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Fabrication of DLC-Based Micro-Gear Patterns by Room-Temperature Curing Nanoimprint Lithography Using Glass-Like Carbon Molds

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MRS Online Proceedings Library (OPL) 2013年第1期1511卷 mrsf12-1511-ee05-01-mrsf12-1511-ee05-01页

作者： Shuji Kiyohara Tomu Ikegaki Chigaya Ito Ippei Ishikawa Hideto Tanoue Hirofumi Takikawa Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section ELIONIX INC. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Research Center for Ubiquitous MEMS and Micro Engineering AIST 1-2-1 Namiki Tsukuba Ibaraki 305-8564 Japan

The fabrication of diamond-like carbon (DLC) micro-gear by room temperature curing nanoimprint lithography (RTC-NIL) using glass-like carbon (GC) molds as applications to the DLC-based medical MEMS (Micro Electronic Mechanical systems) was investigated. The DLC film which has excellent properties similar to chemical vapor deposited (CVD) diamond films was used as the patterning material. We propose GC as mold material because GC has higher etching selectivity than a diamond film. The etching selectivity of polysiloxane film against a GC substrate is about 5 times as high as that of a diamond film. Therefore we fabricated the GC molds that have micro-gear patterns with 30 µm-tip diameter and 500 nm-tooth thickness. We carried out the RTC-NIL process using the GC micro-gear molds under the following optimum conditions. 1 min-time from spin-coating to imprint: t1, 0.5 MPa-imprinting pressure: P and 5 min-holding time: t2, and then the imprinted polysiloxane pattern on DLC film was processed with an electron cyclotron resonance (ECR) oxygen ion shower. However, we were not able to fabricate micro-gear patterns in high accuracy because of a remaining residual layer on the DLC film. Therefore we propose the removing process for the residual layer with trifluoromethane (CHF3) ion shower under the optimum conditions of 300 eV-ion energy and 4 min-etching time. As a result, we succeeded to fabricate concave DLC-based micro-gear patterns in high accuracy which has 30 µm-tip diameter and 1 µm-depth.

关键词： diamond ion-beam processing microelectro-mechanical (MEMS)

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Heat Transfer Efficiency Evaluation for Outward and Inward Multi-Flame-Hole Gas Burner

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Journal of Thermal Science 2012年第2期21卷 189-195页

作者： Shin-ichi MORITA Yasutaka HAYAMIZU Takashi KATAYAMA Hideo INABA Department of Mechanical Engineering Yonago National College of Technology 4448 Hikona-cho Yonago city Tottori 683-8502 Japan Department of System Production Engineering Yonago National College of Technology Advanced Course 4448 Hikona-cho Yonago city Tottori 683-8502 Japan Tsuyama National College of Technology 624-1 Numa Tsuyama city Okayama 708-8509 Japan

The purpose of this study is to understand the factor that influence the heating efficiency of the outward and inward multi-hole gas burner. The flame-hole angle and the distance from flame hole to heating object are chosen as the experimental parameters. The measurement of the flame temperature distribution is carried out on each experimental condition. The observation of combustion flame, by the Schlieren method, is done from the purpose to understand the combustion phenomenon on the heating efficiency. LPG (Liquefied petroleum gas) is used for the test fuel gas. The compositions of LPG are propane 97.5vol%, butane 0.2vol% and methane + ethylene 2.3vol%. The optimum ranges of the flame-hole angle and the distance from flame hole to heating object are clarified. The experimental correlation equations for the outward and inward multi-flame-hole gas burner are proposed.

关键词： Burner Heat Transfer Design Thermal Efficiency Energy Saving

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Micro-organic light-emitting devices fabricated by room-temperature curing nanoimprint lithography using diamond molds

Micro-organic light-emitting devices fabricated by room-temp...

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2011 MRS Fall Meeting

作者： Ishikawa, Ippei Okuno, Taisuke Kiyohara, Shuji Taguchi, Yoshio Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Shiroya Maizuru Kyoto 625-8511 Japan Application and Technical Section Elionix Inc. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Department of Mechanical System Engineering University of Yamanashi 4-3-11 Takeda Kofu Yamanashi 400-8511 Japan

ISBN: (纸本)9781605113722

Organic light-emitting devices (OLEDs) have attracted a lot of attention as a next generation display. In this study, we fabricated the micro-OLEDs by room-temperature curing nanoimprint lithography (RTC-NIL) using diamond molds. The diamond has superior durability and was used as mold material for RTC-NIL. The diamond molds have been fabricated by electron cyclotron resonance (ECR) oxygen ion shower with polysiloxane oxide mask in the electron beam (EB) lithography technology. We fabricated the diamond mold pattern with 10 μm-square dot. The diamond molds have been used to form an insulating layer in micro-OLEDs. The optimum thickness of N,N′-Diphenyl-N,N′-di(m- tolyl)benzidine (TPD) [hole transport layer], Tris(8-quinolinolato)aluminum (Alq3) [electron transport layer] and aluminum (Al) [cathode] were 40 nm, 40 nm and 200 nm, respectively. We succeeded in formation of insulating layer in micro-OLEDs and operation of micro-OLEDs with 10 μm-square-dot by RTC-NIL using diamond molds. © 2012 Materials Research Society.

关键词： Silicones

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Fabrication of diamond nanopit arrays by room-temperature curing nanoimprint lithography using glass-like carbon molds

Fabrication of diamond nanopit arrays by room-temperature cu...

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2011 MRS Fall Meeting

作者： Kiyohara, Shuji Ito, Chigaya Ishikawa, Ippei Takikawa, Hirofumi Taguchi, Yoshio Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology Toyohashi Aichi 441-8580 Japan Application and Technical Section Elionix Inc. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Department of Mechanical System Engineering University of Yamanashi 4-3-11 Takeda Kofu Yamanashi 400-8511 Japan

ISBN: (纸本)9781605113722

We have proposed the use of glass-like carbon (GC), as mold material because the 27-maximum etching selectivity of polysiloxane film against GC, which was approximately six times larger than that of polysiloxane film against chemical vapor deposited (CVD) diamond film. We have investigated the fabrication of diamond nanopit arrays by room-temperature curing nanoimprint lithography (RTC-NIL) using GC mold, as applications to the emitter and the micro-gear. The polysiloxane has in the state of sticky liquid at room-temperature and negative-exposure characteristic. Therefore, the polysiloxane was used as RTC-imprint resist material, and also used as electron beam (EB) resist (oxide mask) material in EB lithography. We have fabricated the cylindrical GC nanodot mold with 500 nm-diameter, 600 nm-height and 2 μm-pitch. We carried out RTC-NIL using GC mold under the following optimum conditions: time from spin-coating to imprint of 1 min, imprinting pressure of 0.5 MPa and imprinting time of 5 min. Then, we have processed the diamond film with an electron cyclotron resonance (ECR) oxygen ion shower. We have fabricated diamond nanopit array with 250 nm-depth and 500 nm-diameter. The diameter of diamond nanopit pattern was in good agreement with that of GC mold. Moreover, the depth of the diamond nanopit patterns fabricated by RTC-NIL using cylindrical GC mold was three times larger than that using conical diamond mold. © 2012 Materials Research Society.

关键词： Chemical vapor deposition

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Progression to cell death correlates with neurite swelling induced by stretch injury

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Journal of Biomechanical Science and engineering 2012年第SPECIALISSUE.4期7卷 406-415页

作者： Nakadate, Hiromichi Umahashi, Hiroto Kakuta, Akira Aomura, Shigeru Graduate School of System Design Tokyo Metropolitan University 6-6 Asahigaoka Hino Tokyo 191-0065 Japan Advanced Course of Mechanical and Computer Systems Engineering Tokyo National College of Technology Japan

Diffuse axonal injury (DAI), a major component of traumatic brain injury, is associated with rapid deformation of brain tissue resulting in the stretching of neural axons. Focal axonal swelling, which is the morphological hallmarks of DAI pathology, leads to the disconnection of neurons from tissues, resulting in cell death. Our goal is better understanding of neuronal tolerance and help to predicting the pathogenesis of DAI from mechanical loading to the head. In present study, we developed an in vitro stretch injury device that subjected cultured cells to a wide range of mechanical stretch that are experienced during in vivo head injury. Then using this device, PC12 cells, which extend structurally axon-like cylindrical protrusions in culture, were stretched to a strain of 0.15, 0.30, or 1.00 at strain rates of 30, 40, or 80 s-1, or left as static culture. Following mechanical loading, we assessed neurite swelling resulting in neuronal detachment from culture substrate and neuronal death. As a result, the increase in early neurite swelling was dependent on the severity of the stretch, and neuronal adhesion and viability at 24 h post-injury decrease in a stretch-dependent manner. These results suggest that the formation of neurite swellings correlates with the progression to neuronal death. © 2012 by JSME.

关键词： Strain rate

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Pneumatic rubber actuators for a rehabilitation device to prevent contractures of finger joints

Pneumatic rubber actuators for a rehabilitation device to pr...

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International Conference on Mechatronics and Machine Vision in Practice

作者： Hironari Taniguchi Hidenori Toyooka Tetsuya Minatohara Makoto Fukuda Feifei Zhao Department of Electronics and Control Engineering Tsuyama National College of Technology Tsuyama-city OKAYAMA 708-8509 JAPAN Advanced Mechanical and Control System Engineering Course Tsuyama National College of Technology Tsuyama-city OKAYAMA 708-8509 JAPAN

ISBN: (纸本)9781467316439

There has been increased interest in use of pneumatic actuators in many fields, such as medical care and welfare. In particular, a pneumatic rubber actuator with soft material has many advantages such as low mass, flexibility, safety and user-friendliness. We therefore focus on pneumatic rubber actuators as a drive source of a rehabilitation device. This paper presents pneumatic rubber actuators for a rehabilitation device to prevent contractures of the finger joints. We propose two types of actuators. The fabrication of the actuators was based on molding silicon rubber. The actuators can not only operate in flexion and extension but can also twist and stretch out the finger. The actuators force and motion were characterized at different supply pressures. In addition, we investigated different possible methods of rehabilitation for fingers using the actuators. The metacarpophalangeal (MP) and the proximal interphalangeal (PIP) joint motion -were measured with the supply pressure of 150 kPa. The range of MP/PIP joint motion was from minus 3/9 degrees to 53/55 degrees. It was shown about 40 percent of its normal range. As a result, we confirmed the viability of the actuators for a finger rehabilitation device.

关键词： Pneumatic actuator rehabilitation device preventing contractures. actuators Pneumatic actuators Contracture supply pressures Pneumatic Finger Joint Rehabilitation rubbers Lake Restoration Fingers

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A Structured Overlay Network for Aggregating Sensor Data

A Structured Overlay Network for Aggregating Sensor Data

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International Conference on Broadband, Wireless Computing, Communication and Applications (BWCCA)

作者： Atsushi Takeda Takuma Oide Akiko Takahashi Department of Information Science Tohoku Gakuin University Sendai Japan Advanced Course of Information and Electronic System Engineering Sendai National College of Technology Sendai Japan Department of Information Systems Sendai National College of Technology Sendai Japan

Symbiotic computing services require big data from a huge number of sensor devices in order to detect the real-world, so a distributed database system which can handle the big data is required for symbiotic computing system. In this paper, we propose a scalable structured p2p network which supports data aggregation. In the proposed p2p network, each node forwards partial statistical results to other nodes, and each node aggregates partial statistical results in order to calculate a complete statistical result. In the proposed p2p network, the data aggregation process does not need any specific protocols, so the communication cost of the extension mechanism is very low. We simulated the proposed p2p network by using a p2p network simulator. The simulation results indicate that the proposed data aggregation mechanism is effective enough.

关键词： Database systems Symbiosis Maintenance engineering Information management Data handling Data storage systems Clocks

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A trial of flapping water turbine

Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japa...

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Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B 2011年第779期77卷 1445-1456页

作者： Iwagishi, Chiso Nakamura, Takahiko Honmura, Shinji Nakagawa, Koji Hakodate National College of Technology Advanced Course of Production System Engineering Tokura 14-1 Hakodate Hokkaido 042-8501 Japan

A flapping water turbine is a kind of power generating machine which extracts mechanical energy from flowing water by swing of blade motion. In this study, we carried out numerical simulation of blade motion and experiment on river. In the simulation, we made numerical integration of momentum equation about roll angle and compared the result with experiment in water channel. The disagreement in roll angle between the simulation and the result of experiment were discussed by using analytical model and basic data of blade fluid dynamic characteristics. The result of river experiment showed that flapping water turbine can extract energy from stream with rippling surface and turbulence. © 2011 The Japan Society of Mechanical Engineers. © 2012 The Japan Society of Mechanical Engineers.

关键词： Rivers

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Micro-organic Light-emitting Devices Fabricated by Room-temperature Curing Nanoimprint Lithography Using Diamond Molds

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MRS Online Proceedings Library 2011年第1期1395卷 33-38页

作者： Ippei Ishikawa Taisuke Okuno Shuji Kiyohara Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology Maizuru Kyoto Japan Application and Technical Section ELIONIX INC. Hachioji Tokyo Japan Department of Mechanical System Engineering University of Yamanashi Kofu Yamanashi Japan

Organic light-emitting devices (OLEDs) have attracted a lot of attention as a next generation display. In this study, we fabricated the micro-OLEDs by room-temperature curing nanoimprint lithography (RTC-NIL) using diamond molds. The diamond has superior durability and was used as mold material for RTC-NIL. The diamond molds have been fabricated by electron cyclotron resonance (ECR) oxygen ion shower with polysiloxane oxide mask in the electron beam (EB) lithography technology. We fabricated the diamond mold pattern with 10 µm-square dot. The diamond molds have been used to form an insulating layer in micro-OLEDs. The optimum thickness of N,N’-Diphenyl-N,N’-di(m-tolyl)benzidine (TPD) [hole transport layer], Tris(8-quinolinolato)aluminum (Alq3) [electron transport layer] and aluminum (Al) [cathode] were 40 nm, 40 nm and 200 nm, respectively. We succeeded in formation of insulating layer in micro-OLEDs and operation of micro-OLEDs with 10 µm-square-dot by RTC-NIL using diamond molds.

关键词： diamond optoelectronic microelectronics

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A reduced-size and tunable branch-line 3dB hybrid

A reduced-size and tunable branch-line 3dB hybrid

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Asia-Pacific Conference on Microwave

作者： Satoshi Kondo Hajime Kondo Hitoshi Ishida Advanced System Engineering Course Gunma National College of Technology Maebashi Gunma Japan Chuo Electronics Company Limited Hachioji Tokyo Japan

This paper proposes a reduced-size and tunable 3dB branch-line hybrid. The proposed hybrid consists of short transmission lines with equal characteristic impedance and shunt lumped tuning capacitors. The authors fabricated the proposed hybrid on PTFE substrates at 2GHz. In the measurements, while tuning capacitance changes from 1.3pF to 2.7pF, center frequency shifted 1.8GHz to 2.4GHz, with -19.5dB return loss, ±0.3dB outputs amplitude difference, and 90±3° phase difference. These measurement results agree with analytical calculation accurately. In general, these hybrids are particularly useful for power dividers or power combiners in microwave circuit as balanced mixers, image-rejection mixers, and balanced amplifiers.

关键词： Tuning Capacitance Equations Capacitance measurement Couplings Frequency measurement Reflection

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