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Proposal of a novel peeling of nano-particle (PNP) process for localized material removal on a hard material surface by controllable magnetic fields 22

Proposal of a novel peeling of nano-particle (PNP) process f...

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22nd International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2022

作者： Permpatdechakul, Thitipat Khajornrungruang, Panart Suzuki, Keisuke Kutomi, Shotaro Graduate School of Computer Science and System Engineering Mechanical Information Science and Technology Course Kyushu Institute of Technology Fukuoka Japan Department of Intelligent and Control Systems Avanced Mechanical Division Kyushu Institute of Technology Fukuoka Japan School of Computer Science and System Engineering Advanced Mechanical Course Kyushu Institute of Technology Fukuoka Japan

ISBN: (纸本)9781998999118

This article proposes a novel Peeling of Nano-Particle (PNP) process to locally remove material on a hard material surface using controllable magnetic fields. Fe3O4 particles in the size range of 50-100 nm in aqueous solution (pH value 11 adjusted by KOH) were magnetically controlled to adhere and remove from a 4H-SiC surface by two electromagnetic coils, which were sandwiched between the substrate. The particle controlling phenomenon on the surface was experimentally observed and verified by our developed apparatus applying an evanescent field. According to the results, particles could be controlled to approach and remove from the substrate surface with 12mT of magnetic field at the selective area on the substrate surface to realise the proposed PNP process. © European Society for Precision engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Magnetic fields

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Optical Evanescent Field for Direct Observation of Sub-100nm Particle Motion on Glass Surface 1

Optical Evanescent Field for Direct Observation of Sub-100nm...

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1st International Conference on Robotics, engineering, science, and Technology, RESTCON 2024

作者： Khajornrungruang, Panart Permpatdechakul, Thitipat Suzuki, Keisuke Blattler, Aran Terayama, Yutaka Goto, Daiki Phaisalpanumas, Pipat Bun-Athuek, Natthaphon Phunopas, Amornphun Kyushu Institute of Technology Iizuka-Shi Mechanical Science and Technology Division Dept. of Intelligent and Control System Faculty of Computer Science and Systems Engineering Fukuoka Japan Kyushu Institute of Technology Iizuka-Shi Mechanical Information Science and Technology Division Dept. of Interdisciplinary Informatics Graduate School of Computer Science and Systems Engineering Fukuoka Japan King Mongkut's University of Technology North Bangkok Bangsue Faculty of Engineering Dept. of Production and Robotics Engineering Bangkok Thailand Kyushu Institute of Technology Iizuka-Shi Mechanical Science and Technology Course Dept. of Intelligent and Control System Graduate School of Computer Science and Systems Engineering Fukuoka Japan King Mongkut's University of Technology North Bangkok Bangsue Faculty of Engineering Dept. of Industiral Engineering Bangkok Thailand King Mongkut's University of Technology North Bangkok Bangsue College of Industrial Technology Dept. of Mechanical Engineering Technology Bangkok Thailand

ISBN: (纸本)9798350348842

To directly investigate the dynamic nanoscale phenomenon on the surface being processed in wet conditions such as precision polishing, and cleaning in semiconductor industrial, an optical method for visualization and observation of each sub-100 nm sized particle that is moving on an interface such as a silica glass surface by applying an evanescent field have been proposing. Subsequently, we developed an experimental apparatus equipped with an optical microscopy system for verifying the moving particle observation method in a laboratory scale. This article introduces some experimentally direct observation results of duplicated wet processes. © 2024 IEEE.

关键词： Visualization

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Absolute longitudinal distance measurement verification of a standard polystyrene nanoparticle near a surface in water by means of multi-wavelength evanescent field 22

Absolute longitudinal distance measurement verification of a...

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22nd International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2022

作者： Blattler, Aran Khajornrungruang, Panart Suzuki, Keisuke Baba, Akiyoshi Goto, Daiki Graduate School of Computer Science and System Engineering Mechanical Information Science and Technology Course Kyushu Institute of Technology Fukuoka Japan Department of Intelligent and Control Systems Advanced Mechanical Division Kyushu Institute of Technology Fukuoka Japan Center of Microelectronic System Kyushu Institute of Technology Fukuoka Japan School of Computer Science and System Engineering Advanced Mechanical Course Kyushu Institute of Technology Fukuoka Japan

ISBN: (纸本)9781998999118

In the wet semiconductor process, abrasive nanoparticles are widely used in the chemical mechanical polishing (CMP) process to polish wafer surfaces for high planarization. During polishing, nanoparticles move with a high-speed three-dimensional (3D) position in the solution. In the 3D particles's moving positions, Z is a perpendicular longitudinal distance between the surface to the nanoparticle that plays a significant role in polishing, which could not be measured by general microscopy without longitudinal scanning. To understand nanoparticle phenomena near-surface, we have proposed and developed the apparatus with real-time fastmotion tracking on optical multi-wavelength evanescent fields microscopy to measure the 3D motion of the nanoparticle in water without scanning. In euspen's 2020, we could verify the relative distance ?Z of nanoparticles in water, but the absolute distance Z is unknown yet. In this manuscript, we have therefore developed an invisible nano-step height in water to verify the absolute height Z of an individual nanoparticle. The invisible nano-step height in water is made from an optical resin with a refractive index of 1.35 that is close to a refractive index of water to avoid unnecessary light during experimental verification. The nano-step height was less than 100 nm on a glass surface, fabricated using nanoimprint lithography. Polystyrene f100 nm standard particles in water were used to verify the height Z. The results of height Z of nanoparticles could be measured less than 100 nm with the measurement uncertainty ±10 nm (2s), which is related to the interferometer result of the nano-step height. © European Society for Precision engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Nanoparticles

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Optical Evanescent Field for Direct Observation of Sub-100nm Particle Motion on Glass Surface

Optical Evanescent Field for Direct Observation of Sub-100nm...

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Robotics, engineering, science, and Technology (RESTCON), International Conference on

作者： Panart Khajornrungruang Thitipat Permpatdechakul Keisuke Suzuki Aran Blattler Yutaka Terayama Daiki Goto Pipat Phaisalpanumas Natthaphon Bun-Athuek Amornphun Phunopas Dept. of Intelligent and Control System Faculty of Computer Science and Systems Engineering Mechanical Science and Technology Division Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Interdisciplinary Informatics Graduate School of Computer Science and Systems Engineering Mechanical Information Science and Technology Division Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Production and Robotics Engineering Faculty of Engineering King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand Dept. of Intelligent and Control System Graduate School of Computer Science and Systems Engineering Mechanical Science and Technology Course Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Industiral Engineering Faculty of Engineering King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand Dept. of Mechanical Engineering Technology College of Industrial Technology King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand

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A study for Motion-Planning Method Resident-tracking Robot based on Reinforcement Learning 30

A study for Motion-Planning Method Resident-tracking Robot b...

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30th International Symposium on Micro-NanoMechatronics and Human science, MHS 2019

作者： Sugimoto, Masashi Yoshioka, Takashi Ishii, Kohei Nonaka, Shogo Deguchi, Mikio Tsuzuki, Shinji Hiran, Masatsugu Electrical and Electronic Engineering Course Ehime University Division of Electrical and Electronic Engineering and Computer Science 3 Bunkyo-cho Matsuyama City Ehime Pref.790-8577 Japan National Institute of Technology Kagawa College Department of Electrical and Computer Engineering 355 Chokushi-cho Takamatsu City Kagawa Pref.761-8058 Japan National Institute of Technology Kagawa College. Department of Electro-Mechanical Systems Engineering 355 Chokushi-cho Takamatsu City Kagawa Pref.761-8058 Japan National Institute of Technology Tsuyama College Department of Integrated Science and Technology 624-1 Numa Tsuyama City Okayama Pref.790-8577 Japan National Institute of Technology Niihama College Department of Electronics and Control Engineering 7-1 Yakumo-cho Niihama City Ehime Pref.790-8580 Japan National Institute of Technology Niihama College Department of Electrical Engineering and Information Science 7-1 Yakumo-cho Niihama City Ehime Pref.792-8580 Japan

ISBN: (纸本)9781728126746

Among the advanced countries, especially in Japan, we are facing on the decreasing birthrate and aging population ahead of the world. In recent, population of single-living elder, and elderly people have been taking care by same-aged person, have been actualized. Unfortunately, the population of caregivers is decreasing according to year. In this situation, the Elderly Person Watching System has been focused on. Especially, Robotics, Internet of Things, and Artificial Intelligence technology have been having high affinity with this system. In this study, firstly, the person watching robot system will be developed. In detail, in this paper, the flexible-analyze system will be focused on. In the algorithm, a resident-tracking task and an energy-saving task are holding. The whole tasks are working based on Reinforcement Learning. Thus, the behavior algorithm of the person watching robot system will be developed. In detail, in this paper, the flexible-analyze system will be focused on. In the algorithm, a resident-tracking task and an energy-saving task are holding. From the verification experiment, the simulation results showed the proposed method has been acquired actions to switch the desired task. © 2019 IEEE.

关键词： Reinforcement learning

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A technological platform for the teaching of control engineering

A technological platform for the teaching of control enginee...

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2010 IEEE Education engineering Conference, EDUCON 2010

作者： Carvalho, Adelson S. Barone, Dante Zaro, Milton Graduate Program in Computer Science in Education Universidade Federal do Rio Grande do Sul Porto Alegre-RS Brazil Control Engineering and Automation Superior Course Instituto Federal Fluminense Campos Dos Goytacazes-RJ Brazil

ISBN: (纸本)9781424465682

This paper presents a technology platform as a resource for the teaching of control engineering. The platform in question combines the educational potential of software of design and simulation of control systems - MATLAB ® - and the connection between this software and a pilot distillation column. The research hypothesis is that the use of technology platforms such as this helps to develop aspects not only stimulated with simulation. Therefore, an experiment based on the constructivist and social-interactionist theory has been designed to detect student development and to capture their impressions of the platform. The results are presented as graphs and impression reports of the teacher. © 2010 IEEE.

关键词： Teaching

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Human systems integration and advanced technology in engineering department workload and manpower reduction

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NAVAL ENGINEERS JOURNAL 2003年第1期115卷 57-65页

作者： Lively, KA Seman, AJ Kirkpatrick, M KENNETH A. LIVELY graduated from the University of Colorado with a BS in applied mathematics and an MS in mathematics in 1976 and from the Massachusetts Institute of Technology with an MS in electrical engineering and the degree ocean engineer in naval architecture and marine engineering in 1984. He retired from the U.S. Navy in 1989 after 23 years of service. Assignments included electrical officer on the USS Constellation (CV 64) project engineer for the DDG 51 machinery control system (NAVSEA) and DDG 51 Technical Director (NAVSEA). He was vice president of the PDI Division of Bird-Johnson Company from July 1989 to November 1998 where he managed various gas turbine and machinery controls related development projects. He joined Anteon Corporation's Systems Engineering Group as senior controls engineer in December 1998 where he provided technical support to the integrated power systems program (NAVSEA PMS 510) and managed the Office of Naval Research Afloat Laboratory. DR. MARK KIRKPATRICK is currently an independent consultant in human factors and work-load/manning analysis and modeling. He holds a Ph.D. degree in experimental psychology from The Ohio State University and has 34 years of experience in applied human factors. From 1982 through 2000 Dr. Kirkpatrick served as the senior vice president of Carlow International. Prior to joining Carlow in 1982 Dr. Kirkpatrick served as a member of the technical staff at North American Rockwell's Missiles Division and as a project director and vice president for Essex Corporation. His areas of expertise include workload simulation task analysis operator-in-the-loop simulation human performance experimentation statistical analysis and human factors T&E. He has directed and/or participated in human factors projects for the U.S. Navy U.S. Army NASA Department of Transportation the U.S. Nuclear Regulatory Commission and private industry. ANTHONY J. SEMAN III is the technical manager for the reduced ship's crew by virtual presence (RSVP) advanced technology d

Aboard current ships, such as the DDG 51, engineering control and damage control activities are manpower intensive. It is anticipated that, for future combatants, the workload demand arising from operation of systems under conditions of normal steaming and during casualty response will need to be markedly reduced via automated monitoring, autonomous control, and other technology initiatives. Current DDG 51 class ships can be considered as a manpower baseline and under Condition III typical engineering control involves seven to eight watchstanders at manned stations in the Central control Station, the engine rooms and other machinery spaces. In contrast to this manning level, initiatives such as DD 21 and the integrated engineering plant (IEP) envision a partnership between the operator and the automation system, with more and more of the operator's functions being shifted to the automation system as manning levels decrease. This paper describes some human systems integration studies of workload demand reduction and, consequently, manning reduction that can be achieved due to application of several advanced technology concepts. Advanced system concept studies in relation to workload demand are described and reviewed including. Piecemeal applications of diverse automation and remote control technology concepts to selected high driver tasks in current DDG 51 activities. Development of the reduced ship's crew by virtual presence system that will provide automated monitoring and display to operators of machinery health, compartment conditions, and personnel health. The IEP envisions the machinery control system as a provider of resources that are used by various consumers around the ship. Resource needs and consumer priorities are at all times dependent upon the ship's current mission and the availability of equipment pawnbrokers.

关键词： Naval warfare

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Definition of evaluation criteria for system development acquisition modeling and simulation

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NAVAL ENGINEERS JOURNAL 1999年第1期111卷 55-64页

作者： Leite, MJ Mensh, DR Michael J. Leite:is a Principal Engineer with PRC Inc. a division of Litton Industries. He supports combat system engineering for theater air and missile defense. His other tasks have included the command and control for the AEGIS shipbuilding program systems engineering for the 21st Century Surface Combatant combat system survivability and the development of NATO standardization agreements for naval ordnance. He was previously a Senior Engineer with San Diego Gas & Electric with responsibility for its energy application and lighting programs. Prior to joining SDG&E Mr. Leite was a commissioned officer in the U.S. Navy where he served in operations and engineering assignments. Following active duty he accepted a Naval Reserve commission and has retired with the rank of Captain. His assignments included command operational and engineering tours. Mr. Leite has also served as an expert witness in admiralty and engineering matters. He is a gradate of the University of California Berkeley with a Bachelor of Science Degree in Engineering and also holds a Masters Degree in Business Administration from National University in San Diego. Mr. Leite is a Registered Professional Engineer in the States of California and Minnesota. Mr. Leite is a member of ASNE ASCE MORS the Illuminating Engineering Society and the U.S. Naval institute. Dennis Roy Mensh:is a Senior Engineer with PRC Inc. a division of Litton Industries in Crystal City VA where he supports modeling and simulation tasking for combat systems. He received BS and MS degrees in applied Physics from Lopola College in Baltimore MD and the American University in Washington DC. He has also completed the course work towards a Ph.D. degree in computer science specializing in the fields of Operations Reseurch Anabsis Systems Analysis and Computer Modeling and Simulation. Previously he was employed at the White Oak Laboratory of the Naval Surface Warfare Carter in Silver Spring MD where he worked in the areas of naval sensor and weapon system analysis

This paper defines, develops and examines a set of generic analysis tools that can be applied to Models and Simulations at the Systems engineering level of fidelity. The tools examine the performance and effectiveness of Sensors;Weapons;and Battle Management, Command, control, Communications, computers, and Intelligence ((BMCI)-I-4) systems and equipment. The Measures of Performance (MOPs), Measures of Effectiveness (MOEs) and Measures of Force Effectiveness (MOFEs) were extracted from the Modular Command and control Structure Paradigm which was developed at the Naval Postgraduate School. The paradigm provides for the development of evaluation criteria (MOPs, MOEs, and MOFEs) in a framework that ensures the traceability of system performance and effectiveness to the system operational requirements as specified in the Operational Requirements Document (ORD). Also, the analysis tools provide insight and valid estimates of numerical measures of the defined system functionality threads, which represent the system's operational requirements as specified in the ORD. The tools are directly transferrable and applicable to test and evaluation exercise events which are conducted in support of the development and acquisition of systems and equipment. Once the levels of system performance have been defined, the Paradigm generates a quantitative database that becomes a useful tool in system tradeoffs and selection. Once the alternative system suites have been defined, the suites can be analyzed in terms of system functionality threads and their corresponding performance capabilities versus cost.

关键词： Naval vessels

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An interactive analysis of large scale multi-spectral images using a Hilbert curve

An interactive analysis of large scale multi-spectral images...

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IEEE International Symposium on Geoscience and Remote Sensing (IGARSS)

作者： M. Niimi S. Kamata E. Kawaguchi Computer Science and Control Engineering Course Nagasaki Institute of Applied Science Nagasaki Japan Faculty of Engineering Kyushu Institute of Technology South Korea

There have been some new developments of an interactive analysis for the multi-spectral images. Recently the authors have proposed an interactive analysis method for classification using a Hilbert curve which is a one-to-one mapping and takes a neighborhood between N-dimensional space and one-dimensional space into consideration. In order to analyze large scale multi-spectral images, the authors divide a large scale image into subimages which can be analyzed using their proposed method. A problem is that after classifying one of the subimages, how they classify the rest of the subimages using this result effectively. They present a solution of this problem using a tree structure expression. They assign a reliability measure to each pixels on the rest. The reliability measure is based on a distance from a center of a cluster, and the center is considered occurrence information. For the low reliable data, they apply their interactive analysis method for classification again. In the experiment using a LANDSAT image data, they confirmed the effectiveness of the reliability measure because category boundaries on the rest have lower reliability.

关键词： Image analysis Large-scale systems Multispectral imaging Remote sensing Space technology Satellites Hypercubes computer science control engineering Displays

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A multi-temporal classification of multi-spectral images using a neural network 12

A multi-temporal classification of multi-spectral images usi...

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12th IAPR International Conference on Pattern Recognition - Conference B: Pattern Recognition and Neural Networks, ICPR 1994

作者： Kamata, Sei-Ichiro Niimi, Michiharu Kawaguchi, Eiji Dept. of Computer Engineering Kyushu Institute of Technology Kitakyushu804 Japan Computer Science and Control Engr. Course Nagasaki Institute of Applied Science Nagasaki851-01 Japan

ISBN: (纸本)0818662700

The classification of remotely sensed multispectral data using classical statistical methods has been worked on for several decades. Recently there have been many new developments in neural network (NN) research, and many new applications have been studied. It is well known that NN approaches have the ability to classify without assuming a distribution. We have proposed an NN model to combine the spectral and spacial information of LANDSAT TM images. In this paper, we apply the NN approach with a normalization method to classify multi-temporal LANDSAT TM images in order to investigate the robustness of our approach. From our experiments, we confirmed that our approach is more effective for the classification of multi-temporal data than the original NN approach and maximum likelihood approach. © 1994 IEEE.

关键词： Maximum likelihood

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