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M3: Multiscale, deterministic and reconfigurable macro-micro assembly system for packaging of MEMS

M3: Multiscale, deterministic and reconfigurable macro-micro...

引用

2007 IEEE International Conference on robotics and automation, ICRA'07

作者： Murthy, Rakesh Das, Aditya N. Popa, Dan Stephanou, Harry ARRI UT Arlington Department of Electrical Engineering Automation and Robotics Research Institute University of Texas at Arlington Fort Worth TX 76118 United States Department of Electrical Engineering Automation and Robotics Research Institute University of Texas Arlington

ISBN: (纸本)1424406021

This paper presents recent results in configuring a muMscale (maero-miero) robotic assembly platform with modular and reeonfigurable characteristics. M3 is a multi-robot system capable of spanning across the macro-meso-micro scales, and has been specifically designed to package MOEMS (Micro Opto Electro Mechanical Systems). The emphasis on packaging (as opposed to assembly) is inclusive of the latter, but it also recognizes that bonding, sealing and attachment processes must also be controlled, and will greatly influence the reliability of the microsystem. The system components include precision robots, microstages, end-effectors and fixtures that accomplish assembly tasks in a shared workspace. The system components are systematically characterized in terms of accuracy and repeatability, and assembly plans are performed using kinematic identification, visual servoing, inverse kinematics, and dynamic vibration suppression. As an application packaging problem, various micro and meso scale parts are assembled into a MEMS device. The tolerance budget of assembly ranges from 4 microns to 300 microns, while the size of components in the assembly ranges from 126 microns to 30mm. Various end-effectors and fixtures have been designed for use with off-the-shelf hardware (robots and microstages) and were tested for precision performance. The robots are calibrated to accuracies of 10 microns or less. In this paper we present experimental results of precision robot calibration and visual servoing for fiber pigtailing with one of the robots within M3. © 2007 IEEE.

关键词： MEMS

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Process development and die shear testing in MOEMS packaging

Process development and die shear testing in MOEMS packaging

引用

ASME Electronic and Photonics Packaging Division

作者： Lakhkar, Nikhil Fasoro, Abiodun Patil, Amit Lee, Woo Ho Agonafer, Dereje Popa, Dan Stephanou, Harry Automation and Robotics Research Institute University of Texas at Arlington Department of Mechanical Engineering University of Texas at Arlington

ISBN: (纸本)0791842770

Micro-Opto-electro-Mechanical Systems (MOEMS), which are MEMS integrated with photonics, share the traditional challenges of MEMS packaging with the additional issues of optical interconnects and optical surface contamination. Opto-electronic systems require signals through a package using fiber-optics, coaxial or other interconnection approaches. Precise optical component alignment and accurate thermal management is critical to achieve component and system performance capabilities. As the requirements for higher signal speeds and higher data rates grow, and as operating frequencies move to the higher GHz regions and beyond, the choice of packaging technology becomes critical. Optical MEMS packages not only have to provide electrical connections but also support high precision optics and mechanics, vital for operation of optical MEMS devices. Analogous to MEMS, packaging is also a critical path in reliability and cost of MOEMS devices. One of the commonly observed failures is the de-lamination between the chip (die) and the die attach. The focus of this paper is the development of a reliable fluxless die attachment process suitable for MOEMS assemblies with long operational life time. The reliability assessment was carried out at the Texas Microfactory ™at UT Arlington according to the MIL-STD-883F for die shear reliability. Copyright © 2007 by ASME.

关键词： Electronics packaging

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Flexible wheeurail contact model for railway vehicle dynamics without pre-calculation

Flexible wheeurail contact model for railway vehicle dynamic...

引用

2007 ASME Rail Transportation Division Fall Conference

作者： Durali, Mohammad Salehi, S. Hassan Jalili, Mohammad Mehdi Center of Excellence for Design Robotics and Automation Mechanical Engineering Department Sharif University of Technology PO Box 11365-9567 Tehran Iran

ISBN: (纸本)9780791848005

An advanced method using progressive concept of geometrical correspondence is applied to create a new wheel/rail contact model based on virtual penetration theory. The geometry and contact mechanism are solved simultaneously because of the independency in a defined correspondence. The model takes the penetrated profiles of wheel and rail and also associated creeps as inputs, and produces driving contact forces as output. The advantage of this model is that it doesn't require pretabulation of rigid contact situation. The method allows calculating flexible, non-elliptical, multiple contact patches during integration of the model. Consequently the rails with substructures can vibrate separately from the vehicle in a flexible wheel/rail contact model. The simulation results indicate that this method can be used in various rail vehicle dynamic problems. Copyright © 2007 by ASME.

关键词： Rails

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Investigation of vertical displacement thermal actuators

Investigation of vertical displacement thermal actuators

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Smart Structures, Devices, and Systems III

作者： Dhaubanjar, Naresh Rao, Smitha M. N. Lun-Chen, Hsu Luquire, Matthew Popa, Dan Chiao, Mu Stephanou, Harry Chiao, J.-C. Automation and Robotics Research Institute University of Texas Arlington United States Department of Electrical Engineering University of Texas Arlington United States Department of Mechanical Engineering University of British Columbia Canada

ISBN: (纸本)0819465232

In this paper, we present design, modeling, fabrication, testing techniques and experimental verification for a bidirectional thermal actuator. The actuation principle is based on the asymmetrical thermal expansion of pseudo-bimorph microstructures due to the difference in the electrical resistance of two stacked poly-silicon layers. Bi-directional actuation is achieved depending upon the application of currents on either the top or bottom layers. Various designs were fabricated using the commercial foundry process PolyMUMPS and characterized with a reflective microscope and an optical profiler. Previous demonstrated designs had a limited vertical displacement due to the mechanical limitation imposed by the flexural lengths of the actuator arms. We proposed a new design allowing an increase of the maximum displacement by 85% with the same input voltage of 7V. The flexure arm is incorporated in the top silicon layer such that the torsion forces on the flexural arms are minimized. This enables larger deflection of the actuator arm without significant increase in the temperature. Different device configurations have been designed and tested. The temperature distributions on the actuator arms and displacements of the actuators at various conditions were analyzed using finite-element analysis and verified experimentally. We will discuss the design configuration, testing techniques and practical issues. The potential applications of the out-of-plane actuators include flow sensors, variable capacitors, resistive sensors, optical switches and RF switches.

关键词： Actuators

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Robust control of space robot for capturing objects using optimal control method

Robust control of space robot for capturing objects using op...

引用

International Conference on Information Acquisition, ICIA 2007

作者： Huang, Panfeng Yan, Jie Yuan, Jianping Xu, Yangsheng Research Center for Intelligent Robotics College of Astronautics Northwestern Polytechnical University Xi'an China Department of Mechanical and Automation Engineering Chinese University of Hong Kong Hong Kong

ISBN: (纸本)1424412196

The capturing operation for the space object by space robot can not be avoided in order to complete the on-orbital services, such as repairing, maintaining, inspecting and exchanging orbital replace unit (ORU). However, there are some unknown factors, such as the unknown payload and unknown modeling of object and the other uncertain dynamic parameters in the space robot, will affect the performance and the security of the space robot when the space robot captures the unknown object. Therefore, it is significant to design a robust control law that will guarantee the performance and security of the space robot under these uncertainties. Here, we propose a new optimal control method to robust control of space robot. To design the robust control law, we translate the robust control problem into an optimal control problem, where the uncertainties are reflected in the objective function index. We optimize this objective function to realize the robust control. An illustrative example shows that the proposed approach is remarkable. ©2007 IEEE.

关键词： Robust control

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A compact optical fiber scanner for medical imaging

A compact optical fiber scanner for medical imaging

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Smart Structures, Devices, and Systems III

作者： Dhaubanjar, Naresh Hu, Hans Dave, Digent Phuyal, Pratibha Sin, Jeongsik Stephanou, Harry Chiao, J.-C. Automation and Robotics Research Institute University of Texas Arlington TX 76019 Department of Electrical Engineering University of Texas Arlington TX 76019 Bioengineering Department University of Texas Arlington TX 76019

ISBN: (纸本)0819465232

A compact fiber optic scanner for biomedical applications such as optical coherent tomography has been designed, fabricated and tested. The scanner is designed as an in vivo device and composed of an optical fiber coated with nickel-powder loaded paint for external magnetic actuation. The compactness of the imaging device makes it suitable for applications where size, precision and low power consumption is critical. We have previously demonstrated the principles utilizing magnetic actuation for the fiber scanner coated with magnetic gel. This work focused on verification and optimization of the scanner operation. The magnetic properties of the nickel particle mixed with paint were characterized using an alternating gradient magnetometer. The optical scanner is externally actuated by an electromagnet and so it does not require a voltage or current supply in the probe itself. The displacements of the scanner were recorded using a position sensitive detector. The result showed a 0.8-mm displacement under the influence of a static magnetic field of 17.6 KA/m in a fiber with a moveable length of 4.2cm. Dynamic analysis showed a displacement of 0.83mm with an input current amplitude of 41mA and a magnetic field of 2.4 KA/m. The measurements are in good agreement with the theoretical lumped-element calculations. Finite-element analysis was performed and the results agree with the theoretical and experimental results. The static and dynamic displacements of the fiber optic scanner depend on the thickness and length of the magnetic coating. Thus, scanners for different displacements and operating frequencies can be designed by varying the coating thickness and length.

关键词： Optical fibers

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High speed solenoid valves in pneumatic servo applications

High speed solenoid valves in pneumatic servo applications

引用

Mediterranean Conference on Control and automation (MED)

作者： Zeljko Situm Tihomir Zilie Mario Essert Department of Robotics and Automation of Production Systems Zagreb Croatia Faculty of Mechanical Engineering and Naval Architecture Department of Robotics and Automation of Production Systems Zagreb Croatia Faculty of Mechanical Engineering and Naval Architecture Department of Robotics and Automation of Production Systems Zagreb Croatia

Pneumatic driving systems are mainly used in industrial applications where the moving parts are usually fixed by the mechanical stops. For flexible and precise positioning tasks of pneumatic drives relatively expensive proportional valves have been implemented. In order to develop cheaper pneumatic servo systems, the employment of low-cost on/off solenoid valves have received considerable attention. But, the traditional technologies used in on/off solenoid valves manifest different problems caused by the electric and thermal effects, inertial forces of their mechanical parts and friction phenomenon. However, it seems that innovative technology used in fast switching solenoid valves gives better possibilities in control of pneumatic systems due to their negligible internal friction and modular architecture. In this paper a control method based on pulse-width-modulation algorithm for position control of a pneumatic actuator with high-speed solenoid valve is considered and experimentally verified.

关键词： Solenoids Valves Servomechanisms Friction Employment Thermal force Control systems Pneumatic systems Position control Pneumatic actuators

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Packaging carbon nanotube based infrared detector

Packaging carbon nanotube based infrared detector

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2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007

作者： King, Wai Chiu Lai Ning, Xi Jiangbo, Zhang Guangyong, Li Hongzhi, Chen Department of Electrical and Computer Engineering Michigan State University United States Department of Electrical and Computer Engineering University of Pittsburgh United States Robotics and Automation Laboratory Electrical and Computer Engineering Michigan State University East Lansing MI 48824 United States

ISBN: (纸本)1424406080

We present a fabrication and packaging method of carbon nanotube (CNT) based infrared (IR) sensor chip using parylene C layer. CNT was found to be sensitive under near IR radiation and it could be used as IR sensing element. Parylene C thin Aim was used as a conformal pin hole free insulating layer and oxygen barrier for protecting CNTs during the detection. The IR transmission properties of parylene C layer and the influence on the response of the CNT sensor were studied. Our experimental results showed that the CNT sensor without parylene C protection exhibited current change when it was exposed to the IR laser. The sensing current percentage changes decreased when the parylene C thin film substrate was placed between the CNT sensor and IR laser source. It implied the IR absorption behavior of parylene C thin film. We also found that the IR absorption level is proportional to the thickness of the parylene C layer. The parylene C packaged CNT sensor was fabricated and tested under near IR radiation. Preliminary results indicated that the CNT IR detector coated with parylene C was capable of sensing IR radiation and exhibited repeatable response. Moreover, the IV characteristic of the sensor chip was measured when it was surrounded by dry ice for long time to investigate its long term stability under moisture environment. Therefore, the packaging process can become possible to fabricate a CNT based IR sensor array which possesses more stable and reliable performance. © 2007 IEEE.

关键词： Carbon nanotubes

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Output feedback decoupling of neutral time delay systems

Output feedback decoupling of neutral time delay systems

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2007 Mediterranean Conference on Control and automation, MED

作者： Panagiotakis, G.E. Koumboulis, F.N. Paraskevopoulos, P.N. Halkis Institute of Technology Department of Automation 34400 Psahna Evias Greece National Technical University of Athens Division of Signals Control and Robotics Department of Electrical and Computer Engineering 15773 Zographou Athens Greece

ISBN: (纸本)142441282X

The problem of Input Output Decoupling is studied for the case of general neutral multi-delay systems, via proportional realizable output feedback. Using a pure algebraic approach, the necessary and sufficient conditions for the problem to have a realizable solution are established and the general analytical expressions of the proportional realizable controller matrices, are derived. © 2007 IEEE.

关键词： Timing circuits

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Introducing Fuzzy Cognitive Maps for decision making in precision agriculture

Introducing Fuzzy Cognitive Maps for decision making in prec...

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6th European Conference on Precision Agriculture, ECPA 2007

作者： Markinos, Ath. Papageorgiou, El. Stylios, Chr. Gemtos, Th. Department of Agriculture Laboratory of Farm Mechanization University of Thessaly Greece Department of Electrical and Computer Engineering Laboratory for Automation and Robotics University of Patras Greece TEI of Epirus Department of Telecommunications Informatics and Management Artas Epirus Greece

ISBN: (纸本)9789086860241

A Fuzzy Cognitive Maps (FCMs) is a modelling methodology based on exploiting knowledge and experience. It comprises the main advantages of fuzzy logic and neural networks, representing a graphical model that consists of nodes-concepts (describing elements of the system) which are connected with weighted edges (representing the cause and effect relationships among the concepts). FCMs have proved to be a promising modeling methodology with many successful applications in different areas especially for simulating system design, modeling and control. In this work, FCMs are introduced to model a decision support system for precision agriculture (PA). The FCM model developed consists of nodes which describe soil properties and cotton yield and of the weighted relationships between these nodes. The nodes of the FCM model represent the main factors influencing cotton crop production i.e. essential soil properties such as texture, pH, OM, K, and P. The proposed FCM model addresses the problem of crop development and spatial variability of cotton yield, taking into consideration the spatial distribution of all the important factors affecting yield. The first results of the study are very promising;our model achieves a 70% average success rate on yield class prediction between two possible categories (low and high) for three different years. This model will be further investigated to achieve better results by introducing learning algorithms into FCMs.

关键词： Crops

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