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Beyond Performance of Learning Control Subject to Uncertainties and Noise: A Frequency-Domain Approach Applied to Wafer Stages

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IEEE/CAA Journal of Automatica Sinica 2025年第1期12卷 198-214页

作者： Fazhi Song Ning Cui Shuaiqi Chen Kai Zhang Yang Liu Xinkai Chen Jiubin Tan IEEE the Center of Ultra-precision Optoelectronic Instrument Engineering Harbin Institute of Technology the Key Laboratory of Ultra-Precision Intelligent Instrumentation Ministry of Industry and Information Technology the State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment Guangdong University of Technology the Center of Ultraprecision Optoelectronic Instrument Engineering Harbin Institute of Technology the Key Laboratory of UltraPrecision Intelligent Instrumentation Ministry of Industry and Information Technology the Department of Electronic and Information Systems Shibaura Institute of Technology

The increasingly stringent performance requirement in integrated circuit manufacturing, characterized by smaller feature sizes and higher productivity, necessitates the wafer stage executing a extreme motion with the accuracy in terms of nanometers. This demanding requirement witnesses a widespread application of iterative learning control(ILC), given the repetitive nature of wafer scanning. ILC enables substantial performance improvement by using past measurement data in combination with the system model knowledge. However, challenges arise in cases where the data is contaminated by the stochastic noise, or when the system model exhibits significant uncertainties, constraining the achievable performance. In response to this issue, an extended state observer(ESO) based adaptive ILC approach is proposed in the frequency *** being model-based, it utilizes only a rough system model and then compensates for the resulting model uncertainties using an ESO, thereby achieving high robustness against uncertainties with minimal modeling effort. Additionally, an adaptive learning law is developed to mitigate the limited performance in the presence of stochastic noise, yielding high convergence accuracy yet without compromising convergence speed. Simulation and experimental comparisons with existing model-based and data-driven inversion-based ILC validate the effectiveness as well as the superiority of the proposed method.

关键词： Extended state observer learning control model uncertainties motion control stochastic noise

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Bifunctional nanoprobe for simultaneous detection of intracellular reactive oxygen species and temperature in single cells

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Microsystems & Nanoengineering 2024年第6期10卷 161-172页

作者： Yanmei Ma Weikang Hu Jian Hu Muyang Ruan Jie Hu Ming Yang Yi Zhang Hanhan Xie Chengzhi Hu Shenzhen Key Laboratory of Biomimetic Robotics and Intelligent Systems Department of Mechanical and Energy EngineeringSouthern University of Science and TechnologyShenzhen 518000China Department of Electrical and Electronic Engineering Southern University of Science and TechnologyShenzhen 518000China

Living cells can rapidly adjust their metabolic activities in response to external stimuli,leading to fluctuations in intracellular temperature and reactive oxygen species(ROS)*** these parameters is essential for understanding cellular metabolism,particularly during dynamic biological *** this study,we present a bifunctional nanoprobe capable of simultaneous measurement of ROS levels and temperature within single *** nanoprobe features two individually addressable nanoelectrodes,with platinum(Pt)and nickel(Ni)coatings on both *** the tip,these two metal layers form a nano-thermocouple,enabling precise intracellular temperature measurements,while the Pt layer facilitates selective ROS *** dual functionality allows for real-time monitoring of cellular responses during synergistic chemo-photothermal therapy of cancer cells and zebrafish embryos subjected to mitochondrial toxic *** results demonstrate that the nanoprobe effectively measures increases in temperature and ROS levels in HeLa cells undergoing chemo-photothermal therapy,as well as in chemically stimulated zebrafish *** providing detailed analysis of submicrometer-scale temperature and ROS variations within living cells,this nanoprobe offers valuable insights into cellular processes and holds promise for early disease detection and drug development.

关键词： metabolism simultaneous holds

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An optical carbon nanotube fibre probe for measurement of nano structures with large aspect ratio

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Nano Research 2025年第3期18卷 436-443页

作者： Weihao Tao Shuhao Zhao Hanjin Dong Ze Zhang Peirui Ji Shenghan Qin Wenbo Hu Jinlong Zhu Renjie Zhou Shuming Yang State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049China State Key Laboratory of Intelligent Manufacturing Equipment and Technology Huazhong University of Science and TechnologyWuhan 430074China Department of Biomedical Engineering The Chinese University of Hong KongHong KongChina

With the development of imaging and measurement technologies,scanning near-field optical microscopy(SNOM)has achieved high signal-to-noise *** resolution of a fibre probe-based SNOM system is capable of reaching 10 ***,SNOM applications are presently constrained to the measurement of near-field optical information to relatively straightforward structures,including quantum dots,carbon nanotubes,graphene,and so *** geometry of conventional fibre probes,with tips at an angle of 30°-60°,presents a challenge for accurately imaging complex surface *** paper proposes a carbon nanotube composite fibre probe(CNT-FP)with a large aspect *** key point is that a carbon nanotube bundle is composited at the tip of conventional surface plasmon polaritons fibre probes(SPPs-FP),which are the fibre probes coated with gold film to excite the *** coupling,propagation,and focusing effects of SPPs on the carbon nanotube bundle are ***-FPs have been fabricated and applied to measure a grating with the depth of 400 nm and the width of 400 *** experimental results show that the measurement accuracy and imaging quality of CNT-FP are nearly one order of magnitude higher than that of conventional SPPs-FP,as evidenced by evaluation criteria such as line roughness and volatility ***,it achieves an optical resolution of 72.1 nm in the measurements of a nano structure with large aspect *** provides an effective solution of measuring structures with larger aspect ratios.

关键词： carbon nanotubes fibre optic probes surface plasmon polaritons nano-focusing large aspect ratio

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Analog spatiotemporal feature extraction for cognitive radio-frequency sensing with integrated photonics

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Light(Science & Applications) 2024年第3期13卷 478-487页

作者： Shaofu Xu Binshuo Liu Sicheng Yi Jing Wang Weiwen Zou State Key Laboratory of Advanced Optical Communication Systems and Networks Intelligent Microwave Lightwave Integration Innovation Center(imLic)Department of Electronic EngineeringShanghai Jiao Tong UniversityShanghaiChina

Analog feature extraction(AFE)is an appealing strategy for low-latency and efficient cognitive sensing systems since key features are much sparser than the Nyquist-sampled ***,applying AFE to broadband radio-frequency(RF)scenarios is challenging due to the bandwidth and programmability bottlenecks of analog electronic ***,we introduce a photonics-based scheme that extracts spatiotemporal features from broadband RF signals in the analog *** feature extractor structure inspired by convolutional neural networks is implemented on integrated photonic circuits to process RF signals from multiple antennas,extracting valid features from both temporal and spatial *** of the tunability of the photonic devices,the photonic spatiotemporal feature extractor is trainable,which enhances the validity of the extracted ***,a digital-analog-hybrid transfer learning method is proposed for the effective and low-cost training of the photonic feature *** validate our scheme,we demonstrate a radar target recognition task with a 4-GHz instantaneous *** results indicate that the photonic analog feature extractor tackles broadband RF signals and reduces the sampling rate of analog-to-digital converters to 1/4 of the Nyquist sampling while maintaining a high target recognition accuracy of 97.5%.Our scheme offers a promising path for exploiting the AFE strategy in the realm of cognitive RF sensing,with the potential to contribute to the efficient signal processing involved in applications such as autonomous driving,robotics,and smart factories.

关键词： scheme driving smart

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Flexible sensors with zero Poisson's ratio

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National Science Review 2024年第5期11卷 153-169页

作者： Xin Huang Tianzhao Bu Qingyang Zheng Shaoyu Liu Yangyang Li Han Fang Yuqi Qiu Bin Xie Zhouping Yin Hao Wu Department of Mechanical Engineering Flexible Electronics Research Center State Key Laboratory of Intelligent Manufacturing Equipment and Technology School of Mechanical Science and EngineeringHuazhong University of Science and Technology Department of Electronic Science and Technology School of Integrated CircuitsHuazhong University of Science and Technology

Flexible sensors have been developed for the perception of various stimuli. However, complex deformation,usually resulting from forces or strains from multi-axes, can be challenging to measure due to the lack of independent perception of multiaxial stimuli. Herein, flexible sensors based on the metamaterial membrane with zero Poisson's ratio(ZPR) are proposed to achieve independent detection of biaxial stimuli. By deliberately designing the geometric dimensions and arrangement parameters of elements, the Poisson's ratio of an elastomer membrane can be modulated from negative to positive, and the ZPR membrane can maintain a constant transverse dimension under longitudinal stimuli. Due to the accurate monitoring of grasping force by ZPR sensors that are insensitive to curvatures of contact surfaces, rigid robotic manipulators can be guided to safely grasp deformable objects. Meanwhile, the ZPR sensor can also precisely distinguish different states of manipulators. When ZPR sensors are attached to a thermal-actuation soft robot, they can accurately detect the moving distance and direction. This work presents a new strategy for independent biaxial stimuli perception through the design of mechanical metamaterials, and may inspire the future development of advanced flexible sensors for healthcare, human–machine interfaces and robotic tactile sensing.

关键词： zero Poisson's ratio metamaterials independent perception of multiaxial stimuli flexible sensor

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Position-aware pushing and grasping synergy with deep reinforcement learning in clutter

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CAAI Transactions on Intelligence technology 2024年第3期9卷 738-755页

作者： Min Zhao Guoyu Zuo Shuangyue Yu Daoxiong Gong Zihao Wang Ouattara Sie Intelligent Robotics Laboratory Faculty of Information TechnologyBeijing University of TechnologyBeijingChina Beijing Key Laboratory of Computational Intelligence and Intelligent Systems BeijingChina Laboratory of Biomechatronics and Intelligent Robotics(BIRO) Department of Mechanical and Aerospace EngineeringNorth Carolina State UniversityRaleighNorth CarolinaUSA

The positional information of objects is crucial to enable robots to perform grasping and pushing manipulations in *** effectively perform grasping and pushing manipu-lations,robots need to perceive the position information of objects,including the co-ordinates and spatial relationship between objects(e.g.,proximity,adjacency).The authors propose an end-to-end position-aware deep Q-learning framework to achieve efficient collaborative pushing and grasping in ***,a pair of conjugate pushing and grasping attention modules are proposed to capture the position information of objects and generate high-quality affordance maps of operating positions with features of pushing and grasping *** addition,the authors propose an object isolation metric and clutter metric based on instance segmentation to measure the spatial re-lationships between objects in cluttered *** further enhance the perception capacity of position information of the objects,the authors associate the change in the object isolation metric and clutter metric in cluttered environment before and after performing the action with reward function.A series of experiments are carried out in simulation and real-world which indicate that the method improves sample efficiency,task completion rate,grasping success rate and action efficiency compared to state-of-the-art end-to-end *** that the authors’system can be robustly applied to real-world use and extended to novel *** material is available at https://***/NhG\_k5v3NnM}{https://***/NhG\_k5v3NnM.

关键词： deep learning deep neural networks intelligent robots

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Terahertz flexible multiplexing chip enabled by synthetic topological phase transitions

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National Science Review 2024年第8期11卷 157-166页

作者： Hang Ren Su Xu Zhidong Lyu Yuanzhen Li Zuomin Yang Quan Xu Yong-Sen Yu Yanfeng Li Fei Gao Xianbin Yu Jiaguang Han Qi-Dai Chen Hong-Bo Sun State Key Laboratory of Integrated Optoelectronics College of Electronic Science and Engineering Jilin University College of Information Science and Electronic Engineering Zhejiang University Center for Terahertz Waves and College of Precision Instrument and Optoelectronics Engineering Key Laboratory of Optoelectronic Information Technology(Ministry of Education of China) Tianjin University Guangxi Key Laboratory of Optoelectronic Information Processing School of Optoelectronic Engineering Guilin University of Electronic Technology State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision InstrumentTsinghua University

Flexible multiplexing chips that permit reconfigurable multidimensional channel utilization are indispensable for revolutionary 6G terahertz communications,but the insufficient manipulation capability of terahertz waves prevents their practical ***,we propose the first experimental demonstration of a flexible multiplexing chip for terahertz communication by revealing the unique mechanism of topological phase(TP) transition and perseveration in a heterogeneously coupled bilayer valley Hall topological photonic *** synthetic and individual TPs operated in the coupled and decoupled states enable controllable on-chip modular TP transitions and subchannel *** time-frequency interleaved subchannels support 10-and 12-Gbit/s QAM-16 high-speed data streams along corresponding paths over carriers of 120 and 130 GHz with 2.5-and 3-GHz bandwidths,*** work unlocks interlayer heterogeneous TPs for inspiring ingenious on-chip terahertz-wave regulation,allowing functionality-reconfigurable,compactly integrated and CMOS-compatible chips.

关键词： terahertz technology topological phase transitions flexible multiplexing 6G communications silicon chips

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Time-Varying Formation Tracking Control of Heterogeneous Multi-Agent systems With Intermittent Communications and Directed Switching Networks

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IEEE/CAA Journal of Automatica Sinica 2025年第1期12卷 294-296页

作者： Yuhan Wang Zhuping Wang Hao Zhang Huaicheng Yan the Shanghai Research Institute for Intelligent Autonomous Systems Tongji University the National Key Laboratory of Autonomous Intelligent Unmanned Systems the Frontiers Science Center for Intelligent Autonomous System of Ministry of Education the College of Electronic and Information Engineering the Department of Control Science and Engineering Tongji University the Key Laboratory of Advanced Control and Optimization for Chemical Processes of Ministry of Education the School of Information Science and Engineering East China University of Science and Technology

Dear Editor,This letter is concerned with the problem of time-varying formation tracking for heterogeneous multi-agent systems(MASs) under directed switching networks. For this purpose, our first step is to present so... 详细信息

关键词： Switches Topology Observers Formation control Event detection Switched systems Multi-agent systems Control theory Autonomous systems Stability

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Multi-objective concurrent isogeometric topology optimization of multiscale structures

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Frontiers of Mechanical engineering 2025年第1期20卷 105-127页

作者： Jianli LIU Hongshuo FAN Tao NIE Haobo ZHANG Jingui YU Shuting WANG Zhaohui XIA State Key Laboratory of Intelligent Manufacturing Equipment and Technology School of Mechanical Science and EngineeringHuazhong University of Science and TechnologyWuhan 430074China School of Mechanical and Electronic Engineering Wuhan University of TechnologyWuhan 430070China

Multiscale structures require excellent multiphysical properties to withstand the loads in various complex engineering *** this study,a concurrent isogeometric topology optimization method is proposed to design multiscale structures with high thermal conductivity and low mechanical ***,the mathematical description model of multi-objective topology optimization for multiscale structures is constructed,and a single-objective concurrent isogeometric topology optimization formulation for mechanical and thermal compliance is ***,by combining the isogeometric analysis method,the material interpolation model and decoupled sensitivity analysis scheme of the objective function are established on macro and micro *** solid isotropic material with penalization method is employed to update iteratively the macro and microstructure topologies ***,the feasibility and advantages of the proposed approach are illustrated by several 2D and 3D numerical examples with different volume fractions,while the effects of volume fraction and different boundary conditions on the final configuration and multi-objective performance of the multiscale structure are *** show that the isogeometric concurrent design of multiscale structures through multi-objective optimization can produce better multi-objective performance compared with a single-scale one.

关键词： isogeometric topology optimization multiscale structure multi-objective optimization thermal conductivity mechanical compliance

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Interfacial coupling enables high carrier mobility in PbS colloidal quantum dot photodetectors

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Nano Research 2025年第3期18卷 619-630页

作者： Qing Li Lier Deng Yuxuan Du Shasha Chang Shuai Wen Rui Qin Jiuhong Wang Wenzhi Feng Boao Gu Huan Liu Key Laboratory of the Ministry of Education&Thin Film and Optical Manufacturing Technology School of Opto-Electronic EngineeringXi'an Technological UniversityXi'an 710021China State Key Laboratory for Manufacturing Systems Engineering Xi’an Jiaotong UniversityXi’an 710049China

Carrier transport in colloidal quantum dot(CQD)films is strongly influenced by the interfacial coupling between ***,the shape of PbS CQDs synthesized using traditional methods results in random orientation relationships between the crystal facets in CQD films,limiting the coupling strength and the final performance of optoelectronic *** this study,post-synthesis surface treatment of PbS CQDs was employed to achieve facet control during secondary growth,manipulating the facets of PbS CQDs at the nanoscale to enhance interfacial coupling within CQD ***,mixed ligands of PbX_(2)(X=Br,I)and anhydrous sodium acetate were used to passivate the PbS CQDs,ensuring sufficient *** method combines facet passivation with strong coupling through the(100)facets of CQDs,thereby enhancing carrier mobility and improving device *** results showed that,compared to standard PbS CQD films,the electron and hole mobilities of the PbS CQD films subjected to secondary growth were significantly improved,with hole mobility increased by 6 *** fabricated using these films achieved a quantum efficiency of 33%at 1500 nm under 0 V bias,a threefold improvement compared to standard devices.

关键词： interfacial coupling carrier mobility liquid-phase atomic layer deposition liquid-phase ligand exchange PbS colloidal quantum dot photodetectors

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