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Joint 41st International Symposium on Robotics, ISR 2010 and 6th German Conference on Robotics 2010, ROBOTIK 2010

作者： Mikczinski, Manuel Luttermann, Tim Wich, Thomas Fatikow, Sergej Technologycluster Automated Nanohandling OFFIS Institute for Information Technology Escherweg 2 D-26121 Oldenburg Germany Division Microrobotics and Control Engineering University of Oldenburg D-26111 Oldenburg Germany

ISBN: (纸本)9781617387197

Micro- and Nanorobotics are relatively new but challenging fields in the broad field of robotics. There is more to them than just pick'n'place. They are required to be capable of positioning, characterizing, and assembling objects by means of joining. In this paper, we show the development and use of micro-force sensors for micro- and nanorobots in testing applications at the authors' research institutes. Three different systems are presented. First, a sensor dedicated to the measurement of injection forces during a cell injection is described. Second, directly written strain gages for the application on arbitrary surfaces are shown. Third, a tactile sensor is presented which is used during an assembly process. These are just three examples of the vast field of possible micro-force measurement principles and systems used in micro- and nanorobotics.

关键词： Nanorobotics

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VISUAL FEEDBACK METHODS FOR NANOHANDLING AUTOMATION

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International Journal of Information Acquisition 2009年第3期6卷 159-169页

作者： SERGEJ FATIKOW CHRISTIAN DAHMEN TIM WORTMANN ROBERT TUNNELL Division Microrobotics and Control Engineering University of Oldenburg Ammerländer Heerstr. 114-116 Oldenburg 26129 Germany

This paper presents different image processing methods and algorithms, which are needed to enable the reliable automation of nanohandling processes. These applications use the scanning electron microscope (SEM) as a visual sensor. SEMs are widespread and powerful tools for manipulations on the nanoscale. Due to the timing constraints in automated setups, the trade-off between SEM scanning speed and image quality is a concern for algorithm development. Tasks to be fulfilled on image data provided by the SEM include object recognition, object tracking and depth estimation. A selection of algorithms that have been applied in automated setups for nanomanipulation is discussed and validated.

关键词： Visual feedback object recognition object tracking depth estimation nanohandling automation

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Development of a control system for a microrobot-based nanohandling station

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IFAC Proceedings Volumes 2003年第17期36卷 533-538页

作者： Stefan Garnica Beige Hülsen Sergej Fatikow Division Microrobotics and Control Engineering Department of Computing Science University of Oldenburg Uhlhornsweg 84 D-26111 Oldenburg Germany

A microrobot-based nanohandling station, which is able to handle objects in the micrometer range and below, is introduced. Following a short description of the microrobot's mobile platfonn the station's control system is described. The application of an extended Kohonen network for the low-level pose control of the mobile platform is presented in detail as well as some results achieved.

关键词： Microsystems robot control fuzzy control neural control actuating signals microscope

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Directed Nanorobot-based Handling of Single Nanowires

Directed Nanorobot-based Handling of Single Nanowires

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2011 IEEE International Conference Mechatronics and Automation(2011 IEEE机电一体化与自动化国际会议)

作者： Make Bartenwerfer Sergej Fatikow Division of Microrobotics and Control Engineering University of Oldenburg D-26129 Oldenburg Germany

Within this paper, a new experimental implementation is presented in order to facilitate well directed handling of silicon nanowires with dimensions of about 10 μm length and less than 100 nm diameter. The experimental strategy employs adhesive bond techniques and FIB assisted milling to transfer nanowires from a production substrate to a different electrode substrate for electrical characterization. Thus, further electrical characterization measurements were achieved, which are important for future applications of nanowires. An accurate picking from high-dense nanowire forests, a transfer over several centimeters, and a well directed placement onto the target are feasible using the presented handling technique. This contribution explains advantages, prospects and limits of the proposed handling strategy with regard to an automation heading for future applications.

关键词： handling automation silicon nanowire robotic electrical characterization

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Robotic Dual Probe Setup for Reliable Pick and Place Processing on the Nanoscale using Haptic Devices

Robotic Dual Probe Setup for Reliable Pick and Place Process...

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IEEE/RSJ International Conference on Intelligent Robots and Systems

作者： Tobias Tiemerding Soren Zimmermann Sergej Fatikow Division Microrobotics and Control Engineering University of Oldenburg D-26129 Oldenburg Germany

ISBN: (纸本)9781479969357

This paper presents reproducible pick and place handling of particles within the sub micron range. The handling strategy is based on a robotic dual probe setup that is integrated into a high resolution scanning electron microscope. By purposeful utilization of the predominant adhesive forces on the nanoscale, this setup facilitates the assembly of overall complex arrangements of different nanoparticles using haptic devices. The paper discusses control issues of the setup as well as the advantages and restrictions of the proposed technique.

关键词： Probes Nanoparticles Automation Haptic interfaces End effectors Substrates Nanoscale devices

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Mechanical properties of boron nitride nanocones

Mechanical properties of boron nitride nanocones

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作者： Tian, Y. Wei, R. Eichhorn, V. Fatikow, S. Shirinzadeh, B. Zhang, D. School of Mechanical Engineering Tianjin University Tianjin 300072 China Division of Microrobotics and Control Engineering University of Oldenburg 26111 Oldenburg Germany Robotics and Mechatronics Research Laboratory Department of Mechanical and Aerospace Engineering Monash University Clayton VIC 3800 Australia

Using classic molecular dynamics simulation, the mechanical properties of boron nitride nanocones (BNNCs) have been systematically investigated. The influences of the apex angle, cone height on tensile, and compressive behavior of BNNCs under axial strains are analyzed. The failure strains and strain energy per atom of BNNCs decrease with the increasing cone height, whereas the failure forces almost remain constant for BNNCs under axial tensile strains. For the buckling analyses of BNNCs, the critical strain and critical axial force reduce significantly with the increase of the apex angle. The increasing cone height can also significantly decrease the critical strain of BNNCs and only slightly affects the critical force of BNNCs. The cone height has little influence on the resulting buckling patterns;however, the apex angle has a significant effect on the buckling patterns of the BNNCs. From the computational analyses, it is noted that there exist three deformation patterns, i.e., fourfold rotational symmetric, threefold rotational symmetric, and reflection symmetric modes for the BNNC with an apex angle of 83.6° and the former pattern will gradually transform to the latter pattern during the postbuckling stage. On the contrary, there is only one reflection symmetric fin-like buckling pattern for the BNNC with an apex angle of 39.8°. © 2012 American Institute of Physics.

关键词： Boron nitride

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Kinematics and its solution methodology of A 3-PRR flexure-based parallel mechanism

Kinematics and its solution methodology of A 3-PRR flexure-b...

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IASTED International Conference on Modelling, Simulation, and Identification, MSI 2009

作者： Tian, Y. Shirinzadeh, B. Zhang, D. Fatikow, S. Robotics and Mechatronics Research Laboratory Department of Mechanical and Aerospace Engineering Monash University Clayton VIC 3800 Australia School of Mechanical Engineering Tianjin University Tianjin 300072 China Division of Microrobotics and Control Engineering University of Oldenburg Oldenburg 26111 Germany

ISBN: (纸本)9780889868106

This paper presents the mechanical design and kinematic analysis methodologies of a 3-PRR flexure-based parallel mechanism, which can be utilized to conduct planar precision positioning as required for automating micro/ nano manipulation tasks. Flexure hinges are used as the revolute joints to provide smooth motion in the range of micrometers. Three high performance piezoelectric actuators are utilized to drive the flexure-based mechanism. The kinematics of the proposed flexure-based parallel mechanism is established. Finite element analysis is conducted to validate the performance of the 3-PRR flexure-based parallel mechanism. Two simplified methodologies are proposed to improve the computational efficiency of the kinematics of the developed mechanism.

关键词： Kinematics

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Simulation of probe misalignment effects during RF on-wafer probing 41

Simulation of probe misalignment effects during RF on-wafer ...

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41st International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2016

作者： Von Kleist-Retzow, F.T. Haenssler, O.C. Fatikow, Sergej Division Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany Institut DElectronique De Microlectronique et de Nanotechnologie CNRS UMR 8520 University of Lille 1 Villeneuve dAscq59652 France

ISBN: (纸本)9781467384858

The RF probing is a common task in the semiconductor industry for electrical parameters. In this paper an FEM simulation will be presented to evaluate the influences of probe misalignment on the measurement results during RF on-wafer probing. The main aspect is the investigation of the effects of distorted RF measurements through imprecise positioned tips. The virtual setup includes a GSG probe for on-wafer measurements and different electrical calibration structures. The simulation reveals a significant influence of the alignment on the results and shows an unbalance in the resulting electric field. © 2016 IEEE.

关键词： Probes

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control System of an Automated Nanohandling Robot Cell

Control System of an Automated Nanohandling Robot Cell

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IEEE International Symposium on Intelligent control (ISIC)

作者： Christian Stolle Sergej Fatikow Division Microrobotics and Control Engineering Department of Computing Science University of Oldenburg Germany

Current research work on the development of a nanohandling cell in a scanning electron microscope (SEM) is presented. An experimental setup is shown, in which two microrobots operate in the vacuum chamber of an SEM. In order to enable automatic nanohandling, a modular control system architecture is proposed. Different microrobots can be integrated in a flexible manner using a common control interface. The system easily scales up for more complex robot and sensor setups. Parallel execution of open and closed-loop control tasks can be performed. The functionality of the robot cell is exemplified by handling and mechanical characterization of carbon nanotubes (CNT).

关键词： Automatic control control systems Robotics and automation Scanning electron microscopy Open loop systems Actuators Robot sensing systems Micromanipulators Nanopositioning Sensor systems

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Artificial Enhanced Image Inpainting for Broadband SMM

Artificial Enhanced Image Inpainting for Broadband SMM

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International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)

作者： Markus F. Wieghaus Warda Saeed Muhammad Yasir Department of Computing Science Division Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany

ISBN: (数字)9798350376807

ISBN: (纸本)9798350376814

Scanning probe microscopy techniques changed the understanding of micro and nanometer scaled objects. Since the invention of the scanning tunneling microscope and the atomic force microscope, these techniques were further developed and combined with different measurement methodologies such as scanning microwave microscopy. By introducing an electromagnetic signal in the microwave frequency range via the scanning probe microscope tip to the sample, electromagnetic characteristics of the specimen can be acquired. Using a series of frequencies in one scan, even more information like dopant concentration or different layers of material can be captured. The drawback of this method is the long data acquisition time, which cannot be neglected on nanometer scale. To address this issue, we are using reduced raster scan techniques with broadband scanning microwave microscopy and calculate the missing data information by using image inpainting algorithms afterwards. In this work we will present the development of a deep learning algorithm and compare the output of it with different inpainting algorithms, which can even be used in other scanning probe microscope setups.

关键词： Atomic measurements Atomic force microscopy Scanning probe microscopy Neural networks Training data Tunneling Broadband communication

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