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24th IMEKO TC3 Conference on measurement of Force, Mass and Torque 2022, Together with the 14th TC5 Conference on the measurement of Hardness, the 6th TC16 Conference on Pressure and Vacuum measurement, and the 5th TC22 Conference on Vibration measurement

作者： Pabst, M. Fröhlich, T. Technical University of Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Process Measurement Technology Group Ilmenau Germany

ISBN: (纸本)9781713870203

This paper describes a new method to measure the height of the centre of gravity of high-sensitive mass artefacts. A measuring device is presented and tested with mass samples of various shapes and densities. The results of the measurements are compared to the geometrical estimated heights of the centre of gravity and further developments of the new instrument are presented. © 2023 *** All Rights Reserved.

关键词： Comparators (optical)

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Calibration of the stiffness of soft cantilevers based on electromagnetic and electrostatic force compensation principles

Calibration of the stiffness of soft cantilevers based on el...

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作者： Cherkasova, Valeriya Li, Zhi Popadic, Radovan Froehlich, Thomas Brand, Uwe Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau Germany Department 5.1 Surface Metrology Physikalisch-Technische Bundesanstalt PTB Braunschweig Germany

This article presents a modified version of a traceable force-displacement measurement device developed at TU Ilmenau. The calibration of forces is carried out by a balance with the electromagnetic and electrostatic principles of force compensation. As part of this study, the device was used to calibrate the stiffness of soft cantilevers. The expanded relative uncertainty of the measured stiffnesses in the range from 13 mN/m to 100 mN/m ranged from 1.5 % to 2.7 %. The device was also verified through two-way comparison of measurements with the PTB, good agreement was obtained. © 2024

关键词： Electrostatic force

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New Sartorius mass comparator for highest accuracy including fully automatic vacuum transfer system

New Sartorius mass comparator for highest accuracy including...

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作者： Hilbrunner, Falko Schreiber, Mario Fröhlich, Thomas Fehling, Thomas Schwesinger, Folker Krapf, Gunter Sartorius Lab Instruments GmbH & Co. KG Mass Comparators Department Göttingen37079 Germany Institute of Process Measurement and Sensor Technology TU Ilmenau Ilmenau98684 Germany

Sartorius cooperated with Technische Universität Ilmenau to develop the innovative automatic mass comparator VMC1007. This facilitates highly accurate mass comparisons of weights between 100 g and 1 kg under controlled atmospheric conditions, and in a vacuum. For permanent storage of weights under vacuum conditions, the mass comparator can optionally be configured with a vacuum transfer system and corresponding containers. The device is very compact, has eight universal positions for directly handling weights of different shapes and allows for precise and fast mass comparisons. In order to make the processes for inserting and ejecting weights as simple and safe as possible, all mechanical movement axes are motorised. Mass comparisons can be controlled, monitored and analysed easily and irrespective of the operating system using web-based user interface. In all processes, the user is intuitively guided through the individual steps to enable safe, efficient and convenient work. © 2024

关键词： Comparators (optical)

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Analytical Description of Transversally Symmetric Hinges with Semicircular Contours 16th

Analytical Description of Transversally Symmetric Hinges wi...

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16th International Federation of Theory of Machines and Mechanisms World Congress, IFToMM WC 2023

作者： Jahn, Hannes Fröhlich, Thomas Zentner, Lena TU Ilmenau Department of Mechanical Engineering Mechanics of Compliant Systems Group Ilmenau98693 Germany TU Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Ilmenau98693 Germany

ISBN: (纸本)9783031457081

Compliant mechanisms are becoming increasingly important, especially in force measurement and weighing technology, due to their zero backlash, wear resistance, and zero friction. Their deformation under external forces can be analyzed well with analytical calculations and FEM simulations. Analytically, only mechanisms with symmetrical and longitudinally symmetrical hinges are described. This paper presents a method that allows transversally symmetric hinges to be described analytically. The model must be computed numerically due to the built neutral fiber and the nonlinearities in the used calculation method. The developed method is then compared with FEM calculations in a parameter study and considered to be validated. Finally, outlooks are formulated on how the created method can for instance be used to develop load cells for later calculations. Moreover, it is shown to what extent it is possible to implement this method for general calculations of compliant mechanisms. © 2024, The Author(s), under exclusive license to Springer Nature Switzerland AG.

关键词： Hinges

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Investigating the kinematic performance of a positioning device with subatomic resolution 23

Investigating the kinematic performance of a positioning dev...

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23rd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2023

作者： Hebenstreit, Roman Oertel, Erik Thier, Daniel Manske, Eberhard Theska, René Technische Universität Ilmenau Department of Mechanical Engineering Institute for Design and Precision Engineering Precision Engineering Group Germany Technische Universität Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Germany

ISBN: (纸本)9781998999132

This paper is a follow-up to the conceptual design [1] and the prototype introduction [2] of a linear positioning device with subatomic resolution. This device is designed as a monolithic system. The linear guiding is realized by a mechanism with concentrated compliances. The position measurement is performed by tip-based scanning of the surface of a scale fixed at the moving table. Considering this setup, it becomes clear that the strongest sensitivity for kinematic deviations exists for displacements collinear to the probing axis of the tip as well as corresponding tilting motions. Deviations from an ideal straight guiding axis are mainly a result of manufacturing-related geometric deviations in the guiding mechanism. These error motions are investigated and characterised for prototype devices using an optical focus sensor in combination with a nanomeasuring machine NMM-1. To distinguish dynamic influences and static contributions to error motion, a quasi-static sequence of varying positions of the system has been performed during the measurement procedure. The determined error motions are highly reproducible due to the monolithic design from monocrystalline silicon. Consequently, the systematic error contribution of manufacturing deviations to the kinematic accuracy of the positioning device can be subsequently corrected. © 2023 Euspen Headquarters.

关键词： Compliant mechanisms

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Calibration of the stiffness of soft cantilevers based on electromagnetic and electrostatic force compensation principles

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measurement: sensors 2024年 38卷

关键词： Electrostatic force

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Further Development of a Magnet System for Planck Balance Applications

Further Development of a Magnet System for Planck Balance Ap...

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Conference on Precision Electromagnetic measurements (CPEM)

作者： Markus Pabst Falko Hilbrunner Thomas Fröhlich Institute of Process Measurement and Sensor Technology TU Ilmenau Ilmenau Germany Department Mass Comparators Sartorius Lab Instruments GmbH&Co.KG Göttingen Germany

ISBN: (数字)9798350361049

ISBN: (纸本)9798350361056

An important part of a Planck, or Kibble balance, is the magnet system. It serves as an actuator in force mode and as a sensor in velocity mode. The performance of the magnet system in Planck balances is essential for mass calibration according to the International System of Units of 2019 [1]. This paper describes the further development of a lightweight magnet system for use in the Planck extension for high-precision vacuum mass comparators [4]. Based on the experience gained from investigations with a prototype magnetic system of the Planck extension, a further development of the magnetic system using simulation methods is presented.

关键词： Coils Vacuum systems Electromagnetic measurements Computational modeling Force Prototypes Gain measurement

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New Sartorius mass comparator for highest accuracy including fully automatic vacuum transfer system

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measurement: sensors 2024年 38卷

关键词： Comparators (optical)

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Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for measurement and Fabrication Purposes

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Nanomanufacturing and Metrology 2021年第3期4卷 156-164页

作者： Ralf Schienbein Florian Fern Rene Theska Shraddha Supreeti Roland FuBl Eberhard Manske Department of Mechanical Engineering Institute of Design and Precision Engineering.Technical University of Ilmenau.IlmenauGermany Institute of Process Measurement and Sensor Technology Department of Mechanical EngineeringTechnical University of IlmenauIlmenauGermany Electronics Technology Group Department of Electrical Engineering and Information TechnologyTechnical University of IlmenauIlmenauGermany

The majority of nanopositioning and nanomeasuring machines(NPMMs)are based on three independent linear movements in a Cartesian coordinate *** in combination with the specific nature of sensors and tools limits the addressable part *** enhancement of an NPMM is introduced by the implementation of rotational movements while keeping the precision in the nanometer *** this purpose,a parameter-based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate *** taken show high potential for three linear movements of the object in combination with two angular movements of the *** influence of the additional rotation systems on the existing structure of NPMMs has been investigated further *** series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are *** a result of these test series,the necessity of in situ position determination of the tool became very *** tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry-Perot *** optimization has been used to enhance the overall system structure with regard to reproducibility and long-term *** have been experimentally investigated by use of a retroreflector as a tool and the various laser interferometers of the *** knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.

关键词： Multiaxial nanopositioning and nanomanufacturing Ultra-precision machine designs 5-Axis operation Ultraprecision rotations

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First prototype of a positioning device with subatomic resolution 22

First prototype of a positioning device with subatomic resol...

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22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022

作者： Hebenstreit, Roman Wedrich, Karin Strehle, Steffen Manske, Eberhard Theska, René Technische Universität Ilmenau Department of Mechanical Engineering Institute for Design and Precision Engineering Precision Engineering Group Germany Technische Universität Ilmenau Department of Mechanical Engineering Institute of Micro- and Nanotechnologies Microsystems Technology Group Germany Technische Universität Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Germany

ISBN: (纸本)9781998999118

In the forthgoing work on a device that enables subatomic resolved highly reproducible positioning, a first prototype is here presented. The entire positioning system including the actuator, sensor and guiding mechanism, is realized as a micro-electro-mechanical system (MEMS) on chip level, based on silicon-on-insulator (SOI) technology. A modular printed circuit board acts as the mechanical as well as the electrical contacting interface for the silicon chip. First variants of a linear positioning system comprising axisymmetric double parallel crank structure are investigated. Pivot joints as flexure hinges with concentrated compliance are deployed. These hinges show minimal rotational axis displacement for small angles of deflection, thus ensuring smallest deviations to a straight-line path of the linear guiding mechanism. An electrostatic comb actuator transmits forces contactless to minimize over constraints. A measuring bridge in differential mode utilizes the same comb structures to measure the table position based on the capacitance change. Estimating the position resolution, limited by the resolution of the capacitive sensor, a measurable step width below 50 pm can be expected. In further steps, the device will be a platform to be equipped with a lattice-scale-based position measurement system according to achieve an even higher resolution and reproducibility. © European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Capacitive sensors

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