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A UHF-ECR plasma etcher for insulation films

Hitachi Review 2000年第4期49卷 211-215页

作者： Kawahara, Hironobu Tokunaga, Takafumi Kojima, Masayuki Yokogawa, Ken'etsu Hitachi Ltd. Semiconduct. Mfg. Equipment Group Semiconduct. Equip. Product Division Process Development Department Device Development Center Hitachi Ltd. Production Control Department Semiconductor Group Hitachi Ltd. Hitachi Ltd. Adv. Technology Research Department Central Research Laboratory

In the rapid evolution of VLSI technology toward smaller geometries and increased levels of chip integration, minimum features of 0.18 μm are already being mass produced, and feature sizes of 0.13 μm are being developed. At the same time, 300-mm fab lines are being built, and this is driving a demand for new etching technologies that support smaller tolerances and larger wafer sizes. Insulation layer etching demands good selectivity between mask and substrate and high-aspect vertical processing to deal with increasing aspect ratios and thinner mask thicknesses that go along with shrinking geometries and increasing integration levels. Meanwhile, damascene processes (electroplating for chip interconnects) using a combination of low-κ (low dielectric constant) insulation materials and Cu interconnects are being investigated, and etchers capable of processing these structures will be in great demand. To address these issues, we have developed an insulation layer etcher that uses UHF-ECR (ultra high frequency electron cyclotron resonance) plasma. The unique advantages of this approach are that it enables good control over CF 2/F radicals, an important etchant for selectivity and high-aspect openings, and good control over the ratio of ions to CF2, which is important in achieving vertical profiles. This etcher is capable of (1) producing stable and uniform medium-to-high density plasmas over a large area at low-to-medium pressures using UHF wave (450 MHz) ECR, and (2) increasing the doubled-near-surface effect* and good radical ratio control through control over the UHF wave flat antenna and antenna bias. Taken together, these capabilities amount to a powerful plasma process tool able to process fine features below 0.13 μm.

关键词： Dielectric films

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A manufacturable and modular 0.25 /spl mu/m CMOS platform technology

A manufacturable and modular 0.25 /spl mu/m CMOS platform te...

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Symposium on VLSI Technology

作者： P. Tsui H. Chuang N. Bhat E. Travis S. Chheda J. Grant P. Gilbert P. Chen S. Poon A. Kaiser B. Anthony T. White J. West T. Vuong S. Mattay B. Kruth A. Perera J. Porter M. Schippers I. Yang V. Misra S. Venkatesan A. Nagy T. Lii Process Technology Development Networking Computing Systems Group MOS13 Manufacturing Advanced Products Research and Development Laboratory Motorola Inc. USA Motorola Solutions Inc Schaumburg IL US

A modular 0.25 /spl mu/m CMOS core technology suitable for high density and high-performance or low-power applications is presented. The key salient features include: simple 1-mask STI, 40 /spl Aring/ high-performance or low-power CMOS transistor modules, cobalt salicide, a practical 2D Optical Proximity Correction (OPC) technique applied to tight-pitch local interconnect and 6-level tiled metallization backend that include unlanded vias and no-cap Inter-Level Dielectric (ILD). This technology is capable of producing state-of-the-art 380 MHz RISC microprocessors (47 mm/sup 2/) with 9.4 /spl mu/m/sup 2/ 6 T bitcell SRAM. The modularity of the process architecture allows the subsequent expansion of the integration to a wide-range of applications.

关键词： CMOS technology Implants Resists Transistors Metallization Dielectrics Isolation technology Integrated circuit interconnections Computer aided manufacturing Computer networks

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A high performance 3.97 /spl mu/m/sup 2/ CMOS SRAM technology using self-aligned local interconnect and copper interconnect metallization

A high performance 3.97 /spl mu/m/sup 2/ CMOS SRAM technolog...

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Symposium on VLSI Technology

作者： M. Woo M. Bhat M. Craig P. Kenkare X. Wnag F. Tolic H. Chuang S. Parihar J. Schmidt L. Terpolilli R. Pena D. Derr N. Cave P. Crabtree M. Capetillo S. Filipiak T. Lii A. Nagy D. O'Meara T. Vuong M. Blackwell R. Larson M. Wilson J. Hayden S. Venkatesan P. Tsui P. Gilbert A. Perera C. Subramanian T. McNelly V. Misra R. Islam B. Smith J. Farkas D. Watts D. Denning S. Garcia L. Frisa S. Iyer C. Lage Networking and computing SYstems Group Process Technology Development Motorola Inc. USA Advanced Products Research and Develapment Laboratory Motorola Inc. USA Mos 13 Die Production Motorola Inc. Austin TX USA Applied Materials Inc. Santa Clara CA USA

In this work a 3.97 /spl mu/m/sup 2/ 6T CMOS SRAM bitcell technology has been developed using a logic based platform incorporating a self-aligned local interconnect and copper metallization. This 0.20 /spl mu/m process technology is suitable for stand-alone SRAM applications as well as embedded applications such as digital signal processors. A stable bitcell operation has been demonstrated for power supply (Vdd) of 1.8 V. In this technology, the minimum transistor is (0.27 /spl mu/m/spl times/0.15 /spl mu/m) with a gate pitch of 0.54 /spl mu/m and minimum metal pitch of 0.65 /spl mu/m.

关键词： CMOS technology Random access memory Copper MOSFET circuits Metallization Logic devices Implants Optical films Printing Etching

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Recapitalizing the Navy through optimized manning and improved reliability

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NAVAL ENGINEERS JOURNAL 1998年第6期110卷 61-72页

作者： Anderson, DE Malone, TB Baker, CC Mr. David E. Anderson:is a Navel Engineer with the Naval Sea Systems Command where he is currently assigmd to the HumanSystems Integration branch. Mr Anderson has a Bachelor of Science degree an Environmental Engineering from Flurida Technological University and a Master's in Environmental Engiwering from the University of Central Flurida. He currentEy is an HSI manager for a number oflvay R&D and skig acquisition efforts. Dr. Thomas B. Malone:received a Ph.D. in Experimental Psychology from Fordham University in 1964. He is President of Carlow International Incorporated an organization dedicated to human factors research and development with emphasis an mantime systems. He has directed over 350 programs and projects in his 33 year career and is responsible for overall management of all contract programs within the Corporation. He is a Past President of the Human Factors and E r g m i c s Society (HFES) of which he is a Fellow. He is also a Fellow of the Washington Academy of Sciences He was selected as a member of the N A S Space Sciences Technical Advisuiy Committee on Technoloo Requirements for Human Performance on Long Duration Space Missions in 2989 and 90. He was elected as the First Chair of the Systems Development Technical Group of the HFES. Dr Malone is currently managing eflorts to devehp and auto- mate standardized processes for canducting human systems integration (HSI) in the military weapon systems acquisition process and fov developing automated tools to facilitate fledormance of specific steps in the HSI process. Dr Malone also is currently occupied in applying human engineering to the DD 21 and is serving as the Chair ofthe System ManninglHuman Perfomzance Working IPT under the DD 21 ManninglHSI IPT chaired ty PMS 500M. Mr. Clifford Baker:has over 20 years experience in developing and applying human factors technology to complex systems. He holds a masters degree in psychology with a specialization in human factors engineering and he is a Board Certified Human Factors Engineering Profesional

Reduced manning is the process (and the result) of removing human functions from a system while retaining or improving system operability and effectiveness. Reliability and maintainability characterize a system's operability and effectiveness. Reduced manning impacts system reliability by changing the characteristics of (1) human error associated with system operation and maintenance, (2) time to repair failed components, and (3) mean-time-between-failures (MBTF) in a reduced manning environment. Simply reducing manning without compensating for system dependence on human involvement generally has a negative impact on system maintainability. Methods to address this include (1) human-system integration design of maintenance interfaces and (2) design of operations activities that are closely related to device failures. After demonstrating reliable performance through testing and operation, ship commanders can be assured that fewer people can effectively operate and maintain Navy ships and systems.

关键词： Naval vessels

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Planning and scheduling of parallel semicontinuous processes .1. Production planning

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INDUSTRIAL & ENGINEERING CHEMISTRY research 1997年第7期36卷 2691-2700页

作者： McDonald, CM Karimi, IA Advanced Process Control and Optimization Central Research and Development E. I. DuPont de Nemours Experimental Station Wilmington Delaware 19880-0101

In this two-part series of papers, production planning and scheduling models are developed for the case of semicontinuous processes which are assumed to comprise several facilities in distinct geographical locations, each potentially containing multiple parallel units. The models developed are deterministic in nature and are formulated as mixed-integer linear programs (MIP's). Part Ideals with multiperiod midterm planning models where sourcing considerations are important, given that products can be manufactured at several facilities;often on different continents. Optimal allocation of assets to production tasks in order to satisfy the fluctuating demands of the global marketplace over an extended horizon is the main goal in this kind of model. Plan performance is assessed relative to an objective function involving,:maximization of earnings and minimization of production, inventory, and transportation costs. In these types of models, the actual timing and sequencing of production campaigns is not determined. For this purpose, part 2 discusses the application of two novel short-term scheduling formulations to a single-stage, multiproduct, multiprocessor facility. The goal is to minimize the production, inventory, and transition costs for a single facility. These are continuous time formulations in the sense that they allow production events to occur at any point over the scheduling horizon while retaining the ability to assess costs at discrete points-in time, as in the classic multiperiod formulations. Thus, they overcome the restrictions imposed by the use of time boundaries in multiperiod models. For purposes of illustration, a limited number of examples are presented which are modifications of real industrial problems.

关键词： Safety Kinetic parameters Manufacturing Materials Industrial manufacturing

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KrF lithography for 0.25-mu m CMOS/SIMOX pattern fabrication

NTT REVIEW

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NTT REVIEW 1997年第4期9卷 96-104页

作者： Kawai, Y Ohtaka, A Nakamura, J Tanaka, A Process-Control Research Group System Electronics Laboratories NTT Japan Lithography Technol. Research Group Microfabrication Technol. Laboratory NTT Japan Educational Research Center NTT Advanced Technology Japan

We developed a novel chemically amplified positive resist for KrF lithography. In order to process with it, sophisticated process technologies with good control had to be developed. Consequently, a pattern size accura... 详细信息

关键词： CMOS integrated circuits

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Typhon: A weapon system ahead of its time

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NAVAL ENGINEERS JOURNAL 1997年第4期109卷 53-62页

作者： Gussow, M Milton Gussow:is a principal staff engineer at The Johns Hopkins University Applied Physics Laboratory where he is involved in joint warfare analysis and engineering systems assessment. He is a distinguished graduate of the U.S. Naval Academy (1949) and holds a B.S.E.E. degree from the Naval Postgraduate School (1956) and an M.S. degree from M.I. T. (1957). He retired in 1967 as a commander in the US. Navy having served in surface combatants and as a weapons engineering specialist. He had tours at the Bureau of Naval Weapons as section head of the Typhon Weapon Control System Office of Naval Research as the Guided Missile and Astronautics officer and at headquarters Naval Material Command as the ordnance logistics officer He was senior vice president for product development at the McGraw-Hill Continuing Education center Mr Gussow is the author of a McGraw- Hill textbook on basic electrical engineering circuits and techniques. He has taught courses in electrical engineering and operations research at The George Washington University The American University and the School of Advanced international Studies at TheJohns Hopkins University. Mr Gussow is the director of the Systems Assessment Group for the Strike Surface and Antiair Warfare Committee of the National Security Industrial Association (NSIA). He is the author of more than seventy-five technical papers and monographs and his interests include multiwarfare analysis wargaming information management and international relations. He is a member of Sigma Zi Sigma Gamma Tau ASNE and IEEE. Mr. Gussow is listed in Who's Who in Science and Engineering and in American Education for 1996–1997.

A popular question posed is, ''Where did the Aegis weapon system come from?'' Like any system, it had to have a beginning. This article purports to describe a predecessor system called Typhon, that contributed essentially to the successful development of Aegis. The story began in the late 1950s. Typhon was conceived by the Navy as an integrated weapon system to defeat the air threats of the 1970s. It consisted of: 1) a single radar system for search, acquisition, tracking, and missile guidance with multiple beams and instantaneous beam switching, able to operate in the presence of heavy countermeasures;2) a single weapon direction system to handle two complementary missile types, capable of handling multiple intercepts and integrated with the Naval Tactical Data System/Combat Information Center;3) a long-range and medium-range missile;and 4) launching systems for missiles. The heart of the system was the multifunction Typhon radar, which represented a quantum leap in beam forming and switching and signal processing techniques. Contract work for the development, fabrication, and test of the Typhon radar and missile began in 1960 and lasted until 1965. This article recounts the personal experiences of the author during those exciting and innovative years in the development of Typhon.

关键词： Marine missiles

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Turbofan engine control design using robust multivariable control technologies 32nd

Turbofan engine control design using robust multivariable co...

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32nd Joint Propulsion Conference and Exhibit, 1996

作者： Frederick, Dean K. Garg, Sanjay Adibhatla, Shrider General Electric Research and Development Center SchenectadyNY United States Controls and Dynamics Technology Branch NASA Lewis Research Center ClevelandOH United States Advanced Control Systems Group General Electric Aircraft Engines EvendaleOH United States

A unified robust multivariable approach to propulsion control design has recently been developed at National Aeronautics and Space Administration (NASA) Lewis research Center (LeRC). The critical elements of this unified approach are (i) a robust H-infinity control synthesis formulation, (ii) a simplified controller scheduling scheme, and (iii) a new approach to the synthesis of Integrator Windup Protection gains for multivariable controllers. This paper presents results from an application of these technologies to control design for linear models of an advanced turbofan engine. The objectives of the study were to transfer technology to industry and to identify areas of further development for the technology to be applied by industry to the design of practical controllers for high-performance turbofan engines. The technology elements and industrial development of tools to implement the steps are described with respect to their application to a set of three-input/three-output three-state linear engine models over a range of power levels covering engine operation from idle to maximum unaugmented power. Results from simulation evaluation of HOO controller design, controller order reduction, controller scheduling, and integrator windup protection design are discussed and insight is provided into how the design parameter choices affect the results. © 1996, American Institute of Aeronautics and Astronautics, Inc.

关键词： Turbofan engines

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Flight control system of hypersonic flight experiment vehicle 21st

Flight control system of hypersonic flight experiment vehicl...

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21st Atmospheric Flight Mechanics Conference, 1996

作者： Ishimoto, Shinji Takizawa, Minoru Suzuki, Hirokazu Morito, Toshiki Flight Research Division National Aerospace Laboratory Chofu Tokyo Japan Control Systems Division National Aerospace Laboratory Chofu Tokyo Japan Advanced Aircraft Research Group National Aerospace Laboratory Chofu Tokyo Japan Winged Space Vehicle Office National Space Development Agency of Japan Chofu Tokyo Japan

This paper describes the flight control system of the Hypersonic Flight Experiment (HYFLEX) vehicle. The experiment was conducted in early 1996. This paper summarizes the vehicle, sensor, on-board computer, control effectors, navigation, guidance, and control laws. In addition, the actual flight is compared with a simulated flight. The obtained flight data show that the flight control system provided enough stability and control performance to achieve the guidance commands. Some differences are observed between the actual and simulated flight, but they are not serious anomalies. © 1996, American Institute of Aeronautics and Astronautics, Inc.

关键词： Flight control systems

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Affordability, logistics R&D and fleet systems

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NAVAL ENGINEERS JOURNAL 1996年第3期108卷 199-213页

作者： Schulte, DP Skolnick, A He has supported the development and operation of several naval systems including advanced component selection for Trident II fire control and navigation systems. He served as branch manager of the Surface Ship ASW Combat System Branch which acted as the acquisition engineering agent for the AN/SQQ-89 Surface Ship Anti-Submarine Warfare Weapon System. He was then selected to manage the Module Engineering Department which provided engineering support to numerous naval systems including the AN/BSY-1 Submarine Combat System and the Trident II fire control and navigation system. He then served as the deputy program manager for NAVSEA Progressive Maintenance (2M/ATE). He holds a B.S. degree in Electrical Engineering from Purdue University and currently is pursuing a Maste's degree in Public Environmental Affairs at Indiana University—Purdue University Indianapolis. He served at Applied Physics Laboratory/The Johns Hopkins University in missile development then aboard USS Boston (CAG-1) and played leading roles in several weapon system developments (Regulus Terrier Tartar Talos) inertial navigation (Polaris) deep submergence (DSRV) and advanced ship designs (SES). He later was director Combat System Integration Naval Sea Systems Command and head Combat Projects Naval Ship Engineering Center. He led the Navy's High Energy Lasers and Directed Energy Weapons development efforts. He was vice president advanced technology at Operations Research Inc. and vice president maritime engineering at Defense Group Inc. before starting SSC in 1991. Dr. Skolnick holds a B.S. degree in Mathematics and Economics Queens College an M.A. degree in Mathematics and Philosophy Columbia University an M.S. degree in Electrical/Aeronautical Engineering U.S. Naval Postgraduate School and a Ph.D. in Electrical Engineering and Applied Mathematics from Polytechnic University in New York. He is the author of many published papers on engineering design issues source selection procedures and large-scale complex technology problems

The Fleet continues to require high performance systems that can operate with dependability in the seas' unforgiving environments and under hostile action. Those demands are not new. What has changed is the urgent priority formerly assigned to national defense issues. The arguments for continued superpower military strength are now roiled in politics along with unsettled budgets and uncertain force level projections. Current expectations revolve about indefinite fiscal and operational issues (difficult funding constraints and broadband threats). In the actual event of ''doing more with less,'' a practical response is to apply the creative power available from sound engineering judgement and the crucible of experience to the immediate needs of the Fleet. The attempt to shorten the path between advanced development effort and Fleet use has been tried occasionally in the past, often, without exemplary results. The Sustainable Hardware and Affordable Readiness Practices (SHARP) program, is a generic R&D effort under OpNav sponsorship that has been working steadily on sensible solutions to product engineering problems. Armed today with fast-time, large-scale computation abilities and modern tools for technical problem solving coupled with specialized engineering knowledge, it has been refreshed and is underway satisfying existing Fleet needs. The relationship between fully responsive engineering services and current operational needs is always demanding. The connection between advanced engineering development (6.3 category funds) and immediate Fleet usage brings added complexity and challenge, both technical and organizational. Illustrative examples of affordable engineering solutions to ''retain, revise, replace or retire'' questions are presented within the context of both Fleet realities and budgetary limitations. The discussion covers legacy system support, civil/military considerations and Fleet maintenance issues. It describes the substantial and critical payoffs i

关键词： Warships

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