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REAL-TIME FEEDBACK FOR SIDEWALL PROFILE control IN REACTIVE ION ETCHING

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 1995年第3期13卷 1792-1796页

作者： RASHAP, B FREUDENBERG, J ELTA, M Electronics Manufacturing and Control Systems Laboratory Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor Michigan 48109&#x2010 2122|c|

Reactive ion etching is an important process in the fabrication of microelectronic devices. This article reports on work in progress towards developing a strategy for controlling sidewall profile during this process. ... 详细信息

关键词： Reactive ion etching

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Robust Analysis of Distillation Column Dynamics

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IFAC Proceedings Volumes 1995年第9期28卷 333-338页

作者： E.I. Varga G.Z. Kovács S.B. Jørgensen K.M. Hangos Systems and Control Laboratory Computer and Automation Research Institute Department of Chemical Engineering The Technical University of Denmark Lyngby Denmark

The robust stability and performance of a binary distillation column model is analysed using a minimal state space representation. The uncertainty modelling of the column is resulted in an LFT form with a four element diagonal block structure taking into account the dependence between the steady state gains. Robust analysis of the distillation column dynamics is performed and compared using µ - and l 1 -analysis tools. The magnitude of possible overshoots is determined by l 1 -test for robust performance and the dependence of this magnitude on the dominant time constant (i.e. the purity of the separation) is investigated. Futhermore the effect of the mi certainties in the time constants and the singular values on the robust performance is also analysed using l 1 -test. It has been found that the uncertainty in the time constants affects dominantly the robust performance of the open-loop system, i.e. the magnitude of possible overshoots.

关键词： Distillation column parametric uncertainty modelling robust stability robust performance

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A hybrid knowledge representation model in a natural language interface to MS-DOS

A hybrid knowledge representation model in a natural languag...

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International Conference on Tools for Artificial Intelligence (ICTAI)

作者： S.E. Michos G.D. Magoulas N. Fakotakis Wire Communications Laboratory Division of Telecommunications and Technology Information Department of Electrical & Computer Engineering University of Patras Patras Greece Control Systems Laboratory Division of Systems and Control Department of Electrical & Computer Engineering University of Patras Patras Greece

A hybrid model for representing knowledge in a Greek natural language interface to MS-DOS is presented. This model employs semantic knowledge of the operating system domain to develop a hybrid architecture integrating symbolic and connectionist modules for recognizing the MS-DOS command labels of related or unrelated successive natural language user messages. This approach was deeply motivated by handling ellipsis, ambiguity and flexibility of sentence structure as well as possible. A comparative experimental evaluation of this approach to a symbolic one illustrating their pros and cons is also given. Finally, ways of extending this model are proposed with the view of making the natural language interface more user friendly and functional.

关键词： Knowledge representation Natural languages Artificial intelligence Telecommunication computing Wire Laboratories Communication system control control systems Telecommunication control computer architecture

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control of semiconductor manufacturing: curriculum development under an NSF combined research-curriculum grant

Control of semiconductor manufacturing: curriculum developme...

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American control Conference (ACC)

作者： P.P. Khargonekar F.L. Terry Electronics Manufacturing and Control Systems Laboratory Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor MI USA

In this paper, the authors describe their NSF sponsored research-curriculum program devoted to the topic of modeling and control of semiconductor manufacturing. The paper is focused for the most part on the curriculum... 详细信息

关键词： Semiconductor device manufacture Curriculum development Manufacturing processes Plasma materials processing Virtual manufacturing Process control Plasma applications Plasma displays Microelectronics Feedback control

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Integrating evolutionary computation with neural networks

Integrating evolutionary computation with neural networks

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Electronic Technology Directions to the Year 2000

作者： E. Vonk L.C. Jain L.P.J. Veelenturf R. Hibbs Control Systems and Computer Engineering Group BSC Laboratory for Network Theory Department of Electrical Engineering University of Twente Enschede Netherlands Knowledge-based Engineering Systems Group School of Electronic Engineering University of South Australia Adelaide Australia

There is a tremendous interest in the development of the evolutionary computation techniques as they are well suited to deal with optimization of functions containing a large number of variables. This paper presents a brief review of evolutionary computing techniques. It also discusses briefly the hybridization of evolutionary computation and neural networks and presents a solution of a classical problem using neural computing and evolutionary computing techniques.< >

关键词： Evolutionary computation Neural networks Biological cells Genetic programming Genetic algorithms systems engineering and theory computer networks Knowledge engineering Genetic mutations control systems

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Modeling and control of a spark ignition engine with variable cam timing

Modeling and control of a spark ignition engine with variabl...

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American control Conference (ACC)

作者： A.G. Stefanopoulou J.A. Cook J.S. Freudenberg J.W. Grizzle M. Haghgooie P.S. Szpak Control Systems Laboratory Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor MI USA Scientific Research Laboratory Ford Motor Company Limited Dearborn MI USA

A control scheme is designed to minimize emissions and respond to rapid throttle changes in a fuel injected, spark ignition engine equipped with variable cam timing. The model is derived from engine mapping data for an eight cylinder experimental engine mounted in a dynamometer test cell; it is fundamentally a nonlinear and multivariable model. The control scheme jointly manages fuel and cam position.

关键词： Sparks Ignition computer aided manufacturing CADCAM Timing Engine cylinders Fuels Valves Torque Exhaust systems

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Consequences of modular controller development for automotive powertrains: a case study

Consequences of modular controller development for automotiv...

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IEEE Conference on Decision and control

作者： A.G. Stefanopoulou K.R. Butts J.A. Cook J.S. Freudenberg J.W. Grizzle Control Systems Laboratory Department of Electrical Engineering and Computer Science University of Michigan Ann Arbor MI USA Scientific Research Laboratory Ford Motor Company Limited Dearborn MI USA

A modular controller structure for automotive powertrains has certain benefits. These include improved productivity through module reuse, seamless integration of new features, transparent removal of obsolete features, and module sharing across powertrain platforms. Modular architecture also potentially reduces the complexity in the design and calibration process, in that controller modules for different subsystems are developed independently. Due to the fact that the automotive powertrain system contains many highly interactive sub-systems, it is not clear that a modular controller development process can yield acceptable feedback controller performance with respect to emissions, fuel economy, and drivability. In this paper, we describe the engineering design issues associated with a decentralized development process, and the impact that the resulting decentralized controller has upon the dynamic response of the feedback system. We describe the possible detrimental consequences of subsystem interaction, and the potential of coordinated, multivariable feedback for alleviating these limitations. control of a spark ignition engine incorporating variable camshaft timing is used as a case study.

关键词： Automotive engineering Mechanical power transmission Process control control systems Feedback Productivity Process design Calibration Adaptive control Fuel economy

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Synthesized passive feedback control of sensor-rich smart structures-experimental results

Synthesized passive feedback control of sensor-rich smart st...

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IEEE Conference on control Technology and Applications (CCTA)

作者： P. Akella J.T. Wen Control Laboratory for Mechanical Structures Department of Electrical Computer and Systems EngineeringCenter for Advanced Technology in Automation Robotics & Manufacturing Rensselaer Polytechnic Institute RPI Troy NY USA

Passivity based controllers are used in structural control due to their inherent robustness properties. These controllers require sensor/actuator collocation. In this paper, we consider the design of a "squaring down" matrix which renders a system passive by using a linear combination of all collocated and non-collocated sensor/actuator pairs. The design uses experimental transfer functions and does not require the knowledge of the system model. The problem of finding the squaring down matrix is cast as a solution to a set of linear matrix inequalities (LMIs) subject to some additional performance considerations. The design procedure of the squaring down matrix assumes that velocity information is available from the sensors which is not generally the case. We show that the squaring down matrix can be implemented without the use of such velocity information. We provide experimental results gathered from the single link flexible beam setup in the C/sub La/MS laboratory at RPI to show that implementation of passive loops without velocity measurements provides very good results.

关键词： Feedback control Linear matrix inequalities Intelligent sensors control system synthesis Robust control Sensor systems Hydraulic actuators Transfer functions Laboratories Economic indicators

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Neural network applications

Neural network applications

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Electronic Technology Directions to the Year 2000

作者： E. Vonk L.C. Jain L.P.J. Veelenturf Control Systems and Computer Engineering Group BSC Laboratory for Network Theory Department of Electrical Engineering University of Twente Enschede Netherlands Knowledge-based Engineering System Group School of Electronic Engineering University of South Australia Adelaide Australia

Artificial neural networks, also called neural networks, have been used successfully in many fields including engineering, science and business. This paper presents the implementation of several neural network simulat... 详细信息

关键词： Neural networks Neurons Artificial neural networks systems engineering and theory Hopfield neural networks Process control Knowledge engineering Supervised learning Clustering algorithms Application software

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Preisach modeling of piezoceramic and shape memory alloy hysteresis

Preisach modeling of piezoceramic and shape memory alloy hys...

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IEEE Conference on control Technology and Applications (CCTA)

作者： D. Hughes J.T. Wen Control Laboratory for Mechanical Structures (CLaMS) Center for Advanced Technology in Automation Robotics & Manufacturing Department of Electrical Computer and Systems Engineering Rensselaer Polytechnic Institute Troy NY USA

Smart materials such as piezoceramics and shape memory alloys (SMAs) exhibit significant hysteresis and in order to estimate the effect on open and closed loop control a suitable model is needed. One promising candidate is the Preisach independent domain hysteresis model that is characterized by the congruent minor loop and wiping out properties. Comparable minor loop and decaying oscillation test data for a multi-sheet piezoceramic actuator (made of lead zirconate titanate) attached to a flexible beam are presented and are seen to be very consistent with the two Preisach model properties. The commanded parameter is the sheet transverse electric field while the measured parameter is an approximately colocated strain induced in the beam. Equivalent data for a Nitinol SMA wire muscle, attached to the same beam, are also presented. The input and output parameters are the SMA current and a beam strain respectfully. The minor loop and wiping out evidence is less strong than that of the piezoceramic case, but encouraging. In all experiments the quasi-steady state responses were generated in order to avoid exciting beam flexible modes which would complicate the analysis.

关键词： Piezoelectric materials Shape memory alloys Hysteresis Strain measurement Shape control Open loop systems Testing Actuators Titanium compounds Electric variables measurement

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