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Advances in Patterning Materials and Processes XLI 2024

作者： Ku, Yejin Kim, Gayoung Kim, Min Seung Lee, Jin-Kyun Kim, Jiho Park, Byeong-Gyu Lee, Sangsul Lee, Seohyeon Jung, Byung Jun Lee, Changhyeon Kim, Hyunseok Hur, Su-Mi Koh, Chawon Nishi, Tsunehiro Kim, Hyun-Woo Program in Environment and Polymer Engineering Inha University Incheon22212 Korea Republic of Department of Polymer Science and Engineering Inha University Incheon22212 Korea Republic of Pohang Accelerator Laboratory Postech Pohang37673 Korea Republic of Department of Materials Science and Engineering University of Seoul Seoul02504 Korea Republic of Department of Polymer Engineering Graduate School Chonnam National University Gwangju61186 Korea Republic of School of Polymer Science and Engineering Chonnam National University Gwangju61186 Korea Republic of Department of Materials Science and Engineering Yonsei University Seoul03722 Korea Republic of Samsung Electronics Co. Ltd. Semiconductor R&d Center Gyeonggi-do 18448 Korea Republic of

ISBN: (纸本)9781510672208

High numerical aperture (NA) EUV lithography is considered as the most-promising candidate for next generation lithography protocol that will play a crucial role in meeting the demand on the enhanced semiconductor performance and productivity. While this technology enables the fabrication of sub-10 nm patterns, the increased NA has posed challenges, such as reduced depth of focus and narrower process margins. To overcome these hurdles, it is essential to apply thinner resist films while ensuring that the resulting small patterns maintain sufficient physical and chemical durability. Moreover, considering that thinner films absorb fewer photons, the resist molecular structure should be designed to compensate sensitivity burdens. Here, an approach has been proposed to enhance sensitivity by accelerating the solubility change of a well-known tinbased nanocluster resist. To accomplish this goal, it is important to increase not only the number of secondary electrons but also reaction sites and promote radical-based chemical reactions. We aimed at experimentally validating this concept by utilizing elements with high EUV absorbance and highly reactive functional groups with tin radicals. As a model resist, we chose a tin-oxo cage material consisting of a divalent cation containing 12 tin atoms and two counter anions. Our findings indicate that the introduction of unsaturated groups capable of building bridging bonds with radicals leads to fast solubility change at a lower exposure dose, thus enhancing sensitivity. This research offers a promising direction for the development of resists tailored for High NA EUV lithography. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

关键词： Tin

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Effect of Laying and Bonding Parameters of High-Voltage Underground Cables on Thermal and Electrical Performances by Multiphysics Fem Analysis

SSRN

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SSRN 2023年

作者： Demirol, Yunus Berat Kalenderli, Özcan Istanbul Technical University Graduate School of Electrical Engineering Program ITU Ayazaga Maslak Istanbul34469 Turkey Istanbul Technical University Faculty of Electrical and Electronics Engineering ITU Ayazaga Maslak Istanbul34469 Turkey

In high-voltage underground cable systems, current carrying capacity and power losses vary according to the screen bonding type, the phase sequence, the distance between the cables, and the number of parallel systems. In this study, electrical and thermal analyses of a system consisting of two parallel cables were carried out according to different design parameters, and the performances were evaluated. Trefoil and flat layouts were used in the analyzed systems. In addition, the structure of the single-side and solidly bonded systems was also examined. While carrying out the investigations, the variation of the distance between the cables according to three different parameters was also discussed. In total, 56 different scenarios were created, and the systems' performances were examined. Screen currents, screen voltages, cable temperatures, and power losses were considered while conducting the investigations. In this context, coupled electrical and thermal calculations were performed in the Ansys electronics Suite finite element software. Additionally, the study utilized the CymCap program to verify the finite element model created, with analytical analyses conducted in accordance with IEC 60287 standards. The significance of these calculations cannot be overstated, as the analysis results demonstrate the direct impact of various design parameters on the system's overall performance. © 2023, The Authors. All rights reserved.

关键词： Finite element method

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HyperFed: Free-riding Resistant Federated Learning with Performance-based Reputation Mechanism and Adaptive Aggregation using Hypernetworks

HyperFed: Free-riding Resistant Federated Learning with Perf...

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International Conference on Dependable Systems and Their Applications (DSA)

作者： Sirapop Nuannimnoi Florian Delizy Ching-Yao Huang EECS International Graduate Program National Yang-Ming Chiao Tung University Hsinchu Taiwan Department of Electronics Engineering National Yang-Ming Chiao Tung University Hsinchu Taiwan

Traditional machine learning solutions rely on Cloud based services, which could potentially lead to major problems including security, privacy data leakage, unacceptable latency, and excessive operating expenses. Federated Learning techniques (FL) were introduced to tackle these challenges by allowing distributed edge nodes/servers to collaboratively train AI models without sharing raw training data. However, some of the nodes may intentionally or unintentionally upload virtual (fake) models to the main server. This behavior is called "Free-riding", and it could potentially have a negative effect on the overall performance of the FL system. In this paper, we propose a new adaptive contribution-based aggregation technique using hypernetworks, namely "HyperFed", and evaluate it on two important aspects: resistance against free-riders’ fake contributions, and average convergence speed of global model on local datasets. Our simulation results on Federated EMNIST dataset display promising performance in comparison to FedAvg and AdaFed aggregation techniques.

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Study of the relevance of gender in the classification of hand gestures by electromyography-based recognition systems

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Research on Biomedical engineering 2021年第2期37卷 361-373页

作者： Freitas, Melissa La Banca Junior, Jose Jair Alves Mendes La Banca, Wesley Freitas Stevan, Sergio Luiz Graduate Program in Electrical Engineering Federal University of Technology – Paraná Ponta GrossaParaná84016-210 Brazil Department of Electronics Federal University of Technology – Paraná CuritibaParaná80230-901 Brazil Mechanical Engineering Department Federal University of Technology – Paraná Ponta GrossaParaná84016-210 Brazil

Purpose: Some factors such as gender, age, physical fitness, and manual dominance are relevant and can influence the recognition of movement patterns using electromyography (EMG). In this scenario, we present an EMG signal analysis for men and women to observe if there is any significant difference. Methods: Data from 10 men and 10 women were acquired during the execution of six hand gestures (wrist flexion, wrist extension, wrist flexion to left, wrist extension to right, supination, and pronation) using eight channels armband. Four EMG time-domain signal features were extracted and hand gestures were classified using linear and quadratic discriminant analysis (LDA, QDA), and k-nearest neighbors (KNN) algorithms. Results: Data of the feature difference absolute standard deviation value (DASDV) and waveform length (WL) were analyzed based on polar and bar graphs. KNN with 1 nearest neighbor obtained the best results between the classifiers for both men and women. For statistical analyses, the Wilcoxon-Mann-Whitney and Tukey post hoc in Friedman tests were used. The results show that there is no significant difference between data from different genders. Conclusion: After analyzing the results obtained and extensive comparison with related works, it was concluded that, for the conditions where the electrodes are positioned equidistantly, evaluating all the muscular groups of a limb (armband format), there was no significant difference observed between the data from different genders. In addition, this allows us to conclude that EMG armband on the forearm can be a good option for robotic systems control without the need for prior gender adjustment. © 2021, Sociedade Brasileira de Engenharia Biomedica.

关键词： Biomedical signal processing

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Cryogenic Endurance of Anti-ferroelectric and Ferroelectric $\text{Hf}_{1-\mathrm{x}}\text{Zr}_{\mathrm{X}}\mathrm{O}_{2}$ for Quantum Computing Applications

Cryogenic Endurance of Anti-ferroelectric and Ferroelectric ...

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Annual International Symposium on Reliability Physics

作者： K.-Y. Hsiang J.-Y. Lee Z.-F. Lou F.-S. Chang Z.-X. Li C. W. Liu T.-H. Hou P. Su M. H. Lee Institute and Undergraduate Program of Electro-Optical Engineering National Taiwan Normal University Taipei Taiwan Department of Electronics Engineering and Institute of Electronics National Yang Ming Chiao Tung University Hsinchu Taiwan Graduate School of Advance Technology National Taiwan University Taipei Taiwan

The classical memory device with cryogenic operation is in high demanded for quantum information processing. The cryogenic endurance of anti-ferroelectric (AFE) and ferroelectric (FE) $\text{Hf}_{1-\mathrm{x}}\text{Zr}_{\mathrm{x}}\mathrm{O}_{2}$ capacitors is investigated for $\sim 10^{10}$ cycles (80 K). Moreover, the AFE capacitor exhibits a high speed response with ~ 80% normalized switching $2\mathrm{P}_{\mathrm{r},\text{sw}}$ for $\mathrm{t}_{\mathrm{p}}= 1\ \mu\mathrm{s}$ compared to ~ 60% for the FE capacitor at 80 K.

关键词： Temperature Quantum computing Capacitors Morphology Cryogenics Switches Information processing

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Robust Nonlinear $\mathcal{W}_{\infty}$ Optimal Control for Input Nonaffine Systems

Robust Nonlinear $\mathcal{W}_{\infty}$ Optimal Control for ...

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European Control Conference (ECC)

作者： Daniel N. Cardoso Marco H. Terra Guilherme V. Raffo Graduate Program in Electrical Engineering Federal University of Minas Gerais Belo Horizonte MG Brazil Department of Electrical and Computer Engineering University of São Paulo São Carlos SP Brazil Department of Electronics Engineering Federal University of Minas Gerais (UFMG) Belo Horizonte MG Brazil

ISBN: (数字)9783907144107

ISBN: (纸本)9798331540920

We propose a novel robust nonlinear $\mathcal{W}_{\infty}$ optimal control method for dynamical systems with nonaffine control inputs. The nonlinear $\mathcal{W}_{\infty}$ control formulation extends the classic nonlinear $\mathcal{H}_{\infty}$ one, considering a weighted Sobolev norm of the cost variable. This approach assumes that the cost variable belongs to the weighted Sobolev space $\mathcal{W}_{m,p,\mathbf{\Gamma}}$ , ensuring continuity and differentiability up to degree $m$ in a certain domain $\Omega$ . Consequently, in addition to the well-known features provided by the $\mathcal{H}_{\infty}$ approach in terms of disturbance attenuation, the closed-loop system benefits from the enhanced transient performance. Here, the robust nonlinear $\mathcal{W}_{\infty}$ optimal control problem is formulated via dynamic programming for increased-order systems, and a particular solution is proposed to the resulting Hamilton-Jacobi equation, along with the corresponding stability analysis. To validate the proposed method and its versatility, we provide numerical results for the control of a quadrotor. Additionally, leveraging the inherent $\mathcal{L}_{2}$ -gain properties of our approach, we demonstrate that the resulting controller can achieve trajectory tracking with guaranteed asymptotic stability for the whole closed-loop system.

关键词： Asymptotic stability Visualization Costs Trajectory tracking Optimal control Stability analysis Dynamic programming

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On Reliability Assessment of a Battery Energy Storage Systems Supporting PV Plants 8

On Reliability Assessment of a Battery Energy Storage System...

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8th Southern Power electronics Conference and the 17th Brazilian Power electronics Conference, SPEC / COBEP 2023

作者： Amorim, William Caires Silva Cupertino, Allan Fagner Mendes, Victor Flores De Sousa, Renata Oliveira De Barros, Rodrigo Cássio Pereira, Heverton Augusto Federal University of Minas Gerais Graduate Program in Electrical Engineering Belo Horizonte Brazil Federal University of Juz de Fora Department of Electrical Energy Juiz de Fora Brazil Federal University of Minas Gerais Department of Electrical Engineering Belo Horizonte Brazil Federal University of Tech. - Paraná Department of Electronics Curitiba Brazil Federal University of Recôncavo da Bahia Department of Electrical Engineering Cruz das Almas Brazil Federal University of Viçosa Department of Electrical Engineering Viçosa Brazil

ISBN: (纸本)9798350321128

Battery energy storage system (BESS) has been highlighted for its possibilities of performing ancillary services to the power system, such as voltage and frequency regulation, power quality, power smoothing, and peak shaving, among others. The BESS is very promising especially associated with renewable energies, such as photovoltaic (PV) and wind. Among some of these ancillary services, this work evaluates the battery lifetime and reliability. The proposed methodology includes the combined analysis of rainflow counting algorithm, Monte Carlo simulation, and nonlinear damage accumulation rule for battery reliability assessment. Monte Carlo simulation is used to approximate the battery reliability estimation of practical applications, by considering stochastic variations in the battery lifetime model. The case study is based on a 100 kW PV system, assessed using a one-year mission profile of solar irradiance and ambient temperature from Goiânla-Brazll associated with a mission profile of 100 kW industrial load. The PV plant is connected to a 440 V grid associated with a BESS that mitigates oscillations of 10% of PV nominal power per minute. The peak shaving service presented a decrease in the battery lifetime by approximately 11 % in relation to the deterministic battery lifetime analysis. On the other hand, the peak shaving presented a decrease in the battery lifetime by approximately 17.4 %. In addition, the pack-level analysis revealed a maximum reduction in the battery lifetime by approximately 30%, when compared to the conventional deterministic battery reliability estimation procedure. © 2023 IEEE.

关键词： Battery energy storage system mission profile Monte Carlo peak shaving power smoothing reliability

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Local sampled-data gain-scheduling control of quasi-LPV systems 4th

Local sampled-data gain-scheduling control of quasi-LPV syst...

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4th IFAC Conference on Embedded Systems, Computational Intelligence and Telematics in Control CESCIT 2021

作者： Coutinho, Pedro H.S. Peixoto, Márcia L.C. Bernal, Miguel Nguyen, Anh-Tu Palhares, Reinaldo M. Federal University of Minas Gerais Graduate Program in Electrical Engineering Brazil Department of Electrical and Electronics Engineering Sonora Institute of Technology Mexico Université Polytechnique Hauts-de-France LAMIH UMR CNRS 8201 France Federal University of Minas Gerais Department of Electronics Engineering Brazil

This paper deals with the problem of sampled-data gain-scheduling control design for affine quasi-LPV systems. As the control implementation is based on sample-data and its update occurs only at specific sampling instants, the state-dependent scheduling functions of the controller are piecewise continuous. This characteristic causes a mismatch between the system model and the controller parameters, namely asynchronous scheduling functions of the controller with respect to the plant during the inter-sampling behavior. To cope with this phenomenon, a polytopic description of the inter-sampling is constructed based on bounding assumptions on the scheduling functions and their time derivatives. Then, regarding a time-delay approach, a constructive and numerically implementable LMI-based synthesis condition is derived, and a convex procedure is proposed for enlarging the estimate of the region of attraction of the origin of the closed-loop system. The time-derivative bounds of the scheduling functions are explicitly accounted into the local analysis to ensure the method's implementation. A numerical example is provided to illustrate the proposed methodology. Copyright © 2021 The Authors. This is an open access article under the CC BY-NC-ND license (https://***/licenses/by-nc-nd/4.0/)

关键词： Controllers

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Need Analysis of Interactive Multimedia Development for Virtual Learning in Pandemic 4

Need Analysis of Interactive Multimedia Development for Virt...

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4th International Conference on Electrical, electronics, Informatics, and Vocational Education, ICE-ELINVO 2021

作者： Lempas, J.F. Soenarto, S. Barahama, A.D. Instructional Technology Post-Graduate Program Universitas Negeri Yogyakarta Jalan Colombo 01 Daerah Istimewa Yogyakarta 55281 Indonesia Department of Electronics and Informatics Engineering Education Post-Graduate Program Universitas Negeri Yogyakarta Jalan Colombo 01 Daerah Istimewa Yogyakarta 55281 Indonesia

The pandemic that has not ended has an impact on changing the educational paradigm. Existing conditions demand to continue to use virtual learning. During the epidemic, this study will examine students' demand for interactive multimedia in virtual learning. The interviews reveal that the media that teachers provide in virtual learning during this pandemic has limits. Data was gathered through interviews and questionnaires given to teachers and students. The student requirements questionnaire reveals that interactive multimedia is the most effective instructional medium for pupils. This study is part of a larger investigation of the evolution of multimedia learning during a pandemic. © 2021 Institute of Physics Publishing. All rights reserved.

关键词： Students

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Automated Pricing-based Provisioning of SDN/NFV Services in Distributed Multi-access Edge Computing using Cooperative Multi-Agent Deep Reinforcement Learning

Automated Pricing-based Provisioning of SDN/NFV Services in ...

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International Conference on Dependable Systems and Their Applications (DSA)

作者： Jean Jimmy Julien Sirapop Nuannimnoi Ching-Yao Huang EECS International Graduate Program National Yang-Ming Chiao Tung University Hsinshu City Taiwan Electronics Engineering National Yang-Ming Chiao Tung University Hsinshu City Taiwan

The disruption caused by Software Defined Network and Network Function Virtualization (SDN/NFV) technologies will have many impacts on the telecom network. Specifically, the network architecture based on ETSI MANO comprising Virtual Infrastructure Manager (VIM), Virtual Network Function Manager (VNFM), and NFV Orchestrator (NFVO) will significantly change how we operate and manage the telecom network. These impacts on the network architecture will be made gradually. Thus, the migration from non-virtualized networks to all virtualized networks will happen step by step. By introducing new actors into the telecom ecosystem, NFV-MANO will bring in new business models. It is envisaged that these new actors/models will promote competition hence the demand for more flexible charging models with real-time charging. In this research, we will address the architectural realization of the SDN/NFV charging model under the business model of MANO (MANagement and Orchestration) when the service provider (SP) uses the Network Function Virtualization Infrastructure (NFVI) from the NFVIaaS Provider in a distributed multi-access edge computing (MEC) environment. To optimize the Quality of Service (QoS) of MEC resource allocation for incoming services and maximize the overall operating profit of the service provider adopting our charging model, we also propose a new cooperative multi-agent actor-critic based deep reinforcement learning (MADRL) method trained with proximal policy optimization algorithm, namely Coop MAPPO. The results of our experiments showcase the superiority of the Coop-MAPPO multi-agent system over alternative decision-making approaches, with its potential for enhancing operational efficiency and profitability while minimizing failure rates.

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