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Anisotropic fluorocarbon plasma etching of Si/SiGe heterostruetures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 2007年第2期25卷 404-409页

作者： Ding, R. Klein, L.J. Eriksson, M.A. Wendt, A.E. Materials Science Program University of Wisconsin-Madison Madison WI 53706 Department of Physics University of Wisconsin-Madison Madison WI 53706 Department of Electrical and Computer Engineering University of Wisconsin-Madison Madison WI 53706

Fluorocarbon plasma etching of Si/SiGe heterostructures is demonstrated as a method for fabrication of quantum devices with vertical sidewalls. The heterostructures consist of layers of Si and SiGe, and anisotropic etching of the heterostructures using plasmas to isolate device elements is an attractive approach to fabricating devices. A challenge that has limited the use of fluorocarbon etching is the difference in Si and SiGe etch rates under comparative conditions. Preferential etching of SiGe can lead to undercutting beneath the top Si layer, causing a reduction in critical device dimensions of unknown magnitude. By using fluorocarbon etch gases with high carbon content, fluorocarbon sidewall passivation improves the anisotropy of etched feature profiles by preventing lateral etching of SiGe. Etch results with a C 4F8/Ar/N2 gas mixture show a straight sidewall profile through the layers of the heterostructure. © 2007 American Vacuum Society.

关键词： Plasma etching

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Securing optical burst switched networks

Securing optical burst switched networks

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7th IASTED International Conferences on Wireless and Optical Communications, WOC 2007

作者： Chen, Yuhua Verma, Pramode K. Department of Electrical and Computer Engineering University of Houston Houston TX 77204-4005 United States Telecommunications Systems Program School of Electrical and Computer Engineering University of Oklahoma - Tulsa Tulsa OK 74135 United States

ISBN: (纸本)9780889866591

Optical Burst Switching (OBS) allows variable size data bursts to be transported directly over DWDM links without encountering O/E/O conversion. This paper identifies potential threats to security in OBS networks. To alleviate the security threats, we propose a Secured Optical Burst Switching (S-OBS) framework that, for the first time, brings security measures to the OBS networks. The contributions of the paper are summarized as follows: 1) This is the first paper that identifies the potential security problems in OBS networks;2) We have proposed a security framework for OBS networks;3) We have proposed two levels of security measures to be incorporated into OBS networks, namely, authentication of burst headers and confidentiality of data bursts;4) We have examined the candidate solutions in each category, and suggested the solutions that are well suited to OBS networks.

关键词： Cryptography

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The development of undergraduate distance education engineering programs in North Carolina

The development of undergraduate distance education engineer...

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114th Annual ASEE Conference and Exposition, 2007

作者： Rajala, Sarah Miller, Tom Mississippi State University United States Department of Electrical and Computer Engineering Mississippi State University United States North Carolina State University United States Department of Electrical and Computer Engineering North Carolina State University United States Engineering Entrepreneurs Program

The College of engineering at North Carolina State University has a strong track record in providing distance education to the citizens in North Carolina through credit-based courses and degree programs. To provide increased access to engineering education on the undergraduate level and enhance the success of the student transfer population, the College of engineering developed two new 2+2 engineering programs and a distance education bachelor of science in engineering program. The 2+2 programs are designed to provide students enrolled at institutions without engineering programs the opportunity to take some of the fundamental engineering courses in addition to their general education courses. After completion of the first two years, the students transfer to one of the Colleges of engineering in North Carolina. Students who have the opportunity to take courses such as introduction to engineering, circuits, statics, and dynamics, are well-positioned to complete their education in only two additional years. The Bachelor of Science in engineering distance education program combines the benefits of site-based and distance learning to students who cannot or are unwilling to relocate to the North Carolina State University campus in Raleigh. In this paper we discuss the challenges and opportunities involved in working with our partner four-year institutions and community colleges in the development and delivery of undergraduate distance education programs and describe the benefits to the citizens of North Carolina and the participating institutions. © American Society for engineering Education, 2007.

关键词： Distance education

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University of Maryland's ventureaccelerator

University of Maryland's ventureaccelerator

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114th Annual ASEE Conference and Exposition, 2007

作者： Laughlin, Scott Magids, Scott Barbe, David University of Maryland United States United States IDG Ventures MTECH Ventures Venture Accelerator Program Department of Electrical and Computer Engineering IEEE

It should be noted that while the four VA companies have benefited greatly from the VA process, and it is believed that they are properly set up to be successful, only time will tell how successful they will be in the long-term. Nevertheless, the successful initiation of the program has generated a number of benefits and rewards. UM and the Clark School are benefiting from evidence of leadership, recruiting differentiation, and financial development. Realizing that there is a probability associated with the success of each startup company, the fact that an orderly process and experienced mentoring is applied to each VA Company should increase the chance of success. Accordingly, the region should benefit from economic development gains vis-à-vis job and tax revenue growth. Finally, societal benefits should be enjoyed because of graduating skilled technologists with entrepreneurial (or intrepreneurial) inclinations, as well as by bringing valuable innovations to customer markets. It is believed that the VentureAccelerator program could be replicated at other universities. © American Society for engineering Education, 2007.

关键词： Industrial engineering

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A scholarship recruitment and selection strategy that successfully attracts diverse and academically talented freshmen

A scholarship recruitment and selection strategy that succes...

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114th Annual ASEE Conference and Exposition, 2007

作者： Papadopoulos, Chris Brucks, Karen Key, Eric Munson, Ethan Vairavan, K. University of Wisconsin Milwaukee United States Department of Civil Engineering and Mechanics University of Wisconsin Milwaukee United States UWM Computer Science Engineering and Mathematics Scholarship Program Brazil Department of Mathematical Sciences University of Wisconsin Milwaukee United States Mathematical Science Department UWM's Actuarial Science Program Department of Electrical Engineering and Computer Science University of Wisconsin-Milwaukee United States ACM SIGWEB Group on Hypertext Hypermedia and the Web Department of Electrical Engineering and Computer Science Department of Medical Informatics

We describe recruitment and selection procedures of the computer Science, engineering, and Mathematics Scholarship (CSEMS) program at the University of Wisconsin-Milwaukee that are designed to attract students who are academically talented, financially needy, and diverse. In particular, we address the possible exclusion of underrepresented minority students that could result if standardized test scores are used indiscriminately as metrics of student performance in both recruitment and selection procedures. We describe a "conditional award" process that enables students whose calculus placement is moderately below calculus to competitively apply for and receive scholarships;awards to such students are activated on the condition that they attempt to attain calculus placement prior to matriculation. We present data that demonstrate moderate effectiveness of these methods in fostering diversity among our scholars and reasonably encouraging retention and estimated graduation rates. We discuss areas of improvement for future program years, such as forging new partnerships with local Project Lead The Way high schools to recruit higher numbers of females and minorities, and developing new mentoring opportunities to reduce attrition, especially among underrepresented minority students. © American Society for engineering Education, 2007.

关键词： Social aspects

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Cooperative university/industry development of a freshman 'introduction to ECE design' course

Cooperative university/industry development of a freshman 'i...

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114th Annual ASEE Conference and Exposition, 2007

作者： Williams, Douglas Butera, Robert Uluagac, Selcuk Clark, Matthew Deck, Andy Torba, Michael Trahan, Steven Georgia Institute of Technology United States Undergraduate Affairs School of Electrical and Computer Engineering Georgia Tech. Georgia Department of Electrical and Computer Engineering Interdisciplinary Bioengineering Graduate Program Georgia Tech. United States Georgia Tech. School of Electrical and Computer Engineering United States National Instruments National Instruments Austin TX United States

Faculty members from Georgia Tech's School of electrical and computer engineering (ECE) have worked jointly with engineers from National Instruments (NI) to develop a new freshman engineering course. This course is entitled 'Introduction to ECE Design' and is constructed around the use of the LEGO MINDSTORMS NXT robotics system. NI partnered with LEGO to jointly develop the programming software for the MINDSTORMS NXT, and their engineers are uniquely positioned to provide insight into the use and functionality of these kits. NI engineers have not only provided technical support but have also conceived and designed most of the laboratories for the course. This course addresses the diverse objectives of providing students with a systems-level design experience at the beginning of their academic programs and introducing them to a broad range of ECE disciplines. A primary goal is to enable students to make better-informed decisions when choosing whether or not to major in electrical engineering or computer engineering. © American Society for engineering Education, 2007.

关键词： Systems engineering

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Service-learning integrated into existing core courses throughout a college of engineering

Service-learning integrated into existing core courses throu...

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114th Annual ASEE Conference and Exposition, 2007

作者： Duffy, John Kazmer, David Barrington, Linda Ting, John Barry, Carol Zhang, Xiaoqi Clark, Donn Rux, Alan University of Massachusetts Lowell United States Mechanical Engineering Department SLICE Program Plastics Engineering Department Francis College of Engineering United States Human Services Management United States University of Massachusetts Lowell United States College of Engineering Civil and Environmental Engineering Department Electrical and Computer Engineering Department

Service-Learning (S-L) and engineering education share the common goals of relating theory to practice and of civic engagement ("public problem solving"). In the current effort, service-learning is being integrated into a broad array of courses so that students will be exposed to S-L in every semester in the core curriculum in each of the five engineering departments at University of Massachusetts Lowell. The focus here is on the learning of traditional engineering content by engaging diverse learners in solving authentic problems in the community and in the process achieving ABET criteria and attracting underrepresented groups into engineering. Thirty-three faculty members out of 75 in the college integrated S-L into 52 different courses in 2005-06. Readers will find a wide array of projects and examples that can be adapted to their own courses. © American Society for engineering Education, 2007.

关键词： engineering education

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Spatially recursive spreadsheet computations: Teaching the critical path method of scheduling using two-dimensional function ranges versus traditional one-dimensional object-oriented programming

Spatially recursive spreadsheet computations: Teaching the c...

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114th Annual ASEE Conference and Exposition, 2007

作者： Lucko, Gunnar Madden, Michael Molineaux, Justin Catholic University of America United States Construction Engineering and Management Program Department of Civil Engineering Catholic University of America United States United Space Alliance Department of Electrical Engineering and Computer Science Catholic University of America United States

Project management is the art and science of planning and controlling projects in their various aspects of time, cost, and scope. Scheduling focuses on the time aspect while considering the various needed resources. The critical path method (CPM) is the most common scheduling technique, whereby the project is broken down into activities with specific durations and relationships among each other. Calculation occurs in two major steps. In the forward pass each activity is scheduled to occur as early as possible while obeying its dependency conditions. The backward pass examines the inverse case of delaying all activities as late as possible without impacting the project end. The flexibility of each activity, its float, is assessed by comparing these extreme cases. Activities with zero float are time critical, as postponing any of them would impact the project end. Any traditional computer program for the two-step CPM algorithm consists of defining variables for the time and dependency information of each activity from the schedule input, sorting them, making case distinctions whenever the dependency structure splits or merges between predecessors and successors, and saving the maximum early dates and minimum late dates to the output. An object-oriented programming (OOP) approach would use the appealing existing division into objects, the activities, which are related in a clearly defined sequence. It would follow a one-dimensional flow of individual commands including various loop statements to accommodate the case distinctions at forks in the dependency structure. Numerous standard textbooks on project management that have been reviewed fail to consider these case distinctions in their presentation of the CPM algorithm, which in the experience of the authors often leads to students initially having difficulties in how to apply the parallel evaluation of numerous activities under CPM to solve complex schedules. The authors developed an educational unit for teaching CP

关键词： Spreadsheets

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A deliberate integration of information technology into the classroom

A deliberate integration of information technology into the ...

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114th Annual ASEE Conference and Exposition, 2007

作者： Fairfax, Duane Huggins, Kevin Goda, Bryan USMA United States Computer Science Program US Military Academy United States IEEE Department of Electrical Engineering and Computer Science US Military Academy at West Point United States Association for Computing Machinery Institute of Electrical and Electronic Engineers Information Technology Program US Military Academy United States

The Information Age has revolutionized the way students learn in the classroom. The United States Military Academy (USMA) emphasizes the importance of Information Technology (IT) through an academy-wide IT specific goal. This goal supports the USMA's mission of producing Army Officers who can respond effectively to technological changes in the defense of our nation. Courses augmented with IT can be daunting for cadets who lack the experience and confidence level to succeed in the course. As a result, these types of courses are avoided by cadets if at all possible. This is not an option for an aspiring officer who will lead the soldiers of tomorrow on a digitized battlefield. Since 1990, cadets have been issued a computer which has played a central role in bringing the power of IT to all graduates of the Military Academy. Integration of IT in the curriculum begins early with every cadet receiving a laptop computer. An integrated software package is included to support any course of instruction. Cadets receive two courses in IT, one in their freshman year and one in their junior year. The freshman course teaches the cadet the basic functionality of the laptop, a basic programming language, and creating a basic website. The junior course builds on the freshman course by teaching the cadets to create an advanced website, design and build a network, manage a database, and create an information system. IT plays a central role in several overlap courses between engineering and the humanities in such areas as information warfare, terrorism, and the legal aspects of intellectual property rights. What makes this approach unique is the methodical diffusion of IT into course design which removes the barrier between learning and the implementation of IT as an academic multiplier. An academy-wide committee consisting of 12 members is responsible for examining collected data to see how well the Military Academy is meeting its LT goal. This data comes from a variety of sources such

关键词： Information technology

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Disaster-mitigating design and practice: A student-centered program developing sustainable and earthquake-resistant designs for residential structures in developing regions

Disaster-mitigating design and practice: A student-centered ...

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114th Annual ASEE Conference and Exposition, 2007

作者： Lucko, Gunnar Tsopelas, Panagiotis Garland, Timothy Gonzalez, Rodrigo Lee, Thomas Molineaux, Justin Catholic University of America United States Construction Engineering and Management Program Department of Civil Engineering Catholic University of America United States Department of Civil Engineering Catholic University of America United States Department of Electrical Engineering and Computer Science Catholic University of America United States

Earthquakes frequently strike the neediest regions of the planet with devastating consequences for their inhabitants. Impacts of such disasters extend beyond the immediate casualties, which may reach several 10,000, including the destruction of residential and commercial property and infrastructure, which severely weakens the regional economy in the longer term. Simple residential dwellings from adobe, brick, or un-reinforced concrete blocks, which are the predominant structures in significant portions of the reviewed developing regions, are frequently damaged to structural failure and collapse by earthquakes, which may obliterate entire villages and their livelihood within minutes. Designing such small residential structures to be more resistant to earthquake loads, followed by physical testing of scaled models and implementing the design concepts in an actual prototype are the objectives of the program development for a two-semester course sequence that is currently being undertaken by the authors. This program began when guest presentations by Peace Corps alumni and the founder of Engineers Without Borders caused the students and their faculty mentors to realize that the traditional course of study in civil engineering did not sufficiently prepare them for addressing engineering problems within a global context. Since then, an introductory course on sustainability has been added to the curriculum and the students have founded a student chapter that has begun to participate in organizing the outreach to a partner community in a developing region. In a new course sequence on disaster-mitigating design and practice, the undergraduate civil engineering and architecture students are working together in entrepreneurially oriented teams. Faculty members and representatives from industry and from foreign aid organizations are collaborating in guiding the courses. The course activities address several accreditation outcomes, have been structured to expose students to all

关键词： Disasters

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