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A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime

ECS Meeting Abstracts 2014年第31期MA2014-02卷

作者： Moriz Jelinek Johannes Laven Reinhart Job Werner Schustereder Hans-Joachim Schulze Mathias Rommel Lothar Frey Infineon Technologies Austria AG Infineon Technologies AG Department of Electrical Engineering and Computer Science Muenster University of Applied Sciences Fraunhofer Institute for Integrated Systems and Device Technology

Proton-implantation doping offers a feasible method to modify the doping profile in semiconductor grade silicon in depths ranging up to several hundred micrometers at comparatively low thermal budgets. The hydrogen-related donors are radiation-induced defect complexes decorated by hydrogen. During the proton implantation, typically in the energy range of several 100 keV to several MeV and with fluences in the range between about 1013 cm-2 and 1015 cm-2, intrinsic radiation defects are induced. During a successive anneal in the temperature range between about 300—500 °C the implanted hydrogen diffuses from its projected range through the radiation damage profile and decorates the radiation-induced defects or defect complexes, thus activating, the hydrogen-related donors. Due to this basic mechanism, the profile shape of the hydrogen-related donor profiles is closely correlated to the initial damage profile of the radiation-induced lattice defects. The profiles, hence, exhibit an extended penetrated range with an approximately constant concentration followed by an expressed peak near the end-of-range of the protons. The achievable doping concentration of the hydrogen-related donors induced by the proton implantation and successive annealing is, however, typically limited to a few 1015 cm-3. Earlier studies, based mainly on co-implantations of helium and hydrogen, have led us to propose this to be due to an over-decoration effect of the hydrogen-related donors by excess hydrogen. Based on this assumption, we present a pre-conditioning method based on vacancy-related gettering sites in order to reduce the concentration of excess hydrogen. The procedure comprises a pre-implant with protons and an annealing step at elevated temperatures above the range typically used for proton-implantation doping and is thus fully applicable to a commercial manufacturing environment. During this pre-conditioning, thermally stable higher-order defect complexes are created that are for the

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A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime

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ECS Transactions 2014年第11期64卷

Besides the application of local lifetime control, proton implantations can be used to create deep donor profiles in crystalline silicon. At a certain annealing temperature, the maximum hydrogen-related donor (HD) concentration is limited to a few 1015 cm-3 in the end-of-range depth of the radiation damage profile. This behavior is explained with a passivation of the shallow donors due to an excess supply of hydrogen at high proton doses. The impact of hydrogen remaining in the substrate from prior processing steps is investigated. As a countermeasure to the over-decoration effect, a pre-annealing step at elevated temperatures is investigated. This procedure is fully applicable in a commercial manufacturing environment. Experimental results from spreading resistance measurements are shown that clearly show the beneficial effect of the pre-conditioning. DLTS results of pre-conditioned samples are reported, that show a dominant deep defect level that was previously assigned to be vacancy related.

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Deep-Level Defects in High-Dose Proton Implanted and High-Temperature Annealed Silicon

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ECS Transactions 2014年第11期64卷

作者： Moriz Jelinek Johannes Laven Mathias Rommel Werner Schustereder Hans-Joachim Schulze Lothar Frey Reinhart Job Infineon Technologies Austria AG Infineon Technologies AG Fraunhofer Institute for Integrated Systems and Device Technology Department of Electrical Engineering and Computer Science Muenster University of Applied Sciences

We review the principal mechanisms of deep-level defect formation after proton irradiation and subsequent annealing of float zone grown crystalline silicon. Various reaction paths commonly related to vacancy-complexes, interstitial oxygen and hydrogen are discussed. In the experimental part DLTS results of proton-irradiated pn-diode structures are presented. It appears that some detected defects show a thermal stability differing from that reported in literature. Furthermore the metastability of two defects at 300 meV and 418 meV below the conduction band is examined. This behavior commonly designated to a negative-U defect is for the first time reported in a sample annealed at 350° C.

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Improving electric behavior and simplifying production of Si-based diodes by using thermal laser separation

Improving electric behavior and simplifying production of Si...

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2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2013

作者： Koitzsch, Matthias Lewke, Dirk Schellenberger, Martin Kolb, Robert Zuhlke, Hans-Ulrich Schellenberger Lothar Pfitzner Heiner Ryssel Fraunhofer Institute for Integrated Systems and Device Technology IISB Erlangen Germany Robert Bosch GmbH Automotive Electronics Engineering Electronics Stuttgart Germany JENOPTIK Automatisierungstechnik GmbH Jena Germany

ISBN: (纸本)9781467350068

Leakage current of silicon (Si) based diodes could be reduced by a factor of 1.,000 while using Thermal Laser Separation (TLS) compared to state-of-the-art mechanical blade dicing. Laser based heating and subsequent water spray cooling is used to induce a mechanical stress field inside the Si-wafer guiding a crack along a line to be cut without melting or removing material. Results of physical and electrical measurements prove that TLS does not damage diode edges which allows for cutting through the p-n-junction hence simplifying the production process and reducing costs. © 2013 IEEE.

关键词： Diodes

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Modular AUV System for Sea Water Quality Monitoring and Management

Modular AUV System for Sea Water Quality Monitoring and Mana...

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Oceans 2013 - Norway

作者： Mike Eichhorn Ralf Taubert Christoph Ament Marco Jacobi Torsten Pfuetzenreuter Institute for Automation and Systems Engineering Ilmenau University of Technology Branch Advanced System Technology (AST) Fraunhofer IOSB

ISBN: (纸本)9781479900022

The sustained and cost-effective monitoring of the water quality within European coastal areas is of growing importance in view of the upcoming European marine and maritime directives, i.e. the increased industrial use of the marine environment. Such monitoring needs mechanisms/systems to detect the water quality in a large sea area at different depths in real time. This paper presents a system for the automated detection and analysis of water quality parameters using an autonomous underwater vehicle. The analysis of discharge of nitrate into Norwegian fjords near aqua farms is one of the main application fields of this AUV system. As carrier platform the AUV "CWolf" from the fraunhofer IOSB-AST will be used, which is perfectly suited through its modular payload concept. The mission task and the integration of the payload unit which includes the sensor module, the scientific and measurement computer in the AUV carrier platform will be described. Few practice oriented information about the software and interface concept, the function of the several software modules and the test platform with the several test levels to test every module will be discussed.

关键词： Component AUV Software Design Water Quality Monitoring Model Based Design Technique Socket Communication

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Thin Films: Ethanedithiol Treatment of Solution‐Processed ZnO Thin Films: Controlling the Intragap States of Electron Transporting Interlayers for Efficient and Stable Inverted Organic Photovoltaics (Adv. Energy Mater. 5/2015)

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Advanced Energy Materials 2015年第5期5卷

作者： Sai Bai Yizheng Jin Xiaoyong Liang Zhizhen Ye Zhongwei Wu Baoquan Sun Zaifei Ma Zheng Tang Jianpu Wang Uli Würfel Feng Gao Fengling Zhang State Key Laboratory of Silicon Materials Department of Materials Science and Engineering Cyrus Tang Center for Sensor Materials and Application and Center for Chemistry of High‐Performance and Novel Materials Zhejiang University Hangzhou 310027 China Jiangsu Key Laboratory for Carbon‐Based Functional Materials and Devices Institute of Functional Nano & Soft Materials (FUNSOM) Soochow University 199 Ren'ai Road Suzhou 215123 China Department of Physics Chemistry and Biology (IFM) Linköping University SE‐581 83 Linköping Sweden Institute of Advanced Materials Nanjing Tech University Nanjing 210009 China Fraunhofer Institute for Solar Energy Systems ISE Heidenhofstr. 2 79110 Freiburg Germany Materials Research Centre FMF University of Freiburg Stefan‐Meier‐Str. 21 79104 Freiburg Germany

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Parameter study on UV-induced degradation of dye-sensitized solar cells

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Journal of the Marine Biological Association of the United Kingdom 2013年第5期1537卷 1-7页

作者： Jensen, Katrine Flarup Veurman, Welmoed Brandt, Henning Im, Chan Wilde, Jürgen Hinsch, Andreas Fraunhofer Institute for Solar Energy Systems (ISE) Heidenhofstr. 2 Freiburg 79110 Germany Konkuk University-Fraunhofer Next Generation Solar Cell Research Center (KFnSC) 120 Neungdong-ro Gwangjin-gu Seoul 143-701 South Korea Department of Microsystems Engineering - IMTEK University of Freiburg Georges-Köhler-Allee 103 Freiburg 79110 Germany

The present work investigates the UV stability of the dye-sensitized solar cell (DSC) by parametrical investigation of the material influence on UV stability. UV illumination has been observed to cause degradation by slow photocatalysis in the DSC. Photooxidized impurities represent an unwanted side reaction with the redox pair of the electrolyte as the released electron will deplete the triiodide concentration. A study on the DSC cell was carried out with intermediate electrical characterization by cyclic voltammetry (CV) and electrical impedance spectroscopy (EIS) to map the influence of UV illumination as a function of the H2O concentration in the electrolyte, the plate distance and the triiodide concentration. The results show that the H2O content has a detrimental influence on the DSC stability during UV illumination. A higher concentration of triiodide can buffer the reaction with impurities, so that a longer-term stability is achieved. A recovery of triiodide in UV aged cells with either no remaining triiodide or with such a low concentration that the cell current has been diffusionlimited, was seen during CV to -0.75 V under illumination. The reappearance of triiodide was accompanied with a production of hydrogen bubbles, which was related to the H2O content in the electrolyte and the exposure to UV. Our approach can be used to test the purity and the UV stability of various electrolytes. Copyright © Materials Research Society 2013.

关键词： defects photochemical photovoltaic

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FactRunner: Fact extraction over wikipedia

FactRunner: Fact extraction over wikipedia

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9th International Conference on Web Information systems and Technologies, WEBIST 2013

作者： Sutoyo, Rhio Quix, Christoph Kastrati, Fisnik Thai-German Graduate School of Engineering King Mongkut's University of Technology North Bangkok Bangkok Thailand Information Systems and Databases RWTH Aachen University Aachen Germany Fraunhofer Institute for Applied Information Technology FIT St. Augustin Germany

ISBN: (纸本)9789898565549

The increasing role of Wikipedia as a source of human-readable knowledge is evident as it contains an enormous amount of high quality information written in natural language by human authors. However, querying this information using traditional keyword based approaches requires often a time-consuming, iterative process to explore the document collection to find the information of interest. Therefore, a structured representation of information and queries would be helpful to be able to directly query for the relevant information. An important challenge in this context is the extraction of structured information from unstructured knowledge bases which is addressed by Information Extraction (IE) systems. However, these systems struggle with the complexity of natural language and produce frequently unsatisfying results. In addition to the plain natural language text,Wikipedia contains links between documents which directly link a term of one document to another document. In our approach for fact extraction fromWikipedia, we consider these links as an important indicator for the relevance of the linked information. Thus, our proposed system FactRunner focusses on extracting structured information from sentences containing such links. We show that a natural language parser combined with Wikipedia markup can be exploited for extracting facts in form of triple statements with a high accuracy. Copyright © 2013 SCITEPRESS.

关键词： Semantics

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Control strategies for heterogeneous, autonomous robot swarms

Control strategies for heterogeneous, autonomous robot swarm...

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1st International Conference on Robot Intelligence Technology and Applications, RiTA 2012

作者： Thamke, Stefan Ax, Markus Kuhnert, Lars Kuhnert, Klaus-Dieter Langerwisch, Marco Remmersmann, Thomas Dept. of Realtime Learningsystems University of Siegen Hoelderlinstr. 3 57076 Siegen Germany Institute of Systems Engineering Leibnitz University of Hannover Appelstraße 9A 30167 Hannover Germany Fraunhofer Institute for Communication Information Processing and Ergonomics Neuenahrer Straße 20 53343 Wachtberg Germany

ISBN: (纸本)9783642373732

Having robots as reliable and robust mobile sensor platforms in unknown environments is getting more and more attractive. The control of each robot as a single machine is often complicated enough. But if there are more than one robots in a given scenario, the task get's even harder. The operators then do not only have to care about steering their robot, but they also have to cooperate with each other. In this paper we describe the results of a research project regarding control strategies for a group of heterogeneous, autonomous robots. The swarm receives orders from a central control station, that uses a Battle Management Language, which is abstract, but human readable. An abstract language postulates a certain degree of intelligence within each robot of the cooperation, because the orders are mostly more complex than simple moves from A to B. There is a command hierarchy within the swarm, but every robot implements its own control strategies, to fulfill the overall goal of the orders. The technical as well as the operational realizations are described and discussed mostly with the focus on the unmanned aerial robots. © 2013 Springer-Verlag.

关键词： Antennas

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Unifying Compliance Management in Adaptive Environments through Variability Descriptors (Short Paper)

Unifying Compliance Management in Adaptive Environments thro...

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IEEE International Conference on Service-Oriented Computing and Applications (SOCA)

作者： Falko Koetter Monika Kochanowski Thomas Renner Christoph Fehling Frank Leymann University of Stuttgart IAT and Fraunhofer Institute for Industrial Engineering IAO Stuttgart Germany Institute of Architecture of Application Systems University of Stuttgart Stuttgart Germany

When managing IT environments and designing business processes, compliance regulations add challenges. Especially considering adaptive environments in the context of a service-oriented architecture in combination with exploiting the advantages of cloud technologies, maintaining compliance is cumbersome. Measures have to be taken on many application levels - including business processes, IT architecture, and business management. Although a lot of work has been done on various approaches covering compliance on one or more of these levels, in large companies more than one approach is likely to be employed. However, a unified approach for supporting the compliance tasks - like introduction, maintenance, and especially adaptation - on different levels of business and IT is missing. This work introduces this unifying approach, which links compliance requirements to implementing technology using variable compliance descriptors in order to comprehensively support compliance tasks. The advantage of this approach is that the impact of compliance on these different levels is tracked, thus enabling change propagation from changes in compliance requirements to infrastructure and business process reconfiguration.

关键词： Monitoring Runtime Companies Documentation Computer architecture Topology

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