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C4F6 Etching Characteristics for High-Aspect-Ratio Etching of SiO2 Films Using an Inductively Coupled Plasma Etching System With Low-Frequency Bias Power

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Plasma Processes and Polymers 2025年第0期

作者： Wei, Jiachen Woo, Byungjun Lee, DaeKug Jeong, Ki-Hyeok Kwon, Kwang-Ho Department of Control and Instrumentation Engineering Korea University-Sejong Campus Sejong Korea Republic of Department of Computer and Information Science Korea University-Sejong Campus Sejong Korea Republic of

In this study, the etching characteristics of C4F6 gas are investigated using inductively coupled plasma (ICP) etching equipment to apply a high-aspect-ratio etching process to SiO2. The use of a CF4 + C4F6 + He gas mixture in the ICP etching system provides a lower F atom density, a higher polymerization capacity with increasing C4F6 gas proportion, and better SiO2/amorphous carbon layer selectivity. With an increase in the C4F6 gas mixing ratio, the bowing phenomenon is alleviated, and a vertically etched profile is formed regardless of the source and bias power. The etching characteristics demonstrate that ICP etching using C4F6 gas is an excellent alternative to capacitively coupled plasma (CCP) etching for the development of next-generation high-aspect-ratio-contact etching processes. © 2025 Wiley-VCH GmbH.

关键词： Aspect ratio

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A New Belief-Based Incomplete Pattern Unsupervised Classification Method : Extended Abstract 39

A New Belief-Based Incomplete Pattern Unsupervised Classific...

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39th IEEE International Conference on Data engineering, ICDE 2023

作者： Zhang, Zuowei Liu, Zhe Ma, Zongfang Zhang, Yiru Wang, Hao University of Rennes 1 Institut de Recherche en Informatique et Systèmes Aléatoires France Xi'an University of Architecture and Technology School of Information and Control Engineering China Norwegian University of Science and Technology Department of Computer Science Norway

ISBN: (纸本)9798350322279

Imputing the incomplete patterns in clustering tasks is a common but risky procedure, because the estimated values may affect the real distribution of the data and deteriorate the results. To address this problem, a new belief-based incomplete pattern unsupervised classification method (BPC) with uncertainty and imprecision reasoning is proposed in this paper. First, the complete patterns are grouped into a few clusters to obtain the corresponding reliable centers, and thereby are divided into reliable patterns and unreliable ones by an optimization method. Second, a basic classifier trained by reliable patterns is employed to classify unreliable patterns and incomplete patterns edited by the neighbors. Finally, some imprecise patterns are carefully reassigned again by a new distance-based rule depending on the obtained reliable centers and belief functions theory. The simulation results show that the BPC has the potential to deal with real datasets. © 2023 IEEE.

关键词： Uncertainty analysis

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Network-based analysis to uncover drug-induced adverse side-effects

Network-based analysis to uncover drug-induced adverse side-...

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2023 IEEE International Conference on Bioinformatics and Biomedicine, BIBM 2023

作者： Funari, Alessio Paci, Paola Conte, Federica Sapienza University of Rome Department of Translational and Precision Medicine Rome Italy National Research Council Institute for Systems Analysis and Computer Science 'Antonio Ruberti' Rome Italy Sapienza University of Rome Department of Computer Control and Management Engineering Rome Italy Karolinska Institutet Stockholm17177 Sweden

ISBN: (纸本)9798350337488

Despite the drug approval process consists of extremely rigorous clinical and preclinical studies, not all side effects are identified before its marketing, posing a significant risk to public health. Furthermore, considering the huge use of economic and human resources, in-silico predictive approaches for the identification of side effects are essential. In this study, we introduce a new method based on random walk with restart algorithm to delineate previously unidentified links between drugs and side effects, and we apply it on the drug-induced Asthma and long QT syndrome. We identified the genes potentially involved in the development of the analyzed side effect by comparing side-effect-related drugs with drugs not known to induce side effects. Analyzing the sets of genes most likely influenced by the perturbation of each individual drug, we observed that, on average, side-effect-related drugs perturb a higher percentage of genes involved in the development of side effects compared to side-effect-unrelated drugs. Based on this finding, we developed a classifier to explore all possible unknown associations between drugs and side effects. This method can be extended to the analysis of other side effects as well. © 2023 IEEE.

关键词： network medicine random walk side effect

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Robust Length of Stay Prediction Model for Indoor Patients

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computers, Materials & Continua 2022年第3期70卷 5519-5536页

作者： Ayesha Siddiqa Syed Abbas Zilqurnain Naqvi Muhammad Ahsan Allah Ditta Hani Alquhayz M.A.Khan Muhammad Adnan Khan Department of Mechatronics and Control Engineering University of Engineering and TechnologyLahore54000Pakistan Department of Information Sciences Division of Science and TechnologyUniversity of EducationLahore54000Pakistan Department of Computer Science and Information College of Science in ZulfiMajmaah UniversityAl-Majmaah11952Saudi Arabia Riphah School of Computing&Innovation Faculty of ComputingRiphah International UniversityLahore CampusLahore54000Pakistan Pattern Recognition and Machine Learning Lab Department of SoftwareGachon UniversitySeongnam13557Korea

Due to unforeseen climate change,complicated chronic diseases,and mutation of viruses’hospital administration’s top challenge is to know about the Length of stay(LOS)of different diseased patients in the *** management does not exactly know when the existing patient leaves the hospital;this information could be crucial for hospital *** could allow them to take more patients for *** a result,hospitals face many problems managing available resources and new patients in getting entries for their prompt ***,a robust model needs to be designed to help hospital administration predict patients’LOS to resolve these *** this purpose,a very large-sized data(more than 2.3 million patients’data)related to New-York Hospitals patients and containing information about a wide range of diseases including Bone-Marrow,Tuberculosis,Intestinal Transplant,Mental illness,Leukaemia,Spinal cord injury,Trauma,Rehabilitation,Kidney and Alcoholic Patients,HIV Patients,Malignant Breast disorder,Asthma,Respiratory distress syndrome,*** been analyzed to predict the *** selected six Machine learning(ML)models named:Multiple linear regression(MLR),Lasso regression(LR),Ridge regression(RR),Decision tree regression(DTR),Extreme gradient boosting regression(XGBR),and Random Forest regression(RFR).The selected models’predictive performance was checked using R square andMean square error(MSE)as the performance evaluation *** results revealed the superior predictive performance of the RFRmodel,both in terms of RS score(92%)and MSE score(5),among all selected *** Exploratory data analysis(EDA),we conclude that maximumstay was between 0 to 5 days with the meantime of each patient 5.3 days and more than 50 years old patients spent more days in the *** on the average LOS,results revealed that the patients with diagnoses related to birth complications spent more days in the hospital than other *** finding coul

关键词： Length of stay machine learning robust model random forest regression

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Multiplier analysis of Lurye systems with power signals 63

Multiplier analysis of Lurye systems with power signals

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63rd IEEE Conference on Decision and control, CDC 2024

作者： Heath, William P. Carrasco, Joaquin Bangor University School of Computer Science and Engineering Dean St LL57 1UT United Kingdom Nancy Rothwell Building University of Manchester Control Systems and Robotics Group Department of Electrical and Electronic Engineering M13 9PL United Kingdom

ISBN: (纸本)9798350316339

Multipliers can be used to guarantee both the Lyapunov stability and input-output stability of Lurye systems with time-invariant memoryless slope-restricted nonlinearities. If a dynamic multiplier is used there is no guarantee the closedloop system has finite incremental gain. It has been suggested in the literature that without this guarantee such a system may be critically sensitive to time-varying exogenous signals including noise. We show that multipliers guarantee the power gain of the system to be bounded and quantifiable. Furthermore power may be measured about an appropriate steady state bias term, provided the multiplier does not require the nonlinearity to be odd. Hence dynamic multipliers can be used to guarantee Lurye systems have low sensitivity to noise, provided other exogenous systems have constant steady state. We illustrate the analysis with an example where the exogenous signal is a power signal with non-zero mean. © 2024 IEEE.

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Complex Permeability Determination for EE Core Based on Flexible PCB Fixture and Magnetic Flux Path Length Analysis 2

Complex Permeability Determination for EE Core Based on Flex...

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2nd China Power Supply Society Electromagnetic Compatibility Conference, CPEMC 2024

作者： Jie, Huamin Zhao, Zhenyu Chang, Yongqi Wang, Changdong Jiang, Shiqi Gao, Richard Xian-Ke See, Kye Yak School of Electrical and Electronic Engineering Nanyang Technological University Singapore Singapore Department of Electrical and Computer Engineering National Univeristy of Singapore Singapore Singapore Department of Control Science and Engineering Harbin Institute of Technology Harbin China School of Electronics and Information Engineering Harbin Institute of Technology Harbin China School of Electrical Engineering and Automation Harbin Institute of Technology Harbin China Institute of High Performance Computing A*STAR Singapore Singapore

ISBN: (纸本)9798331509552

The complex permeability of magnetic cores acts as a vital factor in electromagnetic interference (EMI) filtering choke design and optimization. Many efforts have been reported for toroid cores, but fewer target those with other shapes, such as EE, EI, UU, and UI cores. Owing to their commonly used in planar EMI filters, determining the complex permeability of them is of significance. Targeting EE cores, this paper presents a flexible printed circuit board (PCB)-based fixture adapter tailored designed for performing the measurement, while the corresponding core permeability can be calculated through magnetic flux path length analysis. The experiments validate the effectiveness and accuracy of the proposed methods, spanning a wide frequency range up to 120 MHz. ©2024 IEEE.

关键词： Magnetic flux

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Federated Learning With Meta-Layers Training for Privacy-Preserving in Vehicular Consumer Electronics

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IEEE Transactions on Consumer Electronics 2024年

作者： Shen, Xiaoyang Li, Haibin Li, Yaqian Zhang, Wenming Alenazi, Mohammed J.F. Agarwal, Kadambri Yanshan University College of Electrical Engineering Hebei Qinhuangdao066000 China Key Laboratory of Industrial Computer Control Engineering of Hebei Province Hebei Qinhuangdao066000 China King Saud University College of Computer and Information Sciences Department of Computer Engineering Riyadh11451 Saudi Arabia ABES Engineering College Department of Computer Science and Engineering Ghaziabad201009 India

Vehicular consumer electronics, such as autonomous vehicles (AVs), need collecting large amounts of private user information, which face the risk of privacy leakage. To protect the privacy of consumers, researchers have proposed to apply federated learning (FL) to privacy-preserving vehicular consumer electronics, that is, leveraging FL for collaborative training of a decision model without exchanging the sensitive information generated by AVs. However, FL generally needs to exchange the gradients of client models periodically with the central server, which can be attacked by adversaries to infer user information. Thereby, it may still face the risk of privacy leakage. To solve that challenge, we put forward a novel FL framework, called FL with Meta-Layers Training (FL-MLT). Instead of exchanging the gradients of the client models, it exchanges, meta-layers with the central servers. Since meta-layers are only a slice of the client models, exchanging them helps protect privacy. On the other hand, they contain meta-knowledge to help the FL training process. In the experiments, we conduct extensive visual classification simulation to evaluate FL-MLT, and the experimental results demonstrate the superior performance of FL-MLT. © 1975-2011 IEEE.

关键词： Federated learning

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Security Issues and Defensive Approaches in Deep Learning Frameworks

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Tsinghua science and Technology 2021年第6期26卷 894-905页

作者： Hongsong Chen Yongpeng Zhang Yongrui Cao Jing Xie Department of Computer Science University of Science and Technology Beijing(USTB)Beijing 100083China Beijing Key Laboratory of Knowledge Engineering for Materials Science Beijing 100083China Department of Computer Science and Technology University of Science and Technology Beijing(USTB)Beijing 100083China Defense Electronics Institute China Industrial Control System Cyber Emergency Response TeamBeijing 100040China

Deep learning frameworks promote the development of artificial intelligence and demonstrate considerable potential in numerous ***,the security issues of deep learning frameworks are among the main risks preventing the wide application of *** on deep learning frameworks by malicious internal or external attackers would exert substantial effects on society and *** start with a description of the framework of deep learning algorithms and a detailed analysis of attacks and vulnerabilities in *** propose a highly comprehensive classification approach for security issues and defensive approaches in deep learning frameworks and connect different attacks to corresponding defensive ***,we analyze a case of the physical-world use of deep learning security *** addition,we discuss future directions and open issues in deep learning *** hope that our research will inspire future developments and draw attention from academic and industrial domains to the security of deep learning frameworks.

关键词： adversarial examples deep learning frameworks defensive approaches security issues

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A control Theoretic Study on Omnidirectional MAVs with Minimum Number of Actuators and No Internal Forces at Any Orientation

A Control Theoretic Study on Omnidirectional MAVs with Minim...

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IEEE Conference on Decision and control

作者： Ahmed Ali Chiara Gabellieri Antonio Franchi Robotics and Mechatronics Department Electrical Engineering Mathematics and Computer Science (EEMCS) Faculty University of Twente Enschede Netherlands Department of Computer Control and Management Engineering Sapienza University of Rome Rome Italy

ISBN: (数字)9798350316339

ISBN: (纸本)9798350316346

We propose a new multirotor aerial vehicle class of designs composed of a multi-body structure in which a main body is connected by passive joints to links equipped with propellers. We have investigated some instances of such class, some of which are shown to achieve omnidirectionality while having a minimum number of inputs equal to the main body Degrees of Freedom DoF’s, only uni-directional positive thrust propellers, and no internal forces generated at steady state. After dynamics are derived following the Euler-Lagrange approach, an I/O dynamic feedback linearization strategy is then used to show the controllability of any desired pose with stable zero dynamics. We finally verify the developed controller with closed-loop simulations.

关键词： Three-dimensional displays Propellers Dynamics controllability Regulation Steady-state Feedback linearization control theory Closed loop systems Vehicle dynamics

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Degree of Spiking Neural P Systems Without Delay

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Chinese Journal of Electronics 2023年第3期21卷 419-424页

作者： Keqin JIANG Xiaolong SHI Department of Control Science and Engineering Key Laboratory of Image Processing and Intelligent Control Huazhong University of Science and Technology Wuhan China School of Computer and Information Anqing Teachers College Anqing China

Spiking neural P systems are a class of distributed parallel computing models inspired from the way neurons communicate with each other by means of electrical impulses (called “spikes”). In this paper, we continue the research of normal forms for spiking neural P systems. Specifically, we prove that the degree of spiking neural P systems without delay can be decreased to two without losing the computational completeness (both in the generating and accepting modes).

关键词： Computational modeling Neurons Parallel processing Delays

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