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2024 IEEE Symposium on VLSI technology and Circuits, VLSI technology and Circuits 2024

作者： Han, Geonhui Kim, Youngdong Kim, Jaeseon Kim, Dongmin Seo, Yoori Lee, Chuljun Choi, Jinmyung Lee, Jinwoo Ahn, Dongho Oh, Sechung Lee, Donghwa Hwang, Hyunsang Department of Material Science and Engineering Pohang37673 Korea Republic of Advanced Process Development Team 2 Samsung Electronics Gyeonggi-do Korea Republic of

ISBN: (纸本)9798350361469

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Highly Scalable Vertical Bypass RRAM (VB-RRAM) for 3D V -NAND Memory

Highly Scalable Vertical Bypass RRAM (VB-RRAM) for 3D V -NAN...

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Symposium on VLSI technology

作者： Geonhui Han Youngdong Kim Jaeseon Kim Dongmin Kim Yoori Seo Chuljun Lee Jinmyung Choi Jinwoo Lee Dongho Ahn Sechung Oh Donghwa Lee Hyunsang Hwang Department of Material Science and Engineering Pohang University of Science and Technology (POSTECH) Pohang Korea Advanced Process Development Team 2 Samsung Electronics Gyeonggi-do Republic of Korea

ISBN: (数字)9798350361469

ISBN: (纸本)9798350361476

We firstly demonstrate highly scalable interface type RRAM based 3D V-NAND memory with WOx resistivity switching (RS) layer and IGZO selector transistor (Tr). 3D vertical interface type RRAM integrated with IGZO Tr (VB-RRAM), utilizing bypass reading between Tr and RS layer, exhibits low voltage operation (< 5 V), multi-bit (4 bit) capability, and high uniformity of the RS layer while improving the limitations of on/off ratio. Furthermore, with scaling the channel length down to 30 nm, we achieved fast switching speed (~50 us), stable endurance (> 10 7 cycles), and low switching energy consumption (5 fJ). Finally, critical V-NAND issues like read disturbance and interface layer were also evaluated.

关键词： Low voltage Energy consumption Three-dimensional displays Switches Very large scale integration Conductivity Transistors

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Sparse section imaging-based deep learning electron tomography of porous carbon supports in proton exchange membrane fuel cells

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Journal of Energy Chemistry 2025年第5期104卷 795-806页

作者： Sang-Hyeok Yang Yerin Jeon Min-Hyoung Jung Sungyong Cho Eun-Byeol Park Daehee Yang Hyo June Lee Yun Sik Kang Chang Hyun Lee Sung-Dae Yim Hu Young Jeong Sungchul Lee Young-Min Kim Department of Energy Science Sungkyunkwan University(SKKU)Suwon 16419Republic of Korea Advanced Fuel Cell Technology Development Team 2 Hyundai Motor CompanyUiwang 16082Republic of Korea Fuel Cell Laboratory Korea Institute of Energy Research(KIER)Daejeon 34129Republic of Korea Energy Engineering Department College of EngineeringDankook UniversityCheonan 31116Republic of Korea Graduate School of Semiconductor Materials and Devices Engineering Ulsan National Institute of Science and Technology(UNIST)Ulsan 44919Republic of Korea Center for 2D Quantum Heterostructures Institute for Basic Science(IBS)Suwon 16419Republic of Korea

Understanding the degradation phenomenon of proton exchange membrane fuel cells under electrochemical cycling requires an analysis of the porous carbon support *** factors contributing to this phenomenon include changes in the total porosity and viable surface area for electrochemical *** tomography-based serial section imaging using focused ion beam-scanning electron microscopy(FIB-SEM)can elucidate this phenomenon at a nanoscale ***,this highresolution tomographic analysis requires a huge image dataset and manual inputs in rule-based workflows;these requirements are time-consuming and often cause experimental difficulties and unreliable *** propose a deep learning-empowered approach comprising a two-step automated process for image interpolation and semantic segmentation to address the practical issues encountered in FIB-SEM electron *** optimally trained interpolation model can reduce the image data requirement by more than 95%to analyze the structural degradation of carbon supports after electrochemical cycling while maintaining the reliability obtained in conventional tomographic analysis with several hundred *** the subsequent image segmentation model excludes a complicated manual filtering process,the relevant structural parameters can be reliably measured without human *** sparse-section imaging-based deep learning process can allow cost-efficient analysis and reliable measurement of the degree of cycling-induced carbon corrosion.

关键词： Deep learning FIB-SEM Electron tomography Fuel cell Membrane electrode assembly Carbon support

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Extreme Ultraviolet Scatterometry for Characterizing Nanometer Scale Features in a Damascene Sample

Extreme Ultraviolet Scatterometry for Characterizing Nanomet...

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2024 Frontiers in Optics, FiO 2024

作者： Klein, C. Jenkins, N. Shao, Y. Li, Y. Park, S. Kim, W. Kapteyn, H. Murnane, M. Department of Physics JILA STROBE NSF Science & Technology Center University of Colorado NIST BoulderCO United States Core Technology R&D Team Mechatronics Research Samsung Electronics Co. Ltd. Hwasung Korea Republic of Advanced Process Development Team 4 Semiconductor R&D Center Samsung Electronics Co. Ltd. Hwasung Korea Republic of Kapteyn-Murnane Laboratories Inc. 4775 Walnut Street #102 BoulderCO80301 United States

We characterize nanoscale out-of-plane features on an industrially relevant semiconductor sample using a coherent extreme ultraviolet high harmonic generation source at 29nm. The advantages of using 13.5nm light are a... 详细信息

关键词： Extreme ultraviolet lithography

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Controlling the beam angle spread of carbon implantation for improvement of bin map defect in V-NAND flash memory

Memories - Materials, Devices, Circuits and Systems

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Memories - Materials, Devices, Circuits and Systems 2023年 4卷

作者： Yang, Gui-Fu Jang, Sung-Hwan JANG, SUNG-UK Lee, Tae-Hyun Kim, Da-Hye Huh, Jung-Ho Yoo, Seok-Hyun Advanced Process Development Team Samsung Electronics 1 Samsungjeonja-ro Gyeonggi-do Hwaseong-si18448 Korea Republic of Memory Implantation Technology Team Samsung Electronics 114 Samsung-ro Godeok-myeon Gyeonggi-do Pyeongtaek-si17786 Korea Republic of

As the shrinkage of devices accelerates and the vertical layers increase, beam angle spread of carbon ion implantation (C IIP) for the silicon selective epitaxial growth (Si-SEG) areas in V-NAND is one of the most critical parameters related with bin map defects. The roles of C IIP in Si-SEGs are that it can suppress channeling effect of boron IIP and diffusion limitation of boron dopants during subsequent annealing processes. In this study, beam angle spread was reduced by 36% and the center-to-edge beam angle skew of wafer was reduced to less than 1° by optimizing the specification of tracking magnet and the beam angle mean. After applying the improved process conditions and effective interlocks, the bin defective rate was controlled less than 0.5% successfully. © 2023 The Author(s)

关键词： Defects

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Effect of detuning on noise characteristics in a microcomb-based light source

Effect of detuning on noise characteristics in a microcomb-b...

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2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2022

作者： Kogure, Soma Fujii, Shun Kumazaki, Hajime Sota, Shota Hashimoto, Yosuke Kobayashi, Yuta Araki, Tomohiro Tanabe, Takasumi Department of Electronics and Electrical Engineering Faculty of Science and Technology Keio University 3-14-1 Hiyoshi Kohoku-ku Yokohama223-8522 Japan Quantum Optoelectronics Research Team RIKEN Center for Advanced Photonics 2-1 Hirosawa Saitama Wako351-0198 Japan Research Unit I Research and Development Directorate Japan Aerospace Exploration Agency 2-1-1 Sengen Ibaraki Tsukuba305-8505 Japan

We investigated the pump effective detuning dependence of noise and linewidth characteristics of modulation instability combs. Modulation instability combs are useful for applications if the detuning is smaller than s...

ISBN: (纸本)9798350350012

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Effect of detuning on noise characteristics in a microcomb-based light source

Effect of detuning on noise characteristics in a microcomb-b...

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2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO/PR 2022

关键词： Light sources

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FEC-free optical data transmission with a chip-integrated microresonator frequency comb source

FEC-free optical data transmission with a chip-integrated mi...

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CLEO: Science and Innovations, S and I 2022

作者： Kogure, Soma Ohtsuka, Tamiki Fujii, Shun Kumazaki, Hajime Tanaka, Shuya Hashimoto, Yosuke Kobayashi, Yuta Araki, Tomohiro Furusawa, Kentaro Sekine, Norihiko Tanabe, Takasumi Department of Electronics and Electrical Engineering Faculty of Science and Technology Keio University 3-14-1 Hiyoshi Kohoku-ku Yokohama223-8522 Japan Quantum Optoelectronics Research Team RIKEN Center for Advanced Photonics 2-1 Hirosawa Saitama Wako351-0198 Japan Research Unit I Research and Development Directorate Japan Aerospace Exploration Agency 2-1-1 Sengen Ibaraki Tsukuba305-8505 Japan Terahertz Technology Research Center National Institute of Information and Communications Technology 4-2-1 Nukui-Kitamachi Koganei Tokyo184-8795 Japan

We investigated the feasibility of IM-DD communication in a microcomb. Turing pattern and soliton combs are ideal, though MI comb can transmit signals when the pump-detuning is well controlled and excessive noise is s... 详细信息

ISBN: (纸本)9781557528209

关键词： Light transmission

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Enhancing the Reliability of Inp-Based Qd Color Conversion Layer Through a Uniform Organic Encapsulation Layer Via Inkjet Printing

SSRN

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SSRN 2024年

作者： Lee, Sang Youn Sakong, Chun Ju, Byeong-Kwon Cho, Kwan Hyun Autonomous Manufacturing & Process R&D Dept. Korea Institute of Industrial Technology Gyeong-gi-do Ansan-si15588 Korea Republic of Dept. of Micro/Nano Systems College of Engineering Korea University 145 Anam-ro Seongbuk-gu Seoul02841 Korea Republic of EM Development Team ChemE Inc. 199 Techno 2-ro Yuseong-gu Daejeon34025 Korea Republic of

Quantum dot (QD) as a color conversion layer (CCL) is gaining increasing attention for use in next generation displays. However, QD CCL, especially those based on indium phosphide (InP) materials, are vulnerable to oxygen and moisture. Accordingly, even in CCL technology, encapsulation is essential to mitigate performance reduction due to the degradation of color conversion efficiency (CCE). Herein, we employed only acrylic-based resin to produce a uniform encapsulation layer on a CCL, enhancing the CCE reliability of the QD CCL under ambient conditions. To print a uniform encapsulation layer, we confirmed the significance of the minimized surface energy differences on glass, bank, and QD film through O2 plasma treatment. We also investigated coating characteristics through adjustment of the drop spacing to analyze the reliability of the CCL. Compared to the CCL without an encapsulation layer, the CCE only showed a decrease of 1.96% at green 9and 3.6% at red light, after 168 hours. The T95 (time to 95% of the initial luminance) was improved from 5.25 hours to 75.02 hours by applying the encapsulation layer. As a result, we enhanced the stability of the InP-based QD CCL by printing only an organic encapsulation layer using the inkjet printing process. © 2024, The Authors. All rights reserved.

关键词： Conversion efficiency

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Comparison of microcomb-based light sources for optical data transmission

Comparison of microcomb-based light sources for optical data...

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Frontiers in Optics + Laser Science 2021, FiO+LS 2021 - Part of Frontiers in Optics, FiO 2021

作者： Kogure, Soma Ohtsuka, Tamiki Fujii, Shun Kumazaki, Hajime Wada, Koshiro Hashimoto, Yosuke Kobayashi, Yuta Araki, Tomohiro Furusawa, Kentaro Sekine, Norihiko Tanabe, Takasumi Department of Electronics and Electrical Engineering Faculty of Science and Technology Keio University 3-14-1 Hiyoshi Kohoku-ku Yokohama223-8522 Japan Quantum Optoelectronics Research Team RIKEN Center for Advanced Photonics 2-1 Hirosawa Saitama Wako351-0198 Japan Research Unit I Research and Development Directorate Japan Aerospace Exploration Agency 2-1-1 Sengen Ibaraki Tsukuba305-8505 Japan Terahertz Technology Research Center National Institute of Information and Communications Technology 4-2-1 Nukui-Kitamachi Koganei Tokyo184-8795 Japan

We performed a transmission experiment to compare microcomb states using a silicon nitride microresonator. A modulation instability comb with the correct amount of detuning can provide a light source almost comparable... 详细信息

ISBN: (纸本)9781557528209

关键词： Light sources

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