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International Symposium on Micromechatronics and Human Science (MHS)

作者： Sergej Fatikow Division Microrobotics and Control Engineering University of Oldenburg Germany

The handling of micro- and nanoscale objects with an accuracy in the nanometer range is an important current trend in robotics. It is often referred to as nanohandling and is primarily understood as manipulation of objects, which may include their finding, grasping, moving, tracking, releasing, positioning, pushing, pulling, cutting, bending, twisting, etc. Automated nanohandling is one of the key challenges of microsystem technology and nanotechnology. It will enable high-throughput manufacturing of novel products and open up new application fields. Current research work includes, amongst others, the development of new nanohandling robots; the investigation of novel automated nanohandling strategies; the development of advanced control methods, and the investigation of suitable real-time sensing technologies on the nanoscale. In his talk, Prof. Fatikow introduces his division's current research work on these topics as well as the research projects and applications being pursued. They include automated nanoassembly of AFM supertips inside SEM, handling and characterization of carbon nanotubes (CNT) , electron beam induced deposition (EBiD) as a bonding and nanostructuring technology, automation issues in AFM-based nanohandling, characterization of biological objects by AFM/nanorobots, and others.

关键词： Nanobioscience Educational institutions Nanoscale devices Robot sensing systems Automation control engineering

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FPGA-based object detection and classification inside scanning electron microscopes

FPGA-based object detection and classification inside scanni...

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International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

作者： Claas Diederichs Sören Zimmermann Sergej Fatikow Division Microrobotics and Control Engineering University of Oldenburg Germany

Object-detection and classification is a key task in micro- and nanohandling. The microscopy image is often the only available sensor to detect information about the positions and orientations of objects. Recently, Field Programmable Gate Arrays (FPGAs) have been used for scanning electron microscope (SEM) image acquisition. Such an FPGA image acquisition system is extended to perform basic image processing and on-line object detection. The connected component labeling algorithm for binary large object detection is presented and analyzed for its feasibility in terms of on-line object detection and classification. The features of binary large objects are discussed and analyzed for their feasibility with a single-pass connected component labeling approach, with focus on principal component analysis based features. It is shown that an FPGA implementation of the algorithm can be used to detect and classify carbon-nanotubes (CNTs) during image acquisition, allowing for fast object detection before the whole image is captured.

关键词： Feature extraction Labeling Field programmable gate arrays Biological neural networks Scanning electron microscopy Principal component analysis Object detection

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Frictional shear stress of ZnO nanowires on natural and pyrolytic graphite substrates

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Friction 2022年第12期10卷 2059-2068页

作者： Lizhen HOU Maofen HOU Tursunay YIBIBULLA James Lee MEAD Sergej FATIKOW Shiliang WANG Han HUANG Key Laboratory of Low-Dimensional Quantum Structures and Quantum Control of Ministry of Education School of Physics and Electronic ScienceHunan Normal UniversityChangsha 410081China School of Physics and Electronics Central South UniversityChangsha 410083China Division Microrobotics and Control Engineering Department of Computing ScienceUniversity of OldenburgOldenburg D-26129Germany School of Mechanical and Mining Engineering The University of QueenslandBrisbaneQLD 4072Australia

The friction behaviour of ZnO nanowires on natural graphite(NG)and highly oriented pyrolytic graphite(HOPG)substrates was tested in ambient conditions by use of optical microscopy based *** on the step-free and waviness-free NG substrate exhibit a diameter-independent nominal frictional shear stress of 0.48 MPa,and this provides a benchmark for studying how the surface topography of graphite influences nanowire *** on the HOPG substrate present a significant diameter-dependent frictional shear stress,increasing from 0.25 to 2.78 MPa with the decrease of nanowire diameter from 485 to 142 *** waviness of HOPG has a limited effect on the nanowire friction,as a nanowire can fully conform to the *** surface steps on the HOPG can significantly enhance the nanowire friction and lead to a much higher frictional shear stress than that on NG due to mechanical blocking and the presence of a Schwoebel barrier at step *** surface steps,however,can also generate small wedge-shaped gaps between a nanowire and substrate,and thus reduce the nanowire *** the decrease in nanowire diameter,the capacity for the nanowire to better conform to the substrate reduces the length of the wedge-shaped gaps,leading to the observed increase in nanowire *** results have improved our understanding of the unique friction behaviour of *** an improved understanding is expected to benefit the design and operation of nanowire-friction-based devices,including bio-inspired fibrillar adhesives,soft grippers,rotary nanomotors,and triboelectric nanogenerators.

关键词： frictional shear stress nanowires graphite surface step waviness

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Nanohandling automation as an emerging industrial technology

Nanohandling automation as an emerging industrial technology

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IEEE International Conference on Industrial Technology (ICIT)

作者： Sergej Fatikow Thomas Wich Christian Dahmen Marco Jahnisch Christian Stolle Volkmar Eichhorn Division Microrobotics and Control Engineering (AMiR) University of Oldenburg Germany

ISBN: (纸本)9781424435067

Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nanotechnology, which has recently been addressed by a rising number of R&D groups and companies all over the world. controlled, reproducible assembly processes on the nanoscale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these research activities is the development of automated nanomanipulation processes to build a bridge between existing precise handling strategies for micro- and nanoscale objects and aspired high-throughput fabrication of micro- and nanosystems. Despite the growing interest in automated nanomanipulation, there is hardly any work that treats this research in a coherent and comprehensive way. This paper is an attempt to provide an overview over some important issues in this rapidly expanding technology.

关键词： Robotics and automation Manufacturing automation Manufacturing industries Service robots Nanotechnology Automatic control Process control Robotic assembly Manufacturing processes Bridges

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Fast focus-based depth detection for manipulation in scanning electron microscopes

Fast focus-based depth detection for manipulation in scannin...

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IEEE International Conference on Automation Science and engineering (CASE)

作者： Daniel Jasper Sergej Fatikow Division Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany

To date, determining depth information for robotic handling in a scanning electron microscope is a challenging problem without a versatile solution. In this paper, focus-based as well as other depth detection methods are analyzed showing limitations in terms of accuracy and speed. To overcome these limitations, existing focus-based approaches are combined with a new line-scan based position tracking in order to increase both accuarcy and update rate. Using normalized variance as focus measure on each line scan results in well-defined focus curves. The depth from defocus approach exploits the linearity of the normalized variance for defocused objects to facilitate fast coarse positioning. The depth from focus approach determines the peak of the normalized variance during a focus sweep with high accuracy and enables fine positioning using a look-then-move methodology. For the first time, a z-alignment on the nanoscale is implemented solely relying on the SEM's focus information.

关键词： Scanning electron microscopy Apertures Robot sensing systems Accuracy Noise Image resolution

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Development of a Nanohandling Robot Station for Nanocharacterization by an AFM Probe

Development of a Nanohandling Robot Station for Nanocharacte...

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Mediterranean Conference on control and Automation (MED)

作者： Sergej Fatikow Stefan Kray Volkmar Eichhorn Saskia Tautz Division Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany

Current research work on the development of an nanohandling station using the probe of an atomic force microscope (AFM) as an end-effector is presented. The manipulation of individual multiwall-nanotubes (MWNTs) and the characterization of eukaryotic cells are aspired applications. For this reason, the station has to be flexible enough to be integrated both into a scanning electron microscope (SEM) for the nanomanipulation of carbon nanotubes (CNTs) and into an optical microscope for the cell characterization. Another implemented application in the SEM is the characterization of nanofilms by nanoindentation. The experimental setup consists out of a nanopositioning piezo sample stage with three degrees of freedom (DoF) and a three-axes nanomanipulator. Piezoresistive AFM probes are applied as an end-effector. This way the acting forces can be detected allowing force feedback for the station's control system. First investigations have been carried out by bending of MWNTs and calculating the elastic modulus of a MWNT

关键词： Robots Probes Scanning electron microscopy Atomic force microscopy Optical microscopy Carbon nanotubes Electron optics Integrated optics Optical feedback Nanopositioning

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Extended Kohonen networks for the pose control of microrobots in a nanohandling station

Extended Kohonen networks for the pose control of microrobot...

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IEEE International Symposium on Intelligent control (ISIC)

作者： H. Hulsen S. Garnica S. Fatikow Division Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany

A microrobot-based nanohandling station, which is able to handle objects in the micrometer range and below, is introduced. A functional description of the microrobot's mobile platform is given as well as an overview over the control system architecture and the low-level control part. The application of an extended Kohonen network for the adaptive open-loop pose control of the mobile platform is presented with theoretical background and implementation details. Its performance is analysed by means of simulation results.

关键词： Intelligent networks control systems Robots control engineering Electronic mail Steel Voltage Communication system control Open loop systems Scanning electron microscopy

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AFM as a robot for automated nanohandling

AFM as a robot for automated nanohandling

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International Conference on control, Automation and Systems ( ICCAS)

作者： Sergej Fatikow Florian Krohs Malte Bartenwerfer Uwe Mick Florian Niewiera Michael Weigel-Jech Division Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany

Besides its ability of high resolution imaging, the Atomic Force Microscope (AFM) has been recognized as a valuable instrument for manipulation at the nanoscale within the last years. Promising applications of such AFM-based nanorobotic manipulation are e.g. the characterization of nanoentities such as CNTs and DNA or the prototypical fabrication of nanoscale components, devices, and systems based on such nanoobjects. One major problem that arises when the AFM is used as a robot for nanomanipulation is often the relativly low throughput induced by the sequential character of the AFM. Automation has proven to be a suitable means to increase the throughput of such AFM-based nanomanipulations and to achieve more reliable results. This paper discusses the usage of the AFM as a robot for na-nohandling in general and presents our latest results on automated nanomanipulation. The handling of CNTs on HOPG substrate as an example of the manipulation of single nanoentities and our strategies for automated nanohandling are dealt with. Moreover, the feasibility of AFM-based nanostructuring for the development of components for biosensors and the combination of an AFM with an SEM are demonstrated.

关键词： DNA Scanning electron microscopy Automation Nanoscale devices Nanobioscience Force

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Towards Automated Handling on the Nanoscale

Towards Automated Handling on the Nanoscale

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2008 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2008), vol.1

作者： Sergej Fatikow Thomas Wich Florian Krohs Christian Dahmen Division Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany

Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nanotechnology. controlled, reproducible operation on the nano-scale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these research activities is the development of automated nanomanipulation processes to build a bridge between existing precise handling strategies for micro- and nano-scale objects and aspired high-throughput fabrication of micro- and nanosystems. This paper describes our current work on different problems of nanohandling automation, both by nanorobots inside a scanning electron microscope and by an atomic force microscope applied as a nanorobot.

关键词： Force Scanning electron microscopy Grippers Silicon Nanobioscience Nanoscale devices Materials

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Automated robot-based separation and palletizing of microcomponents

Automated robot-based separation and palletizing of microcom...

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IEEE International Symposium on Assembly and Manufacturing (ISAM)

作者： Daniel Jasper Claas Diederichs Christian Stolle Sergej Fatikow Division of Microrobotics and Control Engineering University of Oldenburg Oldenburg Germany

Separation and palletizing of microparts is a prerequisite for microhandling and microassembly, especially for components such as microspheres that cannot be efficiently produced and transported in a well-ordered form. Two mi-crorobots equipped with a microgripper and a sharp tungsten tip, respectively, can be effectively utilized to solve this task cooperatively. Based on a powerful visual feedback architecture, the automated palletizing of two different microspheres initially lying in an unordered agglomerated structure is demonstrated. The achieved sorting throughput is in the range of one sphere per second while maintaining a placement accuracy of 3μm.

关键词： Grippers Microscopy Robot kinematics Silicon Accuracy Benchmark testing

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