As wafer circuit widths shrink less than 10 nm,stringent quality control is imposed on the wafer fabrication processes. Therefore, wafer residency time constraints and chamber cleaning operations are widely required i...
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As wafer circuit widths shrink less than 10 nm,stringent quality control is imposed on the wafer fabrication processes. Therefore, wafer residency time constraints and chamber cleaning operations are widely required in chemical vapor deposition, coating processes, etc. They increase scheduling complexity in cluster tools. In this paper, we focus on scheduling single-arm multi-cluster tools with chamber cleaning operations subject to wafer residency time constraints. When a chamber is being cleaned, it can be viewed as processing a virtual wafer. In this way, chamber cleaning operations can be performed while wafer residency time constraints for real wafers are not violated. Based on such a method, we present the necessary and sufficient conditions to analytically check whether a single-arm multi-cluster tool can be scheduled with a chamber cleaning operation and wafer residency time constraints. An algorithm is proposed to adjust the cycle time for a cleaning operation that lasts a long cleaning ***, algorithms for a feasible schedule are also *** an algorithm is presented for operating a multi-cluster tool back to a steady state after the cleaning. Illustrative examples are given to show the application and effectiveness of the proposed method.
Power systems are becoming increasingly vulnerable to cyberattacks due to extensive information exchange. This paper proposes a novel fuzzy inference system (FIS)-enhanced data integrity attack (DIA)-recovery framewor...
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This study investigates the combined berth allocation problem (BAP) and quay crane allocation problem (QCAP) while considering a multi-quay setting. First, a mixed integer linear programming mathematical model is deve...
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A numerical model of the bearing fault of a motor with a closed-slot rotor using the finite element method(FEM)is *** rotor’s radial motion can be regarded as static eccentric at the defect time points and healthy at...
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A numerical model of the bearing fault of a motor with a closed-slot rotor using the finite element method(FEM)is *** rotor’s radial motion can be regarded as static eccentric at the defect time points and healthy at other time *** frequency of the harmonic component is analyzed corresponding to bearing fault in stator current according to the radial movement of the motor ***,the relative permeability variation region is established to achieve the radial motion of the rotor with bearing ***,the relative permeability variation region is established in the health and static eccentric ***,the defect time points are estimated and the static eccentricity model by transient field is ***,the relative permeability of the variable region in the static eccentric model is imported into the variable region of the health model at the defect time *** simulation results show that the air gap flux density of the bearing fault model is different from that of the health model and static eccentric *** addition,the stator current contains harmonic components of the bearing *** analysis results prove the applicability of the proposed model.
Waveguide-integrated mid-infrared(MIR)photodetectors are pivotal components for the development of molecular spectroscopy applications,leveraging mature photonic integrated circuit(PIC)*** various strategies,critical ...
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Waveguide-integrated mid-infrared(MIR)photodetectors are pivotal components for the development of molecular spectroscopy applications,leveraging mature photonic integrated circuit(PIC)*** various strategies,critical challenges still remain in achieving broadband photoresponse,cooling-free operation,and large-scale complementary-metal-oxide-semiconductor(CMOS)-compatible *** leap beyond these limitations,the bolometric effect-a thermal detection mechanism-is introduced into the waveguide *** importantly,we pursue a free-carrier absorption(FCA)process in germanium(Ge)to create an efficient light-absorbing medium,providing a pragmatic solution for full coverage of the MIR spectrum without incorporating exotic materials into ***,we present an uncooled waveguide-integrated photodetector based on a Ge-on-insulator(Ge-OI)PIC architecture,which exploits the bolometric effect combined with ***,our device exhibits a broadband responsivity of 28.35％/mW across 4030-4360 nm(and potentially beyond),challenging the state of the art,while achieving a noise-equivalent power of 4.03×10-7W/Hz0.5 at 4180 *** further demonstrate label-free sensing of gaseous carbon dioxide(CO2)using our integrated photodetector and sensing waveguide on a single *** approach to room-temperature waveguide-integrated MIR photodetection,harnessing bolometry with FCA in Ge,not only facilitates the realization of fully integrated lab-on-a-chip systems with wavelength flexibility but also provides a blueprint for MIR PICs with CMOS-foundry-compatibility.
The series connection of fast-switching SiC mosfets presents a promising approach to enhance the efficiency, compactness, and simplicity of medium voltage (MV) power converters. However, managing voltage imbalances du...
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Ocular diseases have become an important issue worldwide. Every year, various ocular diseases affect numerous individuals, leading to blindness for many. Despite seeking treatment in hospitals or from doctors, accurat...
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Polymer nanocomposites have been a topic of intensive research regarding High Voltage engineering since the nineties of the last century. They present an alternative to conventional polymers since the latter were diag...
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Quantum coordination is considered in networks with classical and quantum links. We begin with networks with classical links, and characterize the generation of separable and classical-quantum correlations in three pr...
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An ultra-wideband (UWB) slotted compact Vivaldi antenna with a microstrip line feed was evaluated for microwave imaging (MI) applications. The recommended FR4 substrate-based Vivaldi antenna is 50×50×1.5 mm3...
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