检索结果-内蒙古大学图书馆

C4F6 Etching Characteristics for High-Aspect-Ratio Etching of SiO2 Films Using an Inductively Coupled Plasma Etching System With Low-Frequency Bias Power

引用

Plasma Processes and Polymers 2025年第6期22卷

作者： Wei, Jiachen Woo, Byungjun Lee, DaeKug Jeong, Ki-Hyeok Kwon, Kwang-Ho Department of Control and Instrumentation Engineering Korea University-Sejong Campus Sejong Korea Republic of Department of Computer and Information Science Korea University-Sejong Campus Sejong Korea Republic of

In this study, the etching characteristics of C4F6 gas are investigated using inductively coupled plasma (ICP) etching equipment to apply a high-aspect-ratio etching process to SiO2. The use of a CF4 + C4F6 + He gas mixture in the ICP etching system provides a lower F atom density, a higher polymerization capacity with increasing C4F6 gas proportion, and better SiO2/amorphous carbon layer selectivity. With an increase in the C4F6 gas mixing ratio, the bowing phenomenon is alleviated, and a vertically etched profile is formed regardless of the source and bias power. The etching characteristics demonstrate that ICP etching using C4F6 gas is an excellent alternative to capacitively coupled plasma (CCP) etching for the development of next-generation high-aspect-ratio-contact etching processes. © 2025 Wiley-VCH GmbH.

关键词： Aspect ratio

来源：评论

学校读者我要写书评

暂无评论

A distributed algorithm with network-independent step-size and event-triggered mechanism for economic dispatch problem

A distributed algorithm with network-independent step-size a...

引用

作者： Chen, Baitong Yang, Jianhua Lu, Wei Pedrycz, Witold Sun, Changhai School of Control Science and Engineering Dalian University of Technology Dalian China Department of Electrical and Computer Engineering University of Alberta EdmontonABT6G 2R3 Canada Institute of Systems Engineering Macau University of Science and Technology SARTaipa 999078 China Research Center of Performance and Productivity Analysis Istinye University Istanbul Turkey School of Electrical Engineering Dalian University of Technology Dalian China

The economic dispatch problem (EDP) poses a significant challenge in energy management for modern power systems, particularly as these systems undergo expansion. This growth escalates the demand for communication resources and increases the risk of communication failures. To address this challenge, we propose a distributed algorithm with network-independent step sizes and an event-triggered mechanism, which reduces communication requirements and enhances adaptability. Unlike traditional methods, our algorithm uses network-independent step sizes derived from each agent's local cost functions, thus eliminating the need for detailed network topology knowledge. The theoretical derivation identifies a range of step size values that depend solely on the objective function's strong convexity and the gradient's Lipschitz continuity. Furthermore, the proposed algorithm is shown to achieve a linear convergence rate, assuming the event triggering threshold criteria are met for linear convergence. Numerical experiments further validate the effectiveness and advantages of our proposed distributed algorithm by demonstrating its ability to maintain good convergence characteristics while reducing communication frequency. © 2024 John Wiley & Sons Ltd.

关键词： Cost functions

来源：评论

学校读者我要写书评

暂无评论

On the Existence and Uniqueness of Steady State Solutions of a Class of Dynamic Hydraulic Networks via Actuator Placement

On the Existence and Uniqueness of Steady State Solutions of...

引用

IEEE Conference on Decision and control

作者： Mark Jeeninga Juan E. Machado Michele Cucuzzella Giacomo Como Jacquelien Scherpen Department of Automatic Control Lund University Lund Sweden Chair of Control Systems and Network Control Technology Faculty 3 Mechanical Engineering Electrical and Energy Systems Brandenburg University of Technology Cottbus - Senftenberg Cottbus Germany Department of Electrical Computer Science and Biomedical Engineering Univeristy of Pavia Pavia Italy Department of Mathematical Science “G.L. Lagrange” Politecnico di Torino Torino Italy Department of Automatic Control Lund University Faculty of Science and Engineering Jan C. Willems Center for Systems and Control ENTEG University of Groningen Groningen the Netherlands

In this paper, using tools from graph theory we provide verifiable necessary and sufficient conditions for the existence of a unique hydraulic equilibrium in district heating systems of meshed topology and containing multiple heat sources. Even though numerous publications have addressed the design of efficient algorithms for numerically finding hydraulic equilibria in the general context of water distribution networks, this is not the case for the analysis of existence and uniqueness. Moreover, most of the existing work dealing with these aspects exploit the equivalence between the nonlinear algebraic equations describing the hydraulic equilibria and the KKT conditions of a suitably defined nonlinear convex optimization problem. Differently, this paper proposes necessary and sufficient graph-theoretic conditions on the actuator placement for the existence and uniqueness of a hydraulic equilibrium, independent of the actuators' control objective. An example based on a representative district heating network is considered to illustrate the key aspects of our contribution, and an explicit formulation of the steady state solution is given for the case in which pressure drops through pipes are linear with respect to the flow rate.

关键词：

来源：评论

学校读者我要写书评

暂无评论

A New Belief-Based Incomplete Pattern Unsupervised Classification Method : Extended Abstract 39

A New Belief-Based Incomplete Pattern Unsupervised Classific...

引用

39th IEEE International Conference on Data engineering, ICDE 2023

作者： Zhang, Zuowei Liu, Zhe Ma, Zongfang Zhang, Yiru Wang, Hao University of Rennes 1 Institut de Recherche en Informatique et Systèmes Aléatoires France Xi'an University of Architecture and Technology School of Information and Control Engineering China Norwegian University of Science and Technology Department of Computer Science Norway

ISBN: (纸本)9798350322279

Imputing the incomplete patterns in clustering tasks is a common but risky procedure, because the estimated values may affect the real distribution of the data and deteriorate the results. To address this problem, a new belief-based incomplete pattern unsupervised classification method (BPC) with uncertainty and imprecision reasoning is proposed in this paper. First, the complete patterns are grouped into a few clusters to obtain the corresponding reliable centers, and thereby are divided into reliable patterns and unreliable ones by an optimization method. Second, a basic classifier trained by reliable patterns is employed to classify unreliable patterns and incomplete patterns edited by the neighbors. Finally, some imprecise patterns are carefully reassigned again by a new distance-based rule depending on the obtained reliable centers and belief functions theory. The simulation results show that the BPC has the potential to deal with real datasets. © 2023 IEEE.

关键词： Uncertainty analysis

来源：评论

学校读者我要写书评

暂无评论

Vehicle type recognition based on audio data 58

Vehicle type recognition based on audio data

引用

58th Hawaii International Conference on System sciences, HICSS 2025

作者： Kobiela, Dariusz Hajdasz, Michal Erezman, Mateusz Nurzyńska, Karolina Zaporowski, Szymon Kurowski, Adam Weichbroth, Pawel Department of Software Engineering Faculty of Electronics Telecommunication and Informatics Gdańsk University of Technology Gabriela Narutowicza 11/12 Gdańsk80-233 Poland Department of Multimedia Systems Faculty of Electronics Telecommunication and Informatics Gdańsk University of Technology Gabriela Narutowicza 11/12 Gdańsk80-233 Poland Department of Algorithmics and Software Faculty of Automatic Control Electronics and Computer Science Silesian University of Technology Akademicka 16 Gliwice44-100 Poland

ISBN: (纸本)9780998133188

Identifying different vehicle types can help manage traffic more efficiently, reduce congestion, and improve public safety. This study aims to create a classification model that can recognize vehicle types based on the sound of passing vehicles. To achieve this, a database of raw audio files containing 1763 samples from two sources was assembled. The time-domain signals were converted to a time-frequency representation using the short-time Fourier transform to generate Mel Spectrograms. Mel-frequency Cepstral Coefficients (MFCCs) were also generated using the discrete cosine transform. In our experiments we compared these approaches. Since the data was imbalanced we applied online augmentation. Based on the literature review, we chose a Convolutional Neural Network (CNN) classifier because it is particularly well suited for analyzing large datasets due to its automatic feature extraction, parameter sharing and sparsity. The results showed that Mel Spectrograms were more effective for audio data preprocessing in this particular use case, achieving the highest accuracy of 0.875 and the highest f1-score of 0.877 compared to MFCCs. © 2025 IEEE computer Society. All rights reserved.

关键词： Image coding

来源：评论

学校读者我要写书评

暂无评论

Network-based analysis to uncover drug-induced adverse side-effects

Network-based analysis to uncover drug-induced adverse side-...

引用

2023 IEEE International Conference on Bioinformatics and Biomedicine, BIBM 2023

作者： Funari, Alessio Paci, Paola Conte, Federica Sapienza University of Rome Department of Translational and Precision Medicine Rome Italy National Research Council Institute for Systems Analysis and Computer Science 'Antonio Ruberti' Rome Italy Sapienza University of Rome Department of Computer Control and Management Engineering Rome Italy Karolinska Institutet Stockholm17177 Sweden

ISBN: (纸本)9798350337488

Despite the drug approval process consists of extremely rigorous clinical and preclinical studies, not all side effects are identified before its marketing, posing a significant risk to public health. Furthermore, considering the huge use of economic and human resources, in-silico predictive approaches for the identification of side effects are essential. In this study, we introduce a new method based on random walk with restart algorithm to delineate previously unidentified links between drugs and side effects, and we apply it on the drug-induced Asthma and long QT syndrome. We identified the genes potentially involved in the development of the analyzed side effect by comparing side-effect-related drugs with drugs not known to induce side effects. Analyzing the sets of genes most likely influenced by the perturbation of each individual drug, we observed that, on average, side-effect-related drugs perturb a higher percentage of genes involved in the development of side effects compared to side-effect-unrelated drugs. Based on this finding, we developed a classifier to explore all possible unknown associations between drugs and side effects. This method can be extended to the analysis of other side effects as well. © 2023 IEEE.

关键词： network medicine random walk side effect

来源：评论

学校读者我要写书评

暂无评论

Robust Length of Stay Prediction Model for Indoor Patients

引用

computers, Materials & Continua 2022年第3期70卷 5519-5536页

作者： Ayesha Siddiqa Syed Abbas Zilqurnain Naqvi Muhammad Ahsan Allah Ditta Hani Alquhayz M.A.Khan Muhammad Adnan Khan Department of Mechatronics and Control Engineering University of Engineering and TechnologyLahore54000Pakistan Department of Information Sciences Division of Science and TechnologyUniversity of EducationLahore54000Pakistan Department of Computer Science and Information College of Science in ZulfiMajmaah UniversityAl-Majmaah11952Saudi Arabia Riphah School of Computing&Innovation Faculty of ComputingRiphah International UniversityLahore CampusLahore54000Pakistan Pattern Recognition and Machine Learning Lab Department of SoftwareGachon UniversitySeongnam13557Korea

Due to unforeseen climate change,complicated chronic diseases,and mutation of viruses’hospital administration’s top challenge is to know about the Length of stay(LOS)of different diseased patients in the *** management does not exactly know when the existing patient leaves the hospital;this information could be crucial for hospital *** could allow them to take more patients for *** a result,hospitals face many problems managing available resources and new patients in getting entries for their prompt ***,a robust model needs to be designed to help hospital administration predict patients’LOS to resolve these *** this purpose,a very large-sized data(more than 2.3 million patients’data)related to New-York Hospitals patients and containing information about a wide range of diseases including Bone-Marrow,Tuberculosis,Intestinal Transplant,Mental illness,Leukaemia,Spinal cord injury,Trauma,Rehabilitation,Kidney and Alcoholic Patients,HIV Patients,Malignant Breast disorder,Asthma,Respiratory distress syndrome,*** been analyzed to predict the *** selected six Machine learning(ML)models named:Multiple linear regression(MLR),Lasso regression(LR),Ridge regression(RR),Decision tree regression(DTR),Extreme gradient boosting regression(XGBR),and Random Forest regression(RFR).The selected models’predictive performance was checked using R square andMean square error(MSE)as the performance evaluation *** results revealed the superior predictive performance of the RFRmodel,both in terms of RS score(92%)and MSE score(5),among all selected *** Exploratory data analysis(EDA),we conclude that maximumstay was between 0 to 5 days with the meantime of each patient 5.3 days and more than 50 years old patients spent more days in the *** on the average LOS,results revealed that the patients with diagnoses related to birth complications spent more days in the hospital than other *** finding coul

关键词： Length of stay machine learning robust model random forest regression

来源：评论

学校读者我要写书评

暂无评论

Follow Everything: A Leader-Following and Obstacle Avoidance Framework with Goal-Aware Adaptation

arXiv

引用

arXiv 2025年

作者： Zhang, Qianyi Ma, Shijian Liu, Boyi Liu, Jingtai Jiao, Jianhao Kanoulas, Dimitrios Institute of Robotics and Automatic Information System Nankai University Tianjin300350 China Electrical and Computer Engineering Department Hong Kong University of Science and Technology China Centre for Data Science University of Macau China Department of Computer Science University College London United Kingdom

Robust and flexible leader-following is a critical capability for robots to integrate into human society. While existing methods struggle to generalize to leaders of arbitrary form and often fail when the leader temporarily leaves the robot’s field of view, this work introduces a unified framework addressing both challenges. First, traditional detection models are replaced with a segmentation model, allowing the leader to be anything. To enhance recognition robustness, a distance frame buffer is implemented that stores leader embeddings at multiple distances, accounting for the unique characteristics of leader-following tasks. Second, a goal-aware adaptation mechanism is designed to govern robot planning states based on the leader’s visibility and motion, complemented by a graph-based planner that generates candidate trajectories for each state, ensuring efficient following with obstacle avoidance. Simulations and real-world experiments with a legged robot follower and various leaders (human, ground robot, UAV, legged robot, stop sign) in both indoor and outdoor environments show competitive improvements in follow success rate, reduced visual loss duration, lower collision rate, and decreased leader-follower distance. Visit the website for the video and code. © 2025, CC BY.

关键词： Motion planning

来源：评论

学校读者我要写书评

暂无评论

Multiplier analysis of Lurye systems with power signals 63

Multiplier analysis of Lurye systems with power signals

引用

63rd IEEE Conference on Decision and control, CDC 2024

作者： Heath, William P. Carrasco, Joaquin Bangor University School of Computer Science and Engineering Dean St LL57 1UT United Kingdom Nancy Rothwell Building University of Manchester Control Systems and Robotics Group Department of Electrical and Electronic Engineering M13 9PL United Kingdom

ISBN: (纸本)9798350316339

Multipliers can be used to guarantee both the Lyapunov stability and input-output stability of Lurye systems with time-invariant memoryless slope-restricted nonlinearities. If a dynamic multiplier is used there is no guarantee the closedloop system has finite incremental gain. It has been suggested in the literature that without this guarantee such a system may be critically sensitive to time-varying exogenous signals including noise. We show that multipliers guarantee the power gain of the system to be bounded and quantifiable. Furthermore power may be measured about an appropriate steady state bias term, provided the multiplier does not require the nonlinearity to be odd. Hence dynamic multipliers can be used to guarantee Lurye systems have low sensitivity to noise, provided other exogenous systems have constant steady state. We illustrate the analysis with an example where the exogenous signal is a power signal with non-zero mean. © 2024 IEEE.

关键词：

来源：评论

学校读者我要写书评

暂无评论

Complex Permeability Determination for EE Core Based on Flexible PCB Fixture and Magnetic Flux Path Length Analysis 2

Complex Permeability Determination for EE Core Based on Flex...

引用

2nd China Power Supply Society Electromagnetic Compatibility Conference, CPEMC 2024

作者： Jie, Huamin Zhao, Zhenyu Chang, Yongqi Wang, Changdong Jiang, Shiqi Gao, Richard Xian-Ke See, Kye Yak School of Electrical and Electronic Engineering Nanyang Technological University Singapore Singapore Department of Electrical and Computer Engineering National Univeristy of Singapore Singapore Singapore Department of Control Science and Engineering Harbin Institute of Technology Harbin China School of Electronics and Information Engineering Harbin Institute of Technology Harbin China School of Electrical Engineering and Automation Harbin Institute of Technology Harbin China Institute of High Performance Computing A*STAR Singapore Singapore

ISBN: (纸本)9798331509552

The complex permeability of magnetic cores acts as a vital factor in electromagnetic interference (EMI) filtering choke design and optimization. Many efforts have been reported for toroid cores, but fewer target those with other shapes, such as EE, EI, UU, and UI cores. Owing to their commonly used in planar EMI filters, determining the complex permeability of them is of significance. Targeting EE cores, this paper presents a flexible printed circuit board (PCB)-based fixture adapter tailored designed for performing the measurement, while the corresponding core permeability can be calculated through magnetic flux path length analysis. The experiments validate the effectiveness and accuracy of the proposed methods, spanning a wide frequency range up to 120 MHz. ©2024 IEEE.

关键词： Magnetic flux

来源：评论

学校读者我要写书评

暂无评论

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案：

请选择收藏分类：

通借通还

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：