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Nanofabrication of DLC-dot Arrays by Room-temperature Curing Imprint-liftoff Method

MRS Online Proceedings Library (OPL) 2013年第1期1511卷 mrsf12-1511-ee05-02-mrsf12-1511-ee05-02页

作者： Shuji Kiyohara Shohei Matta Ippei Ishikawa Hideto Tanoue Hirofumi Takikawa Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology 1-1 Hibarigaoka Tenpaku Toyohashi Aichi 441-8580 Japan Application and Technical Section ELIONIX INC. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Research Center for Ubiquitous MEMS and Micro Engineering AIST 1-2-1 Namiki Tsukuba Ibaraki 305-8564 Japan

As an application to the nanoemitter, we investigated the nanofabrication of diamond-like carbon (DLC)-dot arrays by room-temperature curing imprint-liftoff (RTCIL) method using aluminum mask. The DLC film which has excellent properties similar to diamond properties was used as the patterning material. A polished glass like carbon (GC) was used as a mold material. The polysiloxane in the state of sticky liquid at room temperature and stable in air exhibits a negative-exposure characteristics. Therefore, the polysiloxane was used as electron beam (EB) resist and oxide mask material in EB lithography, and also used as RTC-imprint resist material. An aluminum was used as oxide metal mask material of liftoff. We have fabricated the GC mold of dot arrays with 5 µm-square and 500 nm-height. We carried out the RTCIL process using the GC mold under the following optimum imprint conditions: 0.5 MPa-imprinting pressure and 5 min- holding time. Aluminum film on the imprinted polysiloxane was prepared by vacuum evaporation method and its thickness is 20 nm. Finally, the polysiloxane patterns were removed with acetone and aluminum mask patterns were fabricated. We found that the maximum etching selectivity of aluminum film against DLC film was as high as 35, which was obtained under an ion energy of 400 eV. Then we processed the patterned aluminum on DLC film with an ECR oxygen ion shower. We fabricated DLC-dot arrays with 5 µm-square and 400 nm-height with an aspect ratio of 0.08.

关键词： diamond ion-beam processing microstructure

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Cloud computing for mission design and operations

Cloud computing for mission design and operations

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12th International Conference on Space Operations, SpaceOps 2012

作者： Arrieta, Juan Beswick, Robert Gerasimatos, Dimitrios Jet Propulsion Laboratory California Institute of Technology Flight Path Control Section 4800 Oak Grove Drive M/S 230-205 Pasadena CA 91109 United States Jet Propulsion Laboratory California Institute of Technology Navigation and Mission Design System Engineering Section 4800 Oak Grove Drive M/S 301-121 Pasadena CA 91109 United States

The space mission design and operations community already recognizes the value of cloud computing and virtualization. However, natural and valid concerns, like security, privacy, up-time, and vendor lock-in, have prevented a more widespread and expedited adoption into official workflows. In the interest of alleviating these concerns, we propose a series of guidelines for internally deploying a resource-oriented hub of data and algorithms. These guidelines provide a roadmap for implementing an architecture inspired in the cloud com- puting model: associative, elastic, semantical, interconnected, and adaptive. The architec- ture can be summarized as exposing data and algorithms as resource-oriented Web services, coordinated via messaging, and running on virtual machines;it is simple, and based on widely adopted standards, protocols, and tools. The architecture may help reduce com- mon sources of complexity intrinsic to data-driven, collaborative interactions and, most importantly, it may provide the means for teams and agencies to evaluate the cloud com- puting model in their specific context, with minimal infrastructure changes, and before committing to a specific cloud services provider. © 2012 by the American Institute of Aeronautics and Astronautics, Inc.

关键词： Cloud computing

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Micro-organic light-emitting devices fabricated by room-temperature curing nanoimprint lithography using diamond molds

Micro-organic light-emitting devices fabricated by room-temp...

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2011 MRS Fall Meeting

作者： Ishikawa, Ippei Okuno, Taisuke Kiyohara, Shuji Taguchi, Yoshio Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Shiroya Maizuru Kyoto 625-8511 Japan Application and Technical Section Elionix Inc. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Department of Mechanical System Engineering University of Yamanashi 4-3-11 Takeda Kofu Yamanashi 400-8511 Japan

ISBN: (纸本)9781605113722

Organic light-emitting devices (OLEDs) have attracted a lot of attention as a next generation display. In this study, we fabricated the micro-OLEDs by room-temperature curing nanoimprint lithography (RTC-NIL) using diamond molds. The diamond has superior durability and was used as mold material for RTC-NIL. The diamond molds have been fabricated by electron cyclotron resonance (ECR) oxygen ion shower with polysiloxane oxide mask in the electron beam (EB) lithography technology. We fabricated the diamond mold pattern with 10 μm-square dot. The diamond molds have been used to form an insulating layer in micro-OLEDs. The optimum thickness of N,N′-Diphenyl-N,N′-di(m- tolyl)benzidine (TPD) [hole transport layer], Tris(8-quinolinolato)aluminum (Alq3) [electron transport layer] and aluminum (Al) [cathode] were 40 nm, 40 nm and 200 nm, respectively. We succeeded in formation of insulating layer in micro-OLEDs and operation of micro-OLEDs with 10 μm-square-dot by RTC-NIL using diamond molds. © 2012 Materials Research Society.

关键词： Silicones

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Fabrication of diamond nanopit arrays by room-temperature curing nanoimprint lithography using glass-like carbon molds

Fabrication of diamond nanopit arrays by room-temperature cu...

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2011 MRS Fall Meeting

作者： Kiyohara, Shuji Ito, Chigaya Ishikawa, Ippei Takikawa, Hirofumi Taguchi, Yoshio Sugiyama, Yoshinari Omata, Yukiko Kurashima, Yuichi Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology 234 Aza Shiroya Maizuru Kyoto 625-8511 Japan Department of Electrical and Electronic Information Engineering Toyohashi University of Technology Toyohashi Aichi 441-8580 Japan Application and Technical Section Elionix Inc. 3-7-6 Motoyokoyama Hachioji Tokyo 192-0063 Japan Department of Mechanical System Engineering University of Yamanashi 4-3-11 Takeda Kofu Yamanashi 400-8511 Japan

ISBN: (纸本)9781605113722

We have proposed the use of glass-like carbon (GC), as mold material because the 27-maximum etching selectivity of polysiloxane film against GC, which was approximately six times larger than that of polysiloxane film against chemical vapor deposited (CVD) diamond film. We have investigated the fabrication of diamond nanopit arrays by room-temperature curing nanoimprint lithography (RTC-NIL) using GC mold, as applications to the emitter and the micro-gear. The polysiloxane has in the state of sticky liquid at room-temperature and negative-exposure characteristic. Therefore, the polysiloxane was used as RTC-imprint resist material, and also used as electron beam (EB) resist (oxide mask) material in EB lithography. We have fabricated the cylindrical GC nanodot mold with 500 nm-diameter, 600 nm-height and 2 μm-pitch. We carried out RTC-NIL using GC mold under the following optimum conditions: time from spin-coating to imprint of 1 min, imprinting pressure of 0.5 MPa and imprinting time of 5 min. Then, we have processed the diamond film with an electron cyclotron resonance (ECR) oxygen ion shower. We have fabricated diamond nanopit array with 250 nm-depth and 500 nm-diameter. The diameter of diamond nanopit pattern was in good agreement with that of GC mold. Moreover, the depth of the diamond nanopit patterns fabricated by RTC-NIL using cylindrical GC mold was three times larger than that using conical diamond mold. © 2012 Materials Research Society.

关键词： Chemical vapor deposition

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Erratum to: Antimicrobials: a global alliance for optimizing their rational use in intra-abdominal infections (AGORA)

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World journal of emergency surgery : WJES 2017年第1期12卷 35页

作者： M Sartelli D G Weber E Ruppé M Bassetti B J Wright L Ansaloni F Catena F Coccolini F M Abu-Zidan R Coimbra E E Moore F A Moore R V Maier J J De Waele A W Kirkpatrick E A Griffiths C Eckmann A J Brink J E Mazuski A K May R G Sawyer D Mertz P Montravers A Kumar J A Roberts J L Vincent R R Watkins W Lowman B Spellberg I J Abbott A K Adesunkanmi S Al-Dahir M N Al-Hasan F Agresta A A Althani S Ansari R Ansumana G Augustin M Bala Z J Balogh O Baraket A Bhangu M A Beltrán M Bernhard W L Biffl M A Boermeester S M Brecher J R Cherry-Bukowiec O R Buyne M A Cainzos K A Cairns A Camacho-Ortiz S J Chandy A Che Jusoh A Chichom-Mefire C Colijn F Corcione Y Cui D Curcio S Delibegovic Z Demetrashvili B De Simone S Dhingra J J Diaz I Di Carlo A Dillip S Di Saverio M P Doyle G Dorj A Dogjani H Dupont S R Eachempati M A Enani V N Egiev M M Elmangory P Ferrada J R Fitchett G P Fraga N Guessennd H Giamarellou W Ghnnam G Gkiokas S R Goldberg C A Gomes H Gomi M Guzmán-Blanco M Haque S Hansen A Hecker W R Heizmann T Herzog A M Hodonou S K Hong R Kafka-Ritsch L J Kaplan G Kapoor A Karamarkovic M G Kees J Kenig R Kiguba P K Kim Y Kluger V Khokha K Koike K Y Kok V Kong M C Knox K Inaba A Isik K Iskandar R R Ivatury M Labbate F M Labricciosa P F Laterre R Latifi J G Lee Y R Lee M Leone A Leppaniemi Y Li S Y Liang T Loho M Maegele S Malama H E Marei I Martin-Loeches S Marwah A Massele M McFarlane R B Melo I Negoi D P Nicolau C E Nord R Ofori-Asenso A H Omari C A Ordonez M Ouadii G A Pereira Júnior D Piazza G Pupelis T M Rawson M Rems S Rizoli C Rocha B Sakakushev M Sanchez-Garcia N Sato H A Segovia Lohse G Sganga B Siribumrungwong V G Shelat K Soreide R Soto P Talving J V Tilsed J F Timsit G Trueba N T Trung J Ulrych H van Goor A Vereczkei R S Vohra I Wani W Uhl Y Xiao K C Yuan S K Zachariah J R Zahar T L Zakrison A Corcione R M Melotti C Viscoli P Viale Department of Surgery Macerata Hospital Via Santa Lucia 2 62100 Macerata Italy. Department of Trauma Surgery Royal Perth Hospital Perth Australia. Genomic Research Laboratory Geneva University Hospitals Geneva Switzerland. Infectious Diseases Division Santa Maria Misericordia University Hospital Udine Italy. Department of Emergency Medicine and Surgery Stony Brook University School of Medicine Stony Brook NY USA. General Surgery Department Papa Giovanni XXIII Hospital Bergamo Italy. Department of General Maggiore Hospital Parma Italy. Department of Surgery "Infermi" Hospital Rimini Italy. Department of Surgery College of Medicine and Health Sciences UAE University Al-Ain United Arab Emirates. Department of Surgery UC San Diego Medical Center San Diego USA. Department of Surgery University of Colorado Denver Health Medical Center Denver CO USA. Department of Surgery Division of Acute Care Surgery and Center for Sepsis and Critical Illness Research University of Florida College of Medicine Gainesville FL USA. Department of Surgery University of Washington Seattle WA USA. Department of Critical Care Medicine Ghent University Hospital Ghent Belgium. General Acute Care and Trauma Surgery Foothills Medical Centre Calgary AB Canada. General and Upper GI Surgery Queen Elizabeth Hospital Birmingham UK. Department of General Visceral and Thoracic Surgery Klinikum Peine Academic Hospital of Medical University Hannover Peine Germany. Department of Clinical microbiology Ampath National Laboratory Services Milpark Hospital Johannesburg South Africa. Department of Surgery School of Medicine Washington University in Saint Louis Saint Louis MO USA. Departments of Surgery and Anesthesiology Division of Trauma and Surgical Critical Care Vanderbilt University Medical Center Nashville TN USA. Department of Surgery University of Virginia Health System Charlottesville VA USA. Departments of Medicine Clinical Epidemiology and Biostatistics and Pathology and Mo

[This corrects the article DOI: 10.1186/s13017-016-0089-y.].

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Human genome meeting 2016 : Houston, TX, USA. 28 February - 2 March 2016

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Human genomics 2016年第1期10 Suppl 1卷 12页

作者： A. K. Srivastava Y. Wang R. Huang C. Skinner T. Thompson L. Pollard T. Wood F. Luo R. Stevenson R. Polimanti J. Gelernter X. Lin I. Y. Lim Y. Wu A. L. Teh L. Chen I. M. Aris S. E. Soh M. T. Tint J. L. MacIsaac F. Yap K. Kwek S. M. Saw M. S. Kobor M. J. Meaney K. M. Godfrey Y. S. Chong J. D. Holbrook Y. S. Lee P. D. Gluckman N. Karnani A. Kapoor D. Lee A. Chakravarti C. Maercker F. Graf M. Boutros G. Stamoulis F. Santoni P. Makrythanasis A. Letourneau M. Guipponi N. Panousis M. Garieri P. Ribaux E. Falconnet C. Borel S. E. Antonarakis S. Kumar J. Curran J. Blangero S. Chatterjee J. Akiyama D. Auer C. Berrios L. Pennacchio T. R. Donti G. Cappuccio M. Miller P. Atwal A. Kennedy A. Cardon C. Bacino L. Emrick J. Hertecant F. Baumer B. Porter M. Bainbridge P. Bonnen B. Graham R. Sutton Q. Sun S. Elsea Z. Hu P. Wang Y. Zhu J. Zhao M. Xiong David A. Bennett A. Hidalgo-Miranda S. Romero-Cordoba S. Rodriguez-Cuevas R. Rebollar-Vega E. Tagliabue M. Iorio E. D’Ippolito S. Baroni B. Kaczkowski Y. Tanaka H. Kawaji A. Sandelin R. Andersson M. Itoh T. Lassmann Y. Hayashizaki P. Carninci A. R. R. Forrest C. A. Semple E. A. Rosenthal B. Shirts L. Amendola C. Gallego M. Horike-Pyne A. Burt P. Robertson P. Beyers C. Nefcy D. Veenstra F. Hisama R. Bennett M. Dorschner D. Nickerson J. Smith K. Patterson D. Crosslin R. Nassir N. Zubair T. Harrison U. Peters G. Jarvik F. Menghi K. Inaki X. Woo P. Kumar K. Grzeda A. Malhotra H. Kim D. Ucar P. Shreckengast K. Karuturi J. Keck J. Chuang E. T. Liu B. Ji A. Tyler G. Ananda G. Carter H. Nikbakht M. Montagne M. Zeinieh A. Harutyunyan M. Mcconechy N. Jabado P. Lavigne J. Majewski J. B. Goldstein M. Overman G. Varadhachary R. Shroff R. Wolff M. Javle A. Futreal D. Fogelman L. Bravo W. Fajardo H. Gomez C. Castaneda C. Rolfo J. A. Pinto K. C. Akdemir L. Chin S. Patterson C. Statz S. Mockus S. N. Nikolaev X. I. Bonilla L. Parmentier B. King F. Bezrukov G. Kaya V. Zoete V. Seplyarskiy H. Sharpe T. McKee K. Popadin N. Basset-Seguin R. Ben Chaabene M. Andrianova C. Verdan K. Grosdemange O. Sumara M. E JCSRI Greenwood Genetic Center Greenwood USA School of Computing Clemson University Clemson USA Biochemical Genetics Laboratory Greenwood Genetic Center Greenwood USA Department Psychiatry Yale Sch Med and VA CT Healthcare Center West Haven USA Department Genetics Yale Sch Med and VA CT Healthcare Center West Haven USA Department Neurobiology Yale Sch Med and VA CT Healthcare Center West Haven USA Singapore Institute for Clinical Sciences Singapore Singapore National University of Singapore Singapore Singapore University of British Columbia Vancouver Canada KK Women’s and Children’s Hospital Singapore Singapore University of Southampton and University Hospital Southampton NHS Foundation Trust Southampton UK University of Auckland Auckland New Zealand McKusick-Nathans Institute of Genetic Medicine Johns Hopkins University School of Medicine Baltimore USA Esslingen University of Applied Sciences Esslingen Germany German Cancer Research Center Heidelberg Germany Department of Genetic Medicine and Development University of Geneva Medical School Geneva Switzerland Geneva University Hospitals-HUG Service of Genetic Medicine Geneva Switzerland GE3 Institute of Genetics and Genomics of Geneva University of Geneva Medical School Geneva Switzerland South Texas Diabetes and Obesity Institute School of Medicine University of Texas Rio-Grande Valley Edinburg USA South Texas Diabetes and Obesity Institute School of Medicine University of Texas Rio-Grande Valley Brownsville USA Institute of Genetic Medicine Johns Hopkins University Baltimore USA Genomics Division Lawrence Berkeley National Laboratory Berkeley USA Molecular and Human Genetics Baylor College of Medicine Houston USA Department of Translational Medical Sciences Federico II University Naples Italy Metabolon Inc Durham USA Section of Pediatric Neurology and Neuroscience Baylor College of Medicine Houston USA Tawam Hospital Abu Dhabi United Arab Emirates Stanford Medical School Stanford USA Sch

O1 The metabolomics approach to autism: identification of biomarkers for early detection of autism spectrum disorder A. K. Srivastava, Y. Wang, R. Huang, C. Skinner, T. Thompson, L. Pollard, T. Wood, F. Luo, R. Stevenson O2 Phenome-wide association study for smoking- and drinking-associated genes in 26,394 American women with African, Asian, European, and Hispanic descents R. Polimanti, J. Gelernter O3 Effects of prenatal environment, genotype and DNA methylation on birth weight and subsequent postnatal outcomes: findings from GUSTO, an Asian birth cohort X. Lin, I. Y. Lim, Y. Wu, A. L. Teh, L. Chen, I. M. Aris, S. E. Soh, M. T. Tint, J. L. MacIsaac, F. Yap, K. Kwek, S. M. Saw, M. S. Kobor, M. J. Meaney, K. M. Godfrey, Y. S. Chong, J. D. Holbrook, Y. S. Lee, P. D. Gluckman, N. Karnani, GUSTO study group O4 High-throughput identification of specific qt interval modulating enhancers at the SCN5A locus A. Kapoor, D. Lee, A. Chakravarti O5 Identification of extracellular matrix components inducing cancer cell migration in the supernatant of cultivated mesenchymal stem cells C. Maercker, F. Graf, M. Boutros O6 Single cell allele specific expression (ASE) IN T21 and common trisomies: a novel approach to understand DOWN syndrome and other aneuploidies G. Stamoulis, F. Santoni, P. Makrythanasis, A. Letourneau, M. Guipponi, N. Panousis, M. Garieri, P. Ribaux, E. Falconnet, C. Borel, S. E. Antonarakis O7 Role of microRNA in LCL to IPSC reprogramming S. Kumar, J. Curran, J. Blangero O8 Multiple enhancer variants disrupt gene regulatory network in Hirschsprung disease S. Chatterjee, A. Kapoor, J. Akiyama, D. Auer, C. Berrios, L. Pennacchio, A. Chakravarti O9 Metabolomic profiling for the diagnosis of neurometabolic disorders T. R. Donti, G. Cappuccio, M. Miller, P. Atwal, A. Kennedy, A. Cardon, C. Bacino, L. Emrick, J. Hertecant, F. Baumer, B. Porter, M. Bainbridge, P. Bonnen, B. Graham, R. Sutton, Q. Sun, S. Elsea O10 A novel causal methylation network approach to Alzheimer’s

关键词： Pulmonary Arterial Hypertension Oral Squamous Cell Carcinoma Deep Neural Network Autosomal Recessive Polycystic Kidney Disease Whole Genome Bisulfite Sequencing

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Optimized quality factor of fractional order analog filters with band-pass and band-stop characteristics

Optimized quality factor of fractional order analog filters ...

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International Conference on Computing and Networking technology (ICCNT)

作者： Anindya Pakhira Saptarshi Das Anish Acharya Indranil Pan Suman Saha Department of Instrumentation and Electronics Engineering Jadavpur University Kolkata India Department of Power Engineering Jadavpur University Kolkata India MERG Energy Environment Modelling and Minerals E2M2) Research Section Department of Earth Science and Engineering Imperial College London London UK Drives and Control System Technology Group CSIR-Central Mechanical Engineering Research Institute Durgapur India

ISBN: (纸本)9781467356930

Fractional order (FO) filters have been investigated in this paper, with band-pass (BP) and band-stop (BS) characteristics, which can not be achieved with conventional integer order filters with orders lesser then two. The quality factors for symmetric and asymmetric magnitude response have been optimized using real coded Genetic Algorithm (GA) for a user specified center frequency. Parametric influence of the FO filters on the magnitude response is also illustrated with credible numerical simulations.

关键词： Numerical simulation Filtering Ear

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Adaptive Variable Selection Using Nonnegative Garrote with Application to Soft Sensor and Fault Detection

Adaptive Variable Selection Using Nonnegative Garrote with A...

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第23届过程控制会议

作者： Jian-guo Wang Chang-Chun Pan Shi-Shang Jang David Shan-Hill Wong Shyan-Shu Shieh Chan-Wei Wu School of Mechatronical Engineering and Automation Shanghai University and Shanghai Key Labof Power Station Automation Technology Shanghai 200072 China Department of Automation and Key Laboratory of System Control and Information Processing Ministry ofEducation of China Shanghai Jiao Tong University Shanghai 200240 China Department of Chemical Engineering National Tsing-Hua University Hsin-Chu 30013 Taiwan Department of Occupational Safety and Hygiene Chang Jung University Tainan 71101 Taiwan Energy & Air Pollution Control Section New Materials R&D Dept. China Steel Corporation Kaohsiung 81233 Taiwan

ring normal operations, response or quality variables of a process will follow a input-output relation that depend on certain key sensor variables. A soft-sensor with limited model size can be developed. When the process enters into a “faulty” state, the structure, of this model may change. Moreover, disturbance that is not reflected by sensor outputs may also be present. In this paper, we introduce a recursive soft-sensor modeling algorithm which employs a nonnegative garrote (NNG) variable selection procedure. This model can be used for both prediction, and detection of structural model change and the emergence of disturbance. The advantages of the proposed method were demonstrated by a simulation example and an industrial application to temperature prediction of a blast furnace hearth.

关键词： NNG(nonnegative garrote) Soft sensor Fault detection

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On-line detection system for internal flaws in as-hot-rolled steel strip using ultrasonic probe array

On-line detection system for internal flaws in as-hot-rolled...

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作者： Takada, Hajime Tomura, Yasuo Aratani, Makoto Yamasaki, Takuya Sasaki, Toshihiro Instrument and Control Engineering Research Department Steel Research Laboratory JFE Steel Corporation Kawasaki 210-0855 Japan Plant Control Technology Section Plant Control Department East Japan Works Chiba 260-0835 Japan Product Design and Quality Control Department East Japan Works JFE Steel Corporation Chiba 260-0835 Japan Cold Rolling Technology Section Cold Rolling Department I East Japan Works Chiba 260-0835 Japan Non-destructive Inspection Technology Department Instrument System Division JFE Techno-Research Corporation Chiba 260-0835 Japan

A new ultrasonic immersion test method for detecting internal flaws in a running steel strip has been developed. A transmitting probe array and a receiving probe array are arranged face-to-face on opposite sides of the strip in water, and two flaw echoes are received by the receiving probe array: (1) Haw echo reflected first at an internal flaw and next at the surface wall of the strip;and (2) Flaw echo reflected first at the back wall of the strip and next at an internal flaw. A linear area in the strip can be tested within a cycle of ultrasonic pulse repetition by integrating the transmission of a line-focused ultrasonic beam (25 MHz in frequency) using all elements in the transmitting probe array at once with the parallel processing of signals received by the receiving probe array. An ultrasonic detection system based on this method was subsequently installed in the No. 6 pickling line at JFE Steel, Chiba District. The steel strip being tested is immersed in water by using six additional deflector rolls. The transmitting probe array and receiving probe array cover the width of the strip so that testing of the entire volume of the strip is realized. It is confirmed that inclusions with a minimum volume of 5 × 10-5 mm3 can be detected at a signal-to-noise ratio in the range of 9-10dB. The detection results are rapidly fed back to the steelmaking process to improve steel cleanliness. As a result, steel coils have maintained a high level of internal cleanliness with a dramatic reduction in defects found during the users' manufacturing process. ©2011 The Japan Institute of Metals.

关键词： Signal to noise ratio

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Micro-organic Light-emitting Devices Fabricated by Room-temperature Curing Nanoimprint Lithography Using Diamond Molds

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MRS Online Proceedings Library 2011年第1期1395卷 33-38页

作者： Ippei Ishikawa Taisuke Okuno Shuji Kiyohara Yoshio Taguchi Yoshinari Sugiyama Yukiko Omata Yuichi Kurashima Electric and Control System Engineering Course Faculty of Advanced Engineering Maizuru National College of Technology Maizuru Kyoto Japan Application and Technical Section ELIONIX INC. Hachioji Tokyo Japan Department of Mechanical System Engineering University of Yamanashi Kofu Yamanashi Japan

Organic light-emitting devices (OLEDs) have attracted a lot of attention as a next generation display. In this study, we fabricated the micro-OLEDs by room-temperature curing nanoimprint lithography (RTC-NIL) using diamond molds. The diamond has superior durability and was used as mold material for RTC-NIL. The diamond molds have been fabricated by electron cyclotron resonance (ECR) oxygen ion shower with polysiloxane oxide mask in the electron beam (EB) lithography technology. We fabricated the diamond mold pattern with 10 µm-square dot. The diamond molds have been used to form an insulating layer in micro-OLEDs. The optimum thickness of N,N’-Diphenyl-N,N’-di(m-tolyl)benzidine (TPD) [hole transport layer], Tris(8-quinolinolato)aluminum (Alq3) [electron transport layer] and aluminum (Al) [cathode] were 40 nm, 40 nm and 200 nm, respectively. We succeeded in formation of insulating layer in micro-OLEDs and operation of micro-OLEDs with 10 µm-square-dot by RTC-NIL using diamond molds.

关键词： diamond optoelectronic microelectronics

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