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Flexible pressure sensors with ultrahigh stress tolerance enabled by periodic microslits

microsystems & nanoengineering 2024年第1期10卷 301-311页

作者： Song Wang Chenying Wang Yifan Zhao Yujing Zhang Yaxin Zhang Xiangyue Xu Qijing Lin Kai Yao Yuheng Wang Feng Han Yu Sun Zhuangde Jiang State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Mechanical EngineeringXi’an Jiaotong UniversityXi’anChina State Key Laboratory for Manufacturing Systems Engineering International Joint Laboratory for Micro/Nano Manufacturing and Measurement TechnologiesSchool of Instrument Science and TechnologyXi’an Jiaotong UniversityXi’anChina The Faculty of Electrical Engineering and Computer Science Ningbo UniversityNingboChina Department of Mechanical and Industrial Engineering University of TorontoTorontoCanada

Stress tolerance plays a vital role in ensuring the effectiveness of piezoresistive sensing films used in flexible pressure ***,existing methods for enhancing stress tolerance employ dome-shaped,wrinkle-shaped,and pyramidal-shaped microstructures in intricate molding and demolding processes,which introduce significant fabrication challenges and limit the sensing *** address these shortcomings,this paper presents periodic microslits in a sensing film made of multiwalled carbon nanotubes and polydimethylsiloxane to realize ultrahigh stress tolerance with a theoretical maximum of 2.477 MPa and a sensitivity of 18.092 kPa−*** periodic microslits permit extensive deformation under high pressure(e.g.,400 kPa)to widen the detection ***,the periodic microslits also enhance the sensitivity based on simultaneously exhibiting multiple synapses within the sensing interface and between the periodic sensing *** proposed solution is verified by experiments using sensors based on the microslit strategy for wind direction detection,robot movement sensing,and human health *** these experiments,vehicle load detection is achieved for ultrahigh pressure sensing under an ultrahigh pressure of over 400 kPa and a ratio of the contact area to the total area of 32.74%.The results indicate that the proposed microslit strategy can achieve ultrahigh stress tolerance while simplifying the fabrication complexity of preparing microstructure sensing films.

关键词： robot shaped stress

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Characterization and Modeling of Non-Conducting RF Hot Carrier Stress in FinFETs 17

Characterization and Modeling of Non-Conducting RF Hot Carri...

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17th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2024

作者： Niu, G. Ding, X. Zhang, H. Wang, W. Imura, K. Dai, F. Alabama Micro/Nano Electronics Science and Technology Center Auburn University Electrical and Computer Engineering Department AuburnAL United States Maxlinear Inc. CarlsbadCA United States

ISBN: (纸本)9798350361834

A significant reliability concern in RF power amplifiers is non-conducting RF hot carrier stress. We present experimental characterization and lifetime modeling of non-conducting RF hot carrier stress in modern FinFETs and demonstrate the importance of near-threshold stress. The relationship between RF and DC stresses is examined, and the quasi-static approximation is discussed. Die-to-die threshold voltage variation makes the measurement and modeling of V ds dependence difficult. A solution using the source current is proposed and demonstrated. © 2024 IEEE.

关键词： FinFET

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Black-hole-inspired thermal trapping with graded heat-conduction metadevices

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National Science Review 2023年第2期10卷 131-138页

作者： Liujun Xu Jinrong Liu Peng Jin Guoqiang Xu Jiaxin Li Xiaoping Ouyang Ying Li Cheng-Wei Qiu Jiping Huang Department of Physics State Key Laboratory of Surface Physics and Key Laboratory of Micro and Nano Photonic Structures (MOE) Fudan University Department of Electrical and Computer Engineering National University of Singapore Graduate School of China Academy of Engineering Physics School of Materials Science and Engineering Xiangtan University Interdisciplinary Center for Quantum Information State Key Laboratory of Modern Optical InstrumentationZJU-Hangzhou Global Scientific and Technological Innovation CenterZhejiang University International Joint Innovation Center Key Laboratory of Advanced Micro/Nano Electronic Devices and Smart Systems of Zhejiang The Electromagnetics Academy of Zhejiang University Zhejiang University

The curved space-time produced by black holes leads to the intriguing trapping *** far,metadevices have enabled analogous black holes to trap light or sound in laboratory ***,trapping heat in a conductive environment is still challenging because diffusive behaviors are *** by black holes,we construct graded heat-conduction metadevices to achieve thermal trapping,resorting to the imitated advection produced by graded thermal conductivities rather than the trivial solution of using insulation materials to confine thermal *** experimentally demonstrate thermal trapping for guiding hot spots to diffuse towards the *** heat-conduction metadevices have advantages in energy-efficient thermal regulation because the imitated advection has a similar temperature field effect to the realistic advection that is usually driven by external energy *** results also provide an insight into correlating transformation thermotics with other disciplines,such as cosmology,for emerging heat control schemes.

关键词： thermal trapping graded metadevices imitated advection

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Recent Advances in Parity-Time Symmetry-Enabled Electromagnetic Sensors

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Progress In Electromagnetics Research B 2024年 105卷 107-121页

作者： Yang, Minye Ye, Zhilu Chen, Pai-Yen Erricolo, Danilo Department of Electrical and Computer Engineering University of Illinois Chicago ChicagoIL60607 United States State Key Laboratory for Manufacturing Systems Engineering Electronic Materials Research Laboratory Key Laboratory of the Ministry of Education School of Electronic Science and Engineering Xi’an Jiaotong University Shaanxi Xi’an710049 China State Key Laboratory for Manufacturing Systems Engineering The Key Laboratory of Biomedical Information Engineering of Ministry of Education Center for Mitochondrial Biology and Medicine School of Life Science and Technology International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology Xi’an Key Laboratory for Biomedical Testing and High-end Equipment Xi’an Jiaotong University Shaanxi Xi’an710049 China

Parity-time (PT) reversal symmetry, as a representative example in the field of non-Hermitian physics, has attracted widespread research interest in the past few years due to its extraordinary wave dynamics. PT symmetry enables unique spectral singularities including the exceptional point (EP) degeneracy where two or more eigenvalues and eigenvectors coalesce, as well as the coherent perfect absorber-laser (CPAL) point where laser and its time-reversal counterpart (i.e., coherent perfect absorber) can coexist at the same frequency. These singular points not only give rise to new physical phenomena but also provide new plausibility for building the next-generation sensors and detectors with unprecedented sensitivity. To date, investigations into EPs and CPAL points have unveiled their great potential in various sensing scenarios across a broad spectral range, spanning optics, photonics, electronics, and acoustics. In this review article, we will discuss ongoing developments of EP- and CPAL-based sensors composed of PT-synthetic structures and offer a glimpse into the future research directions in this emerging field. © (2024), (Electromagnetics Academy). All rights reserved.

关键词： Eigenvalues and eigenfunctions

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Boosting Monolayer Transition Metal Dichalcogenides Growth by Hydrogen-Free Ramping during Chemical Vapor Deposition

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nano Letters 2024年第27期24卷 8277-8286页

作者： Liu, Hongwei Zhang, Tianyi Wu, Peng Lee, Hae Won Liu, Zhenjing Tang, Tsz Wing Tang, Shin-Yi Kang, Ting Park, Ji-Hoon Wang, Jun Zhang, Kenan Zheng, Xudong Peng, Yu-Ren Chueh, Yu-Lun Liu, Yuan Palacios, Tomás Kong, Jing Luo, Zhengtang Department of Chemical and Biological Engineering Guangdong-Hong Kong-Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology William Mong Institute of Nano Science and Technology and Hong Kong Branch of Chinese National Engineering Research Center for Tissue Restoration and Reconstruction The Hong Kong University of Science and Technology Kowloon999077 Hong Kong Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology CambridgeMA02139 United States Department of Materials Science and Engineering Massachusetts Institute of Technology CambridgeMA02139 United States Department of Materials Science and Engineering National Tsing-Hua University Hsinchu30013 Taiwan Department of Materials Science and Engineering Korea University Seoul02841 Korea Republic of Key Laboratory for Micro-Nano Optoelectronic Devices of Ministry of Education School of Physics and Electronics Hunan University Changsha410082 China

The controlled vapor-phase synthesis of two-dimensional (2D) transition metal dichalcogenides (TMDs) is essential for functional applications. While chemical vapor deposition (CVD) techniques have been successful for transition metal sulfides, extending these methods to selenides and tellurides often faces challenges due to uncertain roles of hydrogen (H2) in their synthesis. Using CVD growth of MoSe2 as an example, this study illustrates the role of a H2-free environment during temperature ramping in suppressing the reduction of MoO3, which promotes effective vaporization and selenization of the Mo precursor to form MoSe2 monolayers with excellent crystal quality. As-synthesized MoSe2 monolayer-based field-effect transistors show excellent carrier mobility of up to 20.9 cm2/(V·s) with an on-off ratio of 7 × 107. This approach can be extended to other TMDs, such as WSe2, MoTe2, and MoSe2/WSe2 in-plane heterostructures. Our work provides a rational and facile approach to reproducibly synthesize high-quality TMD monolayers, facilitating their translation from laboratory to manufacturing. © 2024 American Chemical Society.

关键词： Monolayers

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Past, Present, and Future of CASS Educational Programs and Initiatives [Feature]

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IEEE Circuits and Systems Magazine 2024年第2期24卷 7-15页

作者： Rokhani, Fakhrul Zaman Zhang, Xinmiao Joshi, Rajiv V. Reis, Ricardo Grimblatt, Victor Tang, Kea-Tiong Li, Yongfu Amara, Amara Delgado-Restituto, Manuel Universiti Putra Malaysia Faculty of Engineering Department of Computer and Communication Systems Engineering Serdang43400 Malaysia The Ohio State University Department of Electrical and Computer Engineering ColumbusOH43210 United States IBM T. J. Watson Research Center Yorktown HeightsNY10598 United States Institute of Informatics Federal University of Rio Grande do Sul Porto Alegre90010-150 Brazil Synopsys California CA92037 United States National Tsing Hua University Department of Electrical Engineering Hsinchu300 Taiwan Shanghai Jiao Tong University Department of Micro and Nano Electronics Engineering Shanghai200240 China Paris75006 France Institute of Microelectronics of Sevilla Sevilla41092 Spain

The Circuits and Systems Society (CASS) places a strong emphasis on advancing education within its domain. Various educational programs and resources have contributed to the professional development of CASS members for more than 20 years now. A major transformation within the Society was started in 2021 with a clear vision to become a premier educational resource within circuits and systems areas of interest. This article provides a comprehensive review of flagship educational programs and past initiatives. Insights from the lessons learned and future trends in the education ecosystem guided society's strategies and frameworks for improving and developing new educational products and services. The benefits of learning with the CASS program are presented, highlighting the Society's deep commitment to serving the community at large in educational pursuit for years to come. © 2001-2012 IEEE.

关键词： engineering education

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Advances in magnetic-assisted triboelectric nanogenerators:structures,materials and self-sensing systems

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International Journal of Extreme manufacturing 2024年第5期6卷 162-188页

作者： Pengfan Wu Chenxi Zhao Endian Cui Shiwei Xu Tao Liu Fayang Wang Chengkuo Lee Xiaojing Mu Key Laboratory of Optoelectronic Technology&Systems Ministry of Education International R&D Center of Micro-Nano Systems and New Materials TechnologyChongqing UniversityChongqing 400044People’s Republic of China Department of Electrical and Computer Engineering National University of SingaporeSingaporeSingapore

Triboelectric nanogenerators(TENG),renowned for their remarkable capability to harness weak mechanical energy from the environment,have gained considerable attention owing to their cost-effectiveness,high output,and *** review provides a unique perspective by conducting a comprehensive and in-depth analysis of magnetically assisted TENGs that encompass structures,materials,and self-powered sensing *** systematically summarize the diverse functions of the magnetic assistance for TENGs,including system stiffness,components of the hybrid electromagnetic-triboelectric generator,transmission,and interaction *** the material domain,we review the incorporation of magnetic nano-composites materials,along with ferrofluid-based TENG and microstructure verification,which have also been summarized based on existing ***,we delve into the research progress on physical quantity sensing and human-machine interface in magnetic-assisted *** analysis highlights that magnetic assistance extends beyond the repulsive and suction forces under a magnetic field,thereby playing multifaceted roles in improving the output performance and environmental adaptability of the ***,we present the prevailing challenges and offer insights into the future trajectory of the magnetic-assisted TENGs development.

关键词： triboelectric nanogenerator magnetic assistance tuning structure controlled material preparation self-powered system

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Soft-lock drawing of super-aligned carbon nanotube bundles for nanometre electrical contacts (vol 17, pg 278, 2022)

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NATURE nanoTECHNOLOGY 2022年第3期17卷 331-331页

作者： Guo, Yunfan Shi, Enzheng Zhu, Jiadi Shen, Pin-Chun Wang, Jiangtao Lin, Yuxuan Mao, Yunwei Deng, Shibin Li, Baini Park, Ji-Hoon Lu, Ang-Yu Zhang, Shuchen Ji, Qingqing Li, Zhe Qiu, Chenguang Qiu, Song Li, Qingwen Dou, Letian Wu, Yue Zhang, Jin Palacios, Tomas Cao, Anyuan Kong, Jing Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology Cambridge MA USA Research Institute of Frontier Technology College of Micro-Nano Electronics Zhejiang University Hangzhou China Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province School of Engineering Westlake University Hangzhou China School of Materials Science and Engineering Peking University Beijing China Davidson School of Chemical Engineering Purdue University West Lafayette IN USA Taiwan Semiconductor Manufacturing Company (TSMC) Hsinchu Taiwan Department of Mechanical Engineering Massachusetts Institute of Technology Cambridge MA USA Department of Chemistry Purdue University West Lafayette IN USA College of Chemistry and Molecular Engineering Peking University Beijing China Department of Chemical and Biological Engineering Iowa State University Ames IA USA Key Laboratory for the Physics and Chemistry of Nanodevices and Department of Electronics Peking University Beijing China Division of Advanced Nano-Materials Suzhou Institute of Nano-Tech and Nano-Bionics Chinese Academy of Sciences Suzhou China

The assembly of single-walled carbon nanotubes (CNTs) into high-density horizontal arrays is strongly desired for practical applications, but challenges remain despite myriads of research efforts. Herein, we developed a non-destructive soft-lock drawing method to achieve ultraclean single-walled CNT arrays with a very high degree of alignment (angle standard deviation of ~0.03°). These arrays contained a large portion of nanometre-sized CNT bundles, yielding a high packing density (~400 µm−1) and high current carrying capacity (∼1.8 × 108 A cm−2). This alignment strategy can be generally extended to diverse substrates or sources of raw single-walled CNTs. Significantly, the assembled CNT bundles were used as nanometre electrical contacts of high-density monolayer molybdenum disulfide (MoS2) transistors, exhibiting high current density (~38 µA µm−1), low contact resistance (~1.6 kΩ µm), excellent device-to-device uniformity and highly reduced device areas (0.06 µm2 per device), demonstrating their potential for future electronic devices and advanced integration technologies.

关键词： Carbon nanotubes and fullerenes Materials Science general nanotechnology nanotechnology and microengineering

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Accidental bound states in the continuum in acoustic resonators with rotating obstacles

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Physical Review B 2024年第5期110卷 054201-054201页

作者： Yuhang Yin Qilin Duan Shan Zhu Jing Li Zuoti Xie Cheng-Wei Qiu Huanyang Chen Quantum Science Center of Guangdong–Hong Kong–Macao Greater Bay Area (Guangdong) Shenzhen 518045 China Department of Physics College of Physical Science and Technology and Pen-Tung Sah Institute of Micro-Nano Science and Technology Department of Electrical and Computer Engineering Department of Materials Science and Engineering MATEC

Bound states in the continuum (BICs) are embedded states in the radiation spectrum, which have garnered significant interest across various areas, including photonics and acoustics. In this work, by introducing rotational obstacles into acoustic resonators, we report a series of accidental BICs in coupled waveguide-resonator systems. We demonstrate that a general type of accidental BICs would emerge at specific rotating angles, supported by the mode symmetries at the boundary interface between resonators and attached waveguides. We further demonstrate that the presence or absence of accidental BICs is closely related to the geometric parameters of resonators and obstacles, and can be predicted by the mode evolution within closed resonators. Additionally, we show that two BICs of an individual mode could converge, merge, and vanish in a single resonator by changing the geometry parameters. We also explore the topological origins of these phenomena. Our study provides an efficient way to manipulate and engineer BICs through rotating obstacles in acoustic resonator systems.

关键词： Acoustic wave phenomena Bound states in the continuum Acoustic metamaterials Non-Hermitian systems Waveguides

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Characterization and Modeling of Non-Conducting RF Hot Carrier Stress in FinFETs

Characterization and Modeling of Non-Conducting RF Hot Carri...

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International Conference on Solid-State and Integrated Circuit Technology

作者： G. Niu X. Ding H. Zhang W. Wang K. Imura F. Dai Electrical and Computer Engineering Department Alabama Micro/Nano Electronics Science and Technology Center Auburn University Auburn AL USA Maxlinear Inc. Carlsbad CA USA

ISBN: (数字)9798350361834

ISBN: (纸本)9798350361841

A significant reliability concern in RF power amplifiers is non-conducting RF hot carrier stress. We present experimental characterization and lifetime modeling of non-conducting RF hot carrier stress in modern FinFETs and demonstrate the importance of near-threshold stress. The relationship between RF and DC stresses is examined, and the quasi-static approximation is discussed. Die-to-die threshold voltage variation makes the measurement and modeling of $V_{\text{ds}}$ dependence difficult. A solution using the source current is proposed and demonstrated.

关键词： Radio frequency Degradation Voltage measurement Hot carriers FinFETs Reliability Integrated circuit modeling Subthreshold current Stress Stress measurement

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