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Review Article: Recommended reading list of early publications on atomic layer deposition - Outcome of the "virtual Project on the History of ALD"

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films 2017年第1期35卷 010801-010801页

作者： Ahvenniemi, Esko Akbashev, Andrew R. Ali, Saima Bechelany, Mikhael Berdova, Maria Boyadjiev, Stefan Cameron, David C. Chen, Rong Chubarov, Mikhail Cremers, Veronique Devi, Anjana Drozd, Viktor Elnikova, Liliya Gottardi, Gloria Grigoras, Kestutis Hausmann, Dennis M. Hwang, Cheol Seong Jen, Shih-Hui Kallio, Tanja Kanervo, Jaana Khmelnitskiy, Ivan Kim, Do Han Klibanov, Lev Koshtyal, Yury Krause, A. Outi I. Kuhs, Jakob Kärkkänen, Irina Kääriäinen, Marja-Leena Kääriäinen, Tommi Lamagna, Luca Lapicki, Adam A. Leskelä, Markku Lipsanen, Harri Lyytinen, Jussi Malkov, Anatoly Malygin, Anatoly Mennad, Abdelkader Militzer, Christian Molarius, Jyrki Norek, Malgorzata Özgit-Akgün, Çaǧla Panov, Mikhail Pedersen, Henrik Piallat, Fabien Popov, Georgi Puurunen, Riikka L. Rampelberg, Geert Ras, Robin H. A. Rauwel, Erwan Roozeboom, Fred Sajavaara, Timo Salami, Hossein Savin, Hele Schneider, Nathanaelle Seidel, Thomas E. Sundqvist, Jonas Suyatin, Dmitry B. Törndahl, Tobias Van Ommen, J. Ruud Wiemer, Claudia Ylivaara, Oili M. E. Yurkevich, Oksana Department of Chemistry Aalto University P.O. Box 16100 EspooFI-00076 Finland Department of Materials Science and Engineering Stanford University StanfordCA94305 United States Department of Materials Science and Engineering Aalto University School of Chemical Technology P.O. Box 16200 AaltoFI-00076 Finland Institut Européen des Membranes IEM UMR-5635 Université de Montpellier ENSCM CNRS Place Eugène Bataillon Montpellier Cedex 5F-34095 France Industrial Focus Group XUV Optics University of Twente Enschede7522 ND Netherlands Institute of Solid State Physics Bulgarian Academy of Sciences 72 Tzarigradsko chaussee blvd. Sofia1784 Bulgaria CEPLANT Masaryk University Kotlářská 267/2 Brno611 37 Czech Republic School of Mechanical Science and Engineering School of Optical and Electronic Information Huazhong University of Science and Technology 1037 Luoyu Road Wuhan Hubei430074 China Univ. Grenoble Alpes CNRS SIMAP GrenobleF-38000 France Department of Solid State Sciences CoCooN Ghent University Krijgslaan 281/S1 Ghent9000 Belgium Inorganic Materials Chemistry Ruhr University Bochum Bochum44801 Germany Institute of Chemistry St.-Petersburg State University Universitetskaya emb. 7/9 St.-Petersburg199034 Russia Institute for Theoretical and Experimental Physics Bolshaya Cheremushkinskaya 25 Moscow117218 Russia Fondazione Bruno Kessler Center for Materials and Microsystems Trento38123 Italy VTTFI-02044 Finland Lam Research Corporation TualatinOR97062 United States Department of Materials Science and Engineering Inter-university Semiconductor Research Center College of Engineering Seoul National University Seoul08826 Korea Republic of Globalfoundries AlbanyNY12203 United States Department of Chemistry School of Chemical Engineering Aalto University P.O. Box 16100 AaltoFI-00076 Finland Åbo Akademi TurkuFI-20500 Finland Research and Education Center Nanotechnology Saint Petersburg Electrotechnical University LETI ul. Professora

Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin conformal inorganic material layers for various applications. ALD has been discovered and developed independently, at least twice, under different names: atomic layer epitaxy (ALE) and molecular layering. ALE, dating back to 1974 in Finland, has been commonly known as the origin of ALD, while work done since the 1960s in the Soviet Union under the name "molecular layering" (and sometimes other names) has remained much less known. The virtual project on the history of ALD (VPHA) is a volunteer-based effort with open participation, set up to make the early days of ALD more transparent. In VPHA, started in July 2013, the target is to list, read and comment on all early ALD academic and patent literature up to 1986. VPHA has resulted in two essays and several presentations at international conferences. This paper, based on a poster presentation at the 16th International Conference on Atomic Layer Deposition in Dublin, Ireland, 2016, presents a recommended reading list of early ALD publications, created collectively by the VPHA participants through voting. The list contains 22 publications from Finland, Japan, Soviet Union, United Kingdom, and United States. Up to now, a balanced overview regarding the early history of ALD has been missing;the current list is an attempt to remedy this deficiency. © 2016 Author(s).

关键词： Atomic layer deposition

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Software architecture documentation for developers: A survey

Software architecture documentation for developers: A survey

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Software engineering 2014

作者： Rost, Dominik Naab, Matthias Lima, Crescendo Von Flach Chavez, Christina Fraunhofer Institute for Experimental Software Engineering Kaiserslautern Germany Fraunhofer Project Center on Software and Systems Engineering Software Engineering Laboratory Department of Computer Science Bahia Brazil

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Assessment of Different PCM Storage Configurations in a 50 MW el CSP Plant with Screw Heat Exchangers in a Combined Sensible and Latent Storage – Simulation Results

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Energy Procedia 2015年 69卷 1078-1088页

作者： V. Zipf A. Neuhäuser C. Bachelier R. Leithner W. Platzer Dipl.-Ing. Project Leader Fraunhofer Institute for Solar Energy Systems Heidenhofstrasse 2 79110 Freiburg Germany Dr.-Ing Head of Group Thermal Processes and Systems Fraunhofer Institute for Solar Energy Systems Heidenhofstr. 2 79110 Freiburg Dipl.-Ing./Msc Applications Engineer Novatec Solar GmbH Herrenstrasse 33 76137 Karlsruhe Germany Prof. Dr. tech Institute of Energy and Process Systems Engineering TU Braunschweig Franz-Liszt-Strasse 35 38106 Braunschweig Germany Dr. Director Division Solar Thermal and Optics Fraunhofer Institutefor Solar Energy SystemsHeidenhofstr. 2 79110 Freiburg Germany

Effective and economic storage solutions have an important role to enable Solar Thermal Electricity plants (STE) to generate dispatchable power. A thermal storage can increase the value of STE by providing firm electricity in times of peak load or ancillary services. Latent storages are suited optimally for direct steam generating STE systems: due to the isothermal behavior of the phase change materials (PCM) during melting /crystallization, exergy losses during storage charging/discharging are minimized. Up to now latent heat storages are, due to technical and economic issues, not used commercially in STE systems. The PCM have a very low heat conductivity – therefore a sophisticated heat exchanger design is needed to build such storages with sufficient charging/discharging power. An innovative storage concept, uses a screw heat exchanger to transport the PCM from a cold to a hot tank or vice versa during phase change. This concept separates heat exchange and storage *** concepts do not have this ability. In annual yield calculations the use of this heat exchanger as part of a thermal storage in a 50 MW el direct steam generating solar thermal power plant has been assessed. After setting up of a cost structure, the respective levelised cost of electricity (LCOE) have been used as comparison criterion for two storage systems with different designs. It can be shown, that a storage system with three storage tanks yields lower LCOE than one with two storage tanks. There is further potential for cost reductions, such as the optimization of the heat exchanger area and the temperature difference between the heat transfer fluid and the PCM.

关键词： latent heat storage screw heat exchanger solarthermal power plant levelised cost of electricity phase change material concentrated solar power direct steam generation

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Real-Time Simulation Technologies for Power systems Design, Testing, and Analysis

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IEEE Power and Energy Technology systems Journal 2015年第2期2卷 63-73页

作者： Faruque, M.O. Strasser, T. Lauss, G. Jalili-Marandi, V. Forsyth, P. Dufour, C. Dinavahi, V. Monti, A. Kotsampopoulos, P. Martinez, J.A. Strunz, K. Saeedifard, M. Wang, X. Shearer, D. Paolone, M. Brandl, R. Matar, M. Davoudi, A. Iravani, R. Center for Advanced Power Systems Department of Electrical and Computer Engineering Florida State University TallahasseeFL32310 United States Electric Energy Systems-Energy Department AIT Austrian Institute of Technology Vienna1220 Austria OPAL-RT Technologies Inc. MontrealQCH3K 1G6 Canada RTDS Technologies Inc. WinnipegMBR3T 2E1 Canada University of Alberta EdmontonABT6G 2R3 Canada E.ON Energy Research Center Institute for Automation of Complex Power Systems RWTH Aachen University Aachen52062 Germany School of Electrical and Computer Engineering National Technical University of Athens Athens161 21 Greece Departament d'Enginyeria Elèctrica Universitat Politècnica de Catalunya Barcelona08034 Spain Fakultät Elektrotechnik und Informatik Technische Universität Berlin Berlin10587 Germany School of Electrical and Computer Engineering Georgia Institute of Technology AtlantaGA30332 United States Department of Electronics Carleton University OttawaONK1S 5B6 Canada ABB Power Systems Ludvika771 80 Sweden Swiss Federal Institute of Technology of Lausanne Lausanne1015 Switzerland Fraunhofer Institute for Wind Energy and Energy System Technology Kassel34119 Germany Centre of Applied Power Electronics University of Toronto TorontoONM5S 2J7 Canada Department of Electrical Power and Machines Ain Shams University Cairo11566 Egypt Department of Electrical Engineering University of Texas at Arlington ArlingtonTX76019 United States

This task force paper summarizes the state-of-the-art real-time digital simulation concepts and technologies that are used for the analysis, design, and testing of the electric power system and its apparatus. This paper highlights the main building blocks of the real-time simulator, i.e., hardware, software, input-output systems, modeling, and solution techniques, interfacing capabilities to external hardware and various applications. It covers the most commonly used real-time digital simulators in both industry and academia. A comprehensive list of the real-time simulators is provided in a tabular review. The objective of this paper is to summarize salient features of various real-time simulators, so that the reader can benefit from understanding the relevant technologies and their applications, which will be presented in a separate paper. © 2015 IEEE.

关键词： Real time systems

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Best-Practice Piloting Based on an Integrated Social Media Analysis and Visualization for E-Participation Simulation in Cities

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Procedia Computer Science 2015年 75卷 66-74页

作者： Dirk Burkhardt Kawa Nazemi Egils Ginters Fraunhofer IGD Fraunhoferstr. 5 64283 Darmstadt Germany TU Darmstadt Fraunhoferstr. 5 64283 Darmstadt Germany Sociotechnical Systems Engineering Institute Vidzeme University of Applied Sciences Cesu Street 4 LV- 4201 Valmiera Latvia

E-Participation and the engagement of citizens in politics are on the agenda in many countries. Therefore, a number of project and programs were initiated that aim at finding creative and effective solutions for involving citizens. One intended aspect is the provision of transparency that enables citizens to analyze socio-economical indicators and serves as basement for initial data storing for e-participation scenarios simulation. A beyond going step is to consider citizens’ opinions in the policy making process. Unfortunately this will only be possible; if a significant number of citizens know what concrete aspect should be realized. The growth and establishment of social media nowadays allow most people to discuss political ideas and critics virtually and anonymously achieving higher credibility of the data usable for policy making. However, the major barrier is the different topical languages, the representatives’ role and weak visualization of the results. This article dealt with a best-practice piloting approach for discussing and realizing innovative solutions with a variety of stakeholders from different domains. The core of this paper is how to deal and manage the different perspective on development process, to aim on designing a common set of requirements and development procedure. The methodology is practically and beneficial applied as social media integration solution in the EC FP7 FUPOL research project.

关键词： Policy making and simulation semantic visualization e-participation

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Semantics Visualization – Definition, Approaches and Challenges

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Procedia Computer Science 2015年 75卷 75-83页

作者： Kawa Nazemi Dirk Burkhardt Egils Ginters Jorn Kohlhammer Fraunhofer IGD Fraunhoferstr. 5 64283 Darmstadt Germany TU Darmstadt Fraunhoferstr. 5 64283 Darmstadt Germany Sociotechnical Systems Engineering Institute Vidzeme University of Applied Sciences Cesu Street 4 LV- 4201 Valmiera Latvia

The visualization of the simulation results must be done in conformity with beneficiaries perception and professional domain understanding. It means that right data must be identified before. Semantic technologies provide new ways for accessing data and acquiring knowledge. The underlying structures allow finding information easier, gathering meanings and associations of the data entities and associating the data to users’ knowledge. Even though the focus of the research in this area is more to provide “machine readable” data, human-centered systems benefit from the technologies too. Especially graphical representations of the semantically structured data play a key-role in today's research. The meaningful relations of data entities and the meaningful and labeled clustering of data in form of semantic concepts enable new ways to visualize data. With these new ways, various challenges are related with deploying semantics visualizations beyond analytical search and simulation. The goal is to give a common understanding of the term semantics as it is used in semantic web. This paper dealt with the general idea of semantics visualization. First a short introduction to semantic formalisms is given followed by a general definition. Subsequently approaches and techniques of existing semantics visualizations are presented, where-as a new classification is introduced to describe the techniques. The article concludes with future challenges in semantics visualization focusing on users, data and tasks.

关键词： Visualization and virtualization simulation semantic visualization

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Comparison of Two Different (Quasi-) Dynamic Testing Methods for the Performance Evaluation of a Linear Fresnel Process Heat Collector

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Energy Procedia 2015年 69卷 84-95页

作者： A. Hofer D. Büchner K. Kramer S. Fahr A. Heimsath W.J. Platzer S. Scholl Scientific Researcher Fraunhofer Institute for Solar Energy Systems ISE Heidenhofstr. 2 79110 Freiburg Germany Prof. Dr.-Ing. Head of Institute for Chemical and Thermal Process Engineering ICTV Technical University Braunschweig Langer Kamp 7 38106 Braunschweig Germany

A small-scale Linear Fresnel Collector (LFC) for the generation of process heat has been tested by fraunhofer ISE;its performance was evaluated by means of two different methods. The first is a quasi-dynamic testing method performed according to the testing standard ISO 9806:2013, with modificationsin the model to accurately describe LFCs. Due to the two-dimensional Incidence Angle Modifier (IAM) of an LFC, an iterative multi-linear regression (MLR)approach has been developed to be able to comprehensively evaluate the optical performance. The second method is a dynamic testing method based on a parameter identification incorporating a multi-node/plug-flow collector model without strict restraints on mass flow and inlet temperature stability. Both methods are briefly described in their conceptual design and theirbasic requirements, revealing their similarities and differences. Each method is then applied to real measurement datafrom an LFC, assessing practicability and identification accuracy. For both methods, the mean absolutedifferencebetween identifiedIAM values and results from ray tracing fell in a range of 0.013-0.017, leading toa similar accuracy inLFC performance evaluation. Differences in optical efficiency between the two methodsare smaller,with anaverage absolutedifferencebelow 0.0098, even whenusing different measurement data and simulation models. Thus the dynamic methodrepresents a good starting point for the further development of an alternative dynamic testing and evaluation method with more flexibility than the current testing standard. This will be significantwhenevaluating large-scale concentrating collectors and collectors with direct steam generation.

关键词： Linear Fresnel collector performance evaluation parameter indentification method process heat collector multi-linear regression least-square algorithm

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Quantification of Front Side Metallization Area on Silicon Wafer Solar Cells for Background Plating Detection

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Energy Procedia 2015年 77卷 717-724页

作者： Martin Heinrich Achim Kraft Martin Lieder Bram Hoex Armin G. Aberle Markus Glatthaar Now at Department of Microsystems Engineering – IMTEK University of Freiburg Georges-Köhler-Allee 106 79110 Freiburg Germany Fraunhofer Institute for Solar Energy Systems Heidenhofstr. 2 79110 Freiburg Germany Now at School of Photovoltaic and Renewable Energy Engineering University of New South Wales Kensington NSW 2052 Australia Solar Energy Research Institute of Singapore National University of Singapore 7 Engineering Drive 1 Block E3A Singapore 117574 Singapore

This work describes a method to measure the metallized area on the front side of silicon wafer solar cells. The method is especially applicable to detect and quantify background plating, which can occur in the production of solar cells with plated front-side metallization. The metallized area of plated solar cells is determined by an image processing algorithm (“MetDetect”) using images of the solar cell front side obtained by a simple commercially available flatbed scanner. The algorithm is verified by the comparison of scanned images from test samples with microscope images. Furthermore a correlation of the metallized area with the measured short-circuit current density of the samples justifies the proposed method. With “MetDetect” a precise quantification of the background plating on the plated solar cell front side can be realized. It is suitable for inline inspection in solar cell production or quantification of pinholes and cracks in the surface dielectric. In this work “MetDetect” is applied to corroborate the observation that background plating of solar cells with a nickel copper front side metallization can surprisingly be removed during plating by a thin Sn-capping.

关键词： Front side metallization Light induced plating Background plating Nickel Copper Tin Shading Metallized area

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Bimanual robot manipulation and packaging of shoes in footwear industry 1

Bimanual robot manipulation and packaging of shoes in footwe...

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ROBOT 2013: 1st Iberian Robotics Conference

作者： Morales, Ricardo Badesa, Francisco J Aracil, Nicolás García Bormann, Richard Fischer, Jan Graf, Birgit Department of Systems Engineering and Automatic Control Miguel Hernandez University Spain Fraunhofer Institute for Manufacturing Engineering and Automation IPA Germany

ISBN: (纸本)9783319034126

The present paper presents the ongoing research undertaken as a research experiment, called HERMES, inside Echord european integrated project framework. The goal of the HERMES experiment is to study, analyze and finally implement the packaging of shoes on a robot system that mimics the required degree of flexibility and dexterity provided by the human workers. The use of a bimanual system with anthropomorphic hands has been chosen as it could also be applied to solve other processes of similar or even higher complexity in the future and thus provide a holistic approach towards automization in footwear industry. In this paper, the first experimental results of the HERMES experiment are presented. © Springer International Publishing Switzerland 2014

关键词： Computer vision

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Extended Heat Loss and Temperature Analysis of Three Linear Fresnel Receiver Designs

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Energy Procedia 2015年 69卷 424-433页

作者： A. Hofer F. Cuevas A. Heimsath P. Nitz W.J. Platzer S. Scholl Scientific Researcher Fraunhofer Institute for Solar Energy Systems ISE Heidenhofstr. 2 79110 Freiburg Germany. Prof. Dr.-Ing. Head of Institute for Chemical and Thermal Process Engineering ICTV Technical University Braunschweig Langer Kamp 7 38106 Braunschweig Germany.

Heat loss prediction models for parabolic trough receivers do not consider the thermal effect of a secondary mirror. As an extension a Thermal Resistance Model (TRM) has been developed at fraunhofer ISE for the prediction of the heat loss of three different Linear Fresnel Collector (LFC) receiver configurations. In previous investigations we have found the energy balance of a LFC receiver to be strongly influenced by the amount of solar radiation absorbed by the secondary mirror. This absorption provokes an increase of temperature of the secondary mirror and hence a decrease in the total amount of heat loss of a LFC. The size of this effect depends on the receiver geometry and diverse ambient parameters. Investigated parameters are wind velocity, ambient temperature and Direct Normal Irradiance (DNI). This dependency and its effect on heat loss and secondary mirror temperatures are analyzed for three different LFC receiver configurations. As the radiation absorbed by the secondary mirror is affected by the aperture area of the LFC, studies are performed for small-scale and for large-scale collectors.

关键词： Linear Fresnel Receiver Heat Loss Secondary Mirror Temperatures Ambient Parameter Study

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