检索结果-内蒙古大学图书馆

您好，读者！请登录

内蒙古大学图书馆

首页
概况
党建
资源
服务
科研支持
- 论文收录引用证明
- 科技查新
知识产权
档案馆
帮助

咨询与建议

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

您的常用邮箱：*

您的手机号码：*

问题描述：

当前已输入0个字，您还可以输入200个字

全部搜索
期刊论文
图书
学位论文
标准
纸本馆藏
外文资源发现
数据库导航
超星发现

高级检索

时间限定

出版年份：

文献类型

图书期刊文献学位论文多媒体

馆藏选择

电子馆藏纸本馆藏

核心期刊

全部期刊 SCI 收录期刊 SSCI 收录期刊 EI 收录期刊 CSCD 收录期刊 CSSCI 收录期刊

语言

中文英文

文献类型

期刊文献图书学位论文标准纸本馆藏

帮助

文字说明：

T=题名（书名、题名），A=作者（责任者），K=主题词，P=出版物名称，PU=出版社名称，O=机构（作者单位、学位授予单位、专利申请人），L=中图分类号，C=学科分类号，U=全部字段，Y=年（出版发行年、学位年度、标准发布年）

检索规则说明：

AND代表“并且”；OR代表“或者”；NOT代表“不包含”；(注意必须大写,运算符两边需空一格)

检索范例：

范例一：(K=图书馆学 OR K=情报学) AND A=范并思 AND Y=1982-2016
范例二：P=计算机应用与软件 AND (U=C++ OR U=Basic) NOT K=Visual AND Y=2011-2016

分类表

所选分类

>> <<

限定检索结果

文献类型

4 篇 会议

馆藏范围

4 篇 电子文献
0 种 纸本馆藏

日期分布

学科分类号

3 篇 工学
- 2 篇 材料科学与工程（可...
- 2 篇 电子科学与技术（可...
- 1 篇 机械工程
- 1 篇 仪器科学与技术
- 1 篇 冶金工程
- 1 篇 化学工程与技术
1 篇 理学
- 1 篇 物理学

主题

2 篇 elastic moduli
1 篇 technological pa...
1 篇 mechanical prope...
1 篇 films
1 篇 nanotechnologies
1 篇 polysilicon
1 篇 technical parame...
1 篇 piezoresistance
1 篇 piezoresistive s...
1 篇 elastic modulus
1 篇 piezoresistive p...
1 篇 young's modulus
1 篇 low pressure che...
1 篇 polycrystalline ...

机构

2 篇 department of in...
2 篇 dept. of integra...

作者

2 篇 huang hai
2 篇 lu xue bin
2 篇 cui lin hai
1 篇 hai huang
1 篇 lu xuebin
1 篇 xuebin lu
1 篇 linhai cui
1 篇 cui linhai
1 篇 ren ming yuan

语言

4 篇 英文

检索条件"机构=Department of Integrate Circuit Design and Integrate System"

共 4 条记录，以下是1-10 订阅

全选清除本页清除全部题录导出标记到"检索档案"

详细简洁

排序：

Piezoresistive and mechanics properties of nano polycrystalline silicon film materials

Piezoresistive and mechanics properties of nano polycrystall...

引用

2013 International Conference on Vehicle and Mechanical Engineering and Information Technology, VMEIT 2013

作者： Lu, Xue Bin Cui, Lin Hai Huang, Hai Department of Integrate Circuit Design and Integrate System Harbin University of Science and Technology Harbin 150080 China

ISBN: (纸本)9783037858202

The polycrystalline silicon films with same doping concentration and different thickness were prepared by low pressure chemical vapor deposition. The gauge factors of the films samples were tested, the results show that the piezoresistive properties of nano polycrystalline silicon film (NPSF) exceed that of common polycrystalline silicon film (CPSF). To apply the NPSF to MEMS piezoresistive device effectively, the Young's modulus of the NPSF were tested by in-situ nano mechanical test system, the results show that the Young's modulus of the NPSF is about between 155GPa and 158GPa. It is very useful to investigate the piezoresistive and mechanics properties of NPSF, the results show that NPSF is a suitable material in MEMS piezoresistive device. © (2013) Trans Tech Publications, Switzerland.

关键词： Elastic moduli

来源：评论

学校读者我要写书评

暂无评论

Optimized technical characteristics of polysilicon nanofilm

Optimized technical characteristics of polysilicon nanofilm

引用

2014 International Conference on Electronic Engineering and Information Science, ICEEIS 2014

作者： Lu, Xue Bin Cui, Lin Hai Ren, Ming Yuan Department of Integrate Circuit Design and Integrate System Harbin University of Science and Technology Harbin 150080 China

ISBN: (纸本)9783038351467

In order to take good advantage of polysilicon nanofilm, optimized technical characteristics of the polysilicon nanofilm are very necessary to investigated. In this paper, the polysilicon nanofilms were prepared under different technical parameters, including thickness and doping concentration, which are very important for preparation of the nanofilm. The experimental results of piezoresistive and temperature characteristics show that the optimized technical characteristics are followed, the thickness is about 90nm, and the doping concentration is about 4.1×1019cm-3 or between 2.0×1020cm-3 and 4.1×1020cm-3 from different point of view. The investigations of optimized technical characteristics are very useful for application of the polysilicon nanofilm to piezoresistive sensor. © (2014) Trans Tech Publications, Switzerland.

关键词： Polycrystalline materials

来源：评论

学校读者我要写书评

暂无评论

Analyses of piezoresistive and mechanical characteristics of nano polysilicon film

Analyses of piezoresistive and mechanical characteristics of...

引用

International Conference on Software Intelligence Technologies and Applications and International Conference on Frontiers of Internet of Things, 2014

作者： Lu, Xuebin Cui, Linhai Huang, Hai Dept. of Integrate Circuit Design and Integrate System Harbin University of Science and Technology China

ISBN: (纸本)9781849199704

In order to take good advantage of nano polysilicon film, piezoresistive and mechanical characteristics of the nano polysilicon film are very necessary to investigated. In this paper, the nano polysilicon films were prepared by low pressure chemical vapour deposition under different technical parameters, including thickness, deposition temperature and doping concentration, which are very important for preparation of the nanofilm. The experimental results of piezoresistive and temperature characteristics show that the optimized technical parameters are followed, the thickness is about 90nm, the deposition temperature is 620, and the doping concentration is about 4.1×1019cm-3 or between 2.0×1020cm-3 and 4.1×1020cm-3 from different point of view. The experimental results of Young's modulus show that the mechanical characteristic of nano polysilicon film is almost independent of thickness. The piezoresistive performance of nano polysilicon film is better than that of single silicon under same doping concentration. The investigation of piezoresistive and mechanical characteristics of the nano polysilicon film is very useful for application of piezoresistive sensor, which can be used in the internet of things.

关键词： Elastic moduli

来源：评论

学校读者我要写书评

暂无评论

Analyses of piezoresistive and mechanical characteristics of nano polysilicon film

Analyses of piezoresistive and mechanical characteristics of...

引用

International Conference on Software Intelligence Technologies and Applications & International Conference on Frontiers of Internet of Things 2014

作者： Xuebin Lu Linhai Cui Hai Huang Dept. of Integrate Circuit Design and Integrate System Harbin University of Science and Technology China

In order to take good advantage of nano polysilicon film, piezoresistive and mechanical characteristics of the nano polysilicon film are very necessary to investigated. In this paper, the nano polysilicon films were prepared by low pressure chemical vapour deposition under different technical parameters, including thickness, deposition temperature and doping concentration, which are very important for preparation of the nanofilm. The experimental results of piezoresistive and temperature characteristics show that the optimized technical parameters are followed, the thickness is about 90nm, the deposition temperature is 620°C, and the doping concentration is about 4.1×10 19 cm -3 or between 2.0×10 20 cm -3 and 4.1×10 20 cm -3 from different point of view. The experimental results of Young's modulus show that the mechanical characteristic of nano polysilicon film is almost independent of thickness. The piezoresistive performance of nano polysilicon film is better than that of single silicon under same doping concentration. The investigation of piezoresistive and mechanical characteristics of the nano polysilicon film is very useful for application of piezoresistive sensor, which can be used in the internet of things.

关键词： Piezoresistive Sensor Piezoresistive performance Technical Parameters Young's Modulus piezoresistance technological parameter Elastic Modulus Mechanical properties Polysilicon Low pressure chemical vapor deposition Nanotechnologies Films

来源：评论

学校读者我要写书评

暂无评论

没有更多数据了...

全选清除本页清除全部题录导出标记到“检索档案”

共1页 << < 1 > >>

检索报告对象比较合并检索0

隐藏清空

合并搜索

回到顶部

执行限定条件

内容：

评分：

请选择保存的检索档案：

请选择收藏分类：

订阅名称：

通借通还

温馨提示：

图书名称：

借书校区：

取书校区：

手机号码：

邮箱地址：

一卡通帐号：

电话和邮箱必须正确填写，我们会与您联系确认。

联系人：

所在院系：

联系邮箱：

联系电话：

内蒙古自治区呼和浩特市赛罕区大学西街235号邮编: 010021

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：