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This paper introduces a novel piezoelectric actuator (PEA)-driven two-degree-of-freedom micro/nano-positioning stage for high-precision adjustments in small-space situations. To enhance stage compactness and dynamic performance while significantly reducing parasitic motions, the composite leaf-type double parallelogram mechanism and the leaf-type double parallelogram mechanism are presented for implementation in guided and decoupled mechanisms, respectively. The composite bridge arm structure and compact double parallelogram design enable the amplification mechanism to provide significant lateral rigidity and safeguard the *** orthogonal arrangement of the composite bridge type amplification mechanism and the dual parallelogram decoupling guiding mechanism are integrated to achieve full decoupling of the stage at both the input and output ends. The compliance matrix method and Lagrange's equation were employed to establish mathematical analytical models of the static and dynamic characteristics, which were subsequently validated through finite element analysis. The stage's static and dynamic performances were thoroughly assessed through experiments. The closed-loop control of the PEA utilizing integral strain gauges effectively eliminates the nonlinear hysteresis issue on the stage and exhibits proficient trajectory tracking capability. The experimental findings indicate that the motion range of the precision positioning stage is 51.71 × 49.56 µm2, the output coupling displacement error is under 1%, the displacement resolution is 12 nm, and the natural frequencies of the X-axis and Y-axis are 429 Hz and 438 Hz, respectively.
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版权所有:内蒙古大学图书馆 技术提供:维普资讯• 智图
内蒙古自治区呼和浩特市赛罕区大学西街235号 邮编: 010021
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