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Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for measurement and Fabrication Purposes

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Nanomanufacturing and Metrology 2021年第3期4卷 156-164页

作者： Ralf Schienbein Florian Fern Rene Theska Shraddha Supreeti Roland FuBl Eberhard Manske Department of Mechanical Engineering Institute of Design and Precision Engineering.Technical University of Ilmenau.IlmenauGermany Institute of Process Measurement and Sensor Technology Department of Mechanical EngineeringTechnical University of IlmenauIlmenauGermany Electronics Technology Group Department of Electrical Engineering and Information TechnologyTechnical University of IlmenauIlmenauGermany

The majority of nanopositioning and nanomeasuring machines(NPMMs)are based on three independent linear movements in a Cartesian coordinate *** in combination with the specific nature of sensors and tools limits the addressable part *** enhancement of an NPMM is introduced by the implementation of rotational movements while keeping the precision in the nanometer *** this purpose,a parameter-based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate *** taken show high potential for three linear movements of the object in combination with two angular movements of the *** influence of the additional rotation systems on the existing structure of NPMMs has been investigated further *** series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are *** a result of these test series,the necessity of in situ position determination of the tool became very *** tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry-Perot *** optimization has been used to enhance the overall system structure with regard to reproducibility and long-term *** have been experimentally investigated by use of a retroreflector as a tool and the various laser interferometers of the *** knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.

关键词： Multiaxial nanopositioning and nanomanufacturing Ultra-precision machine designs 5-Axis operation Ultraprecision rotations

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First prototype of a positioning device with subatomic resolution 22

First prototype of a positioning device with subatomic resol...

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22nd International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2022

作者： Hebenstreit, Roman Wedrich, Karin Strehle, Steffen Manske, Eberhard Theska, René Technische Universität Ilmenau Department of Mechanical Engineering Institute for Design and Precision Engineering Precision Engineering Group Germany Technische Universität Ilmenau Department of Mechanical Engineering Institute of Micro- and Nanotechnologies Microsystems Technology Group Germany Technische Universität Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Germany

ISBN: (纸本)9781998999118

In the forthgoing work on a device that enables subatomic resolved highly reproducible positioning, a first prototype is here presented. The entire positioning system including the actuator, sensor and guiding mechanism, is realized as a micro-electro-mechanical system (MEMS) on chip level, based on silicon-on-insulator (SOI) technology. A modular printed circuit board acts as the mechanical as well as the electrical contacting interface for the silicon chip. First variants of a linear positioning system comprising axisymmetric double parallel crank structure are investigated. Pivot joints as flexure hinges with concentrated compliance are deployed. These hinges show minimal rotational axis displacement for small angles of deflection, thus ensuring smallest deviations to a straight-line path of the linear guiding mechanism. An electrostatic comb actuator transmits forces contactless to minimize over constraints. A measuring bridge in differential mode utilizes the same comb structures to measure the table position based on the capacitance change. Estimating the position resolution, limited by the resolution of the capacitive sensor, a measurable step width below 50 pm can be expected. In further steps, the device will be a platform to be equipped with a lattice-scale-based position measurement system according to achieve an even higher resolution and reproducibility. © European Society for Precision engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Capacitive sensors

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Improved Particle Swarm Optimization Algorithm for EIT Image Reconstruction 20

Improved Particle Swarm Optimization Algorithm for EIT Image...

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20th International Multi-Conference on Systems, Signals and Devices, SSD 2023

作者： Kahouli, Oumayma Hafsa, Mariem Hellara, Hiba Bennour, Imed Eddine Essoukri Ben Amarax, Najoua Kanoun, Olfa University of Sousse National Engineering School of Sousse Department of Computer Science Sousse4023 Tunisia National Engineering School of Sousse Laboratory of Advanced Technology and Intelligent Systems Tunisia Technische Universität Chemnitz Laboratory of Measurement and Sensor Technology Chemnitz Germany University of Sfax Laboratory of Signals Systems Artificial Intelligence and Networks Digital Research Center of Sfax Tunisia

ISBN: (纸本)9798350332568

Electrical Impedance Tomography (EIT) is a clinical imaging technique that gained a lot of attention because it is a non-invasive and radiation-free method. To obtain an inner image of the domain under study, a specific number of electrodes is attached to the surface of the object, then through a pair of electrodes, a low alternative current is injected. Potentials produced by this injection are measured with the remaining electrodes. Based on these boundary voltages measurements, the inner conductivity can be inferred, thus the image is reconstructed. The focus of this paper is to overcome the major weakness of the EIT image reconstruction technique, which is the low spatial resolution of the reconstructed images caused by the non-linearity of EIT inverse problem. This paper considers this problem, an optimization problem that is solved using the Particle Swarm Optimization (PSO) meta-heuristic. A variant of the standard PSO is proposed and validated, first on a circular mesh composed of 686 triangles then on a lung mesh composed of 2707 triangles. © 2023 IEEE.

关键词： Electrodes

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On the development of five axes nanopositioning machines for measurement and fabrication purposes based on Cartesian systems 21

On the development of five axes nanopositioning machines for...

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21st International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2021

作者： Schienbein, Ralf Theska, René Fern, Florian Füßl, Roland Manske, Eberhard Precision Engineering Group Department of Mechanical Engineering Technische Universität Ilmenau Germany Institute of Process Measurement and Sensor Technology Department of Mechanical Engineering Technische Universität Ilmenau Germany

ISBN: (纸本)9780995775190

The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This in combination with the specific nature of sensors and tools limits the addressable part geometries. An enhancement of a NPMM is introduced by the implementation of rotational movements while keeping the precision untouched. For this purpose, a parameter based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate substructures. Evaluations taken, show high potential for three linear movements of the object in combination with two angular movements of the tool. The influence of the additional rotation systems on the existing structure of NPMMs has been investigated further on. Test series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are realized. As a result of these test series, the necessity of in situ position determination of the tool became very clear. The tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry Pérot interferometers. FEA optimization has been used to enhance the overall system structure with regard to reproducibility and long term stability. Residual deviations to the ideal moving pathes have been experimentally investigated by replacing the tool by a retroreflector and utelization of the various laser interferometers of the NPMM. The knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines. © 2021 Proceedings of the 21st International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2021. All rights reserved.

关键词： Machine design

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Flexible 3D Printed Ferroelectret sensors Integrated into Smart Textiles for Unobtrusive Monitoring

Flexible 3D Printed Ferroelectret Sensors Integrated into Sm...

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IEEE International Conference on Flexible and Printable sensors and Systems (FLEPS)

作者： Alexander A. Altmann Fatma Souissi Omar Ben Dali Sven Suppelt Bastian Latsch Jan Helge Dörsam Sergey Zhukov Dennis Flachs Mario Kupnik Measurement and Sensor Technology Group Technische Universität Darmstadt Germany Department of Materials and Earth Sciences Technische Universität Darmstadt Germany Faculty of Engineering Technische Hochschule Aschaffenburg Germany

ISBN: (数字)9798350383263

ISBN: (纸本)9798350383270

The development of smart wearables, involving the sensor integration into textiles, has emerged in several applications, such as heart rate monitoring in healthcare contexts, smart insoles for gait analysis, or gesture recognition for virtual reality interfaces. A common challenge in this field is the incorporation of off-the-shelf sensors, which are often nonelastic, therefore, constrain the design, reduce sensitivity, and lead to increased costs. In this work, we present an additively manufactured ferroelectret sensor integrated into a textile with detachable electronics on an elastic strap. The sensor comprises a 3D printed layer of soft polylactic acid, creating a seamlessly fused, mechanically resilient compound. Its long-term charge stability results in the surface potential settling at 300V after 15 days and a piezoelectric coefficient of up to 201 pC/N for mechanical loads of 1 N, similar to state-of-the-art ferroelectrets. We demonstrate the sensor integration in the application of hand gesture recognition by deploying it into a sport bandage and reliably distinguish between three gestures, while the soft sensor proves suitable as an unobtrusive measurement device. As a result, this low-cost, biocompatible, and highly flexible sensor qualifies for the integration in various further applications, such as in medical and sports devices.

关键词： Smart textiles Three-dimensional displays Gesture recognition Virtual reality Three-dimensional printing Stability analysis Wearable devices

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A wrapper framework for feature selection and ELM weights optimization for FMG-based sign recognition

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Computers in Biology and Medicine 2024年 179卷 108817-108817页

作者： Al-Hammouri, S. Barioul, R. Lweesy, K. Ibbini, M. Kanoun, O. Biomedical Engineering Department College of Engineering Jordan University of Science and Technology P.O. Box 3030 Irbid22110 Jordan Professorship of Measurement and Sensor Technology Technische Universitaet Chemnitz Chemnitz09126 Germany Electrical Computer and Biomedical Engineering Department College of Engineering Abu Dhabi University P.O. Box 59911 Abu Dhabi United Arab Emirates

Force myography (FMG) is increasingly gaining importance in gesture recognition because of it's ability to achieve high classification accuracy without having a direct contact with the skin. In this study, we investigate the performance of a bracelet with only six commercial force sensitive resistors (FSR) sensors for classifying many hand gestures representing all letters and numbers from 0 to 10 in the American sign language. For this, we introduce an optimized feature selection in combination with the Extreme Learning Machine (ELM) as a classifier by investigating three swarm intelligence algorithms, which are the binary grey wolf optimizer (BGWO), binary grasshopper optimizer (BGOA), and binary hybrid grey wolf particle swarm optimizer (BGWOPSO), which is used as an optimization method for ELM for the first time in this study. The findings reveal that the BGWOPSO, in which PSO supports the GWO optimizer by controlling its exploration and exploitation using inertia constant to improve the convergence speed to reach the best global optima, outperformed the other investigated algorithms. In addition, the results show that optimizing ELM with BGWOPSO for feature selection can efficiently improve the performance of ELM to enhance the classification accuracy from 32% to 69.84% for classifying 37 gestures collected from multiple volunteers and using only a band with 6 FSR sensors. © 2024 Elsevier Ltd

关键词： Swarm intelligence

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Medical Omics

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Deutsche Gesellschaft fur Medizinische Informatik, Biometrie und Epidemiologie e.V. (GMDS) 2023年 19卷

作者： Allmer, Jens Hofestädt, Ralf Hochschule Ruhr West Institute for Measurement Engineering and Sensor Technology Mülheim an der Ruhr Germany Bielefeld University Faculty of Technology Bioinformatics/Medical Informatics Department Bielefeld Germany

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Electrical Impedance Tomography Image Reconstruction with apriori Knowledge for Gesture Recognition 19

Electrical Impedance Tomography Image Reconstruction with ap...

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19th IEEE International Multi-Conference on Systems, Signals and Devices, SSD 2022

作者： Alasasfeh, Hayat Hafsa, Mariem Bader, Oumaima Ibbini, Mohammed Hasan, Sameer Kanoun, Olfa Jordan University of Science and Technology Biomedical Engineering Department Irbid Jordan Université de Sousse Ecole Nationale d'Ingénieurs de Sousse LATIS- Laboratory of Advanced Technology and Intelligent Systems Sousse4023 Tunisia Measurement and Sensor Technology Technische Universität Chemnitz Chemnitz Germany

ISBN: (数字)9781665471084

ISBN: (纸本)9781665471084

Electrical impedance tomography (EIT) reconstructs the conductivity images of an object based on the voltages and the currents at the surface of the object. Among the clinical applications of EIT thorax imaging, brain function monitoring and breast cancer screening. However, EIT suffers from a poor signal-to-noise ratio and spatial resolution. To improve the quality of reconstructed images and provide clear information about the structure, the paper proposes to include prior knowledge about the structure from MRI. The proposed techniques could be very promising with more work. To illustrate this technique in this paper, eight electrodes with the adjacent current pattern were employed in this research. For each gesture, forty data points are recorded. The Gauss-Newton and Back-Projection algorithms are used for image reconstruction with prior knowledge of the human forearm from MRI images. The resultant contours of the Forearm, Ulna, and Radius have been used to build the mesh. In the Gauss-Newton algorithm, the results reveal that structural information improves image quality and conductivity distribution, particularly in the region of two bones. In addition, the reconstructed images using the Gauss-Newton algorithm performed better than images reconstructed using the back-projection algorithm. © 2022 IEEE.

关键词： Image reconstruction

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Vulnerabilities and Challenges in the Development of PUF-Based Authentication Protocols on FPGAs: A Brief Review

Vulnerabilities and Challenges in the Development of PUF-Bas...

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IEEE Conference on Dependable and Secure Computing

作者： Sinan Yavuz Edwin Naroska Kai Daniel Department of Electrical Engineering and Computer Science University of Siegen Siegen Germany Department of Electrical Engineering and Computer Science Niederrhein University of Applied Sciences Krefeld Germany Institute of Measurement and Sensor Technology University of Applied Sciences Ruhr West Mülheim Germany

ISBN: (数字)9798331540289

ISBN: (纸本)9798331540296

The security of IoT (Internet of Things) devices and the protection of sensitive information processed by these devices such as personal data, sensor values, process-related information is an important and difficult challenge. A major task in IoT communication is secure identification of devices. Unfortunately, traditional cryptographic methods are often not suitable for IoT devices due to their limited hardware resources. However, typical methods are computationally intensive, require a large amount of memory, and have a high-power consumption. On the other hand, Physical Unclonable Functions (PUFs) are low-cost and lightweight hardware-based primitives that can be used as a security component to protect data against third parties and thus increase security of a device. In this paper, the challenges and vulnerabilities in the development of PUF-based authentication protocols are presented. To this end, a security analysis of different approaches known from literature are discussed. Furthermore, possible attack vectors and prevention techniques are also considered.

关键词： Protocols Reviews Authentication Physical unclonable function Vectors Security Internet of Things Servers Object recognition Field programmable gate arrays

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Remote platform for lung monitoring based on Electrical Impedance Tomography measurements 19

Remote platform for lung monitoring based on Electrical Impe...

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19th IEEE International Multi-Conference on Systems, Signals and Devices, SSD 2022

作者： Hafsa, Mariem Bchir, Ons Bader, Oumaima Ben Amara, Najoua Essoukri Kanoun, Olfa Université de Sousse Ecole Nationale d' Ingénieurs de Sousse LATIS- Laboratory of Advanced Technology and Intelligent Systems Sousse4023 Tunisia Professorship of Measurement and Sensor Technology Technische Universität Chemnitz Chemnitz Germany University of Sousse National EngineeringSchool of Sousse Computer Engineering Department Sousse Tunisia

ISBN: (数字)9781665471084

ISBN: (纸本)9781665471084

Electrical Impedance Tomography (EIT) is a non-invasive, non-ionizing medical imaging method that has been on the rise in biomedical field. For lung monitoring, electrodes are attached around patient's thorax. Several boundary voltages are measured on the surface of these electrodes, which result from the injection of a small alternating current. Based on these measurements, the inner conductivity distribution of the patient's lung can be determined and used for monitoring and diagnosis. EIT can be used for extended periods of time, which makes it ideal for continuous monitoring, especially for intensive care patients. Several stationary EIT-based lung monitoring platforms have been developed for this reason. In this work, however, we propose a web and cloud-based monitoring solution that allows remote access for the doctors and medical staff. The implemented solution provides real-time, continuous monitoring as well as a visualization of extracted lung features that aid the diagnosis, © 2022 IEEE.

关键词： Electrodes

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