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Plasma Processes and Polymers 2025年

作者： Wei, Jiachen Woo, Byungjun Lee, DaeKug Jeong, Ki-Hyeok Kwon, Kwang-Ho Department of Control and Instrumentation Engineering Korea University-Sejong Campus Sejong Korea Republic of Department of Computer and Information Science Korea University-Sejong Campus Sejong Korea Republic of

In this study, the etching characteristics of C4F6 gas are investigated using inductively coupled plasma (ICP) etching equipment to apply a high-aspect-ratio etching process to SiO2. The use of a CF4 + C4F6 + He gas mixture in the ICP etching system provides a lower F atom density, a higher polymerization capacity with increasing C4F6 gas proportion, and better SiO2/amorphous carbon layer selectivity. With an increase in the C4F6 gas mixing ratio, the bowing phenomenon is alleviated, and a vertically etched profile is formed regardless of the source and bias power. The etching characteristics demonstrate that ICP etching using C4F6 gas is an excellent alternative to capacitively coupled plasma (CCP) etching for the development of next-generation high-aspect-ratio-contact etching processes. © 2025 Wiley-VCH GmbH.

关键词： Aspect ratio

Collaborative Satisfaction of Long-Term Spatial Constraints in Multi-Agent Systems: A Distributed Optimization Approach (extended version)

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arXiv 2025年

作者： Mehdifar, Farhad Dhullipalla, Mani H. Bechlioulis, Charalampos P. Dimarogonas, Dimos V. The Division of Decision and Control Systems KTH Royal Institute of Technology Stockholm Sweden The Division of Systems and Control The Department of Electrical and Computer Engineering University of Patras Patra Greece

This paper addresses the problem of collaboratively satisfying long-term spatial constraints in multi-agent systems. Each agent is subject to spatial constraints, expressed as inequalities, which may depend on the positions of other agents with whom they may or may not have direct communication. These constraints need to be satisfied asymptotically or after an unknown finite time. The agents’ objective is to collectively achieve a formation that fulfills all constraints. The problem is initially framed as a centralized unconstrained optimization, where the solution yields the optimal configuration by maximizing an objective function that reflects the degree of constraint satisfaction. This function encourages collaboration, ensuring agents help each other meet their constraints while fulfilling their own. When the constraints are infeasible, agents converge to a least-violating solution. A distributed consensus-based optimization scheme is then introduced, which approximates the centralized solution, leading to the development of distributed controllers for single-integrator agents. Finally, simulations validate the effectiveness of the proposed approach. Copyright © 2025, The Authors. All rights reserved.

关键词： Multi agent systems

Physical Intrusion Attack Detection in Fieldbus Network With Passive Fail-Safe Biasing

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IEEE Transactions on Automation Science and engineering 2025年 22卷 14008-14019页

作者： Wang, Xiangming Liu, Yang Yu, Nanpeng Liu, Pengfei Deng, Nanyi Li, Yanan Liu, Ting Xi’an Jiaotong University School of Cyber Science and Engineering MoE KLINNS Laboratory Xi’an710049 China University of California at Riverside Department of Electrical and Computer Engineering RiversideCA92521 United States Xi’an Thermal Power Research Institute Company Ltd. Power Infrastructure Cyber Security Research Center Xi’an710054 China Electric Power Dispatch and Control Center of Guangdong Power Grid Company Ltd. Guangzhou510699 China

Fieldbus is widely used for real-time distributed control in Industrial control Systems (ICSs) due to its simplicity and stability. The real-world fieldbus network contains hundreds of interconnected devices, presenting a widespread network layout. Attackers can attach external intrusion devices to these communication lines to launch various attacks. In this paper, we model the fieldbus network’s channel fingerprint based on the signal’s amplitude and propose a detection method to identify potential attackers (silent intrusion devices that are eavesdropping) via channel fingerprint differences. Leveraging the passive fail-safe biasing voltage in the fieldbus network such as RS485, we can still detect the intrusion device when the fieldbus is idle (i.e., no devices are transmitting commands), which can significantly reduce the detection delay with lower sampling costs. Moreover, our method can adapt to environmental changes with little computational overhead by generating dynamic thresholds. Using a monitoring unit with stored channel fingerprints, our method can be easily deployed in fieldbus networks without occupying communication resources. The effectiveness and robustness of the proposed method have been demonstrated via extensive experiments on two real-world scenarios and one simulation scenario, where we can achieve 100% accuracy and 0% false alarm rates against various intrusion devices. © 2004-2012 IEEE.

关键词： Network intrusion

Semantic Feature Division Multiple Access for Digital Semantic Broadcast Channels

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IEEE Internet of Things Journal 2025年第11期12卷 17123-17136页

作者： Ma, Shuai Sun, Zhiye Shen, Bin Wu, Youlong Li, Hang Shi, Guangming Li, Shiyin Al-Dhahir, Naofal Peng Cheng Laboratory Shenzhen518066 China China University of Mining and Technology School of Information and Control Engineering Xuzhou221116 China ShanghaiTech University School of Information Science and Technology Shanghai201210 China Shenzhen Research Institute of Big Data Guangdong Shenzhen518172 China Xidian University School of Artificial Intelligence Shaanxi Xi'an710071 China The University of Texas at Dallas Department of Electrical and Computer Engineering RichardsonTX75080 United States

In this paper, we propose a digital semantic feature division multiple access (SFDMA) paradigm in multi-user broadcast (BC) networks for the inference and the image reconstruction tasks. In this SFDMA scheme, the multi-user semantic information is encoded into discrete approximately orthogonal representations, and the encoded semantic features of multiple users can be simultaneously transmitted in the same time-frequency resource. Specifically, for inference tasks, we design a SFDMA digital BC network based on robust information bottleneck (RIB), which can achieve a tradeoff between inference performance, data compression and multi-user interference. Moreover, for image reconstruction tasks, we develop a SFDMA digital BC network by utilizing a Swin Transformer, which significantly reduces multi-user interference. More importantly, SFDMA can protect the privacy of users' semantic information, in which each receiver can only decode its own semantic information. Furthermore, we establish a relationship between performance and signal to interference plus noise ratio (SINR), which is fitted by an Alpha-Beta-Gamma (ABG) function. Furthermore, an optimal power allocation method is developed for the inference and reconstruction tasks. Extensive simulations verify the effectiveness and superiority of our proposed SFDMA scheme. © 2014 IEEE.

关键词： Image reconstruction

Reactive Navigation of the Ackermann Steering Robot in Unknown Environments

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Reactive Navigation of the Ackermann Steering Robot in Unkno...

International Conference on Autonomous Robots and Agents, ICARA

作者： ANA ŠELEK IVAN HRABAR SAŠA ŠTEKOVIĆ Department of Control and Computer Engineering Faculty of Electrical Engineering and Computing University of Zagreb Zagreb Croatia Autegra D.O.O. Zagreb Croatia

ISBN: (数字)9798331509231

ISBN: (纸本)9798331509248

Mobile robots are now widely used in numerous real-world applications that have complex navigation requirements, especially in environments used by humans. This requires highly accurate navigation that can be performed in realtime. In this paper, a method for generating a smooth motion of nonholonomic mobile robots is proposed. It enables robots to move optimally toward the desired goal and allows fast path replanning when encountering unknown or dynamic obstacles. The method generates smooth, collision-free trajectories based on clothoids, ensuring high computational efficiency and suitability for realtime path planning. By applying a smoothing algorithm, the proposed method improves the robot's efficiency in terms of travel time and trajectory length from start to goal, as demonstrated by a comparison with model predictive control.

关键词： Smoothing methods Navigation Dynamics Real-time systems Trajectory Computational efficiency Mobile robots Collision avoidance Testing Predictive control

Safe Multi-Robotic Arm Interaction via 3D Convex Shapes

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arXiv 2025年

作者： Kaypak, Ali Umut Wei, Shiqing Krishnamurthy, Prashanth Khorrami, Farshad Control/Robotics Research Laboratory Electrical and Computer Engineering Department Tandon School of Engineering New York University BrooklynNY11201 United States

Inter-robot collisions pose a significant safety risk when multiple robotic arms operate in close proximity. We present an online collision avoidance methodology leveraging 3D convex shape-based High-Order control Barrier Functions (HOCBFs) to address this issue. While prior works focused on using control Barrier Functions (CBFs) for human–robotic arm and single-arm collision avoidance, we explore the problem of collision avoidance between multiple robotic arms operating in a shared space. In our methodology, we utilize the proposed HOCBFs as centralized and decentralized safety filters. These safety filters are compatible with any nominal controller and ensure safety without significantly restricting the robots’ workspace. A key challenge in implementing these filters is the computational overhead caused by the large number of safety constraints and the computation of a Hessian matrix per constraint. We address this challenge by employing numerical differentiation methods to approximate computationally intensive terms. The effectiveness of our method is demonstrated through extensive simulation studies and real-world experiments with Franka Research 3 robotic arms. © 2025, CC BY.

关键词： Robotic arms

Sensor Fault Estimation and Ftc Design for Fractional Linear Systems Using the Conformable Derivative

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Sensor Fault Estimation and Ftc Design for Fractional Linear...

IEEE SSD International Multi-Conference on Systems, Signals and Devices

作者： Ali Omar M. Alsharif A. Jmal O. Naifar Ausama H. Ahmed H. Gassara A. Ben Makhlouf Control and Energy Management laboratory (CEM lab) Sfax University Engineering National School Tunisia Department of Electrical & Computer Engineering Faculty of Engineering Elmergib University Alkhums Libya Control and Energy Management laboratory (CEM lab) Monastir University Tunisia Laboratory of Sciences and Techniques of Automatic Control and Computer Engineering National School of Engineering of Sfax University of Sfax Tunisia Department of Mathematics Faculty of Sciences of Sfax Sfax Tunisia

ISBN: (数字)9798331542726

ISBN: (纸本)9798331542733

In this paper, Fault Tolerant control (FTC) for fractional-order systems (FOS) has not received as much attention in the literature as it has for standard integer-order systems. This work aims to bridge that gap. We propose a practical approach to fault estimation and fault-tolerant control (FTC) specifically designed for linear (FOS) with sensor failures. Our method leverages fractional exponential stability within the Lyapunov framework and employs the Conformable formulation of fractional derivatives. Notably, the primary contribution of this paper is the first application of the Conformable fractional derivative (CFD) in the context of (FTC). To accurately estimate states and faults, the proposed approach utilizes an observer coupled with a customized adaptation law. To validate our theoretical contributions, we present a detailed simulation of a numerical case study.

关键词： Linear systems Bridges Stability Fault tolerant systems Fault tolerant control Observers control theory Standards Lyapunov methods

CAMETA: Conflict-Aware Multi-Agent Estimated Time of Arrival Prediction for Mobile Robots

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arXiv 2025年

作者： Sejersen, Jonas le Fevre Kayacan, Erdal Department of Electrical and Computer Engineering Aarhus University Aarhus C8000 Denmark Automatic Control Group Department of Electrical Engineering and Information Technology Paderborn University Paderborn Germany

This study presents the conflict-aware multi-agent estimated time of arrival (CAMETA) framework, a novel approach for predicting the arrival times of multiple agents in unstructured environments without predefined road infrastructure. The CAMETA framework consists of three components: a path planning layer generating potential path suggestions, a multi-agent ETA prediction layer predicting the arrival times for all agents based on the paths, and lastly, a path selection layer that calculates the accumulated cost and selects the best path. The novelty of the CAMETA framework lies in the heterogeneous map representation and the heterogeneous graph neural network architecture. As a result of the proposed novel structure, CAMETA improves the generalization capability compared to the state-of-the-art methods that rely on structured road infrastructure and historical data. The simulation results demonstrate the efficiency and efficacy of the multi-agent ETA prediction layer, with a mean average percentage error improvement of 29.5% and 44% when compared to a traditional path planning method (A∗) which does not consider conflicts. The performance of the CAMETA framework shows significant improvements in terms of robustness to noise and conflicts as well as determining proficient routes compared to state-of-the-art multi-agent path planners. © 2025, CC BY.

关键词： Mobile robots

On Space-Filling Input Design for Nonlinear Dynamic Model Learning: A Gaussian Process Approach

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arXiv 2025年

作者： Liu, Yuhan Kiss, Máté Tóth, Roland Schoukens, Maarten Control Systems Group Department of Electrical Engineering Eindhoven University of Technology Eindhoven5600 MB Netherlands Systems and Control Laboratory HUN-REN Institute for Computer Science and Control Budapest1111 Hungary

While optimal input design for linear systems has been well-established, no systematic approach exists for nonlinear systems, where robustness to extrapolation/interpolation errors is prioritized over minimizing estimated parameter variance. To address this issue, we develop a novel identification-oriented space-filling input design strategy for efficient covering of a well-defined region of interest. By placing a Gaussian Process (GP) prior on the joint input-state space, the proposed strategy leverages the GP posterior variance to construct a space-filling promoting input design cost function from the Bayesian point of view. This accordingly enables maximization of the coverage in the region of interest, thereby facilitating the generation of informative datasets. Furthermore, we theoretically prove that minimization of the cost function indicates the space-filling behavior. The effectiveness of the proposed strategy is demonstrated on both an academic example and a mass-spring-damper system, highlighting its potential practical impact on efficient exploration in identification scenarios for nonlinear dynamical systems. © 2025, CC BY-NC-SA.

关键词： Cost functions

Multiagent Confrontation Method Based on Three-Party Dynamic Multistrategy Evolutionary Game

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IEEE Transactions on Computational Social Systems 2025年

作者： Jin, Shilong Wang, Yingjie Duan, Peiyong Zhang, Haijing Li, Gang Cai, Zhipeng Yantai University School of Computer and Control Engineering Yantai264005 China Qilu University of Technology Shandong Academy of Sciences Faculty of Electronics Electrical and Control Jinan250353 China Georgia State University Department of Computer Science AtlantaGA30303 United States

Unmanned agents represent a significant advancement in unmanned control and constitute an important element in the future agent warfare. Their autonomous decision-making capabilities are integral to accomplishing tasks independently. To address challenges inherent in multiparty game scenarios that traditional method struggle with and enhance the applicability and accuracy of game decision-making, this article proposes a novel multiagent confrontation method for unmanned vessels, tailored to a three-party dynamic multistrategy evolutionary game in incomplete information scenarios. The approach introduces a new incentive mechanism designed to enhance both individual and collective profits of agents. Using evolutionary game theory, a three-party model is developed, incorporating interactions among player, enemy, and neutral agents. The model tracks the evolution of strategies to identify stable equilibria across various perceptual conditions. Simulations validate the effectiveness of the proposed method in selecting optimal strategies for unmanned vessels in complex battlefield scenarios, demonstrating its potential for improving autonomous decision-making in multiparty confrontations. © 2014 IEEE.

关键词： Multi agent systems