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Memories - Materials, Devices, Circuits and Systems 2023年 4卷

作者： Yang, Gui-Fu Jang, Sung-Hwan JANG, SUNG-UK Lee, Tae-Hyun Kim, Da-Hye Huh, Jung-Ho Yoo, Seok-Hyun Advanced Process Development Team Samsung Electronics 1 Samsungjeonja-ro Gyeonggi-do Hwaseong-si18448 Korea Republic of Memory Implantation Technology Team Samsung Electronics 114 Samsung-ro Godeok-myeon Gyeonggi-do Pyeongtaek-si17786 Korea Republic of

As the shrinkage of devices accelerates and the vertical layers increase, beam angle spread of carbon ion implantation (C IIP) for the silicon selective epitaxial growth (Si-SEG) areas in V-NAND is one of the most critical parameters related with bin map defects. The roles of C IIP in Si-SEGs are that it can suppress channeling effect of boron IIP and diffusion limitation of boron dopants during subsequent annealing processes. In this study, beam angle spread was reduced by 36% and the center-to-edge beam angle skew of wafer was reduced to less than 1° by optimizing the specification of tracking magnet and the beam angle mean. After applying the improved process conditions and effective interlocks, the bin defective rate was controlled less than 0.5% successfully. © 2023 The Author(s)

关键词： Defects

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Optimal Design of WET Etching Bath for 3D Flash Memories Using Multi-Objective Bayesian Optimization

Optimal Design of WET Etching Bath for 3D Flash Memories Usi...

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Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & International Symposium on Semiconductor Manufacturing (ISSM)

作者： Miyuki Kouda Yumi Mori Tomohiko Sugita Youyang Ng AI & System Research Center Frontier Technology R&D Institute KIOXIA Corporation Yokkaichi-shi Japan AI & System Research Center Frontier Technology R&D Institute KIOXIA Corporation Yokohama-shi Japan Advanced Memory Process Development Center Memory Division KIOXIA Corporation Yokkaichi-shi Japan

ISBN: (数字)9798331510589

ISBN: (纸本)9798331510596

In recent years, the complexity of semiconductor manufacturing processes has increased, leading to a growing need for the high-precision optimization of device structures. For example, in batch-type wet etching devices, the flow of chemical liquids within the process bath can vary depending on the device structure, causing variations in the etching state of the wafer. This issue is addressed using a feedback mechanism that iteratively adjusts the device structure based on the results of an etching experiment, thereby achieving more uniform etching conditions. However, this approach requires a large number of trial experiments. In the fabrication process of 3D flash memories, word-line formation in the silicon substrate requires precise control of the silicon concentration in the etching solution. However, this concentration can fluctuate due to the dissolution of the SiN film during the etching process. This fluctuation may cause various problems. This study introduces an innovative method utilizing multi-objective Bayesian optimization to derive optimal wet etching bath design parameters; this method is informed by image and physical-quantity data from fluid dynamics simulations [1]. This approach is validated through simulation experiments, whose results are used to identify the best possible wet etching bath designs effectively.

关键词： Wet etching Three-dimensional displays Fluid dynamics Semiconductor device manufacture Silicon Bayes methods Flash memories Optimization Silicon dioxide Substrates

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Phase retrieval of periodic patterns

Phase retrieval of periodic patterns

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Metrology, Inspection, and process Control XXXIX 2025

作者： Ansuinelli, Paolo Lee, Hojun Kim, Wookrae Shin, Junho Ekinci, Yasin Mochi, Iacopo Laboratory for X-ray Nanoscience and Technologies Center for Photon Science Paul Scherrer Institut PSI Villigen5232 Switzerland Advanced Process Development Team 4 Semiconductor R&D Center Samsung Electronics Seoul Korea Republic of Core Technology R&D Team Samsung Electronics Seoul Korea Republic of

ISBN: (纸本)9781510686380

Coherent Diffraction Imaging (CDI) is a promising method for the metrology of lithographic structures due its low cost, ease of implementation, and scalability. CDI can be realized in different ways, but the core process involves illuminating the sample with coherent light, recording the diffracted intensity distribution, and computationally recovering the phase to reconstruct the complex amplitude of the sample. One of the primary challenges in semiconductor metrology is high resolution inspection for lithographic patterns. Although the patterns can be relatively complex, periodic structures are found in many layers of modern devices. Given the traction gained by hybrid bonding for wafer-to-wafer (W2W) or chip-to-wafer (C2W) interconnects, their metrology is becoming important. It is interesting to study and research phase retrieval methods that can potentially be applied to reconstruct the topography of the Cu pads structures that are used for the electrical connections in such scenario. This paper presents a study of phase retrieval algorithms applied to reconstruct the profile of the dishing/protrusions present on each Cu pillar of the array. In particular, we explore a sample model featuring a Cu pad array where the single pillars have a bowl-shaped topography and we investigate, by means of simulations, the accuracy that we can achieve with this approach in the measurement of the depth and shape of the concavity of the surface of the pillars. © 2025 SPIE.

关键词： Laser radiation

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Prediction of dissolved oxygen in a fishery pond based on gated recurrent unit (GRU)

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Information processing in Agriculture 2021年第1期8卷 185-193页

作者： Wuyan Li Hao Wu Nanyang Zhu Yongnian Jiang Jinglu Tan Ya Guo Key Laboratory of Advanced Process Control for Light Industry(Ministry of Education) School of Internet of Things EngineeringJiangnan UniversityWuxi 214122China Jiangsu Internet Agricultural Development Center Nanjing 210017China Jiangsu Zhongnong IoT Technology Co. LTDYixing 214200China University of Missouri ColumbiaMO 65211USA

Dissolved oxygen(DO),an important water quality indicator in aquaculture,affects the survival rate of aquatic creatures and the yield of aquatic ***,it is important to predict DO in fishery ponds for applying artificial aeration with low energy and ***,deep learning models,such as recurrent neural network(RNN),long short-term memory(LSTM),and gated recurrent unit(GRU),are often used to predict the trend of time series,but it is unclear which one of them is more suitable for prediction of DO in fishery *** this work,the RNN model,LSTM model,and GRU model were used to build three DO predicting *** performance of the three models were compared by mean absolute error(MAE),mean square error(MSE),mean absolute percentage error(MAPE),and the coefficient of determination(R2).The performance of RNN is worse result than LSTM and *** four evaluation indicators of GRU are 0.450 mg/L,0.411,0.054,and 0.994,and the four indicators of LSTM are 0.407 mg/L,0.294,0.059,and 0.970,which shows that the performance of GRU is similar to LSTM,but the time cost and number of parameters used for GRU is much lower than *** is concluded that the GRU has overall better performance and can be applied to practical applications.

关键词： Dissolved oxygen RNN model LSTM model GRU model

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Tailoring the electronic acceptor–donor heterointerface between black phosphorus and Co_(3)O_(4) for boosting oxygen bifunctional electrocatalysis

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Chinese Chemical Letters 2023年第2期34卷 284-289页

作者： Jing Zou Yilun Zou Haitao Wang Wei Wang Pingxiu Wu Arramel Jizhou Jiang Xin Li School of Chemistry and Environmental Engineering School of Environmental Ecology and Biological EngineeringKey Laboratory of Green Chemical Engineering Process of Ministry of EducationEngineering Research Center of Phosphorus Resources Development and Utilization of Ministry of EducationHubei Tree Gorges LaboratoryWuhan Institute of TechnologyWuhan 430205China Key Laboratory of Rare Mineral Ministry of Natural ResourcesGeological Experimental Testing Center of Hubei ProvinceWuhan 430034China Key Laboratory of Hunan Province for Advanced Carbon-based Functional Materials Hunan Institute of Science and TechnologyYueyang 414006China Semiconductor Electronic Special Gas of Hubei Engineering Research Center Jingzhou 434000China Nano Center Indonesia Jl.PUSPIPTEK Tangerang SelatanBanten 15314Indonesia Institute of Biomass Engineering Key Laboratory of Energy Plants Resource and UtilizationMinistry of Agriculture and Rural AffairsSouth China Agricultural UniversityGuangzhou 510642China

Black phosphorus (BP) as an uprising two-dimensional material exhibits attractive potential in the field of electrocatalysis due to the inherent advantages of high carrier mobility and abundant lone pair ***,the exposed active electrons compel BP to be deactivated by oxidative ***,the electronic signature of acceptor-donor heterointerfacial interactions between BP and Co_(3)O_(4)is realized via wet ball *** preferential migration of active electrons from BP to Co_(3)O_(4)is achieved at the heterointerface since the Fermi level of BP is higher than that of Co_(3)O_(4).Such relative energetic consideration promotes reasonable oxygen electrocatalytic active ***,it significantly suppresses the oxidative degradation of ***,the resulting Co_(3)O_(4)/BP heterojunction possesses superior oxygen bifunctional electrocatalytic activity than its parent *** importantly,this work promotes an efficient route towards BP-based multifunctional catalysts.

关键词： Electronic acceptor-donor Black phosphorus Co_(3)O_(4) Charge transfer Oxygen bifunctional electrocatalysis

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Transcriptomic analysis of muscle and adipose tissues identifies myokines and adipokines contributing to lipid deposition in Taoyuan Black pigs

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Animal Nutrition 2025年 21卷 256-266页

作者： Guo, Liu Xu, Junfei Zhou, Wenyue Chen, Sisi Shi, Hanjing Han, Mengmeng Pang, Weijun Yin, Yulong Li, Fengna Laboratory of Animal Nutritional Physiology and Metabolic Process Key Laboratory of Agro-ecological Processes in Subtropical Region Institute of Subtropical Agriculture Chinese Academy of Sciences Changsha 410125 China University of Chinese Academy of Sciences Beijing 101408 China College of Advanced Agricultural Sciences University of Chinese Academy of Sciences Beijing 100049 China Laboratory of Animal Fat Deposition and Muscle Development College of Animal Science and Technology Northwest A&F University Yangling 712100 China

Meat quality and lean meat percentage are important to pig industry. Muscle and adipose tissues are regarded as secretory organs that release myokines and adipokines to mediate muscle-adipose tissue crosstalk, which regulates lipid deposition and skeletal muscle development. The Taoyuan Black (TB) pig, a Chinese indigenous breed, exhibits abundant lipid deposition and is known for excellent meat quality. The aim of this study was to explore the dynamics of muscle development and lipid deposition in TB pigs at different ages and to identify myokines and adipokines that contribute to lipid accumulation. Forty TB and 40 Duroc pigs were fed the same diet and slaughtered for analysis at age of 60, 120, 180, and 210 d. The “window phase” of lipid deposition in TB pigs was defined from 120 to 180 d of age according to carcass traits, intramuscular fat (IMF), and adipocyte area. Comparative transcriptome of the longissimus dorsi (LD) muscle and subcutaneous adipose revealed upregulated energy and lipid metabolism pathways in TB pigs at 180 d compared to 120 d (P < 0.05). Many myokines and adipokines associated with IMF and peripheral fat deposition have been identified via database comparison. Myokine IGF2 in TB pigs was downregulated at 180 d compared to 120 d (P < 0.05) and had negative correlation with backfat thickness, perirenal fat percentage, and fat percentage (P < 0.05), adipokines SFRP5 and AGT were upregulated in TB pigs at 180 d compared to 120 d and different between TB and Duroc pigs (P < 0.05). This study provides new insights into the interaction between muscle and adipose tissues, as well as potential targets for nutritional regulation of IMF, lean meat percentage, and meat quality. © 2025 The Authors

关键词： Lipid deposition Longissimus dorsi muscle Muscle-adipose tissue crosstalk Subcutaneous fat Taoyuan Black pig Transcriptome

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g-C3N4/BaTiO3/PVDF membrane photocatalytic degradation of tetracycline

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Journal of Industrial and Engineering Chemistry 2025年

作者： Gan, Jiahao Wang, Huijie Li, Jinze Song, Xianghai Liu, Xin Jiang, Jizhou Huo, Pengwei Institute of Green Chemistry and Chemical Technology School of Chemistry & Chemical Engineering Jiangsu University Zhenjiang212013 China China Construction Eco-Environmental Protection Technology Co Ltd Jiangsu Suzhou215128 China School of Materials Science and Engineering State Key Laboratory of Green and Efficient Development of Phosphorus Resources Engineering Research Center of Phosphorus Resources Development and Utilization of Ministry of Education Key Laboratory of Green Chemical Engineering Process of Ministry of Education Hubei Key Laboratory of Plasma Chemistry and Advanced Materials Novel Catalytic Materials of Hubei Engineering Research Center Wuhan Institute of Technology Wuhan430205 China

Environmental pollution poses a major hurdle to sustainable development, and harnessing solar energy for water treatment has emerged as a promising solution. In this study, flexible, macroporous photocatalytic membranes were developed by combining photocatalysis with membrane separation technology and hydrogen peroxide (H2O2), aiming to improve the degradation efficiency of tetracycline (TC). The g-C3N4/BaTiO3/PVDF photocatalytic membranes were fabricated using a phase inversion method, which successfully addressed challenges such as catalyst agglomeration and recovery difficulties, surpassing traditional membrane separation methods. Additionally, the g-C3N4/BaTiO3 photocatalyst exhibited excellent compatibility with PVDF. Under 120 min of xenon lamp irradiation, the membranes achieved a TC degradation efficiency of 90.63 %. These membranes also demonstrated remarkable permeability, and they maintained high stability and reusability after five degradation cycles, showcasing their promising potential for photocatalytic water treatment applications. © 2025 The Korean Society of Industrial and Engineering Chemistry

关键词： Membrane technology

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Polypyrrole Nanoclips-Coated Co/C Nanostructures with Enhanced Microwave Absorption

SSRN

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SSRN 2024年

作者： Shen, Huihuang Ju, Changdong Wang, Junjun Huang, Huabo Ji, Jiayou Li, Liang Key Laboratory for Green Chemical Process of Ministry of Education Engineering Research Center of Environmental Materials and Membrane Technology of Hubei Province Engineering Research Center of Phosphorus Resources Development and Utilization Ministry of Education Hubei Key Laboratory of Plasma Chemistry and Advanced Materials School of Materials Science and Engineering Wuhan Institute of Technology Wuhan430205 China Key Laboratory of Optoelectronic Chemical Materials and Devices Ministry of Education Jianghan University Wuhan430056 China

There is a challenge to boost the electromagnetic wave absorption performance of magnetic carbon-based materials by rationally adjusting the structure of MOF. In this paper, nanoclip-shaped polypyrrole (PPy) was wrapped on the surface of the Co/C nanoparticle derived from Co-MOF via in-situ polymerization of pyrrole with the help of cetylammonium bromide. The electromagnetic parameters of prepared Co/C@PPy can be easily tuned by adjusting the feed ratio of PPy to Co/C. The optimum value of reflection loss (RL) for Co/C@PPy is -45.49 dB at the thickness of 2.4 mm and 15.12 GHz when the feed ratio of pyrrole to Co/C is 200 μL to 80 mg, and the effective absorption bandwidth (EAB, RL ≤ −10 dB) reaches 5.97 GHz (11.76~17.73 GHz) when the matched thickness is 2.5 mm. This study paves the way for further design and preparation of the nanocomposites based on MOF-derived nanostructures with excellent EMW absorption performance. © 2024, The Authors. All rights reserved.

关键词： Polypyrroles

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Handling the Imbalanced Problem in Agro-Food Data Analysis

SSRN

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SSRN 2024年

作者： Adegbenjo, Adeyemi O. Ngadi, Michael O. Department of Bioresource Engineering McGill University 21 111 Lakeshore Road Ste-Anne-de-BellevueQCH9X 3V9 Canada Process Quality Engineering School of Workforce Development Conestoga College Institute of Technology and Advanced Learning 299 Doon Valley Drive KitchenerONN2G 4M4 Canada

Imbalanced data situation exists in most fields of endeavours. The problem has been identified as a major bottleneck in machine learning/data mining and is becoming a serious issue of concern in the Food processing applications. As a result of rare cases occurring infrequently, classification rules. that detect small groups are scarce, so samples belonging to small classes are largely misclassified. Most existing machine learning algorithms including the K-means, decision trees, and support vector machine (SVM) are not optimal in handling imbalanced data. Consequently, models developed from analysis of such data are very prone to rejection and non-adoptability in the real industrial and commercial settings. This paper showcased the reality of imbalance data problem in agro-food applications and proposes possible ways of handling the problem using methods including one-class learning, ensemble methods, data resampling, and feature selection techniques. Rightly analysing imbalanced data from food processing application research works will improve accuracy of results and model developments. This will consequently enhance acceptability and adoptability of innovations/inventions. © 2024, The Authors. All rights reserved.

关键词： Decision trees

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advanced PEG-tyramine biomaterial ink for precision engineering of perfusable and flexible small-diameter vascular constructs via coaxial printing

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Bioactive Materials 2024年第6期36卷 168-184页

作者： Julia Simińska-Stanny Lise Nicolas Adam Chafai Hafez Jafari Maryam Hajiabbas Gianina Dodi Ioannis Gardikiotis Christine Delporte Lei Nie Daria Podstawczyk Amin Shavandi UniversitéLibre de Bruxelles(ULB) École polytechnique de Bruxelles3BIO-BioMatterAvenue F.D.Roosevelt50-CP 165/611050BrusselsBelgium European School of Materials Science and Engineering University of LorraineNancyFrance UniversitéLibre de Bruxelles(ULB) Micro-milli PlatformAvenue F.D.Roosevelt50-CP 165/671050BrusselsBelgium Faculty of Medical Bioengineering Grigore T.PopaUniversity of Medicine and Pharmacy of IasiRomania Advanced Research and Development Center for Experimental Medicine Grigore T.PopaUniversity of Medicine and Pharmacy of IasiRomania UniversitéLibre de Bruxelles(ULB) Facultéde MédecineCampus Erasme-CP 611Laboratory of Pathophysiological and Nutritional BiochemistryRoute de Lennik8081070BruxellesBelgium College of Life Science Xinyang Normal UniversityXinyangChina Department of Process Engineering and Technology of Polymer and Carbon Materials Faculty of ChemistryWroclaw University of Science and TechnologyNorwida 4/650-373WroclawPoland

Vascularization is crucial for providing nutrients and oxygen to cells while removing *** advances in 3D-bioprinting,the fabrication of structures with void spaces and channels remains *** study presents a novel approach to create robust yet flexible and permeable small(600-1300μm)artificial vessels in a single processing step using 3D coaxial extrusion printing of a biomaterial ink,based on tyramine-modified polyethylene glycol(PEG-Tyr).We combined the gelatin biocompatibility/activity,robustness of PEG-Tyr and alginate with the shear-thinning properties of methylcellulose(MC)in a new biomaterial ink for the fabrication of bioinspired *** characterization using NMR and FTIR spectroscopy confirmed the successful modification of PEG with Tyr and rheo-logical characterization indicated that the addition of PEG-Tyr decreased the viscosity of the ***-mediated crosslinking of PEG-Tyr allowed the formation of covalent crosslinks within the hydrogel chains,ensuring its ***-Tyr units improved the mechanical properties of the material,resulting in stretchable and elastic constructs without compromising cell viability and *** printed vessel structures displayed uniform wall thickness,shape retention,improved elasticity,permeability,and colonization by ***926 *** chorioallantoic membrane(CAM)and in vivo assays demonstrated the hydrogel’s ability to support *** hydrogel material with PEG-Tyr modification holds promise for vascular tissue engineering applications,providing a flexible,biocompatible,and functional platform for the fabrication of vascular structures.

关键词： printing coaxial removing

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