reduction (SCR) system is incorporated. Ricardo and General Motors have developed an advanced calibration process which counters the increasing complexity of powertrain calibration by using Design of Experiments (DoE). A reduction in development outlay can be achieved despite increased system complexity.

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Robust spin-on glass gap-fill process technology for sub-30nm interlayer dielectrics

Robust spin-on glass gap-fill process technology for sub-30n...

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2010 IEEE International Interconnect Technology Conference, IITC 2010

作者： Byun, Kyung-Mun Jung, Deok-Young Lee, Jun-Won Lee, Seungheon Kim, Hyongsoo Kim, Mun-Jun Hong, Eunkee Gang, Mansug Nam, Seok-Woo Moon, Joo-Tae Chung, Chilhee Lee, Jung-Hoo Lee, Hyo-Sug Process Development Team Semiconductor R and D Center Samsung Electronics Co. Ltd. Hwasung-City Gyeonggi-Do 445-701 Korea Republic of Manufacturing Technology Team Infra Technology Service Center Samsung Electronics Co. Ltd. San#16 Banwol-Dong Hwasung-City Gyeonggi-Do 445-701 Korea Republic of Material Application Group Materials Research Center Samsung Advanced Institute of Technology San#14 Nongseo-Dong Giheung-Gu Yongin-City Gyeonggi-Do 449-712 Korea Republic of

ISBN: (纸本)9781424476763

A highly robust gap-fill process technology of spin-on glass (SOG) was developed for the interlayer dielectric (ILD) in sub-30nm devices. We revealed that the filling behavior of SOG within gaps during spin-coating is mainly dependent on the capillary effect. The highly wettable surface treatment prior to SOG coating was found to enhance the gap-fill performance remarkably. This technique plays a key role in maximizing capillary effect by raising surface wettability. The filling capability was also improved by optimization of baking temperature to minimize the viscosity of SOG. It was finally found that the defects of contact bridges due to poor filling of SOG were reduced to be almost free by those unique process refinements. ©2010 IEEE.

关键词： Coatings

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A NEW NON-INVASIVE METHOD FOR VALVE STICTION DECTION USING WAVELET TECHNOLOGY

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Journal of Electronics(China) 2009年第5期26卷 673-680页

作者： Xu Zhanyang Charles Zhan Zhang Shunyi Institute of Information Network Technology Nanjing University of Posts ＆ Telecommunications Nanjing 210003 China Department of Computer Sciences~ Nanjing University of Information Science and Technology Nanjing 210044 China Advanced Process Control Research and Development Group Honeywell Process Solutions Phoenix AZ 85027 USA

In this letter, we present a novel approach of valve stiction detection using wavelet technology. A new non-invasive method is developed with the closed-loop normal operating data. The redundant dyadic discrete wavelet transform is used to decompose the data at different resolution scales. Based on the Lipschitz regularity theory, wavelet coefficients analysis across scales is performed to detect the jumps in the controlled variables. Adaptive wavelet de-noising is then applied to the data. Features of the valve stiction patterns are extracted from the de-noised data and the valve stiction probability is calculated.

关键词： Valve stiction Wavelet de-noising Jump Features extraction

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The Effect of Tuning in Multiple-Model Adaptive controllers: A Case Study

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IFAC Proceedings Volumes 2009年第11期42卷 560-565页

作者： Ehsan Peymani Alireza Fatehi Ali Khaki Sedigh Advanced Process Automation & Control (APAC) Research Group K. N. Toosi University of Technology Tehran Iran

In this paper, two types of multiple-model adaptive controllers are practically evaluated on a laboratory-scale pH neutralization process. The first one is supervisory switching multiple-model adaptive controller (SMMAC) whose model bank is fixed and selected a priori, and another one is a controller based on multiple models, switching, and tuning strategy (MMST) which uses the possibility of model bank tuning. In addition to investigation of the effect of tuning, the advantage of a disturbance rejection supervisor is studied. Various experiments and exhaustive numerical analyses are provided to assess the abilities of the proposed algorithms.

关键词： multiple models adaptive control pH control switching control pole-placement control

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Enhancement of Multi-Objective control Performance via Switching

Enhancement of Multi-Objective Control Performance via Switc...

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2009中国控制与决策会议

作者： Laven Soltanian Ali Khaki Sedigh Omid Namaki-Shoushtari Advanced Process Automation & Control(APAC) Research Group K.N.Toosi University of TechnologyTehranIran Control Engineering Department K.N.Toosi University of TechnologyTehranIran

control system design for a complex system encompasses the optimization of different and often conflicting objectives leading to a multiple objective design *** this paper,a switching strategy is proposed to solve the multiple objective controller *** controller is designed based on a set of performance *** realization considerations are used to ensure overall closed loop *** matrix inequalities are employed in the controller design *** objective designs are always prone to over conservatism,which is greatly reduced by the switching *** results are used to show the effectiveness of the design methodology.

关键词： multi-objective control switching stability state space realization linear matrix inequalities(LMI)

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development of Low-Power-Consumption IC Chipset for SFP+

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SEI Technical Review 2009年第69期 86-91页

作者： Tanaka, Keiji Moto, Akihiro Fujita, Hayato Sato, Shunsuke Oomori, Hiroyasu Tanaka, Hiromi Ishibashi, Hiroto Uesaka, Katsumi Advanced Circuit Design RandDDepartment Transmission Devices RandD Laboratories Japan Lightwave Development Department Optical Components Division Sumitomo Electric Device Innovation Inc. Firmware and Digital Control Design Group Lightwave Development Department Optical Components Division Integrated Device Process RandD Department Transmission Devices RandD Laboratories Japan

For small form-factor pluggable plus (SFP+), the authors have successfully developed chipset composed of transceiver IC equipped with Vertical-Cavity Surface-Emitting Laser (VCSEL) driver and shunt-driver IC. This paper describes the concept of low-power consumption designs and details of circuit designs. This combination of the shunt-driver and VCSEL driver with an asymmetric pre-emphasis has enabled to reduce the total power consumption of SFP+ without any degradation of optical performance. Both the transceiver IC and the shunt-driver IC can operate at 2.5V supply voltage. Consequently, the development of such IC has effectively reduced the total power consumption of SFP+ for 10GBASE-LR to 750 mW or less at operating temperature ranging from Tc = -5C to 85C, in accordance with the requirements of SFF-8472.

关键词： Surface emitting lasers

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Identification, Prediction and Detection of the process Fault in a Cement Rotary Kiln by Locally Linear Neuro-Fuzzy Technique

Identification, Prediction and Detection of the Process Faul...

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International Conference on Computer and Electrical Engineering, ICCEE

作者： Masoud Sadeghian Alireza Fatehi Department of Mechatronics Engineering Sharif University of Technology International Campus Kish Island Iran Advanced Process Automation and Control (APAC) Research group Faculty of Electrical Engineering K.N. Toosi University of Technology Tehran Iran

In this paper, we use nonlinear system identification method to predict and detect process fault of a cement rotary kiln. After selecting proper inputs and output, an input-output model is identified for the plant. To identify the various operation points in the kiln, Locally Linear Neuro-Fuzzy (LLNF) model is used. This model is trained by LOLIMOT algorithm which is an incremental tree-structure algorithm. Then, by using this method, we obtained 3 distinct models for the normal and faulty situations in the kiln. One of the models is for normal condition of the kiln with 15 minutes prediction horizon. The other two models are for the two faulty situations in the kiln with 7 minutes prediction horizon are presented. At the end, we detect these faults in validation data. The data collected from White Saveh Cement Company is used for in this study.

关键词： Fault diagnosis Fault detection Kilns Production facilities Electrical fault detection Fuzzy systems Delay estimation Nonlinear systems Predictive models Automation

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Identification of Nonlinear Predictor and Simulator Models of a Cement Rotary Kiln by Locally Linear Neuro-Fuzzy Technique

Identification of Nonlinear Predictor and Simulator Models o...

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International Conference on Computer and Electrical Engineering, ICCEE

作者： Masoud Sadeghian Alireza Fatehi Department of Mechatronics Engineering International Campus Sharif University of Technology Kish Island Iran Advanced Process Automation and Control (APAC) Research group Faculty of Electrical Engineering K.N. Toosi University of Technology Tehran Iran

One of the most important parts of a cement factory is the cement rotary kiln which plays a key role in quality and quantity of produced cement. In this part, the physical exertion and bilateral movement of air and materials, together with chemical reactions take place. Thus, this system has immensely complex and nonlinear dynamic equations. These equations have not worked out yet. Only in exceptional case; however, a large number of the involved parameters were crossed out and an approximation model was presented instead. This issue caused many problems for designing a cement rotary kiln controller. In this paper, we presented nonlinear predictor and simulator models for a real cement rotary kiln by using nonlinear identification technique on the Locally Linear Neuro-Fuzzy (LLNF) model. For the first time, a simulator model as well as a predictor one with a precise fifteen minute prediction horizon for a cement rotary kiln is presented. These models are trained by LOLIMOT algorithm which is an incremental tree-structure algorithm. At the end, the characteristics of these models are expressed. Furthermore, we presented the pros and cons of these models. The data collected from White Saveh Cement Company is used for modeling.

关键词： Predictive models Kilns Computational modeling Power system modeling Production facilities Nonlinear control systems Chemical technology Nonlinear equations Automatic control process control

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