检索结果-内蒙古大学图书馆

Comparative study of back surface field contact formation using different lamp configurations in rapid thermal processing

引用

Journal of Vacuum science & Technology B: Microelectronics Processing and Phenomena 1998年第2期16卷 613-613页

作者： Singh, R. Vedagarbha, V. Nimmagadda, S.V. Narayanan, S. Department of Electrical and Computer Engineering and Materials Science and Engineering Program Clemson University Clemson South Carolina 29631-0915 Department of Electrical and Computer Engineering Clemson University Clemson South Carolina 29631-0915 Solarex Corporation 630 Solarex Court Frederick Maryland 21701

In this article, we have studied the role of photoeffects in the formation of aluminum back surface field (BSF) contacts on p-type silicon wafers by using different lamp configurations in rapid thermal processing (RTP). Use of photons of wavelengths less than 800 nm in conjunction with infrared and visible photons in RTP resulted in the reduction of processing time from 202 to 138 s and the processing temperature from 890 to 850 °C. The reduction in the overall thermal budget used for BSF contact formation is a direct result of photon assisted RTP. The availability of a large number of high energy photons on the metal surface also resulted in improved electrical, structural and mechanical properties of the processed device.

关键词：

来源：评论

学校读者我要写书评

暂无评论

Multiwavelength integrated 2 × 2 optical cross-connect switch and lambda-partitioner with 2 × N phased-array waveguide grating in self-loopback configuration

Multiwavelength integrated 2 × 2 optical cross-connect swit...

引用

1998 Optical Fiber Communication Conference, OFC 1998

作者： Li, Haifeng Lee, Chau-Han Zhong, Shan Chen, Yung Jui Dagenais, M. Stone, D. Department of Computer Science and Electrical Engineering University of Maryland Baltimore County Joint Program for Advanced Electronic Materials 1000 Hilltop Circle BaltimoreMD21250 United States

来源：评论

学校读者我要写书评

暂无评论

Royal Academy of Medicine in Ireland - Section of bioengineering - Proceedings of meeting held in Dundalk, Co. Louth, in February 1998.

引用

IRISH JOURNAL OF MEDICAL science 1998年第4期167卷 256-276页

作者： [Anonymous] Orthopaedic Research Unit The Queen’s University of Belfast School of Biomedical Sciences The Queen’s University of Belfast Howmedica International Ltd. Raheen Industrial Estate Limerick Department of Mechanical Engineering Trinity College Dublin 2 Mater Hospital Dublin 7 Orthopaedic Research Laboratory Århus University Hospital Denmark University of Limerick Limerick Limerick Regional Hospital Raheen Limerick Boston Scientific Ireland Ltd. Galway Department of Mechanical Engineering University College Dublin Dublin Department of Electrical and Electronic Engineering University College Dublin Dublin Bioengineering Research Centre Department of Mechanical Engineering University College Dublin Dublin Northern Ireland Bio-Engineering Centre (NIBEC) School of Electrical and Mechanical Engineering University of Ulster Newtownabbey Department of Mechanical & Manufacturing Engineering The Ashby Building The Queen’s University of Belfast Johnson and Johnson Professional Orthopaedic Division Queensway England Department of Cardiology and Department of Medical Physics & Bioengineering St. James’s Hospital Dublin 8 Burke House Ellison Street Castlebar Royal College of Surgeons in Ireland Department of Surgery Beaumont Hospital Dublin Department of Electronic and Electrical Engineering Trinity College Dublin 2 Department of Aeronautical Engineering The Queen’s University of Belfast Vascular Unit Belfast City Hospital Department of Medical Physics and Bioengineering St. James’s Hospital Dublin 8 Centre for Biomedical Electronics Department of Electronic and Computer Engineering University of Limerick Limerick Department of Mechanical and Aeronautical Engineering University of Limerick Limerick School of Health Sciences University of Ulster Ireland School of Physiotherapy University of Ulster Newtownabbey Clinical Engineering NI Medical Physics Agency Belfast and Radiology Royal Victoria Hospital Musgrave Park Hospital University of Limerick Biomedical Institute (ULBMI) Uni

来源：评论

学校读者我要写书评

暂无评论

Improved lightpath (wavelength) routing in large WDM networks

Improved lightpath (wavelength) routing in large WDM network...

引用

International Conference on Distributed Computing Systems

作者： Weifa Liang G. Havas Xiaojun Shen Department of Mathematics University of Queensland QLD Australia Centre for Discrete Mathematics and Computing Department of Computer Science and Electrical Engineering University of Queensland QLD Australia Computer Science Telecommunications Program University of Missouri Kansas City Kansas City USA

We address the problem of efficient circuit switching in wide area networks. The solution provided is based on finding optimal routes for lightpaths and semilightpaths. A lightpath is a fully optical transmission path, while a semilightpath is a transmission path constructed by chaining several lightpaths together, using wavelength conversion at their junctions. The problem thus is to find an optimal lightpath/semilightpath in the network in terms of the cost of wavelength conversion and the cost of using the wavelengths on links. We first present fast, efficient algorithms both for the general problem and for a natural restricted version. The new algorithms outperform earlier work, providing time improvements amounting to an almost linear time factor in most cases. Also, all our algorithms can be implemented on the network in a distributed way.

关键词： Wavelength routing Intelligent networks WDM networks Optical wavelength conversion Biomedical optical imaging Optical fiber networks Costs High speed optical techniques Bandwidth Mathematics

来源：评论

学校读者我要写书评

暂无评论

Role of high energy photons in dual spectral source rapid isothermal CVD

引用

JOURNAL OF ELECTRONIC MATERIALS 1997年第10期26卷 1184-1188页

作者： Singh, R Chen, Y Department of Electrical and Computer Engineering Material Science and Engineering Program Clemson University Clemson Department of Electrical and Computer Engineering Clemson University Clemson

The use of tungsten halogen lamps and the deuterium lamp as the source of thermal and optical energies has been exploited to deposit thin films of Ta2O5 on Si and conducting substrates, The leakage current densities are as low as 10(-10) A/cm(2) for gate voltage under 5V. Photons in visible, ultraviolet, and vacuum ultraviolet (lambda < 800 nm) regions provide higher bulk and surface diffusion coefficients as well as reduced activation energy for the chemical process involved in the chemical vapor deposition process. The low thermal mass of the substrate provides limited reaction processing capability. The photochemical and photophysical processes allow the participating atoms and molecules to adjust their bond geometries and occupy sites which result in overall reduction of stress and strain energy and provide materials with overall low microscopic defects at low processing temperature and with high throughput. New experimental results of Al-Ta2O5-Si3N4-poly Si-Al structure are presented. The leakage current-voltage characteristics are better than those reported by other researchers.

关键词： dielectrics metalorganic chemical vapor deposition (MOCVD) rapid isothermal processing (RIP) Ta2O5

来源：评论

学校读者我要写书评

暂无评论

Characterization of AL-Y alloy thin films deposited by direct current magnetron sputtering

引用

Journal of Vacuum science & Technology B: Microelectronics Processing and Phenomena 1997年第6期15卷 1990-1990页

作者： Liu, Y. Singh, R. Poole, K. Diefendorf, R.J. Harriss, J. Cannon, K. Materials Science and Engineering Program Clemson University Clemson South Carolina 29634 Department of Electrical and Computer Engineering Materials Science and Engineering Program Clemson University Clemson South Carolina 29634 Department of Ceramic Engineering and Materials Science and Engineering Program Clemson University Clemson South Carolina 29634 Department of Electrical and Computer Engineering Clemson University Clemson South Carolina 29634 Cryovac North America W. R. Grace & Co. Duncan South Carolina 29334

Thin films of Al-1.27 wt %Y were deposited by dc magnetron sputtering. Adding yttrium to the aluminum drastically reduced the metal’s grain size and also improve the uniformity of grain size distribution. Upon annealing at a temperature of 450 °C for 30 min, grain growth was insignificant, while the electrical resistance dropped from 6.05 to 2.95 μΩ cm. The as deposited films consisted of Al4Y and α-Al supersaturated with yttrium. After annealing, β-Al3Y precipitated instead of α-Al3Y. The Al–Y films had much higher resistance to hillock formation than did Al-1 wt %Si films.

关键词：

来源：评论

学校读者我要写书评

暂无评论

A Modal Distribution Study of Violin Vibrato 23

A Modal Distribution Study of Violin Vibrato

引用

23rd International computer Music Conference, ICMC 1997

作者： Mellody, Maureen Wakefield, Gregory H. Applied Physics Program University of Michigan United States Department of Electrical Engineering and Computer Science University of Michigan United States

A high-resolution time-frequency distribution is applied to the study of violin vibrato. Our analysis indicates that the frequency modulation induced by the motion of the stopped finger on the string is accompanied by a significant amplitude variation in each partial of that note. We suggest that this amplitude modulation results from the densely-spaced wood resonances of the violin body. Amplitude and frequency estimates for each partial are extracted from the time-frequency surface and used in an additive resynthesis model to generate synthesized violin vibrato. © 1997 International computer Music Conference, ICMC Proceedings. All rights reserved.

关键词： computer music

来源：评论

学校读者我要写书评

暂无评论

Chemical Vapor Deposited Teflon Amorphous Fluoropolymer as an Interlevel Dielectric Material for Low Power Integrated Circuits

引用

MRS Online Proceedings Library 1997年第1期476卷 207-212页

作者： R. Sharangpani R. Singh Department of Electrical and Computer Engineering Clemson University Clemson USA Department of Electrical and Computer Engineering and Material Science and Engineering Program Clemson University Clemson USA

The development of materials with dielectric constant (K) less than SiO2 (K=3.9) is essential to meet the stringent speed, power dissipation and crosstalk requirements that are driving the low power integrated circuit (IC) paradigm. Both the low K dielectric and the processing methodology used for it should satisfy several important criteria before the technique can be accepted in future mainstream low power IC manufacturing. We had reported earlier a chemical vapor deposition (CVD) technique for the deposition of DuPont's Teflon amorphous fluoropolymer 1600 (bulk K=1.93) using the principle of direct liquid injection. The processing was carried out with and without an ultra violet (UV) light source in a computerized rapid isothermal processing (RIP) system. Recently, we have extensively characterized the films and examined the suitability of our technique in light of some of the requirements of the future IC industry. Our results indicate that the processed films exceed several of the established dielectric performance standards outlined in recent roadmaps for sub 0.25 μm ICs. The film properties were improved when the UV source was used during processing. CVD processed films in general demonstrated significant improvements in terms of manufacturability, throughput, cost, and dielectric properties over the same films processed by alternate techniques.

关键词：

来源：评论

学校读者我要写书评

暂无评论

Performance and uniformity of phased-array waveguide grating WDMS with wavelength comb self-alignment

Performance and uniformity of phased-array waveguide grating...

引用

Conference on Lasers and Electro-Optics (CLEO)

作者： Wenhua Lin Chau-Han D. Lee Y.J. Chen D.R. Stone Department of Computer Science and Electrical Engineering and Joint Program for Advanced Electronic Materials University of Maryland

Wavelength division multiplexing (WDM) is emerging as one of the dominant technologies for future optical networks.

ISBN: (纸本)0780341252

Wavelength division multiplexing (WDM) is emerging as one of the dominant technologies for future optical networks.

关键词： Wavelength division multiplexing Optical crosstalk Arrayed waveguide gratings Optical waveguides Optical fiber networks Testing Optical switches Phased arrays Optical arrays Temperature

来源：评论

学校读者我要写书评

暂无评论

Comparisons of fast 2D-DCT algorithms for parallel programmable digital signal processors

Comparisons of fast 2D-DCT algorithms for parallel programma...

引用

International Conference on High Performance Computing in the Asia-Pacific Region

作者： Hyuk-Jae Lee Jae-Beom Lee H. Byun Computer Science Program Louisiana Tech University Ruston LA USA Department of Electrical Engineering Columbia University New York NY USA Department of Computer Science Yonsei University Seoul South Korea

Recent advances in technology make it possible to integrate multiple processors into a single chip to build high performance parallel programmable digital signal processors (PPDSPs). These processors are expected to replace many dedicated digital signal processors to implement important image/signal processing algorithms such as discrete cosine transform (DCT). The paper addresses the issue of how to compare fast 2D-DCT algorithms when they are implemented on a PPDSP. Previously, the efficiency of these algorithms is compared based on the number of operations. This comparison is reasonable when these algorithms are implemented on a dedicated DSP. However, this comparison may not be suitable for general-purpose PPDSPs. The paper proposes to use three parameters, the number of data accesses, the number of communications, and the distance of communications, as new criterion for performance comparison of DCT algorithms. An algorithm-level technique is developed to estimate these parameters for DCT algorithms. The comparison results based on the parameters show that the algorithm proposed by Cho and Lee (1991) might be the best choice for a PPDSP unless it requires large overhead for communication between remote processors. In this case, the conventional row-column method with a fast 1D-DCT algorithm might be the most efficient.

关键词： Signal processing algorithms Digital signal processors Digital signal processing chips Discrete cosine transforms Digital signal processing computer science Costs Image coding Parameter estimation Concurrent computing

来源：评论

学校读者我要写书评

暂无评论

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案：

请选择收藏分类：

通借通还

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：