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Proposal of a novel peeling of nano-particle (PNP) process for localized material removal on a hard material surface by controllable magnetic fields 22

Proposal of a novel peeling of nano-particle (PNP) process f...

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22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022

作者： Permpatdechakul, Thitipat Khajornrungruang, Panart Suzuki, Keisuke Kutomi, Shotaro Graduate School of Computer Science and System Engineering Mechanical Information Science and Technology Course Kyushu Institute of Technology Fukuoka Japan Department of Intelligent and Control Systems Avanced Mechanical Division Kyushu Institute of Technology Fukuoka Japan School of Computer Science and System Engineering Advanced Mechanical Course Kyushu Institute of Technology Fukuoka Japan

ISBN: (纸本)9781998999118

This article proposes a novel Peeling of Nano-Particle (PNP) process to locally remove material on a hard material surface using controllable magnetic fields. Fe3O4 particles in the size range of 50-100 nm in aqueous solution (pH value 11 adjusted by KOH) were magnetically controlled to adhere and remove from a 4H-SiC surface by two electromagnetic coils, which were sandwiched between the substrate. The particle controlling phenomenon on the surface was experimentally observed and verified by our developed apparatus applying an evanescent field. According to the results, particles could be controlled to approach and remove from the substrate surface with 12mT of magnetic field at the selective area on the substrate surface to realise the proposed PNP process. © European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Magnetic fields

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Absolute longitudinal distance measurement verification of a standard polystyrene nanoparticle near a surface in water by means of multi-wavelength evanescent field 22

Absolute longitudinal distance measurement verification of a...

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22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022

作者： Blattler, Aran Khajornrungruang, Panart Suzuki, Keisuke Baba, Akiyoshi Goto, Daiki Graduate School of Computer Science and System Engineering Mechanical Information Science and Technology Course Kyushu Institute of Technology Fukuoka Japan Department of Intelligent and Control Systems Advanced Mechanical Division Kyushu Institute of Technology Fukuoka Japan Center of Microelectronic System Kyushu Institute of Technology Fukuoka Japan School of Computer Science and System Engineering Advanced Mechanical Course Kyushu Institute of Technology Fukuoka Japan

ISBN: (纸本)9781998999118

In the wet semiconductor process, abrasive nanoparticles are widely used in the chemical mechanical polishing (CMP) process to polish wafer surfaces for high planarization. During polishing, nanoparticles move with a high-speed three-dimensional (3D) position in the solution. In the 3D particles's moving positions, Z is a perpendicular longitudinal distance between the surface to the nanoparticle that plays a significant role in polishing, which could not be measured by general microscopy without longitudinal scanning. To understand nanoparticle phenomena near-surface, we have proposed and developed the apparatus with real-time fastmotion tracking on optical multi-wavelength evanescent fields microscopy to measure the 3D motion of the nanoparticle in water without scanning. In euspen's 2020, we could verify the relative distance ?Z of nanoparticles in water, but the absolute distance Z is unknown yet. In this manuscript, we have therefore developed an invisible nano-step height in water to verify the absolute height Z of an individual nanoparticle. The invisible nano-step height in water is made from an optical resin with a refractive index of 1.35 that is close to a refractive index of water to avoid unnecessary light during experimental verification. The nano-step height was less than 100 nm on a glass surface, fabricated using nanoimprint lithography. Polystyrene f100 nm standard particles in water were used to verify the height Z. The results of height Z of nanoparticles could be measured less than 100 nm with the measurement uncertainty ±10 nm (2s), which is related to the interferometer result of the nano-step height. © European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Nanoparticles

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An attention mechanism extension of automatic HTML generation from web page design images

IEEJ Transactions on Electronics, Information and Systems

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IEEJ Transactions on Electronics, Information and systems 2020年第12期140卷 1393-1401页

作者： Chinen, Hiroki Ohki, Hidehiro Gyohten, Keiji Takami, Toshiya Computer Science and Intelligent System Course Graduate School of Engineering Oita University 700 Dannoharu Oita870-1192 Japan

The purpose of this study is to improve the accuracy of automatic HTML generation from web page design images. pix2code is the state of art in this field. It is consist of design image learning part by CNN and HTML learning part by LSTM. We propose three improvements of adding a word embedding layer, applying VGG16 fine tuning to CNN, replacing LSTM to Bidirectional LSTM or GRU, and introducing attention mechanism. In the experiment, we employed a conventional data set which was used in pix2code and evaluated by a standard natural language generation metric called BLEU. As the results, the one of proposed models that contained the word embedding layer and the attention mechanism scored the accuracy of 99%. It overcomes the result of state of art scored 88%. © 2020 The Institute of Electrical Engineers of Japan.

关键词： HTML

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Optical Evanescent Field for Direct Observation of Sub-100nm Particle Motion on Glass Surface 1

Optical Evanescent Field for Direct Observation of Sub-100nm...

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1st International Conference on Robotics, Engineering, science, and Technology, RESTCON 2024

作者： Khajornrungruang, Panart Permpatdechakul, Thitipat Suzuki, Keisuke Blattler, Aran Terayama, Yutaka Goto, Daiki Phaisalpanumas, Pipat Bun-Athuek, Natthaphon Phunopas, Amornphun Kyushu Institute of Technology Iizuka-Shi Mechanical Science and Technology Division Dept. of Intelligent and Control System Faculty of Computer Science and Systems Engineering Fukuoka Japan Kyushu Institute of Technology Iizuka-Shi Mechanical Information Science and Technology Division Dept. of Interdisciplinary Informatics Graduate School of Computer Science and Systems Engineering Fukuoka Japan King Mongkut's University of Technology North Bangkok Bangsue Faculty of Engineering Dept. of Production and Robotics Engineering Bangkok Thailand Kyushu Institute of Technology Iizuka-Shi Mechanical Science and Technology Course Dept. of Intelligent and Control System Graduate School of Computer Science and Systems Engineering Fukuoka Japan King Mongkut's University of Technology North Bangkok Bangsue Faculty of Engineering Dept. of Industiral Engineering Bangkok Thailand King Mongkut's University of Technology North Bangkok Bangsue College of Industrial Technology Dept. of Mechanical Engineering Technology Bangkok Thailand

ISBN: (纸本)9798350348842

To directly investigate the dynamic nanoscale phenomenon on the surface being processed in wet conditions such as precision polishing, and cleaning in semiconductor industrial, an optical method for visualization and observation of each sub-100 nm sized particle that is moving on an interface such as a silica glass surface by applying an evanescent field have been proposing. Subsequently, we developed an experimental apparatus equipped with an optical microscopy system for verifying the moving particle observation method in a laboratory scale. This article introduces some experimentally direct observation results of duplicated wet processes. © 2024 IEEE.

关键词： Visualization

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Robot Visual Place Recognition Method Based on Scan-Descriptors and Optimization Algorithms

Research Square

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Research Square 2024年

作者： Liu, Yu Ye, Minying Zhao, Jinwei Jin, Yongze Shangguan, Anqi Liang, Jonathan Tay Yu School of computer science and engineering Xi' an University of Technology Shannxi Xi’an710048 China Human and Artificial Intelligent System Course Graduate School of Engineering The University of Fukui Fukui910-8507 Japan School of Automation and Information Engineering Xi' an University of Technology Shannxi Xi’an710048 China

Visual place recognition using 3D lidar in robotics is a popular research topic. Feature representation descriptors, such as scan-context descriptors, which are 2D descriptors obtained from 3D point clouds, are one of the research directions with great in-depth research value. This paper proposes a new method to improve the robot visual place recognition method based on scan-context descriptors. Our approach focuses on using a combination of loss functions and optimizers to improve the accuracy and robustness of the recognition system. Specifically, we introduce a custom loss function that encourages the network to learn more discriminative features and a Heun optimizer that enables faster and more stable convergence during training. To evaluate the effectiveness of our method, we conduct experiments on the NCLT benchmark dataset. The results show that our method outperforms some existing methods in terms of recognition accuracy and computational efficiency. Our proposed method provides a promising solution for improving robot place recognition, which has significant implications for a wide range of robotic applications, including autonomous navigation, mapping, and localization. © 2024, CC BY.

关键词： Robots

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Optical Evanescent Field for Direct Observation of Sub-100nm Particle Motion on Glass Surface

Optical Evanescent Field for Direct Observation of Sub-100nm...

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Robotics, Engineering, science, and Technology (RESTCON), International Conference on

作者： Panart Khajornrungruang Thitipat Permpatdechakul Keisuke Suzuki Aran Blattler Yutaka Terayama Daiki Goto Pipat Phaisalpanumas Natthaphon Bun-Athuek Amornphun Phunopas Dept. of Intelligent and Control System Faculty of Computer Science and Systems Engineering Mechanical Science and Technology Division Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Interdisciplinary Informatics Graduate School of Computer Science and Systems Engineering Mechanical Information Science and Technology Division Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Production and Robotics Engineering Faculty of Engineering King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand Dept. of Intelligent and Control System Graduate School of Computer Science and Systems Engineering Mechanical Science and Technology Course Kyushu Institute of Technology Iizuka-Shi Fukuoka Japan Dept. of Industiral Engineering Faculty of Engineering King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand Dept. of Mechanical Engineering Technology College of Industrial Technology King Mongkut’s University of Technology North Bangkok Bangsue Bangkok Thailand

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