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Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework

International Journal of Production Research 2009年第15期47卷 4173-4199页

作者： Chen, Liang Ma, Mingda Jang, Shi-Shang Wang, David Shan-Hill Wang, Shuqing State Key Laboratory of Industrial Control Technology Institute of Advanced Process Control Hangzhou China Center for Control and Guidance Technology Harbin Institute of Technology Harbin China Department of Chemical Engineering National Tsing-Hua University Hsin-Chu Taiwan

The objective of this paper is to propose a universal methodology for performance assessment of run-to-run control in semiconductor manufacturing. The slope of the linear semiconductor process model is assumed to be known or subjected to mild plant/model mismatch. Based on an internal model control framework, analytical expressions of minimum variance performance (MVP) and best achievable performance (BAP) for a series of run-to-run control schemes are derived. In the methodology, closed-loop identification is utilised as the first step to estimate the noise dynamics via routine operating data, and numerical optimisation is employed as a second step to calculate the best achievable performance bounds of the run-to-run control loops. The validity of the methodology is justified by examples of performance assessment for EWMA control, double EWMA control and RLS-LT control, even under circumstances where the processes encounter model mismatch, metrology delay and more sophisticated noises. Several essential characteristics of run-to-run control are discovered by performance assessment, and valuable advice is offered to process engineers for improving the run-to-run control performance. Furthermore, a useful application example for online performance monitoring and optimal tuning of run-to-run controller demonstrates the advantage of the methodology.

关键词： Optimization

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A Study of a Gun-Turret Assembly in an Armored Tank using Model Predictive control

A Study of a Gun-Turret Assembly in an Armored Tank using Mo...

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2009 American control Conference (ACC 2009)

作者： Gautam Kumar Pradeep Y. Tiwari Vincent Marcopoli Mayuresh V. Kothare Chemical Process Modeling and Control Center Department of Chemical Engineering Lehigh University Bethlehem PA 18015 U.S.A. Process Dynamics and Optimization group Bayer Technology Services Americas 8500 W Bay Rd Baytown TX 77523 U.S.A. General Dynamics Land Systems Sterling Hts. MI 48310 U.S.A.

ISBN: (纸本)9781424445233

Operation of the gun/turret system in a military tank is limited by several constraints some of which are posed by obstacles existing on the vehicle's own platform. These mechanical constraints acting as hard constraints can cause serious damage to the whole assembly if violated. A control strategy developed for such a system must avoid possible collision of the gun/turret system with these obstacles. We propose to use a MPC based control strategy, due to its inherent ability to handle constraints, for the deck clearance problem and evaluate its performance under operating conditions for a linear model of the tank. Matlab~R based MPCtoolbox is used to set up the MPC calculations for the gun/turret system. Simulations are performed to investigate and compare the performance of the controller under various deck constraint limits. It is shown that MPC is effective in addressing both the stabilization and deck clearance objectives.

关键词： Maximum Allowable Concentration control strategy Tanks belted distributed model predictive control nonlinear model predictive control Constraint Model predictive control Predictive control linear models Addressing assemblies Operating conditions vehicle controllers

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Comparison of rotary cement kiln identified models

Comparison of rotary cement kiln identified models

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International Conference on control and Automation (ICCA)

作者： G. Noshirvani A. Fatehi B. Araabi M. Shirvani M. Azizi ACER Markaz Branch Arak Iran Advanced Process Automation & Control Research group Electrical Engineering Department K.N. Toosi University of Technology Tehran Iran Control and Intelligent Processing Center of Excellence Electrical and Computer Engineering Department University of Tehran Tehran Iran Chemical Engineering Department and member of Cement Research Center University of Science and Technology Tehran Iran Saveh Cement Company Saveh Iran

Rotary cement kiln is the main part of a cement plant that clinker is produced in it. Clinker is the main ingredient of cement. Continual and prolonged operation of rotary cement kiln is vital in cement factories. However, prolonged operation of the kiln is not possible and periodic repairs of the refractory lining would become necessary, due to non-linear phenomena existing in the kiln, such as sudden falls of coatings in the burning zone and probability of damages to the refractory materials during production. This is the basic reason behind the needs for a comprehensive model which is severely necessary for better control of this process. Such a model can be derived based on the mathematic analysis with consultation of expert operator experiences. In this paper both linear and nonlinear model are identified for rotary kiln of Saveh white cement factory. The linear model is introduced using Box-Jenkins structure. The results of the obtained model were satisfactory compared to some other linear models and can be used for designing adaptive or robust controllers. Also, nonlinear system identification via Neural Network technique is performed and its result was compared to linear models.

关键词： Kilns Production facilities Coatings Building materials process control Mathematical model Mathematics Programmable control Adaptive control Robust control

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Repetitive Model Predictive control using Linear Matrix Inequalities

Repetitive Model Predictive Control using Linear Matrix Ineq...

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2008 American control Conference (ACC), vol.4

作者： Pradeep Y. Tiwari Mayuresh V. Kothare Chemical Process Modeling and Control Center Department of Chemical Engineering Lehigh University Bethlehem PA USA

Repetitive systems can be characterized by two time variables, namely, the finite time within each repeating cycle and the cycle index, each embodying a distinct connotation of time. Conventional optimal control theory does not explicitly account for this two dimensional (2D) description of repetitive systems. We propose a new formulation for control of repetitive systems using Model Predictive control (MPC) that explicitly incorporates a 2D representation of the system. The proposed formulation uses a 2D Lyapunov function and the stability requirements are established along each time dimension of the system. The resulting controller synthesis problem is expressed in convex form using Linear Matrix Inequalities (LMIs). The approach allows explicit incorporation of input/output constraints in the controller design. Two examples illustrate the applicability of the proposed approach.

关键词： Predictive models Predictive control Linear matrix inequalities Radio control control systems control system synthesis Stability Economic forecasting chemical processes chemical industry

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Optimal scheduling with energy constraints

Optimal scheduling with energy constraints

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2008 AIChE Annual Meeting, AIChE 100

作者： Castro, Pedro Harjunkoski, Iiro Grossmann, Ignacio E. Department of Process Modeling and Simulation INETI Lisbon Portugal Corporate Research ABB Ladenburg Germany Dept. of Chemical Engineering Center for Advanced Process Decision-making Carnegie Mellon University 5000 Forbes Avenue Pittsburgh PA 15213 United States

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Model predictive control of cyclic systems using linear matrix inequalities

Model predictive control of cyclic systems using linear matr...

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2007 AIChE Annual Meeting

作者： Tiwari, Pradeep Y. Kothare, Mayuresh V. Chemical Process Modeling and Control Center Department of Chemical Engineering Lehigh University Bethlehem PA 18015 United States

ISBN: (纸本)9780816910229

Cyclic processes can be characterized by two time variables, viz, the time within a cycle and the cycle index, each carrying a distinct connotation of time. Conventional optimal control theory does not explicitly account for these two dimensions (2D) of time that characterize cyclic systems. In this paper, we study the control of cyclic process using Model Predictive control (MPC). The proposed approach uses a 2D Lyapunov function and the stability requirements are established along each time dimension of the system. The resulting controller synthesis problem is expressed in convex form using Linear Matrix Inequalities (LMIs). The approach allows incorporation of input/output constraints in the proposed 2D MPC framework. An example of a cyclic process is presented to establish the applicability of the proposed approach.

关键词： Model predictive control

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Multivariable Anti-Windup controller Synthesis incorporating Multiple Convex Constraints

Multivariable Anti-Windup Controller Synthesis incorporating...

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American control Conference (ACC)

作者： Pradeep Y. Tiwari Eric F. Mulder Mayuresh V. Kothare Chemical Process Modeling and Control Center Department of Chemical Engineering Lehigh University Bethlehem PA USA Exxon-Mobil Chemical Baytown TX USA

We study the problem of multivariable anti-windup controller synthesis that incorporates trade-offs between unconstrained linear performance and constrained anti- windup performance. In our previous work [13], we presented a framework for simultaneous design of a linear output feedback controller and a static anti-windup compensator using Linear Matrix Inequalities (LMIs). This framework deviated from the conventional two step paradigm of anti-windup by proposing a one-step synthesis while still maintaining the anti-windup structure. However, the work in [13] did not provide conclusive demonstration of the efficacy of this formulation through realistic practical examples. In this paper, we further study the framework in [13] and explicitly demonstrate its capability in providing effective constrained anti-windup controller performance for two benchmark problems, viz. a vibration isolation table and a multivariable model for the longitudinal dynamics of an F8 aircraft.

关键词： chemical processes chemical engineering Aircraft Design methodology process control Cities and towns Output feedback Linear feedback control systems Linear matrix inequalities Vibration control

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Robust synthesis of constrained linear state feedback using LMIs and polyhedral invariant sets

Robust synthesis of constrained linear state feedback using ...

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American control Conference (ACC)

作者： B. Pluymers M.V. Kothare J.A.K. Suykens B. De Moor Department of Electrical Engineering ESAT-SCD-SISTA Katholieke Universiteit Leuven Belgium Chemical Process Modeling and Control Research Center Lehigh University Bethlehem PA USA

This paper deals with the synthesis of linear feedback controllers for constrained discrete-time linear systems with polytopic uncertainty description. This problem was initially tackled using ellipsoidal robust invariant sets in the paper by Kothare (Kothare et al., Automatica, 1996) leading to an LMI-based optimization problem. The contribution of this paper is twofold. First the aforementioned method is extended to also take into account mixed state/input constraints and cross-terms between states and inputs in the objective function. Secondly, polyhedral invariant sets (Pluymers et al., ACC, 2005) are introduced in the synthesis algorithm in order to eliminate conservative constraint handling. This results in a provably more optimal feedback controller. The resulting method can either be used on-line in a receding horizon fashion to obtain a robust constrained controller or off-line in order to obtain a feedback controller with a guaranteed feasible region for use in dual-mode or other robust model-based predictive control algorithms. A numerical example is given to illustrate the new algorithm

关键词： Robustness State feedback Adaptive control control system synthesis Robust control Linear systems Uncertainty Predictive models Predictive control Prediction algorithms

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Static anti-windup controller synthesis using simultaneous convex design

Static anti-windup controller synthesis using simultaneous c...

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05AIChE: 2005 AIChE Annual Meeting and Fall Showcase

作者： Tiwari, Pradeep Y. Mulder, Eric F. Kotharel, Mayuresh V. Chemical Process Modeling and Control Center Department of Chemical Engineering Lehigh University Bethlehem PA 18015 United States ExxonMobil Chemical 5000 Bayway Drive Baytown TX 77520

We present a method for the synthesis of a control law which incorporates both a traditional linear output-feedback controller as well as a static anti-windup compensator. Unlike traditional anti-windup controller design in which the linear controller and anti-windup compensator are designed sequentially, our method synthesizes all controller parameters simultaneously, thus providing a priori account of the effects of saturation on the closed-loop dynamics. Moreover, we derive sufficient conditions for the quadratic stability and (possibly) multiple performance bounds on the closed-loop dynamics such that the entire synthesis is cast as an optimization problem over linear matrix inequalitics (LMIs).

关键词： Feedback control

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A time varying state space approach for sugar crystallization process modelling and monitoring

A time varying state space approach for sugar crystallizatio...

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作者： Simoglou, A. Georgieva, P. Martin, E.B. Morris, A.J. De Azevedo, S. Feyo Center for Process Analytics and Control Technology Merz Court University of Newcastle Newcastle upon Tyne NE1 7RU United Kingdom Department of Chemical Engineering Faculty of Engineering University of Porto R. Dr. Roberto Frias 4200-465 Porto Portugal Department of Electronics and Telecomunications University of Aveiro Campus Universitario de Santiago 3810-193 Aveiro Portugal

ISBN: (纸本)008045108X

The present paper contributes to the issues of batch process modelling and monitoring by proposing a time-varying state space (TVSS) model for the evaporative sugar crystallization industrial process. The study is focused on issues of on-line detection of changes in crystallization process operation, the early warning of process malfunctions and potential production failures;problems that have not been directly addressed by existing statistical monitoring schemes. The TVSS methodology is compared with current state-of-the-art techniques and the results obtained demonstrate the superior performance of the TVSS approach to successfully detect abnormal events and periods of bad operation. Copyright © 2005 IFAC.

关键词： Statistical process control

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