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Large Pre-Trained Models and Few-Shot FineTuning for Virtual Metrology: A Framework for Uncertainty-Driven Adaptive Process Control in Semiconductor Manufacturing

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IEEE Transactions on Automation science and engineering 2025年 22卷 15351-15370页

作者： Lin, Chin-Yi Tseng, Tzu-Liang Emon, Solayman Hossain Tsai, Tsung-Han University of Texas at EL Paso Department of Industrial Manufacturing and Systems Engineering Texas El PasoTX79968 United States Computational Science Program University of Texas at EL Paso Texas El PasoTX79968 United States National Taipei University of Business Institute of Information and Decision Sciences Taipei10051 Taiwan

High-precision wafer metrology poses significant cost and throughput challenges in modern semiconductor manufacturing, where frequent process changes and recipe variations demand highly adaptive and scalable solutions. In this paper, we present a Generative-FewShot-Active Virtual Metrology (GFA-VM) framework that unifies large-scale generative modeling, few-shot fine-tuning, and uncertainty-driven active sampling into a single, data-centric system. A foundational generative model, built on a hybrid architecture of Transformer networks and Variational Autoencoders (VAEs), learns diverse sensor characteristics in an offline stage without relying on extensive labeled data. During online inference, the model produces both wafer quality predictions and predictive uncertainties;samples exceeding a dynamic uncertainty threshold are selected for physical measurement and few-shot model recalibration. This selective sampling both reduces measurement costs and adapts rapidly to new process conditions (e.g., novel recipes or equipment upgrades), requiring only a handful of freshly labeled wafers. The paper further addresses the long-term stability of the system through a self-updating mechanism that adjusts the uncertainty threshold when distributional shifts occur. Empirical evaluations confirm that our GFA-VM approach achieves state-of-the-art accuracy while significantly reducing metrology overhead compared to conventional virtual metrology methods. Additionally, rigorous theoretical analyses—including proofs of convergence and label cost bounds—demonstrate the reliability of using a generative foundation plus meta-learning technique. By fostering on-demand adaptation within a closedloop framework, GFA-VM offers a comprehensive, scalable strategy for next-generation semiconductor process control. © 2004-2012 IEEE.

关键词： Semiconductor device measurement Metrology Semiconductor device modeling Semiconductor process modeling Uncertainty Adaptation models Accuracy Data models Predictive models Manufacturing

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Multivariate Time-Series Deep Learning for Joint Prediction of Temperature and Relative Humidity in a Closed Space 8

Multivariate Time-Series Deep Learning for Joint Prediction ...

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8th International Conference on Computer science and computational Intelligence, ICCSCI 2023

作者： Gunawan, Fergianto E. Budiman, Arief S. Pardamean, Bens Juana, Endang Romeli, Sugiarto Cenggoro, Tjeng W. Purwandari, Kartika Hidayat, Alam A. Redi, Anak A.N.P. Asrol, Muhammad Industrial Engineering Department BINUS Graduate Program - Master of Industrial Engineering Bina Nusantara University Jakarta11480 Indonesia Computer Science Department BINUS Graduate Program - Master of Computer Science Program Bina Nusantara University Jakarta11480 Indonesia Bioinformatics and Data Science Research Center Bina Nusantara University Jakarta11480 Indonesia Electrical Engineering Department Faculty of Industrial Technology Universitas Trisakti Jakarta11440 Indonesia PT Impack Pratama Industri Jakarta14350 Indonesia Computer Science Department School of Computer Science Bina Nusantara University Jakarta11480 Indonesia Mathematics Department School of Computer Science Bina Nusantara University Jakarta11480 Indonesia

An accurate predictive model of temperature and humidity plays a vital role in many industrial processes that utilize a closed space such as in agriculture and building management. With the exceptional performance of deep learning on time-series data, developing a predictive temperature and humidity model with deep learning is propitious. In this study, we demonstrated that deep learning models with multivariate time-series data produce remarkable performance for temperature and relative humidity prediction in a closed space. In detail, all deep learning models that we developed in this study achieve almost perfect performance with an R value over 0.99. © 2023 The Authors. Published by Elsevier B.V.

关键词： closed space deep learning humity prediction indoor temperature prediction

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Folding angle and wing flexibility influence the flight performance of origami winged fruits

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Nonlinear Dynamics 2024年第13期112卷 10995-11011页

作者： Cai, Jing-Fang Hsu, Ya-Chun Yen, Yu-Chen Lee, Yun-Chung Peyton, Bernie Huang, Mei-Jiau Yu, Hon-Tsen Juang, Jia-Yang Department of Mechanical Engineering National Taiwan University Taipei106319 Taiwan Department of Life Science National Taiwan University Taipei106319 Taiwan Berkeley CA United States Program in Nanoengineering and Nanoscience Graduate School of Advanced Technology National Taiwan University Taipei106319 Taiwan Degree Program of Genome and Systems Biology National Taiwan University Taipei106319 Taiwan

Winged fruits possess a unique flight mechanism relying on simple geometric structures rather than neuromuscular control. This study proposes an innovative approach using origami techniques to create three-winged model fruits, serving as a proxy for understanding the flight dynamics of natural winged fruits. Paper is employed to simulate inherent wing flexibility, with the option to add plastic frames for rigidity. We comprehensively investigate the free fall motion of both rigid and flexible winged fruits through experimental and numerical analyses. Velocity–time curves reveal a three-stage descent pattern—acceleration, deceleration, and steady states. The overshoot phenomenon is attributed to rapid lift increase due to leading-edge vortices attaching stably to the wings. This insight sheds light on aerodynamics governing fruit flight. Compared with rigid wings, flexible wings exhibit two key properties—slower descent and higher self-orienting capability—that facilitate a more stable and longer-distance dispersal of seeds under crosswind conditions. Our study demonstrates the potential benefits of flexible wings in natural seed distribution. This study advances our understanding of winged fruit flight dynamics, utilizing origami as a powerful tool for biomimetic investigations. The findings have broad implications, from improving aerodynamic designs to developing efficient micro air vehicles and electronic microfliers, and understanding seed dispersal evolution. Graphical abstract: (Figure presented.). © The Author(s), under exclusive licence to Springer Nature B.V. 2024.

关键词： Fruits

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LATTICE-VALUED BOTTLENECK DUALITY

arXiv

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arXiv 2024年

作者： Ghrist, Robert Gould, Julian Lopez, Miguel Department of Mathematics Department of Electrical & Systems Engineering and Program in Applied Mathematics & Computational Science University of Pennsylvania United States

This note reformulates certain classical combinatorial duality theorems in the context of order lattices. For source-target networks, we generalize bottleneck path-cut and flow-cut duality results to edges with capacities in a distributive lattice. For posets, we generalize a bottleneck version of Dilworth’s theorem, again weighted in a distributive lattice. These results are applicable to a wide array of non-numerical network flow problems, as shown. All results, proofs, and applications were created in collaboration with AI language models. An appendix documents their role and *** Codes 06D05, 90C35, 06A07 © 2024, CC BY.

关键词： Combinatorial optimization

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Power Quality Assessment of Oil and Gas Platform with High Penetration of Floating Offshore Wind Power 8

Power Quality Assessment of Oil and Gas Platform with High P...

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8th Southern Power Electronics Conference and the 17th Brazilian Power Electronics Conference, SPEC / COBEP 2023

作者： Medeiros, Kassiane De Sousa Callegari, João Marcus Soares Da Rocha, Lorrana Faria Brandão, Danilo Iglesias Graduate Program in Electrical Engineering Universidade Federal de Minas Gerais Belo Horizonte Brazil Norwegian University of Science and Technology Department of Electric Energy Trondheim Norway

ISBN: (纸本)9798350321128

This paper aims to analyze the effect on power quality of a Floating Production Storage and Offloading (FPSO) power system under high penetration of wind-based power generation. A set of results simulated in MATLAB/Simulink® is shown to assess different operational scenarios of a typical Brazilian FPSO, from Mero Oil Field. The floating offshore wind power penetration is varied from 10 to 50 MW and the FPSO power quality effects are reported;then the effect of increasing the umbilical distance from 12 to 150 km between the wind farm and FPSO is evaluated;and finally, the reduction in the number of gas turbine generators (3 and 2 generators) is performed. The conclusions are drawn based on steady-state and transient voltage and frequency profiles;active and reactive power flow between loads and generation;the rate of change of frequency and the minimum frequency reached under the disturbance event when a wind generation loss of 10 MW is triggered. © 2023 IEEE.

关键词： Floating production storage and offloading isolated power systems power quality wind power generation

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Telematics Work Field Review Text Classification Using the Naïve Bayes Method

Telematics Work Field Review Text Classification Using the N...

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2022 IEEE Creative Communication and Innovative Technology, ICCIT 2022

作者： Maesya, Aries Heryadi, Yaya Arifin, Yulyani Lukas Suparta, Wayan Bina Nusantara University Binus Graduate Program - Computer Science Computer Science Department Jakarta11480 Indonesia Faculty of Engineering Indonesia

ISBN: (纸本)9781665468763

Indonesia will benefit from a demographic boom in 2030 with a higher labor supply than in earlier decades. Then in industrial revolution 4.0 robotics and artificial intelligence will take the place of low-skilled or menial employment that don't require specialized expertise (AI). To aim research is Telematics Work Field Review Text Classification Using the Naïve Bayes Method. The method using Multinomial Naïve Bayes model which is trained to learn from patterns in training data set without being programmed explicitly. Then, based on the Term Frequency - Inverse Document Frequency, consider the weighting of the word used (TF-IDF). The text classification stage is then carried out using the multinominal nave bayes classification method with evaluation using the confusion matrix, following the acquisition of the TF-IDF value. In the study it took data with web crawling techniques on social media sites twitter. The data collected was 936 data consisting of 7,8% negative sentiments, 26,4% positive sentiments, and 65,8% neutrals. The results of accuracy testing using the Confusion Matrix. And from the results of such tests resulted in an accuracy of 66%, precision 73%, and recall 85%. © 2022 IEEE.

关键词： Telematics

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Investigating the Impact of Data Augmentation for Fine-Grained Grocery Product Classification Based on Vision Transformer

Investigating the Impact of Data Augmentation for Fine-Grain...

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2023 International Conference on Artificial Intelligence Robotics, Signal and Image Processing, AIRoSIP 2023

作者： Rahmania, Rissa Heryadi, Yaya Lukas, Lukas Suparta, Wayan Sonata, Ilvico Bina Nusantara University Binus Graduate Program Computer Science Computer Science Department Jakarta11480 Indonesia Faculty of Engineering Jakarta12930 Indonesia Institut Teknologi Nasional Yogyakarta Faculty of Industrial Technology Department of Electrical Engineering Yogyakarta55281 Indonesia

ISBN: (纸本)9798350327472

The existence of fine-grained image classification supporting smart retail provides effectiveness in recognizing products with high similarity. However, the generic classification method performs poorly in identifying products from a subordinate category. This paper aims to identify augmentation techniques to leverage the Vision Transformer (ViT) model to classify the fine-grained grocery product, which involves embedding patches and transformer encoders to extract the main features. First, we develop a fine-grained image dataset with ColorJitter, CutOut, and combining both augmentations. Secondly, we perform experiments and analysis of ViT size, embedded patch size and image size in the patch embedding process. Lastly, the ViT model are evaluated according to the image sizes 224, 384, and 512 in accuracy, loss, and confusion matrix. The highest accuracy was obtained at 0.9922. The ColorJitter and CutOut improved the confusion matrix in ViT-B/16 and ViT-L/16 with an image size of 384 and 512. The results show that both augmentations in the ViT model are able to distinguish fine-grained grocery products. © 2023 IEEE.

关键词： Embeddings

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High Resolution of City-Level Climate Simulation by GPU with Multi-physical Phenomena 18th

High Resolution of City-Level Climate Simulation by GPU with...

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18th IFIP WG 10.3 International Conference on Network and Parallel Computing, NPC 2021

作者： Watanabe, Koei Kikuchi, Kohei Boku, Taisuke Sato, Takuto Kusaka, Hiroyuki Master’s Program in Computer Science Graduate School of Systems and Information Engineering University of Tsukuba Tsukubashi Japan Center for Computational Sciences University of Tsukuba Tsukubashi Tennodi Japan

ISBN: (纸本)9783030935702

In this paper, we describe the Graphics Processing Unit (GPU) implementation of our City-LES code on detailed large eddy simulations, including the multi-physical phenomena on fluid dynamics, heat absorption and reflection by surface and building materials, cloud effects, and even sunlight effect. Because a detailed simulation involving these phenomena is required for analyses at the street level and several meters of resolution, the computation amount is enormous, and ordinary CPU computation cannot provide sufficient performance. Therefore, we implemented the entire code on GPU clusters with large-scale computing. We applied OpenACC coding to incrementally implement relatively easy programming and eliminate data transfers between the CPU and GPU memories. Based on this research, we determined that the elimination of data transfers is effective, even in the case where a part of the code execution on the GPU is slower than the CPU, owing to the absence of spatial parallelism. The objective of this study is to perform a complete climate simulation on a few square-kilometers field around the Tokyo Station, considering the finest resolution of the original highlighted area of the Marathon race in the Olympic Games Tokyo 2020. We successfully transferred the entire code to the GPU to provide approximately eight times the performance of CPU-only computation on multi-GPU per node with a large scale cluster. © 2022, IFIP International Federation for Information Processing.

关键词： Graphics processing unit

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Exploring Shifted Domain Problem within MNIST Dataset

Exploring Shifted Domain Problem within MNIST Dataset

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2023 International Conference on Computer science, Information Technology and engineering, ICCoSITE 2023

作者： Hidayaturrahman Heryadi, Yaya Lukas Suparta, Wayan Arifin, Yulyani Bina Nusatara University BINUS Graduate Program - Computer Science Computer Science Department Jakarta11480 Indonesia Faculty of Engineering Jakarta12930 Indonesia Institut Teknologi Nasional Yogyakarta Faculty of Industrial Technology Department of Electrical Engineering Yogyakarta55281 Indonesia

ISBN: (纸本)9798350320954

Domain data can be shifted in any direction so it will be shared in different distributions to its original domain. This could be a problem since the model was trained with different distributions. It is found that adversarial domain adaptation using domain adversarial neural networks (DANN) can help to solve this problem on some scale. DANN can minimize the discrepancy between source and target data so the model can work well in both domains. The experiment is done by utilizing MNIST dataset that shifted into some conditions. In a condition when the shifting of distribution is too far, DANN is struggling to maintain the knowledge extracted from source data which leads to underperformance in the source and target domain. In contrast, when the shifting is closer, DANN can easily fit the model so it can perform well in both domains. It proves DANN is one of the good approaches to performing domain adaptation in small discrepancies. © 2023 IEEE.

关键词： Adversarial Domain Adaptation Domain Shifting Problem MNIST Transfer Learning

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Predicting Microsatellite Instability from Histology Images with Dilated Neighborhood Attention Transformer in Colorectal Cancer 24

Predicting Microsatellite Instability from Histology Images ...

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24th IEEE International Conference on Bioinformatics and Bioengineering, BIBE 2024

作者： Chen, Yun-Chi Chao, Tung Phandita, Wimaya Nitya Sun, Tzu-Yu Wang, Huai-Zhi Hsieh, Yi-Hsien Hsu, Le-Yin Lin, Che Taipei Taiwan College of Bioresources and Agriculture NTU Taipei Taiwan National Taiwan University of Science and Technology Department of Computer Science and Information Engineering Taipei Taiwan Graduate Institute of Communication Engineering NTU Taipei Taiwan NTU Data Science Degree Program Taipei Taiwan NTU Department of Electrical Engineering Taipei Taiwan Center for Advanced Computing and Imaging in Biomedicine NTU Taipei Taiwan NTU Smart Medicine and Health Informatics Program Taipei Taiwan

ISBN: (纸本)9798331518622

Microsatellite instability (MSI) is a pivotal genetic marker influencing the efficacy of immunotherapy in colorectal cancer. Traditional MSI examination often requires additional genetic or immunohistochemical tests, whereas histology images, widely available in colorectal cancer diagnosis, offer a valuable alternative for MSI prediction. Although Transformer-based models have demonstrated promising outcomes in predicting MSI from histology images, they are hampered by traditional local attention mechanisms that struggle to capture long-range interdependencies and establish a comprehensive global receptive field. In this study, we introduce DiNAT-MSI, a novel framework for histology-based MSI prediction that incorporates the Dilated Neighborhood Attention Transformer (DiNAT). This model enhances global context recognition and substantially expands receptive fields, all without additional computational burden. Our results demonstrate that DiNAT-MSI achieves a superior patientwise AUROC compared to ResNet18 and Swin Transformer, along with commendable explainability. Our work not only illustrates a more accessible diagnostic tool for leveraging histological data but also underscores the potential of Transformerbased models with sophisticated attention designs in advancing precision medicine for colorectal cancer patients. © 2024 IEEE.

关键词： Diseases

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