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Metrology, Inspection, and process Control XXXIX 2025

作者： Klein, Clay Jenkins, Nicholas Shao, Yunzhe Li, Yunhao Park, Seungbeom Kim, Wookrae Kapteyn, Henry Murnane, Margaret Department of Physics JILA & STROBE NSF Science & Technology Center University of Colorado NIST BoulderCO United States Core Technology R&D Team Samsung Electronics Co. Ltd. Hwasung Korea Republic of Advanced Process Development Team 4 Semiconductor R&D Center Samsung Electronics Co. Ltd. Hwasung Korea Republic of Kapteyn-Murnane Laboratories Inc. 4775 Walnut Street #102 BoulderCO80301 United States

ISBN: (纸本)9781510686380

We present the use of high harmonic generation (HHG) to achieve sub-nanometer sensitivity to out-of-plane geometric features on an industrially relevant damascene sample with extreme ultraviolet (EUV) scatterometry. We also demonstrate a methodology to take advantage of the tuneability of HHG by selecting experimental conditions that maximize the sensitivity of EUV scatterometry. The method uses the Fisher information matrix to encode prior knowledge about the sample into a robust mathematical framework that enables automated selection of the optimal experimental conditions such as wavelength and incidence angles. Importantly, HHG allows us to use wavelength tunability across the EUV spectrum through precisely controlled phase matching to achieve these conditions. We apply this to our damascene sample to show that EUV light at ~13nm will maximize the sensitivity of our scatterometry measurements and the angle selection will break correlations between parameters to enable a reliable solution to the inverse problem. Using this approach, we are able to take full advantage of the wavelength tunability of HHG based EUV sources to support accurate metrology for next generation semiconductor devices. © 2025 SPIE.

关键词： Extreme ultraviolet lithography

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The investigation of pH controlling and HCl concentrations for synthesis radar absorber material 12

The investigation of pH controlling and HCl concentrations f...

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12th International Conference on Physics and Its Applications, ICOPIA 2024

作者： Yustanti, E. Gusti, M.F. Noviyanto, A. Randa, M. Department of Metallurgical Engineering Faculty of Engineering Sultan Ageng Tirtayasa University Jl. Jend. Sudirman KM 03 Cilegon Banten42435 Indonesia Center of Excellence Nanomaterial and Process Technology Laboratory Faculty of Engineering Sultan Ageng Tirtayasa University Jl. Jend. Sudirman KM 03 Cilegon Banten42435 Indonesia Center of Excellence Advanced Materials Nano Center Indonesia Jl. PUSPIPTEK Tangerang Selatan Banten15314 Indonesia Department of Mechanical Engineering Mercu Buana University Jl. Meruya Selatan Kebun Jeruk Jakarta11650 Indonesia Research and Development Agency Indonesia Ministry of Defense Jl. Jati No.1 Pondok Labu Jakarta12450 Indonesia

Barium hexaferrite, with the chemical formula BaFe12O19, is a well-known permanent magnet. Due to its extraordinary magnetic properties, barium hexaferrite has the potential to be one of the best candidates for microwave absorbers. It is essential to use high-level iron (Fe) as a precursor to synthesize barium hexaferrite. This study used natural FeCl3 precursors from the iron sands of Anyer Beach, Banten. Iron sand is leached with hydrochloric acid (HCl). This study investigated the varying concentrations of HCl, including 8M, 10M, and 12M. This study examined the leaching of iron sand by characterizing it using x-ray fluorescence to determine the amount of each element present. The X-ray fluorescence results for the highest Fe value are 41.624%. This study used the co-precipitation method to create a material that blocks radar. Barium hexaferrite with Mg and Al as dopants is the basis of this material. The washing pH affects the decrease in the reflection loss value. This study investigated variations of pH 7, pH 9, and pH 11. The BHF dopant Mg-Al achieves its optimum at pH 7, resulting in a particle size of 90 nm. At 8.2 GHz, the reflection loss value reaches -18.1462 dB. The reflection loss value corresponds to 98.42% microwave absorption. © 2025 Institute of Physics Publishing. All rights reserved.

关键词： Sand

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Enhancing exergy efficiency and environmental sustainability in pressure swing azeotropic distillation

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Cleaner Energy Systems 2024年 9卷

作者： Wavomba Mtogo, Jonathan Wanyaga Mugo, Gladys Mizsey, Peter Department of Chemical and Environmental Process Engineering Budapest University of Technology and Economics Budapest 1111 Hungary Chemical Engineering Division Kenya Industrial Research and Development Institute P.O. Box 30650 Nairobi 00100 Kenya Advanced Materials and Intelligent Technologies Higher Education and Industrial Cooperation Centre University of Miskolc Egyetemváros Miskolc H-3515 Hungary

This study explores the economic, energetic, exergy efficiency, and environmental benefits of energy integration in pressure-swing distillation, focusing on the separation of tetrahydrofuran/water and acetone/chloroform azeotropes. Heat integration and heat pump techniques are applied to reduce energy consumption. Three energy-efficient configurations are examined, comparing total annual cost (TAC), total energy consumption (TEC), CO₂ emissions, and second-law efficiency. In the tetrahydrofuran/water system, heat integration and heat pump technologies outperform conventional processes, achieving up to 50.2% TAC reduction, 59.6% TEC reduction, 82.8% CO₂ emission reduction, and thermodynamic efficiencies up to 23.5%. In the acetone/chloroform system, similar improvements are observed, with up to 70.9% TAC reduction, 87.2% CO₂ emission reduction, and thermodynamic efficiencies up to 17.6%. These findings demonstrate the effectiveness of energy-saving strategies, endorsing process intensification for environmentally sustainable azeotropic mixture separations. © 2024 The Author(s)

关键词： Azeotrope CO2 emissions Exergy analysis Pressure-swing distillation

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Optimal Design of Wet Etching Bath for 3D Flash Memories Using Multi-Objective Bayesian Optimization

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IEEE Transactions on Semiconductor Manufacturing 2025年

作者： Kouda, Miyuki Mori, Yumi Sugita, Tomohiko Ng, Youyang KIOXIA Corporation AI and System Research Center Frontier Technology R and D Institute Japan KIOXIA Corporation Advanced Memory Process Development Center Memory Division Japan

Recently, the complexity of semiconductor manufacturing processes has increased, resulting in a growing need for high-precision optimization of device structures. For example, in batch-type wet etching devices, the flow of chemical liquids in the process bath can vary depending on the device structure, which causes variations in the etching state of the wafer. This issue is addressed using a feedback mechanism that adjusts the device structure iteratively based on the results of an etching experiment, thereby achieving more uniform etching conditions. However, this approach requires a large number of trial experiments. In the fabrication process of 3D flash memory devices, the formation of word lines in the silicon substrate requires precise control of the silicon concentration in the etching solution. However, this concentration can fluctuate due to the dissolution of the SiN film during the etching process, which can cause various problems. Thus, this study proposes an innovative multi-objective Bayesian optimization method that is informed by image and physical quantity data from fluid dynamics simulations to derive optimal wet etching bath design parameters. The proposed method was validated through simulation experiments, and the simulation results were used to identify the best possible wet etching bath designs. © 1988-2012 IEEE.

关键词： Wet etching

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Characterisation of tire wear particles and their chemical markers: A case study along a German highway

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Case Studies in Chemical and Environmental Engineering 2025年 11卷

作者： Tumwet, Faith Chebet Fester, Karin Vrchovecká, Stanislava Scheytt, Traugott Chair of Hydrogeology and Hydrochemistry TU Bergakademie Freiberg Freiberg 09599 Germany Zittau Institute for Process Development Recycling Management Surface Technology and Natural Substance Research (ZIRKON) University of Applied Sciences Zittau/Görlitz (HSZG) Zittau 02763 Germany Institute for Nanomaterials Advanced Technologies and Innovation (CXI) Technical University of Liberec Studentská 1402/2 Liberec 461 17 Czech Republic

This case study investigates tire wear particles (TWP) and their chemical markers (6PPD-Q, DPG, 2-OHBT) in road dust and roadside soils along a German highway. Using SEM/EDX, FTIR, and LC-MS, TWP and their associated markers were characterised and quantified across road surfaces, soils, and drainage ditches. Results show diverse TWP morphologies and distinct distribution patterns influenced by physicochemical properties and environmental factors. The chemical markers exhibited varied environmental behaviours: 6PPD-Q (1.26–193 μg/g) showed strong adsorption, DPG (0.001–2.45 μg/g) had moderate persistence, and 2-OHBT (0.03–5.09 μg/g) exhibited high mobility. These findings emphasise the need for targeted mitigation strategies. © 2025 The Authors

关键词： 2-OHBT 6PPD-Q Chemical mapping DPG Single particle analysis

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Electrocatalytic ammonia synthesis catalyzed by mesoporous nickel oxide nanosheets loaded with Pt nanoparticles

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Chinese Journal of Catalysis 2022年第5期43卷 1371-1378页

作者： Wei Xiong Min Zhou Hao Li Zhao Ding Da Zhang Yaokang Lv Key Laboratory for Green Chemical Process(Ministry of Education) Engineering Research Center of Phosphorus Resources Development and Utilization of Ministry of EducationHubei Key Laboratory Of Novel Reactor&Green Chemical TechnologySchool of Chemistry and Environmental EngineeringWuhan Institute of TechnologyWuhan 430205HubeiChina Department of Physics Technical University of DenmarkLyngby 2800Denmark The State Key Laboratory of Refractories and Metallurgy Institute of Advanced Materials and NanotechnologyWuhan University of Science and TechnologyWuhan 430071HubeiChina Changjiang River Scientific Research Institute Wuhan 430071HubeiChina College of Chemical Engineering Zhejiang University of TechnologyHangzhou 310014ZhejiangChina

Owing to its cost‐effectiveness and adjustable eight‐electron distribution in the 3d orbital,nickel oxide(NiO)is considered an effective electrocatalyst for an ambient electrochemical nitrogen reduction reaction(NRR).However,because of the low conductivity of the transition metal oxide electrocatalyst,its application in this field is *** this study,we found that the doping of NiO nanosheets with a small amount(3–10 nm)of Pt nanoparticles(Pt/NiO‐NSs)leads to considerable improvements in the Faradaic efficiency(FE)and NH_(3) yield compared with those obtained using pure NiO,breaking the common perception that commercial Pt‐based electrocatalysts demonstrate little potential for NRR due to their high hydrogen evolution *** a 0.1 mol/L Na_(2)SO_(4) solution at−0.2 V ***,a typical Pt/NiO‐2 sample exhibits an optimum electrochemical NH_(3) yield of 20.59μg h^(–1)mg^(–1)*** an FE of 15.56%,which are approximately 5 and 3 times greater,respectively,than those of pure NiO nanosheets at the same applied potential.X‐ray photoelectron spectroscopy analysis revealed that Pt in Pt/NiO‐NSs exist as Pt0,Pt^(2+),and Pt^(4+)and that high‐valence Pt ions are more electropositive,thereby favoring chemisorption and the activation of N2 *** function theory calculations showed that the d‐band of Pt nanoparticles supported on NiO is significantly tuned compared to that of pure Pt,affording a more favorable electronic structure for *** results of this study show that Pt can be an effective NRR electrochemical catalyst when loaded on an appropriate *** importantly,it provides a new synthetic avenue for the fabrication of highly active Pt‐based NRR electrocatalysts.

关键词： Platinum nanoparticles NiO nanosheets Nitrogen reduction reaction Electrocatalysis

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A Novel Anaerobic Digestion (Ad) System Driven By Iron-Based Metal-Organic Framework (Fe-Mof) Towards Expediting the Direct Interspecies Electron Transfer (Diet): Insights into Electron Transfer and Metabolic Pathways

SSRN

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SSRN 2023年

作者： Geng, Mengqi Zhang, Yichu Ma, Rui Wu, Di Zhang, Yifeng Qian, Jin Research & Development Institute in Shenzhen School of Chemistry and Chemical Engineering Northwestern Polytechnical University China Centre for Environmental and Engineering Research Ghent University Global Campus Incheon Korea Republic of Department of Green Chemistry and Technology Ghent Centre for Advanced Process Technology for Urban Resource Recovery [CAPTURE Ghent9000 Belgium Department of Environmental and Resource Engineering Technical University of Denmark Miljoevej B113 Kgs LyngbyDK 2800 Denmark

The inadequate methane production and substandard hydrolysis-acidification activity have impeded the practical application of anaerobic digestion (AD) of waste activated sludge (WAS). Recently, metal-organic framework (MOF) materials have shown the promising capability of controlling proton/electron transfer in AD processes. This study uses a typical iron-based MOF, MIL-88A(Fe), synthesized via a one-step hydrothermal method to improve the methanogenic potential for the WAS treatment. The findings indicate that adding 150 mg MIL-88A(Fe)/g WAS VS resulted in a 57.23% increase in accumulated methane production and a 43.84% increase in daily maximum methane production. The methane production rate (Rmax) also increased from 22.25 to 29.14 mL/g VS/d. MIL-88A(Fe) enhanced the electron transfer capacity, accelerated the hydrolysis of WAS, boosted acetate generation, and mitigated the accumulation of volatile fatty acids. The significant enrichment of Methanobacterium and Methanosaeta and the up-regulation of key methanogenesis enzyme-encoding genes suggested that the CO2 reduction and acetoclastic methanation were strengthened. Moreover, MIL-88A(Fe) stimulated the production of c-type cytochrome and e-pili, facilitating direct interspecies electron transfer (DIET) between norank-f-SC-I-84 and Methanobacterium. This study provides new solutions for improving methane production and offers insights into the mechanism of enhanced methanogenesis of AD in the presence of MIL-88A(Fe). © 2023, The Authors. All rights reserved.

关键词： Anaerobic digestion

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Effect of Steel Slag on Soil Fertility and Plant Growth

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Journal of Agricultural Chemistry and Environment 2022年第3期11卷 209-221页

作者： Zakirul Islam Quoc Thinh Tran Shohei Koizumi Fumitaka Kato Kimio Ito Kiwako S. Araki Motoki Kubo Department of Biotechnology Faculty of Life Sciences Ritsumeikan University Noji Higashi 1-1-1 Kusatsu Shiga Japan Advanced Technology Research Laboratories Research and Development Nippon Steel Corporation 20-1 Shintomi Futtsu Chiba Japan Resource and Process Solution Division Mineral Resources Department Nippon Steel Corporation 20-1 Shintomi Futtsu Chiba Japan

The effective utilization of steel slag, a byproduct produced in large quantities from the steel refining process, is an important issue. Because steel slag contains abundant mineral components, the effects of steel slag on soil bacterial biomass and plant mineral uptake were analyzed in this study. The soil pH increased in proportion to the amount of steel slag added. A lower concentration (0.2% to 1%) of steel slag addition did not change the bacterial biomass. However, a higher concentration of steel slag (above 1%) had a negative effect on bacterial biomass. A lower amount of steel slag (0.2% to 1%) addition in soil leads to increased mineral (Ca, Mg, and Fe) uptake and plant growth in Brassica rapa var. periviridis and Spinacia oleracea L. However, mineral uptake by the plants decreased when a large amount of steel slag (above 1%) was added to the soil. Low concentrations of steel slag (0.2% to 1%) in soil had positive effects on plant growth, mineral uptake of plants, and bacterial biomass.

关键词： Bacterial Biomass Mineral Uptake Nitrogen Circulation Phosphorus Circulation Plant Growth Steel Slag

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Mofs-Derived Cu/Carbon Membrane as Bi-Functional Catalyst: Improving Catalytic Activity in Detection and Degradation of Pfoa Via Regulation of Reactive Cu Species

SSRN

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SSRN 2023年

作者： Hou, Chen Chen, Fang Cheng, Daozhen Zou, Shengyang Wang, Jianzhi Shen, Mengxia Wang, Yang College of Bioresources Chemical and Materials Engineering Shaanxi University of Science and Technology Shaanxi Provincial Key Laboratory of Papermaking Technology and Specialty Paper Development Key Laboratory of Paper Based Functional Materials of China National Light Industry National Demonstration Center for Experimental Light Chemistry Engineering Education Xi’an710021 China Key Laboratory for Green Chemical Process of Ministry of Education Hubei Key Laboratory for Novel Reactor and Green Chemistry Technology Hubei Engineering Research Center for Advanced Fine Chemicals School of Chemical Engineering and Pharmacy Wuhan Institute of Technology Wuhan430073 China

Developing bi-functional materials to simultaneously detect and degrade persistent pollutant perfluorooctanoic acid (PFOA) is of significant importance for environmental and human health. In this study, a copper-based mimic enzyme colorimetric detecting sensor coupling with solar photo-electro-Fenton degradation (SPEF) system was built based on Cu/carbon nanofiber (CNF-Cu/C) membrane. Self-supporting flexible CNF-Cu/C membrane was successfully prepared by solvothermal method with further secondary seed growth and in-situ thermal reduction. Based on calcination temperature regulation, the obtained CNF-Cu/C membrane derived from MOFs/polyacrylonitrile (HKUST/PAN) membrane was characterized by 3D carbon fiber network dispersed with porous carbon skeleton embedded copper species, which exhibited good dispersibility, cycling stability and excellent electrical conductivity. With excellent peroxidase-like activity, CNF-Cu/C can rapidly detect PFOA based on the inhibition of color reaction of tetramethylbenzidine (TMB) with detection limit of 0.133 μM. Furthermore, CNF-Cu/C also exhibited outstanding optical properties and oxygen redox reaction (ORR) activity, and the removal efficiency of PFOA in Cu-SPEF system reached 98.22% within 180 min under optimal conditions. Based on the results of free radical quenching experiment, EPR experiment and HPLC-MS experiments, the degradation mechanism and degradation path of PFOA by SPEF system were further speculated. © 2023, The Authors. All rights reserved.

关键词： Membranes

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Improving stability of MXenes

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Nano Research 2022年第7期15卷 6551-6567页

作者： Jizhou Jiang Saishuai Bai Jing Zou Song Liu Jyh-Ping Hsu Neng Li Guoyin Zhu Zechao Zhuang Qi Kang Yizhou Zhang School of Environmental Ecology and Biological Engineering School of Chemistry and Environmental EngineeringKey Laboratory of Green Chemical Engineering Process of Ministry of EducationEngineering Research Center of Phosphorus Resources Development and Utilization of Ministry of EducationWuhan Institute of TechnologyWuhan 430205China Key Laboratory of Rare Mineral Ministry of Natural ResourcesGeological Experimental Testing Center of Hubei ProvinceWuhan 430034China Institute of Chemical Biology and Nanomedicine(ICBN) State Key Laboratory of Chemo/Biosensing and ChemometricsCollege of Chemistry and Chemical EngineeringCollege of BiologyHunan UniversityChangsha 410082China Department of Chemical Engineering “National Taiwan University”Taipei 10617TaiwanChina State Key Laboratory of Silicate Materials for Architectures Wuhan University of TechnologyWuhan 430070China Institute of Advanced Materials and Flexible Electronics(IAMFE) School of Chemistry and Materials ScienceNanjing University of Information Science&TechnologyNanjing 210044China Department of Chemistry Tsinghua UniversityBeijing 100084China Department of Polymer Science and Engineering Shanghai Key Laboratory of Electrical Insulation and Thermal AgeingShanghai Jiao Tong UniversityShanghai 200240China

Due to their superior hydrophilicity and conductivity,ultra-high volumetric capacitance,and rich surface-chemistry properties,MXenes exhibit unique and excellent performance in catalysis,energy storage,electromagnetic shielding,and life *** they are derived from ceramics(MAX phase)through etching,one of the challenges in MXenes preparation is the inevitable exposure of metal atoms on their surface and embedding of anions and *** the as-obtained MXenes are always in a thermodynamically metastable state,they tend to react with trace oxygen or oxygen-containing groups to form metal oxides or degrade,leading to sharply declined activity and impaired ***,improving the stability of MXenesbased materials is of practical significance in relevant ***,there lacks a comprehensive review in the literature on relevant *** help promote the wide applications of MXenes,we review from the following aspects:(i)insights into the factors affecting the stability of MXenes-based materials,including oxidation of MXenes flakes,stability of MXenes colloidal solutions,and swelling and degradation of MXenes thin-film,(ii)strategies for enhancing the stability of MXenes-based materials by optimizing MAX phase synthesis and modifying the MXenes preparation,and(iii)techniques for further increasing the stability of freshly prepared MXenes-based materials via controlling the storage conditions,and forming shielding on the surface and/or edge of MXenes ***,some outlooks are proposed on the future developments and challenges of highly active and stable *** aim to provide guidance for the design,preparation,and applications of MXenes-based materials with excellent stability and activity.

关键词： MXenes stability oxidation swelling and degradation shielding strategies

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