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Feature referenced tip localization enhanced by probability motion model for AFM based nanomanipulations

Feature referenced tip localization enhanced by probability ...

引用

2011 IEEE International Conference on robotics and Biomimetics, ROBIO 2011

作者： Yuan, Shuai Liu, Lianqing Wang, Zhidong Xi, Ning Wang, Yuechao Dong, Zaili Wang, Zhiyu Wang, Zhibo State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Sciences Shenyang Liaoning Province 110016 China College of Information and Control Engineering Shenyang Jianzhu University Shenyang 110168 China Graduate School of Chinese Academy of Sciences Beijing 100001 China Department of Electrical and Computer Engineering Michigan State University East Lansing MI 48823 United States Department of Advanced Robotics Chiba Institute of Technology Chiba Japan

ISBN: (纸本)9781457721373

The spatial uncertainties of tip positioning due to the nonlinearity of the PZT scanner and thermal drift hinder the further application of the AFM based nanomanipulation. This paper brings forward feature referenced tip localization enhanced by probability motion model to reduce the spatial uncertainties. An improved motion model is probabilistically built by incorporating the PI model, the creep model and the thermal drift model. For calibrating the accurate model parameters, the statistical experiments are designed and performed. Then the tip position is optimally estimated by combining with a local scan based feature sensing method. The simulation and corresponding experiments are performed to illustrate the validity and feasibility of the calibrated parameters and the algorithm. © 2011 IEEE.

关键词： Micromanipulators

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Feature referenced tip localization enhanced by probability motion model for AFM based nanomanipulations

Feature referenced tip localization enhanced by probability ...

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IEEE International Conference on robotics and Biomimetics

作者： Shuai Yuan Lianqing Liu Zhidong Wang Ning Xi Yuechao Wang Zaili Dong Zhiyu Wang Zhibo Wang College of Information & Control Engineering of Shenyang Jianzhu University State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Sciences Department of Advanced Robotics Chiba Institute of Technology Department of Electrical and Computer Engineering Michigan State University

ISBN: (纸本)9781457721366

关键词： Atomic Force Microscopy terminal interface processor nonlinearity based model parameters Drift models

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An extended PI model for hysteresis and creep compensation in AFM based nanomanipulation

An extended PI model for hysteresis and creep compensation i...

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2010 IEEE International Conference on robotics and Biomimetics, ROBIO 2010

作者： Wang, Zhiyu Liu, Lianqing Wang, Zhidong Dong, Zaili Yuan, Shuai State Key Laboratory of Robotics Shenyang Institute of Automation CAS Shenyang 110016 China Dept. of Advanced Robotics Chiba Institute of Technology Chiba Japan Graduate School of Chinese Academy of Sciences Beijing 100001 China Faculty of Electrical and Control Engineering Liaoning Technical University Huludao 125105 China

ISBN: (纸本)9781424493173

One of the prerequisites for AFM based nanomanipulation is that the tip position can be controlled accurately, while this prerequisite is still hindered by the large model uncertainties aroused from PZT nonlinearity such as hysteresis and creep. In this paper, an Extended Prandtl-Ishlinskii (EPI) model is proposed to solve these problems. The main advantage of EPI model over conventional PI model is that the EPI model can compensate the positioning error caused by hysteresis and creep simultaneously through adopting the new adaptive basic operator. The experimental results demonstrate the effectiveness and validity of EPI model in depicting the PZT hysteresis and creep prosperities. © 2010 IEEE.

关键词： Creep

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Modeling and analyzing nano-particle pushing with an AFM by using nano-hand strategy

Modeling and analyzing nano-particle pushing with an AFM by ...

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IEEE International Conference on Nano/Micro Engineered and Molecular Systems

作者： Hou, Jing Wang, Zhidong Liu, Lianqing Yang, Yongliang Dong, Zaili Wu, Chengdong College of Information Science and Engineering Northeastern University Shenyang 110004 China Department of Advanced Robotics Chiba Institute of Technology Chiba 275-0016 Japan State Key Laboratory of Robotics Shenyang Institute of Automation CAS Shenyang 110016 China School of Information and Control Engineering Shenyang Jianzhu University Shenyang 110168 China

ISBN: (纸本)9781424465439

One of the major limitations for Atomic Force Microscopy (AFM) based nanoparticle pushing is that AFM only has one sharp tip as the end-effector. The interaction force between the nanoparticle and the tip is applied through a single point, which often leads the AFM tip to slip-away from the nanoparticle due to their small touch area. Then several minutes is needed to relocate the missed nanoparticle by a new image scan. Moreover, if the nanoparticle is very soft, the sharp tip may damage the particle instead of pushing it away due to the cutting effect of the sharp tip. In this paper, a nano-hand strategy is proposed to resolve this problem. Based on the theoretical analysis to the behavior model of nanoparticle, the pushing points, pushing step-length and pushing speed of AFM tip are planned artfully, through which a multi-tip manipulation effect can be imitated with a single tip. The nanoparticle is pushed as by a virtual nano-hand during manipulation,. In this way, the slip-away problem due to single AFM tip pushing can be get rid of efficiently. The simulation and experiments results show the increased effectiveness of AFM based nanomanipulation. ©2010 IEEE.

关键词： Atomic force microscopy

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Modeling and analyzing nano-rod pushing with an AFM

Modeling and analyzing nano-rod pushing with an AFM

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2010 10th IEEE Conference on Nanotechnology, NANO 2010

作者： Hou, Jing Wu, Chengdong Liu, Lianqing Wang, Zhidong Dong, Zaili Dept. of Electrical and Computer Engineering Northeastern University Shenyang 110004 China State Key Laboratory of Robotics Shenyang Institute of Automation CAS Shenyang 110016 China Dept. of Advanced Robotics Chiba Institute of Technology Chiba Japan School of Information and Control Engineering Shenyang Jianzhu University Shenyang 110168 China

ISBN: (纸本)9781424470334

In developing nano-devices and nano-structures, traditional methodologies on MEMS meet the difficulty from the scale restriction. With the strategy of objects assembly, using AFM to handle nano-rods and other nano-objects is considered as an important and high potential technology in constructing nanostructures. However most of AFM only has one tip as the end effector and cannot control both translational and rotational motions during manipulation, this makes it be difficult to realize posture controllable manipulation especially in nano environment. In this paper, the behavior of nano-rod under pushing is theoretically analyzed and modeled. Viscous friction is incorporated in the model and the two situations that the pivot of the nanorod is either inside or outside the rod are addressed. By modeling, the pivot can be determined at each manipulation in real time, and the pushing points can be planned to realize posture controllable manipulation by using nano-hand strategy which is inspired by stable pushing theory of object manipulation in macro world, and to improve the reliability and the precision of manipulation. ©2010 IEEE.

关键词： Nanorods

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AFM tip on-line positioning by using the landmark in nano-manipulation

AFM tip on-line positioning by using the landmark in nano-ma...

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2010 4th IEEE Nanotechnology Materials and Devices Conference, NMDC2010

作者： Yuan, Shuai Liu, Lianqing Wang, Zhidong Xi, Ning Wang, Yuechao Dong, Zaili Wang, Zhiyu State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Sciences Shenyang 110016 China Graduate University of the Chinese Academy of Sciences Beijing 100039 China Dept. of Advanced Robotics Chiba Institute of Technology Chiba 275-0016 Japan Dept. of Electrical and Computer Engineering Michigan State University United States

ISBN: (纸本)9781424488964

AFM has been proved to be a powerful nano-manipulation tool taking advantage of its ultra high resolution and precision. However the large spatial uncertainties associated with AFM tip positioning dual to the PZT nonlinearity and thermal drift are still challenging problems, which hinders its wide application especially in building complex structures In this paper, a probabilistic approach combined with the Kalman filter based localization algorithm is proposed to improve the accuracy of the tip positioning in the task space coordinate frame. A motion model based on the Prandtl-Ishlinskii (PI) model is established, the distribution of model error is statistically obtained through the experimental calibration process. In addition, to further reduce the tip position uncertainties, an environment measurement models is developed through sensing the landmark intermittently with local scanning method during manipulation. Both the simulations results and experimental results are presented to demonstrate the validity of the proposed method. © 2010 IEEE.

关键词： Uncertainty analysis

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A probabilistic approach for on-line positioning in nano manipulations

A probabilistic approach for on-line positioning in nano man...

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2010 8th World Congress on Intelligent Control and automation, WCICA 2010

作者： Yuan, Shuai Liu, Lianqing Wang, Zhidong Xi, Ning Wang, Yuechao Dong, Zaili Wang, Zhiyu State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy of Sciences Shenyang 110016 China Graduate University Chinese Academy of Sciences Beijing 100039 China Dept. of Advanced Robotics Chiba Institute of Technology Chiba 275-0016 Japan Dept. of Electrical and Computer Engineering Michigan State University United States

ISBN: (纸本)9781424467129

Nanomanipulation and nanoassembly using atom force microscopy (AFM) is a potential and promising technology for nanomanufacturing. Precise position of the tip of AFM is important to increase the accuracy and efficiency on fabricate complex nanostructures. However at the nano-scale, it is difficult to acquire the tip position expressed by the coordinate in real time due to PZT nonlinearity and thermal drift through the general measure. In this paper, a probabilistic approach incorporating a Kalman filter based localization algorithm is introduced into the on-line estimation of the tip position expressed by probability distribution known as probability density function. A probabilistic motion model of AFM tip is introduced that consists of a PZT dynamic model based on the Prandtl-Ishlinskii (PI) model, and motion error distribution obtained from calibration experiments. An observation model by using a local scanning algorithm is proposed and the change of uncertainty distribution on scanning landmarks, e.g. nano-particles, near the target position is analyzed. Some experiment results are included for showing the motion error distribution and a simulation result is presented to illustrate the validity of the proposed method. © 2010 IEEE.

关键词： Kalman filters

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Modeling and analyzing nano-particle pushing with an AFM by using nano-hand strategy

Modeling and analyzing nano-particle pushing with an AFM by ...

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IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

作者： Jing Hou Zhidong Wang Lianqing Liu Yongliang Yang Zaili Dong Chengdong Wu College of Information Science and Engineering Northeastern University China School of Information and Control Engineering Shenyang Jianzhu University Shenyang China State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy and Sciences Shenyang China Department of Advanced Robotics Chiba Institute of Technology Chiba Japan

关键词： Force Friction Real time systems Substrates Mathematical model Nanoparticles Kinematics

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AFM tip on-line positioning by using the landmark in nano-manipulation

AFM tip on-line positioning by using the landmark in nano-ma...

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IEEE Nanotechnology Materials and Devices Conference (NMDC)

作者： Shuai Yuan Lianqing Liu Zhidong Wang Ning Xi Yuechao Wang Zaili Dong Zhiyu Wang Shenyang Jianzhu University Shenyang China State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy and Sciences Shenyang China Chinese Academy of Sciences Beijing China Department of Advanced Robotics Chiba Institute of Technology Chiba Japan Department of Electrical and Computer Engineering Michigan State University USA

关键词： Kalman filters Position measurement Probabilistic logic Uncertainty Nanobioscience Accuracy Motion measurement

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An extended PI model for hysteresis and creep compensation in AFM based nanomanipulation

An extended PI model for hysteresis and creep compensation i...

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IEEE International Conference on robotics and Biomimetics

作者： Zhiyu Wang Lianqing Liu Zhidong Wang Zaili Dong Shuai Yuan Faculty of Electrical and Control Engineering Liaoning Technical University Huludao China State Key Laboratory of Robotics Shenyang Institute of Automation Chinese Academy and Sciences Shenyang China Chinese Academy and Sciences Beijing China Department of Advanced Robotics Chiba Institute of Technology Chiba Japan Chinese Academy of Sciences Beijing Beijing CN

ISBN: (纸本)9781424493197

关键词： Creep Hysteresis Fitting Data models Adaptation model Robot sensing systems

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