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Anisotropic fluorocarbon plasma etching of Si/SiGe heterostruetures

Journal of Vacuum science and Technology B: Microelectronics and Nanometer Structures 2007年第2期25卷 404-409页

作者： Ding, R. Klein, L.J. Eriksson, M.A. Wendt, A.E. Materials Science Program University of Wisconsin-Madison Madison WI 53706 Department of Physics University of Wisconsin-Madison Madison WI 53706 Department of Electrical and Computer Engineering University of Wisconsin-Madison Madison WI 53706

Fluorocarbon plasma etching of Si/SiGe heterostructures is demonstrated as a method for fabrication of quantum devices with vertical sidewalls. The heterostructures consist of layers of Si and SiGe, and anisotropic etching of the heterostructures using plasmas to isolate device elements is an attractive approach to fabricating devices. A challenge that has limited the use of fluorocarbon etching is the difference in Si and SiGe etch rates under comparative conditions. Preferential etching of SiGe can lead to undercutting beneath the top Si layer, causing a reduction in critical device dimensions of unknown magnitude. By using fluorocarbon etch gases with high carbon content, fluorocarbon sidewall passivation improves the anisotropy of etched feature profiles by preventing lateral etching of SiGe. Etch results with a C 4F8/Ar/N2 gas mixture show a straight sidewall profile through the layers of the heterostructure. © 2007 American Vacuum Society.

关键词： Plasma etching

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Optimizing Marker Design to Improve Precision of Optical Camera-Based Rigid-Body Motion Tracking and Correction in Medical Imaging

Optimizing Marker Design to Improve Precision of Optical Cam...

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2021 IEEE Nuclear science Symposium and Medical Imaging Conference, NSS/MIC 2021

作者： Fisher, Jonathan Kim, Chris C. Groll, Andrew Levin, Craig S. Stanford University Department of Electrical Engineering CA United States Stanford University Department of Computer Science CA United States Stanford University Department of Radiology Molecular Imaging Program CA United States Bioengineering at Stanford University Department of Radiology and by Courtesy Physics Electrical Engineering CA United States

ISBN: (纸本)9781665421133

In this work we evaluated the performance of a camera-based rigid body motion correction solution using a 2D checkerboard marker and a 3D encoded marker. The context of the results presented is in PET/MR imaging, but in principle this motion compensation method could be used in any type of medical imaging modality. A high precision, computer-controlled motion stage with four degrees of freedom was used to control the marker positions and orientations (a.k.a. 'poses'). Still images of the markers taken in different poses mimicking a patient moving her/his head from side to side, were used to assess performance of this method. Comparing the known stage motion to the estimated motion, our results indicate that the 2D marker achieves better angular accuracy while the 3D marker's translational (linear) accuracy is superior. For all axes, the angular error was less than 0.96, 0.35 [deg], and the translational error was less than 2.24, 4.76 [mm] for the 3D and 2D markers, respectively. © 2021 IEEE.

关键词： Medical imaging

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Guest editorial nonlinear optimization of communication systems

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IEEE Journal on Selected Areas in Communications 2006年第8期24卷 1421-1423页

作者： Chiang, Mung Low, Steven H. Luo, Zhi-Quan Shroff, Ness B. Yu, Wei Steenstrup, M. Princeton University Department of Electrical Engineering Program in Applied and Computational Mathematics Princeton NJ 08544 United States California Institute of Technology Department of Computer Science Pasadena CA 91125 United States University of Minnesota Department of Electrical and Computer Engineering Minneapolis MN 55455 United States Purdue University School of Electrical and Computer Engineering West Lafayette IN 47907 United States University of Toronto Edward S. Rogers Sr. Department of Electrical and Computer Engineering Toronto Ont. M4S 3G5 Canada

No abstract available

关键词： Communication systems Design optimization Communication system control Optimization methods Protocols Distributed algorithms Power system modeling Nonlinear control systems Lagrangian functions Surges

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Improved optical design for fast scanning RMA

Improved optical design for fast scanning RMA

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Biomedical Topical Meeting, BIO 2006

作者： Chen, Nan Guang Liu, Linbo Division of Bioengineering National University of Singapore Singapore 117576 Singapore Graduate Program in Bioengineering National University of Singapore Singapore 117597 Singapore Department of Electrical and Computer Engineering National University of Singapore Singapore 117576 Singapore

We have developed a double-pass rotary mirror array for fast scanning optical delay line with improved optical coupling. Such a device is ideal for real-time optical coherence tomography. © 2006 Optical Society o... 详细信息

ISBN: (纸本)1557528071

关键词： Optical design

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Requirements specification and evaluation for transient faults in communication protocols based on RT-FRIDA framework

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IFAC-PapersOnLine 2018年第10期51卷 76-81页

作者： Roque, Alexandre S. Nunes, Gerson L. Freitas, Edison P. Pereira, Carlos E. Graduate Program in Electrical Engineering Federal University of Rio Grande do Sul UFRGS Porto Alegre Brazil Computer Science and Engineering Department Regional Integrated University of High Uruguay and Missions URI Santo Angelo Brazil

This paper presents an evaluation of requirements specification for two critical real-time control systems, which depends of industrial communications protocols. It is proposed the use of aspect-oriented modeling (AOM) to map transient fault behaviors in design phases, with RT-FRIDA framework extended for fault modeling capabilities. Requirements specification for an Active suspension control system and for a fault detection control system applied in agricultural implements was made as case study. Faults are specified as non-functional requirements and evaluated applying a quantitative softgoal weight method. Results presented indicates aspect-oriented fault modeling as an important ally to specify faults that have potential to degrade performance of real-time control systems. © 2016

关键词： Suspensions (components) Active suspension systems Agricultural implements Control systems Fault detection Fault tree analysis Interactive computer systems Network protocols Real time control Real time systems Specifications Active suspension control Aspect oriented Aspect Oriented Modeling Industrial communications Non functional requirements Requirements analysis Requirements specifications Transient faults

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Photon avalanche-driven multicolor emission: yttrium vanadate upconversion phosphors for optical thermometry, forensics, and healing light applications

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Chemical engineering Journal 2025年 516卷

作者： Pavitra, Eluri Antony, Lintymol Park, Jin Young Hwang, Seung Kyu Lee, Jeong-Hwan Chandra, Gogineni Rajesh Basaveswara Rao, M.V. Raju, Ganji Seeta Rama Han, Young-Kyu Huh, Yun Suk NanoBio High-Tech Materials Research Center Department of Biological Sciences and Bioengineering Inha University Incheon22212 Korea Republic of 3D Convergence Center Inha University Incheon22212 Korea Republic of Department of Energy and Materials Engineering Dongguk University-Seoul Seoul04620 Korea Republic of Department of Electrical Electronics and Software Engineering Pukyong National University Yongdang Campus Busan48547 Korea Republic of Department of Materials Science and Engineering Inha University Incheon22212 Korea Republic of Program in Semiconductor Convergence Inha University Incheon22212 Korea Republic of Department of Computer Science and Engineering Vignan's Lara Institute of Technology & Science Andhra Pradesh Guntur India Department of Chemistry Krishna University Andhra Pradesh Machillipatnam521001 India

The exploration of photon upconversion has led to the development of multifunctional lanthanide-based materials, particularly through the mechanism of photon avalanche, marking a transformative advancement in material science. In this study, yttrium vanadate upconversion nanocrystalline phosphors (UCNCPs) activated by Ho3+/Er3+/Tm3+/Yb3+ ions are reported. These UCNCPs demonstrate a remarkable ability in the photon avalanche, offering highly intense and tunable emissions across the visible spectrum at room temperature under low excitation power of 980 nm laser. The average number of photons involved in the UC process at threshold pump power, highlighting the intricate interplay of cross-relaxation and energy transfer loops in avalanche mechanism. Notably, these UCNCPs have shown exceptional temperature sensing capabilities, where non-thermally coupled levels of the Ho3+ and Tm3+ ions provide higher relative sensitivity and accuracy than thermally coupled levels of Er3+ ions. The versatility of these UCNCPs is further established by their application in solid-state lighting, where they can produce vibrant red, green, blue, and warm-white light, and in security, serving as multi-level anti-counterfeiting inks that respond to 980 nm laser illumination. These developments not only pave the way for more energy-efficient lighting solutions but also offer new avenues for enhancing the security of valuable items. The temperature sensing capabilities of these phosphors add another layer of functionality, making them ideal for high-tech applications ranging from medical diagnostics to environmental monitoring. © 2025 Elsevier B.V.

关键词： Phosphors

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Impact of Intention to Use to a Document Management System (Case Study Approach) 3

Impact of Intention to Use to a Document Management System (...

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3rd International Conference on Information Management and Technology, ICIMTech 2018

作者： Hartono, Sugiarto Kosala, Raymondus Raymond Supangkat, Suhono Harso Ranti, Benny Information Systems Department Computer Science Department BINUS Graduate Program-Doctor of Computer Science Jakarta11480 Indonesia Computer Science Department Bina Nusantara University BINUS Graduate Program-Doctor of Computer Science Jakarta11480 Indonesia Bandung Institute of Technology School of Electrical Engineering and Informatics Bandung Indonesia

ISBN: (纸本)9781538658215

Document management system makes user to access information anytime and anywhere. The purpose of this research is to analyze what variables have impact on the intention to use of document management system. To achieve the objectives conducted by identification problem on the research model developed from the model of Technology Acceptance Model and Unified Theory of Acceptance and Use of Technology to the use of document management system. Furthermore, the data obtained from the respondents tested outer model, inner model test, hypothesis test and to produce a comprehensive analysis will be conducted Importance Performance Analysis. This research will result in a comprehensive analysis and able to provide recommendations and solutions for improvement from the implementation DMS has been done earlier. © 2018 IEEE.

关键词： Information services

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A virtual eye for use in an Optometry clinic

A virtual eye for use in an Optometry clinic

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2nd International Conference on User science and engineering, i-USEr 2011

作者： Turuwhenua, Jason Naqvi, Husnain Sulayman, Muhammad Riaz, Mehwish Auckland Bioengineering Institute Department of Optometry and Vision Science University of Auckland Auckland New Zealand Department of Electrical and Computer Engineering University of Auckland Auckland New Zealand Department of Computer Science University of Auckland Auckland New Zealand

ISBN: (纸本)9781457716553

It is important that eye care professionals have access to tools that accurately and efficiently convey the results of an eye exam to students and patients. This paper describes work-in-progress on a software system that displays a patient specific 3-dimensional model of the eye, as well as the effects of refractive errors (errors of focus) to the patient. We have used a focus group as a means for gathering preliminary feedback on our software, some of the themes that emerged from our discussions are presented. Future directions for the software are mentioned. © 2011 IEEE.

关键词： computer software

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Sliding Mode Control of the MMC-based Power System 48

Sliding Mode Control of the MMC-based Power System

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48th Annual Conference of the IEEE Industrial Electronics Society, IECON 2022

作者： Aghahadi, Morteza Piegari, Luigi Lekic, Aleksandra Shetgaonkar, Ajay Politecnico di Milano Department of Electronics Information and Bioengineering Milan Italy Mathematics and Computer Science Tu Delft Intelligent Electrical Power Grids Faculty of Electrical Engineering Delft Netherlands

ISBN: (数字)9781665480253

ISBN: (纸本)9781665480253

The modular multilevel converter has become a popular topology for many applications in medium and high-power conversion systems such as multi-terminal direct current power systems. In this paper, Modular multilevel converter structure and related equations are presented. Then, control methods for circulating current, output current, and energy balance among legs and upper and lower arms of each phase for conventional proportional-integral control and sliding mode control are described. Notably, this study concentrates on the multi-terminal direct current configuration link with masterslave control by presenting a π model for the high voltage direct current transmission line. Moreover, dq-frame is used in the control strategy with a modified first-order sliding mode control and a second-order sliding mode control for preventing chattering. The results show that applying the proposed method in a hybrid power system can provide fast transient responses, zero overshoot, and better stability. Finally, the results are verified by simulations in MATLAB/Simulink. © 2022 IEEE.

关键词： Sliding mode control

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Comparison of forward and backward SHG images using Fourier transform-second-harmonic generation imaging

Comparison of forward and backward SHG images using Fourier ...

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Conference on Lasers and Electro-Optics, CLEO 2010

作者： Ramachandra Rao, Raghu Ambekar Mehta, Monal R. Leithem, Scott Toussaint, Kimani C. Jr. Department of Electrical and Computer Engineering Urbana-Champaign IL 61820 United States Department of Mechanical Science and Engineering Urbana-Champaign IL 61820 United States Affiliate in the departments of Electrical and Computer Engineering and Bioengineering University of Illinois Urbana-Champaign IL 61820 United States

We compare the forward and backward SHG images for porcine tendon, sclera, and ear cartilage using Fourier transform-second-harmonic generation microscopy. The preferred orientation and peaks in the magnitude spectrum... 详细信息

ISBN: (纸本)9781557528896

关键词： Harmonic generation

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