The electron beam induced deposition process is a versatile and promising technology to improve and build a variety of different targets. The technique works in scanning electron microscope environment and is applicab...
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ISBN:
(纸本)9781509020669
The electron beam induced deposition process is a versatile and promising technology to improve and build a variety of different targets. The technique works in scanning electron microscope environment and is applicable from the micro-down to the nanometer scale. The fundamental working principle is well known and investigated. However, its application as standard process is still lacking, since repeatability and throughput are infancy. Especially, as this technique is performed manually. An automation and stabilization of the EBID process is desirable but challenging, since the SEM working environment is accompanied with many disturbing effects. Therefore, this work outlines automation strategies to handle those effects and achieve high repeatability and high throughput. These strategies are validated on an external off-the-shelf computer that is connected with the scanning electron microscope via self-developed scan generator. Analyzing these strategies show high repeatability and a reasonable throughput. An outlook is given about the possibilities on extending the scan generator to be able to do an online control of the electron beam induced depositions process.
MRI based nano- and microrobotics show good potential for new targeted therapies tackling e.g. cancer. In this paper, a system developed for the propulsion and navigation of small ferromagnetic objects only using clin...
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ISBN:
(纸本)9781467317375
MRI based nano- and microrobotics show good potential for new targeted therapies tackling e.g. cancer. In this paper, a system developed for the propulsion and navigation of small ferromagnetic objects only using clinical MRI systems is evaluated in experiments. The experiments include propulsion of an untethered ferromagnetic object against a pulsatile flow in a pipe system, navigation of an untethered object filled with ferromagnetic nanoparticles around obstacles in a free environment, and the choosing of a branch in a closed flow-less channel system when propelling an untethered ferromagnetic object. The system is found to deal with the tasks efficiently.
This paper describes a new position tracking system that uses the scanning electron microscope as a fast, high-resolution sensor system. The position tracking system works similar to an optical encoder using a special...
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This paper describes a new position tracking system that uses the scanning electron microscope as a fast, high-resolution sensor system. The position tracking system works similar to an optical encoder using a specially structured pattern as scale. Thus, with low computational overhead, an accuracy below 10 nm is achieved in a tungsten cathode-based microscope. The tracking system is virtually immune to changes in contrast, brightness, magnification and, to a certain extend, to defocusing. With a customized, external scan generator and scanning algorithm, the bottleneck of image acquisition can be bypassed and the position tracking system can reach update rates of more than 1 kHz. Furthermore, measurements can be conducted over long working ranges of up to 200 mum without losing precision.
Carbon nanotubes (CNTs) are one of the most promising materials for nanoelectronic applications. Before bringing CNTs into large-scale production, a reliable nanorobotic system for automated handling and characterizat...
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Carbon nanotubes (CNTs) are one of the most promising materials for nanoelectronic applications. Before bringing CNTs into large-scale production, a reliable nanorobotic system for automated handling and characterization as well as prototyping of CNT-based components is essential. This paper presents the NanoLab setup, a nanorobotic system that combines specially developed key components such as electrothermal microgrippers and mobile microrobots inside a scanning electron microscope. The working principle and fabrication of mobile microrobots and electrothermal microgripper as well as their interaction and integration is described. Furthermore, the NanoLab is used to explore novel key strategies such as automated locating of CNTs for pick-and-place handling and methods for electrical characterization of CNTs. The results have been achieved within the framework of a European research project where the scientific knowledge will be transfered into an industrial system that will be commercially available for potential customers.
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