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2012 MRS Fall Meeting

作者： Kiyohara, Shuji Matta, Shohei Ishikawa, Ippei Tanoue, Hideto Takikawa, Hirofumi Taguchi, Yoshio Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section Elionix Inc. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Research Center for Ubiquitous MEMS and Micro Engineering AIST 1-2-1 Namiki Tsukuba Ibaraki 305-8564 Japan

ISBN: (纸本)9781632661043

As an application to the nanoemitter, we investigated the nanofabrication of diamond-like carbon (DLC)-dot arrays by room-temperature curing imprint-liftoff (RTCIL) method using aluminum mask. The DLC film which has excellent properties similar to diamond properties was used as the patterning material. A polished glass like carbon (GC) was used as a mold material. The polysiloxane in the state of sticky liquid at room temperature and stable in air exhibits a negative-exposure characteristics. Therefore, the polysiloxane was used as electron beam (EB) resist and oxide mask material in EB lithography, and also used as RTC-imprint resist material. An aluminum was used as oxide metal mask material of liftoff. We have fabricated the GC mold of dot arrays with 5 μm-square and 500 nm-height. We carried out the RTCIL process using the GC mold under the following optimum imprint conditions: 0.5 MPa-imprinting pressure and 5 min- holding time. Aluminum film on the imprinted polysiloxane was prepared by vacuum evaporation method and its thickness is 20 nm. Finally, the polysiloxane patterns were removed with acetone and aluminum mask patterns were fabricated. We found that the maximum etching selectivity of aluminum film against DLC film was as high as 35, which was obtained under an ion energy of 400 eV. Then we processed the patterned aluminum on DLC film with an ECR oxygen ion shower. We fabricated DLC-dot arrays with 5 μm-square and 400 nm-height with an aspect ratio of 0.08. © 2013 Materials Research Society.

关键词： Carbon

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Hybrid brain/muscle-actuated control of an intelligent wheelchair

Hybrid brain/muscle-actuated control of an intelligent wheel...

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IEEE International Conference on Robotics and Biomimetics

作者： Zhijun Li Shuangshuang Lei Chun-Yi Su Guanglin Li Key Lab of Autonomous System and Network Control Ministry of Education and College of Automation Science and Engineering South China University of Technology Guangzhou China Department of Mechanical and Industrial Engineering Concordia University Montreal Canada Shenzhen Institutes of Advanced Technology Chinese Academy of Sciences Shenzhen Guangdong China

Brain-computer interface (BCI) controlled wheelchair robots can serve as powerful aids for severely disabled people in their daily life, especially to help them move voluntarily. In order to better understand human “thought”, owing to the development of the hybrid brain/muscle interface technique, in this paper, we present a real-time hybrid brain/muscle interface to control a wheelchair directly to keep the disables recovering several motion capabilities by using noninvasive motor imagery Electroencephalography (EEG) and Electromyography (EMG). The EMG and EEG signals from the users are extracted to control the motion of an intelligent wheelchair. Both signals processing consists of off-line training, online control evaluation, and real-time control. An algorithm called the common spatial patterns (CSP) is used in this human-robot system to extract the most discriminative spatial patterns pairs as features. The extensive experiments were conducted on the developed human-wheelchair systems to verify the proposed approaches.

关键词： Wheelchairs Electroencephalography Electromyography Training Robots Muscles Real-time systems

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XXIV World Allergy Congress 2015 Seoul, Korea. 14-17 October 2015 Abstracts

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WORLD ALLERGY ORGANIZATION JOURNAL 2016年第1期9卷 1-206页

作者： [Anonymous] Korea University College of Medicine Guro Hospital Seoul South Korea College of Medicine Korea University Seoul South Korea Korea University Guro Hospital Seoul South Korea Seoul National University Boramae Hospital Seoul South Korea Division of Clinical Immunology Faculty of Medicine University of Debrecen Debrecen Hungary Meiji Pharmaceutical University Tokyo Japan Suri Medical Foundation Hospital Uttar Pradesh State India Shahid Beheshti University Tehran Iran Airlangga University Teaching Hospital Surabaya Indonesia Tokyo Metropolitan Police Hospital Tokyo Japan Shinichiro KogaSamsung Changwon Hospital Seoul South Korea Sapporo Tokushukai Hospital Sapporo Japan Department of Dermatology Yonsei University College of Medicine Seoul South Korea Brain Korea 21 PLUS Project for Medical Science Yonsei University College of Medicine Seoul South Korea Sureyyapasa Chest Diseases and Chest Surgery Training Hospital Istanbul Turkey Kangnam Sacred Heart Hospital Seoul South Korea Sakai City Medical Center Sakai Japan Osaka University Suita Japan Yonsei University College of Medicine Seoul South Korea Osaka-Minami Medical Center Kawachinagano Japan Inha University College of Medicine Incheon South Korea Inha University Hospital Incheon South Korea Center for Rhinology and Allergology Wiesbaden Wiesbaden Germany Leti Pharma Gmbh Witten Germany Postgraduate Institute of Medical Education and Research Chandigarh India West Bengal Technical University Kolkata India Institute of Microbiology Academy of Sciences of the Czech Republic Prague Czech Republic Seoul National University Hospital Seoul South Korea Ent and Allergy Centre(INDIA) Panchkula India University of Santo Tomas Hospital Manila Philippines University of Santo Tomas Faculty of Medicine Manila Philippines Kyung Hee University Hospital at Gang-Dong Seoul South Korea Sangji University Wonju South Korea Division of Allergy and Immunology Department of Internal Medicine Yonsei University Colle

A1 Pirfenidone inhibits TGF-b1-induced extracellular matrix production in nasal polyp-derived fibroblasts Jae-Min Shin, Heung-Man Lee, Il-Ho Park A2 The efficacy of a 2-week course of oral steroid in the treatment of chronic spontaneous urticaria refractory to antihistamines Hyun-Sun Yoon, Gyeong Yul Park A3 The altered distribution of follicular t helper cells may predict a more pronounced clinical course of primary sjögren’s syndrome Margit Zeher A4 Betamethasone suppresses Th2 cell development induced by langerhans cell like dendritic cells Katsuhiko Matsui, Saki Tamai, Reiko Ikeda A5 An evaluation of variousallergens in cases of allergic bronchial asthma at lucknow and neighbouring districts by intradermal skintest Drsushil Suri, Dranu Suri A6 Evaluation ferqency of ADHD in childhood asthma Marzieh Heidarzadeh Arani A7 Steven johnson syndrome caused by typhoid fever in a child Azwin Lubis, Anang Endaryanto A8 Chronic Bronchitis with Radio Contrast Media Hypersensitivity: A Case with Hypothesized GINA Step 1 Asthma Shinichiro Koga A9 The association between asthma and depression in Korean adult : An analysis of the fifth korea national health and nutrition examination survey (2010-2012) Lee Ju Suk A10 Management of allergic disease exacerbations in pregnancy Yasunobu Tsuzuki A11 Subcutaneous immunotherapy mouse model for atopic dermatitis Seo Hyeong Kim, Jung U Shin, Ji Yeon Noh, Shan Jin, Shan Jin, Hemin Lee, Jungsoo Lee, Chang Ook Park, Kwang Hoon Lee, Kwang Hoon Lee A12 Atopic disease and/or atopy are risk factors for local anesthetic allergy in patients with history of hypersensitivity reactions to drugs? Fatma Merve Tepetam A13 Food hypersensitivity in patients with atopic dermatitis in Korea Chun Wook Park, Jee Hee Son, Soo Ick Cho, Yong Se Cho, Yun Sun Byun, Yoon Seok Yang, Bo Young Chung, Hye One Kim, Hee Jin Cho A14 Anaphylaxis caused by an ant (Brachyponera chinensis) in Japan Yoshinori Katada, Toshio Tanaka, Akihiko Nakabayashi, Koji Nishida, Kenichi A

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Fabrication of Micro-OLEDs by Room-temperature Curing Nanocontact-print Lithography Using DLC Molds

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MRS Online Proceedings Library (OPL) 2013年第1期1511卷 mrsf12-1511-ee05-03-mrsf12-1511-ee05-03页

作者： Ippei Ishikawa Keisuke Sakurai Shuji Kiyohara Taisuke Okuno Hideto Tanoue Yoshiyuki Suda Hirofumi Takikawa Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section ELIONIX INC. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan

The microfabrication technologiesfor organic light-emitting devices (OLEDs) are essential to the fabrication of the next generation of light-emitting devices. The micro-OLEDs fabricated by room-temperature curing nanoimprint lithography (RTC-NIL) using diamond molds have been investigated. However, light emissions from 10 μm-square-dot OLEDs fabricated by the RTC-NIL method have not been uniform. Therefore, we proposed the fabrication of micro-OLEDs by room-temperature curing nanocontact-print lithography (RTC-NCL) using the diamond-like carbon (DLC) mold. The DLC molds used in RTC-NCL were fabricated by an electron cyclotron resonance (ECR) oxygen ion shower with polysiloxane oxide mask in electron beam (EB) lithography technology. The mold patterns are square and rectangle dots which has 10 µm-width, 10 µm-width and50 µm-length, respectively. The height of the patterns is 500 nm. The DLC molds were used to form the insulating layer of polysiloxane in RTC-NCL. We carried out the RTC-NCL process using the DLC mold under the following optimum conditions: 0.1 MPa-pressure for coating DLC mold with polysiloxane film, 2.1 MPa-pressure for transferring polysiloxane from DLC mold pattern to indium tin oxide (ITO) glass substrate. We deposited N, N'-Diphenyl -N, N'-di (m-tolyl)benzidine (TPD) [40 nm-thickness] as hole transport layer / Tris(8-quinolinolato)aluminum (Alq3) [40 nm-thickness] as electron transport layer / Al [200 nm-thickness] as cathode on ITO glass substrateas anode in this order. We succeeded in formation of the insulating layer with square and rectangle dots which has 10 µm-width,10 µm-width and 50 µm-length, and operation of micro-OLEDs by RTC-NIL using DLC molds.

关键词： ion-beam processing microstructure diamond

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The effect of battery temperature on total fuel consumption of fuel cell hybrid vehicles

The effect of battery temperature on total fuel consumption ...

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作者： Zheng, C.H. Kim, N.W. Park, Y.I. Lim, W.S. Cha, S.W. Xu, G.Q. Shenzhen Institutes of Advanced Technology Chinese Academy of Sciences Shenzhen University Town 1068 Xueyuan Avenue Shenzhen 518055 China Shenzhen Key Laboratory of Electric Vehicle Powertrain Platform and Safety Technology Shenzhen China School of Mechanical and Aerospace Engineering/SNU-IAMD Seoul National University Bldg. 301 #1505 San 56-1 Daehak-dong Gwanak-gu Seoul 151-742 Korea Republic of Department of Mechanical System Design Engineering Seoul National University of Science and Technology 172 Gongreung 2-dong Nowon-gu Seoul 139-743 Korea Republic of Department of Mechanical and Automotive Engineering Seoul National University of Science and Technology 172 Gongreung 2-dong Nowon-gu Seoul 139-743 Korea Republic of

In order to consider the effect of battery temperature on the total fuel consumption when a Pontryagin's Minimum Principle (PMP)-based power management strategy is applied to a fuel cell hybrid vehicle (FCHV), this paper designates the battery temperature as a second-state variable other than the battery state of charge (SOC) and defines a new costate for the battery temperature in the control problem. The PMP-based power management strategy is implemented in a computer simulation and the relationship among the final values of the two state variables and the total fuel consumption is illustrated based on the simulation results. This relationship is defined as an optimal surface in this research. Using the optimal surface, it can be concluded that considering the battery temperature effect in the PMP-based power management strategy improves the fuel economy of the FCHV. Potential fuel economy gains attributed to consideration of the battery temperature effect are also determined based on the optimal surfaces. Crown Copyright © 2012, Hydrogen Energy Publications, LLC. Published by Elsevier Ltd. All rights reserved.

关键词： Fuel economy

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Approaches at KAIST NICIE Lab to quantifying situation awareness in nuclear power plant MCRs

Approaches at KAIST NICIE Lab to quantifying situation aware...

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作者： SEONG Poong-Hyun YIM Ho-Bin KIM Man-Cheol HA Jun-Su LEE Hyun-Chul LEE Seung-Woo Department of Nuclear and Quantum Engineering Korea Advanced Institute of Science and Technology School of Energy System Engineering Chung-Ang University Nuclear Engineering (Abu Dhabi Campus) Khalifa University of ScienceTechnology & Research (KUSTAR) Instrumentation & Control/Human Factors Division Korea Atomic Energy Research Institute Risk Assessment Department Korea Institute of Nuclear Safety

Situation awareness(SA) continues to receive a considerable amount of attention from the ergonomics community. But, techniques to measure SA have normally used expert judgment or a self-rating method so far. One of the problems of these techniques is inconsistency of results. So, empirical and analytical studies on an objective and quantitative SA measurement methods have been carried out at Nuclear I&C and Information engineering Lab(NICIE Lab) in Korea advanced Institute of Science and Technology(KAIST). Empirical studies are based on physical and cognitive human behaviors, whereas analytical studies are mainly based on Bayesian inference. Eye movement signals and verbal protocol analysis were used for empirical approaches to obtain objective measures. FIR and SAE measures showed feasibility of an eye-tracking method for robust application. TSA score based on a verbal protocol analysis also showed its possibility of team SA(TSA) quantification. Bayesian inference was used for analytical approaches of SA quantification. The analytical quantification method was further expanded to consider some of the important human properties, and a SA modelling tool called ‘Co RSAGE, ver01" was developed.

关键词： situation awareness quantification empirical approach analytical approach

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Autonomous learning design in system-on-chip

Autonomous learning design in system-on-chip

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IEEE International Conference on Robotics and Biomimetics

作者： Yimin Zhou Ludovic Krundel David Mulvaney Vassilios Chouliaras Guoqing Xu Guoqiang Fu Shenzhen Institutes of Advanced Technology Chinese Academy of Sciences and also with Shenzhen Key Laboratory of Electric Vehicle Powertrain Platform and Safety Technology Shenzhen China Department of Electronic and Electrical Engineering Loughborough University Loughborough UK Shenzhen Insitutes of Advanced Technology Chinese Academy of Sciences and also with The Chinese University of Hong Kong Hong Kong School of Mechanical Electronic and Control Engineering Beijing Jiaotong University Beijing China

ISBN: (纸本)9781479927456

The solving strategy of artificial intelligence (AI) is adopted with bottom-up design to solve its hard problems. To tackle end-to-end AI-hard problems, a highly self-adaptive control system-on-chip has been developed to self-learn its internal and external resources with the aid of sets of sensors and actuators. Inspired by biological cell learning theory, different approaches of modelling techniques have been derived together with machine learning methods to the embedded control systems so as to perform different tasks. Some experimental results have shown the developments.

关键词： Hardware Artificial neural networks Field programmable gate arrays Biological system modeling Biological neural networks Robots Neurons

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The power performance and fuel economy estimation for vehicle concept planning and design using VHDL-AMS HV full vehicle simulation

The power performance and fuel economy estimation for vehicl...

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2012 IEEE 13th Workshop on control and Modeling for Power Electronics, COMPEL 2012

作者： Tsuji, Kimitoshi Kato, Toshiji Advanced Vehicle Control System Engineering Dev. Toyota Motor Corporation 1200 Mishuku Susono Shizuoka 410-1193 Japan Department of Electrical Engineering Doshisha University Kyotanabe Kyoto 610-0321 Japan

ISBN: (纸本)9781424493739

关键词： Carbon dioxide

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Human genome meeting 2016 : Houston, TX, USA. 28 February - 2 March 2016

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Human genomics 2016年第1期10 Suppl 1卷 12页

作者： A. K. Srivastava Y. Wang R. Huang C. Skinner T. Thompson L. Pollard T. Wood F. Luo R. Stevenson R. Polimanti J. Gelernter X. Lin I. Y. Lim Y. Wu A. L. Teh L. Chen I. M. Aris S. E. Soh M. T. Tint J. L. MacIsaac F. Yap K. Kwek S. M. Saw M. S. Kobor M. J. Meaney K. M. Godfrey Y. S. Chong J. D. Holbrook Y. S. Lee P. D. Gluckman N. Karnani A. Kapoor D. Lee A. Chakravarti C. Maercker F. Graf M. Boutros G. Stamoulis F. Santoni P. Makrythanasis A. Letourneau M. Guipponi N. Panousis M. Garieri P. Ribaux E. Falconnet C. Borel S. E. Antonarakis S. Kumar J. Curran J. Blangero S. Chatterjee J. Akiyama D. Auer C. Berrios L. Pennacchio T. R. Donti G. Cappuccio M. Miller P. Atwal A. Kennedy A. Cardon C. Bacino L. Emrick J. Hertecant F. Baumer B. Porter M. Bainbridge P. Bonnen B. Graham R. Sutton Q. Sun S. Elsea Z. Hu P. Wang Y. Zhu J. Zhao M. Xiong David A. Bennett A. Hidalgo-Miranda S. Romero-Cordoba S. Rodriguez-Cuevas R. Rebollar-Vega E. Tagliabue M. Iorio E. D’Ippolito S. Baroni B. Kaczkowski Y. Tanaka H. Kawaji A. Sandelin R. Andersson M. Itoh T. Lassmann Y. Hayashizaki P. Carninci A. R. R. Forrest C. A. Semple E. A. Rosenthal B. Shirts L. Amendola C. Gallego M. Horike-Pyne A. Burt P. Robertson P. Beyers C. Nefcy D. Veenstra F. Hisama R. Bennett M. Dorschner D. Nickerson J. Smith K. Patterson D. Crosslin R. Nassir N. Zubair T. Harrison U. Peters G. Jarvik F. Menghi K. Inaki X. Woo P. Kumar K. Grzeda A. Malhotra H. Kim D. Ucar P. Shreckengast K. Karuturi J. Keck J. Chuang E. T. Liu B. Ji A. Tyler G. Ananda G. Carter H. Nikbakht M. Montagne M. Zeinieh A. Harutyunyan M. Mcconechy N. Jabado P. Lavigne J. Majewski J. B. Goldstein M. Overman G. Varadhachary R. Shroff R. Wolff M. Javle A. Futreal D. Fogelman L. Bravo W. Fajardo H. Gomez C. Castaneda C. Rolfo J. A. Pinto K. C. Akdemir L. Chin S. Patterson C. Statz S. Mockus S. N. Nikolaev X. I. Bonilla L. Parmentier B. King F. Bezrukov G. Kaya V. Zoete V. Seplyarskiy H. Sharpe T. McKee K. Popadin N. Basset-Seguin R. Ben Chaabene M. Andrianova C. Verdan K. Grosdemange O. Sumara M. E JCSRI Greenwood Genetic Center Greenwood USA School of Computing Clemson University Clemson USA Biochemical Genetics Laboratory Greenwood Genetic Center Greenwood USA Department Psychiatry Yale Sch Med and VA CT Healthcare Center West Haven USA Department Genetics Yale Sch Med and VA CT Healthcare Center West Haven USA Department Neurobiology Yale Sch Med and VA CT Healthcare Center West Haven USA Singapore Institute for Clinical Sciences Singapore Singapore National University of Singapore Singapore Singapore University of British Columbia Vancouver Canada KK Women’s and Children’s Hospital Singapore Singapore University of Southampton and University Hospital Southampton NHS Foundation Trust Southampton UK University of Auckland Auckland New Zealand McKusick-Nathans Institute of Genetic Medicine Johns Hopkins University School of Medicine Baltimore USA Esslingen University of Applied Sciences Esslingen Germany German Cancer Research Center Heidelberg Germany Department of Genetic Medicine and Development University of Geneva Medical School Geneva Switzerland Geneva University Hospitals-HUG Service of Genetic Medicine Geneva Switzerland GE3 Institute of Genetics and Genomics of Geneva University of Geneva Medical School Geneva Switzerland South Texas Diabetes and Obesity Institute School of Medicine University of Texas Rio-Grande Valley Edinburg USA South Texas Diabetes and Obesity Institute School of Medicine University of Texas Rio-Grande Valley Brownsville USA Institute of Genetic Medicine Johns Hopkins University Baltimore USA Genomics Division Lawrence Berkeley National Laboratory Berkeley USA Molecular and Human Genetics Baylor College of Medicine Houston USA Department of Translational Medical Sciences Federico II University Naples Italy Metabolon Inc Durham USA Section of Pediatric Neurology and Neuroscience Baylor College of Medicine Houston USA Tawam Hospital Abu Dhabi United Arab Emirates Stanford Medical School Stanford USA Sch

O1 The metabolomics approach to autism: identification of biomarkers for early detection of autism spectrum disorder A. K. Srivastava, Y. Wang, R. Huang, C. Skinner, T. Thompson, L. Pollard, T. Wood, F. Luo, R. Stevenson O2 Phenome-wide association study for smoking- and drinking-associated genes in 26,394 American women with African, Asian, European, and Hispanic descents R. Polimanti, J. Gelernter O3 Effects of prenatal environment, genotype and DNA methylation on birth weight and subsequent postnatal outcomes: findings from GUSTO, an Asian birth cohort X. Lin, I. Y. Lim, Y. Wu, A. L. Teh, L. Chen, I. M. Aris, S. E. Soh, M. T. Tint, J. L. MacIsaac, F. Yap, K. Kwek, S. M. Saw, M. S. Kobor, M. J. Meaney, K. M. Godfrey, Y. S. Chong, J. D. Holbrook, Y. S. Lee, P. D. Gluckman, N. Karnani, GUSTO study group O4 High-throughput identification of specific qt interval modulating enhancers at the SCN5A locus A. Kapoor, D. Lee, A. Chakravarti O5 Identification of extracellular matrix components inducing cancer cell migration in the supernatant of cultivated mesenchymal stem cells C. Maercker, F. Graf, M. Boutros O6 Single cell allele specific expression (ASE) IN T21 and common trisomies: a novel approach to understand DOWN syndrome and other aneuploidies G. Stamoulis, F. Santoni, P. Makrythanasis, A. Letourneau, M. Guipponi, N. Panousis, M. Garieri, P. Ribaux, E. Falconnet, C. Borel, S. E. Antonarakis O7 Role of microRNA in LCL to IPSC reprogramming S. Kumar, J. Curran, J. Blangero O8 Multiple enhancer variants disrupt gene regulatory network in Hirschsprung disease S. Chatterjee, A. Kapoor, J. Akiyama, D. Auer, C. Berrios, L. Pennacchio, A. Chakravarti O9 Metabolomic profiling for the diagnosis of neurometabolic disorders T. R. Donti, G. Cappuccio, M. Miller, P. Atwal, A. Kennedy, A. Cardon, C. Bacino, L. Emrick, J. Hertecant, F. Baumer, B. Porter, M. Bainbridge, P. Bonnen, B. Graham, R. Sutton, Q. Sun, S. Elsea O10 A novel causal methylation network approach to Alzheimer’s

关键词： Pulmonary Arterial Hypertension Oral Squamous Cell Carcinoma Deep Neural Network Autosomal Recessive Polycystic Kidney Disease Whole Genome Bisulfite Sequencing

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Fabrication of DLC-Based Micro-Gear Patterns by Room-Temperature Curing Nanoimprint Lithography Using Glass-Like Carbon Molds

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MRS Online Proceedings Library (OPL) 2013年第1期1511卷 mrsf12-1511-ee05-01-mrsf12-1511-ee05-01页

作者： Shuji Kiyohara Tomu Ikegaki Chigaya Ito Ippei Ishikawa Hideto Tanoue Hirofumi Takikawa Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section ELIONIX INC. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Research Center for Ubiquitous MEMS and Micro Engineering AIST 1-2-1 Namiki Tsukuba Ibaraki 305-8564 Japan

The fabrication of diamond-like carbon (DLC) micro-gear by room temperature curing nanoimprint lithography (RTC-NIL) using glass-like carbon (GC) molds as applications to the DLC-based medical MEMS (Micro Electronic Mechanical systems) was investigated. The DLC film which has excellent properties similar to chemical vapor deposited (CVD) diamond films was used as the patterning material. We propose GC as mold material because GC has higher etching selectivity than a diamond film. The etching selectivity of polysiloxane film against a GC substrate is about 5 times as high as that of a diamond film. Therefore we fabricated the GC molds that have micro-gear patterns with 30 µm-tip diameter and 500 nm-tooth thickness. We carried out the RTC-NIL process using the GC micro-gear molds under the following optimum conditions. 1 min-time from spin-coating to imprint: t1, 0.5 MPa-imprinting pressure: P and 5 min-holding time: t2, and then the imprinted polysiloxane pattern on DLC film was processed with an electron cyclotron resonance (ECR) oxygen ion shower. However, we were not able to fabricate micro-gear patterns in high accuracy because of a remaining residual layer on the DLC film. Therefore we propose the removing process for the residual layer with trifluoromethane (CHF3) ion shower under the optimum conditions of 300 eV-ion energy and 4 min-etching time. As a result, we succeeded to fabricate concave DLC-based micro-gear patterns in high accuracy which has 30 µm-tip diameter and 1 µm-depth.

关键词： diamond ion-beam processing microelectro-mechanical (MEMS)

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