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ETCHING HIGH-ASPECT-RATIO (110) SILICON GROOVES IN CSOH

JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1995年第2期142卷 L23-L25页

作者： YAO, SM HESKETH, PJ MACRANDER, AT Microfabrication Applications Laboratory Department of Electrical Engineering and Computer Science University of Illinois at Chicago Chicago Illinois 60607 Advanced Photon Source Argonne National Laboratory Argonne Illinois 60439

The cross-sectional geometry produced by anisotropic etching high aspect ratio (height/width = 115) silicon grooves with CsOH was studied as a function of the solution concentration. At 50 weight percent (w/o) CsOH straight sidewalls are produced, but at 15 and 25 w/o re-entrant tapered profiles are produced. The etch rates are increased in the groove by 25-100% indicating diffusion effects. The etch rate of the surface was in agreement with previous studies of CsOH etching, but unable to predict the dimensional changes in the grooves.

关键词： Silicon

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Interactive shape metamorphosis 95

Interactive shape metamorphosis

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Proceedings of the 1995 symposium on Interactive 3D graphics

作者： David T. Chen Andrei State David Banks Department of Computer Science University of North Carolina at Chapel Hill Institute for Computer Applications in Science and Engineering Mail Stop 132C NASA Langley Research Center Hampton Virginia

ISBN: (纸本)9780897917360

Image metamorphoses (morphing) is a powerful and easy-to-use tool for generating new 2D images from existing 2D images. In recent years morphing has become popular as an artistic tool and is used extensively in the entertainment industry. In this paper we describe a new technique for controlled, feature-based metamorphosis of certain types of surfaces in 3-space; it applies well-understood 2D methods to produce shape metamorphosis between 3D models in a 2D parametric space. We also describe an interactive implementation on a parallel graphics multicomputer, which allows the user to define, modify and examine the 3D morphing process in real time.

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A study on degradation of spatial resolution in frequency-modulated continuous wave reflectometry due to nonlinear optical frequency sweep

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1995年第10期78卷 28-35页

作者： Wang, LT Iiyama, K Hayashi, K Faculty of Technology Kanazawa University Kanazawa Japan 920 Koichi liyama:received his B.E. M.E. and Dr. of Eng. degrees in Electronic Engineering all from Kanazawa University Kanazawa Japan in 1985 1987 and 1993 respectively. From 1987 to 1988 he worked at Yokogawa Hewlett-Packard Ltd. Since 1988 he has been working as a Research Associate in the Department of Electrical and Computer Engineering Kanazawa University and is now a Lecturer. His current research interest is fiber-optic sensors optical fiber science including Er-doped fibers optical waveguides and the optical reflectometry. Dr. liyama is a member of the IEEE and the Japan Society of Applied Physics. Members Ken-ichi Hayashi:received his B.E. degree in Electronic Engineering from Kanazawa University Kanazawa Japan in 1966 and his Dr. of Eng. degree from Nagoya University Nagoya Japan in 1977. Since 1966 he has been with the Department of Electronics Kanazawa University where he is now a Professor in the Department of Electrical and Computer Engineering. He is currently engaged in research on applications of Er-doped optical fibers fiber-optic sensors optical waveguides and optical reflectometry. Dr. Hayashi is a member of the SICE and the IEEE.

The degradation of the spatial resolution in frequency-modulated continuous wave (FMCW) reflectometry due to the nonlinearity in the optical frequency sweep are discussed both experimentally and theoretically. The response lag in the optical frequency change of a laser diode behind the injection current change was experimentally measured, showing that there were several time constants in the optical frequency response. The interference signals in the FMCW reflectometry were theoretically calculated by taking account of the response lag. From these calculations, the beat frequency becomes low just after the turning point of the optical frequency sweep;this is due to the response lag in the optical frequency response. As a result, the spectrum of the interference signal is spread out toward the low frequency region and spatial resolution is degraded. Moreover, the spatial resolution is seriously degraded with increasing the diagnosing distance due to the nonlinearity in the optical frequency sweep. The calculated results agree well with the measured results.

关键词： laser diode optical frequency sweep modulation reflectometry

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Undersea technologies in the former Soviet Union

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NAVAL ENGINEERS JOURNAL 1995年第6期107卷 85-92页

作者： DeHaemer, DJ Dr. Michael J. DeHaemer:is Director of the World Technology Evaluation Center and the Japanese Technology Evaluation Center at Loyola College in Baltimore. He has directed more than a dozen studies of technologies in foreign countries under the sponsorship of the National Science Foundation ARPA Departments of Energy and Commerce and other agencies. He has a continuing interest in assessing foreign technologies in comparison to the United States.—-On the faculty of the Sellinger School of Business at Loyola College Dr. DeHaemer is a former department chairman and an associate professor of information systems and decision sciences. He teaches the strategic use of information technology and human-computer interface design. His research includes user performance with automated speech recognition systems for computers and business applications of artificial intelligence. Dr. DeHaemer completed an earlier career as a submarine officer including command of a ballistic missile submarine. He holds a B.S. degree from the University of Notre Dame and a Master's degree in Operations Analysis from the Naval Postgraduate School. He has an M.B.A. an M.S. in Industrial Engineering and a Ph.D. in Management Information Systems from Rensselaer Polytechnic Institute.

A team of experts, assembled by the World Technology Evaluation Center, visited twenty-five locations in Russia and Ukraine to observe the state of undersea technologies. Academic sites, basic research institutes, industrial development laboratories, and oceanographic operating bases were visited. The report highlights specific technologies that support research submersibles;and critiques the strengths and weaknesses of the ocean technologies establishment. Russia and Ukraine were found to have a number of strengths, especially in test facilities, a large fleet of surface and submersible research vessels, and highly educated and qualified engineers and scientists. Although political and economic conditions need to be over-come, there is motivation for many cooperative commercial or research ventures with both government institutes and new private companies in Russia and Ukraine.

关键词： Ocean engineering

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Applying multimedia technology to undergraduate engineering laboratories

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computer applications in engineering Education 1995年第3期3卷 157-157页

作者： Elsherbeni, A. Tew, M. Mokaddem, A. Electrical Engineering Department University of Mississippi University Mississippi 38677 Atef Z. Elsherbeni:received an honorary BS degree in Electronics and Communications an honorary BS degree in Applied Physics and a Meng degree in Electrical Engineering all from Cairo University Egypt in 1976 1979 and 1982 respectively and a PhD degree in Electrical Engineering from Manitoba University Canada in 1987. From January to August 1987 he was a postdoctoral fellow at the Electrical Engineering Department University of Manitoba. He joined the faculty at the University of Mississippi in 1987 as an assistant professor and advanced to the rank of associate professor in 1991. His professional interests include microstrip transmission lines and antennas scattering and diffraction numerical techniques and computer applications for electromagnetic education. Dr. Elsherbeni is a senior member of IEEE and a member of Commission B of the International Union of Radio Science (URSI). His honorary memberships include the Electromagnetics Academy and the Scientific Sigma Xi Society. Mark D. Tew:obtained his BS in Electrical Engineering with highest honors in 1971 and an MS in Electrical Engineering in 1973 from the University of Mississippi. He attended the University of Illinois at Urbana-Champaign as a TRW Doctoral Fellow and received the PhD in 1979. He joined the University of Mississippi in 1979 and was appointed associate professor in 1986. His interests lie in improving undergraduate laboratories through the incorporation of computer-aided data acquisition and introduction of multimedia. He is a senior member of IEEE and member of several honorary societies.

This article presents efforts to improve the presentation of material in high frequency, microwave, and electronics laboratories using multimedia technology. A crowded undergraduate curriculum leaves little time to dwell on difficult concepts in these areas of study, yet the laboratory experience is enhanced by greater understanding. A moderate or small-sized electrical engineering department is well suited for a one-on-one approach to teaching where close faculty—student interaction serves to fill many student needs. Even in this environment, better visualization tools may increase learning by reinforcing material introduced in the classroom. This project uses multimedia to enhance instruction and presentation in the high frequency, microwave, and electronics laboratories.

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CONCURRENT LARGE-SIGNAL SIMULATION OF AN ACTIVE MICROSTRIP ANTENNA

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INTERNATIONAL JOURNAL OF NUMERICAL MODELLING-ELECTRONIC NETWORKS DEVICES AND FIELDS 1995年第1期8卷 3-12页

作者： MCDOWALL, DS FUSCO, VF High Frequency Electronics Laboratory. Department of Electrical and Electronic Engineering The Queen's University of Belfast Ashby Building Stranmillis Road Belfast BT9 5AH U.K. D. Stewart McDowall was born in Dublin Republic of Ireland in 1967. He received the M. Eng. degree in Electrical and Electronic Engineering from the Queen's University of Belfast in 1990. In the same year he was presented with a Distinction Award from the Departmnet of Education of Northern Ireland and he is currently pursuing his Ph.D. in the Microwave Research Group at Q.U.B. His principal research area is the electromagnetic field mapping of microwave systems using concurrent programming. He is an Associate Member of the Institute of Electrical Engineers. Vincent F. Fusco was educated at the Queens's University of Belfast where he obtained the degree of Ph.D. in 1982. He has worked as a research engineer on short-range radar and radio telemetry systems. Currently he is a reader in Microwave Communications in the School of Electrical engineering and Computer Science the Queen's University of Belfast. His current research interests include non-linear microwave circuit simulatino and concurrent programming techniques for electromagnetic field problems with particular emphasis on EMC applications. He has published numerous research papers in these areas. He is the author of the bookMicrowave Circuits Analysis and Computer Aided Design Prentice-Hall 1987. Dr Fusco is a Chartered Electrical Engineer and a Member of the Institute of Electrical Engineers.

This paper details the use of a circuit-based EM modelling technique combined with a harmonic balance simulator used to model the radiation from the microstrip bodies comprising an active antenna circuit. The modelling approach adopted for the planar bodies in the circuit will be shown to allow the use of concurrent algorithms in order to reduce overall computational time.

关键词： Microstrip antennas

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ANISOTROPIC ETCHING OF SILICON IN RUBIDIUM HYDROXIDE

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JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1994年第9期141卷 2493-2497页

作者： WANG, T SURVE, S HESKETH, PJ Microfabrication Applications Laboratory Department of Electrical Engineering and Computer Science University of Illinois at Chicago Illinois 60607

The etch rates and plane selectivity for single-crystal silicon anisotropic etching in aqueous rubidium hydroxide are reported. Silicon wafers of (100) and (110) orientation were etched in 25, 30, 40, and 50 weight percent (w/o) aqueous RbOH at 50, 60, 70, and 80-degrees-C. The activation energy, based on an Arrhenius equation, was 0.48 eV for the (100) and (110) planes. The etch rate ratio for the (110)/(100) planes was equal to 1.5 at 50 w/o, and 0.6 at 25 w/o. The plane selectivity is not a function of temperature. Silicon spheres, approximately 0.25 in. diam were etched to reveal fast etching high index {522}/{311} planes in the vicinity of the [100] direction.

关键词： Etching

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THIN GOLD FILM STRAIN-GAUGES

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JOURNAL OF VACUUM science & TECHNOLOGY A-VACUUM SURFACES AND FILMS 1994年第3期12卷 813-819页

作者： LI, CS HESKETH, PJ MACLAY, GJ Microfabrication Applications Laboratory Department of Electrical Engineering and Computer Science (M/C 154) The University of Illinois at Chicago Chicago Illinois 60607|c|

Gold thin films, of thickness 30, 60, 100, and 300 angstrom were studied for use as miniature strain gauges. The thin metal films were thermally evaporated onto silicon dioxide coated silicon wafers and patterned into strain gauges with dimensions of 100 mum x 70 mum and annealed at a maximum temperature of 400-degrees-C. The silicon substrate was cut into cantilever beams to calibrate the strain gauges by loading the beams. The impedance, Z, was measured over a frequency range from 5 kHz to 1 MHz. For the 30, 60, and 100 A thick films the magnitude of the impedance was typically 1 MOMEGA at 5 kHz and the gauge factor ([DELTA\Z\/\Z\]/epsilon) was 24-48 at small strain (epsilon < 2.8 X 10(-6)). The gauge factor was independent of frequency but decreased at larger strains. The 300 angstrom thick films were typically 110OMEGA with a gauge factor of 2.6. The conduction process for the island-like film was modeled with activated tunneling. The sensitivity [DELTA\Z\/\Z\]/epsilon versus strain response model included a contribution from the strain energy in the activated tunneling.

关键词： Strain gages

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Multiagent fault‐diagnosis expert system in power systems

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European Transactions on Electrical Power 1995年第5期5卷 341-347页

作者： Wang, J.P. Trécat, J. Dr. Jianping Wang is a doctor fellow in the Faculte Polytechnique de Mons in Belgium. His current research field is parallel processing applications in power systems. Dr. Wang obtained his BS degree from Southwest Jiaotong University in P.R. Chinain 1982. From 1982 to 1990 he was appointed as an assistant lecturer. lecturer and associate professor respectively in the electrical engineering department of Southwest Jiaotong University. He obtained his Ph.D in the FacultC Polytechnique de Mons in July of 1993. (BD Dolez 3 1 FPMS B-7000 Mons Belgium T +32-65/37 41 87 Fax +32-65/37 43 00) Professor J. Trécat is a director in the power system laboratory in the Faculty Polytechnique de Mons. He obtained his Ph.D in the University of Manchester Institute of Science and Technology(UM1ST) in U.K. in 1970. He has been working in the fields of power system automation artificial intelligence application and computer vision in the Facult6 Polytechnique de Mons since 1970. He is a senior member of IEEE and he has made much contribution both in electrical engineering education and research. (BD Dolez 3 I FPMS B-7000 Mons T +32-651374185. Fax +32-6513743 00)

In order to solve the speed problem and shallow reasoning problem met in current research in fault diagnosis expert system, this paper presents a model based parallel fault diagnosis expert system for energy management systems (EMS). The Petri net model, which corresponds to the relationship between power system components and their protection systems, has been used for the inference in fault diagnosis. A multiagent parallel processing expert system, which is based on five transputers in Sun workstation, has been built for fault diagnosis purposes. The test results show that this expert system is not only fast but also has better performances. Copyright © 1995 John Wiley & Sons, Ltd.

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Toward a neuroscope: A real-time imaging system for evaluation of brain function

Toward a neuroscope: A real-time imaging system for evaluati...

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The 1994 1st IEEE International Conference on Image Processing

作者： Potter, C.S. Liang, Zhi-Pei Gregory, C.D. Morris, H.D. Lauterbur, P.C. Biomedical Magnetic Resonance Laboratory National Center for Supercomputing Applications Beckman Institute for Advanced Science and Technology Department of Electrical and Computer Engineering University of Illinois Urbana-ChampaignIL United States

Magnetic resonance imaging and spectroscopy techniques are now being used to detect changes in blood flow, volume and oxygenation level associated with brain function. The authors describe a prototype system, called a neuroscope, that provides a real-time acquisition, control and processing environment for functional brain studies. Preliminary experiments have shown that oxygenation sensitive changes in the rat can be captured in real-time. When fully developed, this system should prove very useful for mapping the spatial and temporal patterns of functional brain activity of humans. © 1994 IEEE.

关键词： Oxygenation

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