A new alignment method for direct writing using an electron-beam is described. The alignment mark corresponding to the unit cell of the bit-map CAD system is defined in the poly-Si layer. The alignment marks consist o...
A new alignment method for direct writing using an electron-beam is described. The alignment mark corresponding to the unit cell of the bit-map CAD system is defined in the poly-Si layer. The alignment marks consist of array and chip marks. The alignment method consists of two steps of two dimensional displacement and rotation of the coordinate axis. The marks are directly recognized by searching for the alignment marks on the CRT of SEM. NMOS IC test devices were fabricated on a Si wafer employing this alignment method. The alignment mistolerance between each pattern layers was less than 1 µm under the 6 µm design rule.
Single crystalline GaAs0.6P0.4 is grown on (100)2° off Si substrate by metalorganic chemical vapor deposition with the intermediate layers of GaP, (GaP/GaAsP) superlattice and (GaAsP/GaAs) superlattice. PL intens...
详细信息
Single crystalline GaAs0.6P0.4 is grown on (100)2° off Si substrate by metalorganic chemical vapor deposition with the intermediate layers of GaP, (GaP/GaAsP) superlattice and (GaAsP/GaAs) superlattice. PL intensity of GaAs0.6P0.4/Si is about 40% of commercially available GaAs0.6P0.4 grown on GaAs substrate by VPE. Very smooth mirror-like surface is obtained and no crosshatch pattern such as is seen on GaAs0.6P0.4 on GaAs is observed on GaAs0.6P0.4/Si surface.
We developed an algorithm for multiple source localization based on the Estimate-Maximize (EM) method. The EM method is an iterative algorithm that converges to the Maximum Likelihood (ML) estimate of the unknown para...
详细信息
We developed an algorithm for multiple source localization based on the Estimate-Maximize (EM) method. The EM method is an iterative algorithm that converges to the Maximum Likelihood (ML) estimate of the unknown parameters by exploiting the stochastic syctem under consideration. In our case the algorithm will converge to the exact ML estimates of the various sources location parameters, where each iteration increases the likelihood of those parameters.
This Edited Volume gathers a selection of refereed and revised papers originally presented at the Third International Symposium on Signal Processing and Intelligent Recognition Systems (SIRS’17), held on September 13...
详细信息
ISBN:
(数字)9783319679341
ISBN:
(纸本)9783319679334
This Edited Volume gathers a selection of refereed and revised papers originally presented at the Third International Symposium on Signal Processing and Intelligent Recognition Systems (SIRS’17), held on September 13–16, 2017 in Manipal, India. The papers offer stimulating insights into biometrics, digital watermarking, recognition systems, image and video processing, signal and speech processing, pattern recognition, machine learning and knowledge-based systems. Taken together, they offer a valuable resource for all researchers and scientists engaged in the various fields of signal processing and related areas.
The four-volume set LNCS 7333-7336 constitutes the refereed proceedings of the 12th International Conference on Computational Science and Its Applications, ICCSA 2012, held in Salvador de Bahia, Brazil, in June 2012. ...
详细信息
ISBN:
(数字)9783642311253
ISBN:
(纸本)9783642311246
The four-volume set LNCS 7333-7336 constitutes the refereed proceedings of the 12th International Conference on Computational Science and Its Applications, ICCSA 2012, held in Salvador de Bahia, Brazil, in June 2012. The four volumes contain papers presented in the following workshops: 7333 - advances in high performance algorithms and applications (AHPAA); bioinspired computing and applications (BIOCA); computational geometry and applicatons (CGA); chemistry and materials sciences and technologies (CMST); cities, technologies and planning (CTP); 7334 - econometrics and multidimensional evaluation in the urban environment (EMEUE); geographical analysis, urban modeling, spatial statistics (Geo-An-Mod); 7335 - optimization techniques and applications (OTA); mobile communications (MC); mobile-computing, sensind and actuation for cyber physical systems (MSA4CPS); remote sensing (RS); 7336 - software engineering processes and applications (SEPA); software quality (SQ); security and privacy in computational sciences (SPCS); soft computing and data engineering (SCDE). The topics of the fully refereed papers are structured according to the four major conference themes: 7333 - computational methods, algorithms and scientific application; 7334 - geometric modelling, graphics and visualization; 7335 - information systems and technologies; 7336 - high performance computing and networks.
暂无评论