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A study on etching profiles of sacrificial layers

A study on etching profiles of sacrificial layers

引用

International Conference on Solid-State and Integrated Circuit Technology

作者： Wu Chang-ju Jin Zhoug-he Ma Hui-lian Wang Yue-lin Department of Information Science & Electronic Engineering Zhejiang University Hangzhou China Zhejiang University Hangzhou Zhejiang CN Dept. of Inf. Sci. & Electron. Eng. Zhejiang Univ. Hangzhou China

ISBN: (纸本)078038511X

Chemical etching of sacrificial layers is a widely used technique in surface micromachining. The causes of the triangle at the etch front are analyzed. The viewpoint that stress is the major factor of the triangle's formation is put forward. Through a study of the mechanism of the effects of annealing on etch rate, several rules about different annealing conditions having different effects on the etch rate are advanced.

关键词： Etching Annealing Stress Machining Microchannel Plasma measurements Microscopy Tiles Plasma temperature Gravity

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MD16: DSP with some RISC features for embedded system

MD16: DSP with some RISC features for embedded system

引用

International Conference on Signal Processing Proceedings (ICSP)

作者： Jicheng Chen Qingdong Yao Peng Liu Ce Chi Department of Information Science and Electronic Engineering Zhejiang University Hangzhou China Zhejiang University Hangzhou Zhejiang CN Dept. of Inf. Sci. & Electron. Eng. Zhejiang Univ. Hangzhou China

To achieve the high performance/cost ratio, the idea of combining the advantages of DSP and RISC in a single architecture is a solution for the booming and versatile embedded application systems. The existent methods that appear in many literatures all focus on the construction of mixed architecture with RISC basement. Contrary to the above, a new idea of constructing architecture with DSP basement and supplementing it with some RISC features is put up in this paper. It can exert the advantages of DSP architecture by instruction level parallelization and powerful memory access capability, and obtain RISC good high-level language support by the manners of local-homogenous register set and RISC-like pipeline. To accelerate the DSP design and optimize the system, integrated design system (IDS) is presented to complete the hardware/software co-design and co-validation. Application programs can also be rapidly developed based on the integrated development environment (IDF). The behavior level simulation of the DSP system has been completed. It is given as 150 MIPS under the condition of 0.18 /spl mu/m technology library. FPGA validation is also accomplished.

关键词： Digital signal processing Reduced instruction set computing Embedded system Costs computer architecture High level languages Registers Pipelines Acceleration Design optimization

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Unsupervised segmentation of the POL-SAR image using similarity parameters in sequential projection pursuit model

Unsupervised segmentation of the POL-SAR image using similar...

引用

International Conference on Signal Processing Proceedings (ICSP)

作者： Wei Lin Zheng Tian Xian-bin Wen Fan He Northwestern Polytechnical University Xi'an Shaanxi CN Dept. of Math. & Inf. Sci. Northwestern Polytech. Univ. Xi'an China Department of Computer Science and Technology Northwestern Polytechnical University Xi'an China Department of Mathematics and Information Science Northwestern Polytechnical University Xi'an China

A sequential projection pursuit model (SPPM) for unsupervised segmentation of the polarimetric synthetic aperture radar (POL-SAR) image is proposed in this paper. The features of the high dimension data are extracted out via orthogonal projection and the classification is accomplished by the Bayesian decision rule. Also the similarity parameters of POL-data are expressed as the characters of a target and form new target data. The SPPM utilizes new target data to classify the target into various subclasses. Good-segmented results have been obtained for the POL-SAR image processing. The segmented results using the SPPM are better than that of using entropy-alpha plane.

关键词： Image segmentation Radar scattering Scattering parameters Mathematical model Remote sensing Radar imaging Statistical distributions Reflection Entropy Vectors

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Plasma enhanced chemical vapor deposited SiN layers for large area mc-Si solar cell processing

Plasma enhanced chemical vapor deposited SiN layers for larg...

引用

IEEE International Conference on Plasma science (ICOPS)

作者： B. Karunagaran J.S. Yoo D.Y. Kim Kyunghae Kim S.K. Dhulgel D. Mangalaraj Junsin Yi Department of Electrical and Computer Engineering Auburn University Auburn Alabama USA Sungkyunkwan University Jongno-gu Seoul KR Sch. of Inf. & Commun. Eng. Sung Kyun Kwan Univ. Suwon South Korea

Summary form only given. Surface passivation plays a crucial role in the fabrication process of high efficiency multi-crystalline silicon (mc-Si) solar cells. Plasma enhanced chemical vapor deposition (PECVD) of silicon nitride (SiN) is a proven technique for obtaining layers that meet the needs of surface passivation and anti-reflection coatings. In addition, the deposition process appears to provoke bulk passivation as well due to diffusion of atomic hydrogen. This bulk passivation is an important advantage of PECVD deposition when compared to the conventional CVD techniques. A further advantage of PECVD is that the process takes place at a relatively low temperature of 300/spl deg/C, keeping the total thermal budget of the cell processing to a minimum. This paper deals with the fabrication of multicrystalline silicon solar cells with PECVD SiN layers combined with high-throughput screen printing and RTF firing. Using this sequence we were able to obtain solar cells with an efficiency of 13.5% for multi crystalline polished Si wafers of size 125 mm square. POCl/sub 3/ doped polished silicon wafers with a junction depth of about 0.5 /spl mu/m and an emitter sheet resistance of 35 /spl Omega//sq were selected for the cell fabrication. The mean cell efficiency, fill factor and Voc for the cells prepared in the present study were found to be 13.5%, 0.76 and 0.602 V respectively.

关键词： Plasma chemistry Plasma materials processing Chemical processes Silicon compounds Photovoltaic cells Passivation Fabrication Chemical vapor deposition Coatings Atomic layer deposition

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Tunnel minimization and relay for managing virtual private networks

Tunnel minimization and relay for managing virtual private n...

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IEEE Conference and Exhibition on Global Telecommunications (GLOBECOM)

作者： I-Wei Chen Ying-Dar Lin Yl-Neng Lin Department of Computer and Information Science National Chiao Tung University Hsinchu Taiwan National Chiao Tung University Hsinchu TW Dept. of Comput. & Inf. Sci. Nat. Chiao Tung Univ. Hsinchu Taiwan

A virtual private network (VPN) is a private data network, that carries traffic between remote sites. One of the most popular VPN applications is the "intranet/extranet VPN", which establishes network layer connections between remote intranet sites, using various tunneling protocols, to create an IP overlay network. IPSec, which is very prevalent in the industry, is one of these tunneling protocols that not only provide encapsulation/decapsulation but encryption/decryption and hashing, However, an IPSec tunnel often fails to be established due to the management complexity. The paper proposes a new concept of authority to alleviate the management overhead by reducing the number of tunnels. The problem of tunnel minimization is first formalized under three conditions - no constraint, a tunnel path length constraint and a tunnel relay degree constraint - and is then solved using graphical models and the zero-one integer programming algorithm. The effect of tunnel minimization is also investigated, and at most 90% of the tunnels are found to be reducible in a general enterprise VPN.

关键词： Relays Virtual private networks Tunneling Protocols Telecommunication traffic Extranets Encapsulation Cryptography Minimization methods Graphical models

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FTF-IDF scoring for fresh inf.rmation retrieval

FTF-IDF scoring for fresh information retrieval

引用

International Conference on Advanced inf.rmation Networking and Applications (AINA)

作者： N. Sato M. Euhara Y. Sakai Department of Information and Computer Sciences Toyo University JAPAN Toyo Daigaku Bunkyo-ku Tokyo JP Dept. of Inf. & Comput. Sci. Toyo Univ. Japan Graduate School of Agricultural Science Tohoku University JAPAN

For most businesses, fresh inf.rmation retrieval is very important. However, it is difficult for conventional search engines based on centralized architecture to retrieve really fresh inf.rmation, because they take a long time to collect documents via Web robots. In contrast to a centralized architecture, a search engine based on a distributed architecture does not need to collect documents, because each site independently makes an index. As this result, distributed search engines can retrieve really fresh inf.rmation. However, fast indexing is not enough to easily retrieve fresh inf.rmation. The value of inf.rmation is determined by both freshness and relevance. Traditional ranking methods consider either freshness or relevance; so, we proposed FTFIDF (fresh term frequency multiplied by inverse document frequency) as a scoring method that considers both freshness and relevance.

关键词： inf.rmation retrieval Search engines Content based retrieval Frequency computer architecture Service oriented architecture Robots Indexing Web pages inf.rmation theory

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A new mobility management scheme for mobile IP-based wireless networks

A new mobility management scheme for mobile IP-based wireles...

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Fifth IEE International Conference on 3G Mobile Communication Technologies

作者： J.-Y. Chen W.-S. Chen Y.-H. Huang C.-C. Yang H.-T. Chu Dept. of Comput. Sci. & Inf. Eng. Nat. Chi Nan Univ. Nantou Taiwan Department of Information Networking Technology Hsiuping Institute of Technology Taichung Taiwan Department of Computer Science and Information Engineering National Chi Nan University Nantou Taiwan VIPCCL Department of Electrical Engineering National Chi Nan University Nantou Taiwan

This paper introduces two new approaches, co-operated with the mobile routing table (MRT), for optimizing the routing path such that the triangular routing problem is avoided. The first approach combines an ICMP network-mask query and directed broadcast mechanism to find the routers. The other approach uses a tracking mechanism, similar to traceroute, to find all the MRT routers on the path from home agent to corresponding node. We analyze and compare both the standard mobile IP (MIP) and the proposed scheme. It is clear that the proposed scheme acts like the MIP in the worst case, and like the MIP-route optimization in the best case.

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Pre-rake diversity combining for TD-SCDMA base stations

Pre-rake diversity combining for TD-SCDMA base stations

引用

IEEE Region 10 International Conference TENCON

作者： Yang Xiaoa Yue Song J. Habermann Inst. of Inf. Sci. Beijing Jiaotong Univ. China Institute of Information Science Beijing Jiaotong University Beijing P. R. China Electrical Engineering Department Fachhochschule Giessen-Friedberg Friedberg Germany

The paper explores the possibility of applying pre-rake technique in TD-SCDMA systems to improve the communication quality of the systems. The channel estimation approach for pre-rake circuits is provided. This paper analyzes the performance of pre-rake techniques for TD-SCDMA systems, based on quarter phase-shift keying (QPSK) modulation. From the simulation results we find that QPSK has the advantage of stability over BPSK while both of them have the same averaged bit error rate (BER). This advantage, together with the superiority over rake receiver of moving the circuits from the mobile unit (MU) to the base station (BS), makes the pre-rake technique useful in TD-SCDMA systems.

关键词： Diversity reception Time division synchronous code division multiple access Base stations Circuits Quadrature phase shift keying Bit error rate Channel estimation Performance analysis Phase shift keying Phase modulation

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Performance of external modulators for wireless local area networks under multi-path fading

Performance of external modulators for wireless local area n...

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Canadian Conference on Electrical and computer engineering (CCECE)

作者： T. Kurt A. Yongacoglu J.Y. Chouinard School of Information Technology and Engineering University of Ottawa Ontario Canada University of Ottawa Faculty of Medicine Ottawa ON CA Sch. of Inf. Technol. & Eng. Univ. of Ottawa Ont. Canada Department of Electrical and Computer Engineering Laval University QUE Canada

The performance of wireless local area networks (WLANs) over fiber systems is investigated under multipath fading for different external modulators and optical system imperfections. Systems employing LiNbO/sub 3/ based Mach Zehnder modulators, polymer based Mach Zehnder modulators and electro-absorption modulators are presented. The benefits of wireless transmitter diversity, to deal with the optical domain imperfections, are examined.

关键词： Wireless LAN Fading OFDM modulation Optical fiber testing Optical modulation Optical transmitters Optical network units Optical fiber LAN Optical fiber networks Optical polymers

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Frequency and time domain auditory masking threshold constrained Kalman filter for speech enhancement

Frequency and time domain auditory masking threshold constra...

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International Conference on Signal Processing Proceedings (ICSP)

作者： Ning Ma M. Bonchard R.A. Goubran School of Information Technology and Engineering University of Ottawa Ottawa Ontario Canada Ottawa University Ottawa KS US Sch. of Inf. Technol. & Eng. Ottawa Univ. Ont. Canada Department of Systems and Computer Engineering Carleton University Ottawa Ontario Canada

A constrained Kalman filtering algorithm based on auditory masking threshold is proposed for enhancing speech degraded by colored noise. The auditory masking threshold is used as a constraint to obtain a Kalman gain, which minimizes the estimate error variance under the constraint that the error power is smaller than the masking threshold. From the characteristics of the correlation vector, the power spectrum density and the masking threshold, a nonlinear constrained optimization problem is formed to calculate the Kalman gain. Simulation results show that the algorithm can improve subjective PESQ scores over both classic algorithms and recently published algorithms.

关键词： Masking threshold Speech enhancement Colored noise Kalman filters Degradation Speech processing Signal processing Covariance matrix Filtering algorithms Speech coding

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