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Advances in Patterning materials and Processes XLI 2024

作者： Ku, Yejin Kim, Gayoung Kim, Min Seung Lee, Jin-Kyun Kim, Jiho Park, Byeong-Gyu Lee, Sangsul Lee, Seohyeon Jung, Byung Jun Lee, Changhyeon Kim, Hyunseok Hur, Su-Mi Koh, Chawon Nishi, Tsunehiro Kim, Hyun-Woo Program in Environment and Polymer Engineering Inha University Incheon22212 Korea Republic of Department of Polymer Science and Engineering Inha University Incheon22212 Korea Republic of Pohang Accelerator Laboratory Postech Pohang37673 Korea Republic of Department of Materials Science and Engineering University of Seoul Seoul02504 Korea Republic of Department of Polymer Engineering Graduate School Chonnam National University Gwangju61186 Korea Republic of School of Polymer Science and Engineering Chonnam National University Gwangju61186 Korea Republic of Department of Materials Science and Engineering Yonsei University Seoul03722 Korea Republic of Samsung Electronics Co. Ltd. Semiconductor R&d Center Gyeonggi-do 18448 Korea Republic of

ISBN: (纸本)9781510672208

High numerical aperture (NA) EUV lithography is considered as the most-promising candidate for next generation lithography protocol that will play a crucial role in meeting the demand on the enhanced semiconductor performance and productivity. While this technology enables the fabrication of sub-10 nm patterns, the increased NA has posed challenges, such as reduced depth of focus and narrower process margins. To overcome these hurdles, it is essential to apply thinner resist films while ensuring that the resulting small patterns maintain sufficient physical and chemical durability. Moreover, considering that thinner films absorb fewer photons, the resist molecular structure should be designed to compensate sensitivity burdens. Here, an approach has been proposed to enhance sensitivity by accelerating the solubility change of a well-known tinbased nanocluster resist. To accomplish this goal, it is important to increase not only the number of secondary electrons but also reaction sites and promote radical-based chemical reactions. We aimed at experimentally validating this concept by utilizing elements with high EUV absorbance and highly reactive functional groups with tin radicals. As a model resist, we chose a tin-oxo cage material consisting of a divalent cation containing 12 tin atoms and two counter anions. Our findings indicate that the introduction of unsaturated groups capable of building bridging bonds with radicals leads to fast solubility change at a lower exposure dose, thus enhancing sensitivity. This research offers a promising direction for the development of resists tailored for High NA EUV lithography. © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

关键词： Tin

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Unravelling the strong interplay for interfacial magnetic switching in metal-organic-based spintronics

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Journal of materials Chemistry C 2024年第11期12卷 3931-3942页

作者： Chen, Wan-Ting Yu, Li-Chung Lin, Jiu-Hua Cheng, Su Ling Shiu, Hung Wei Lai, Yu-Ling Chu, Ying-Hao Chin, Yi-Ying Wang, Jeng-Han Hsu, Yao-Jane National Synchrotron Radiation Research Center Hsinchu30076 Taiwan Graduate Program for Science and Technology of Accelerator Light Sources National Yang Ming Chiao Tung University Hsinchu30076 Taiwan Department of Materials Science and Engineering National Tsing Hua University Hsinchu30013 Taiwan Department of Chemistry National Taiwan Normal University Taipei11677 Taiwan Department of Photonics National Cheng Kung University Tainan70101 Taiwan Department of Physics National Chung Cheng University Chiayi62102 Taiwan

Organic semiconductors are promising building blocks for multifunctional spintronics. The spinterface plays a key role in affecting the magnetic properties of the performance of spin-based devices. Herein, we reveal the strong interfacial interplay affecting the magnetic switching at the interface of the synthetic paramagnetic tris(8-hydroxyquinoline)iron(iii) (Feq3) layer on the ferromagnetic surface. In combination with synchrotron-based analysis and density functional theory (DFT) calculations, we observed that the robust magnetic interactions of the Co/Feq3 system were strongly influenced by the interfacial reaction between Co and Feq3. As the charge transferred from the contacted Co to Feq3, the central iron was reduced from Fe(iii) to Fe(ii) and hybridized with the 8-hydroxyquinoline, causing spin polarization at the interface. The reduced central Fe(ii) exhibited apparent ferromagnetic ordering after contact with the ferromagnetic Co substrate. With increasing the Feq3 layer thickness, the central Fe reverted to its original Fe(iii) state, resulting in the disappearance of ferromagnetic ordering. The thickness dependence of the Feq3 layer on the magnetic response could be used to tune the spinterface properties and thus the interfacial magnetic interplay. These findings reveal the effect of the strong interfacial redox on the spinterface and open up a promising approach for the use of metal-organic materials in oragnic spintronic devices. © 2024 The Royal Society of Chemistry.

关键词： Organometallics

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On-Chip Perovskite Nanocrystal Laser Integrated with Long-Range Surface Plasmon Polariton Waveguide by Etching-Free Lithographic Patterning

On-Chip Perovskite Nanocrystal Laser Integrated with Long-Ra...

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2022 JSAP-Optica Joint Symposia, JSAP 2022

作者： Lee, Yang-Chun Lin, Hsin-Chang Lin, Cheng-Chieh Ho, Ya-Lun Xing, Di Chen, Mu-Hsin Lin, Bo-Wei Chen, Li-Yin Chen, Chun-Wei Delaunay, Jean-Jacques School of Engineering The University of Tokyo Japan Department of Photonics National Sun Yat-sen University Taiwan International Graduate Program of Molecular Science and Technology National Taiwan University Academia Sinica Taiwan Department of Materials Science and Engineering National Taiwan University Taiwan Molecular Science and Technology Program Taiwan International Graduate Program Academia Sinica Taiwan Department of Photonics National Yang Ming Chiao Tung University Taiwan Center of Atomic Initiative for New Materials National Taiwan University Taiwan

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Infrared Spectra Prediction for Diazo Groups Utilizing a Machine Learning Approach with Structural Attention Mechanism

arXiv

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arXiv 2024年

作者： Liu, Chengchun Mo, Fanyang School of Materials Science and Engineering Peking University Beijing100871 China -Preferred Program Peking University Shenzhen Graduate School Shenzhen518055 China

Infrared (IR) spectroscopy is a pivotal technique in chemical research for elucidating molecular structures and dynamics through vibrational and rotational transitions. However, the intricate molecular fingerprints characterized by unique vibrational and rotational patterns present substantial analytical challenges. Here, we present a machine learning approach employing a Structural Attention Mechanism tailored to enhance the prediction and interpretation of infrared spectra, particularly for diazo compounds. Our model distinguishes itself by honing in on chemical information proximal to functional groups, thereby significantly bolstering the accuracy, robustness, and interpretability of spectral predictions. This method not only demystifies the correlations between infrared spectral features and molecular structures but also offers a scalable and efficient paradigm for dissecting complex molecular interactions. Copyright © 2024, The Authors. All rights reserved.

关键词： Molecular structure

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In-plane Wilson loop for measurement of quantized non-Abelian Berry flux

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Physical Review B 2024年第19期109卷 195149-195149页

作者： Alexander C. Tyner Shouvik Sur Qunfei Zhou Danilo Puggioni Pierre Darancet James M. Rondinelli Pallab Goswami Graduate Program in Applied Physics Northwestern University Evanston Illinois 60208 USA Department of Physics and Astronomy Northwestern University Evanston Illinois 60208 USA Materials Research Science and Engineering Center Northwestern University Evanston Illinois 60208 USA Center for Nanoscale Materials Argonne National Laboratory Argonne Illinois 60439 USA Department of Materials Science and Engineering Northwestern University Evanston Illinois 60208 USA Northwestern Argonne Institute for Science and Engineering Evanston Illinois 60208 USA

Band topology of anomalous quantum Hall insulators can be precisely addressed by computing the Chern numbers of constituent nondegenerate bands, describing the presence of quantized, Abelian Berry flux through the two-dimensional Brillouin zone. Can Berry flux be captured for the SU(2) Berry connection of two-fold degenerate bands in spinful materials preserving space-inversion (P) and time-reversal (T) symmetries without detailed knowledge of underlying basis? We address this question by investigating the correspondence between a non-Abelian generalization of Stokes' theorem and the manifestly gauge-invariant eigenvalues of Wilson loops computed along in-plane contours which preserve the underlying crystalline symmetry. The importance of this correspondence is elucidated by performing natural number resolved classification of ab initio band structures of three-dimensional, Dirac materials. Our work underscores how identification of quantized Berry flux, both Abelian and non-Abelian, offers a unified framework for addressing first-order and higher-order topology of insulators and semimetals.

关键词： Electronic structure of atoms & molecules First-principles calculations Topological insulators

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Evaluation of Single and Duplex Plasma Treatment Applied to Aisi 409 Stainless Steel

SSRN

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SSRN 2024年

作者： do Monte e Silva, André Felipe Soares de Almeida, Larissa Solano Monteiro, Leandro Rossino, Luciana Sgarbi Nunes, Maelson Sousa Libório, Maxwell Santana de Carvalho Costa, Thércio Henrique Bandeira, Rafael Marinho de Sousa, Rômulo Ribeiro Magalhães Post-Graduate Materials Science and Engineering Program Federal University of Piauí PI Teresina Brazil Post-Graduate Program in Materials Science Federal University of São Carlos São Carlos Brazil Post-Graduate Program in Chemistry Federal University of Piauí PI Teresina Brazil School of Science and Technology Federal University of Rio Grande do Norte RN Natal Brazil Brazil Department of Mechanical Engineering Federal University of Piauí PI Teresina Brazil Brazil

The industrial landscape has witnessed a growing demand for components exhibiting superior performance and extended lifespan, especially in parts made of stainless steels like AISI 409 steel, widely used in automotive exhaust systems, heat exchangers, and lightweight structural components. This study investigates the enhancement of surface properties of AISI 409 stainless steel through cathodic cage plasma nitriding (CCPN) and cathodic cage plasma deposition (CCPD) processes, focusing on the novel implementation of duplex treatments. The research aims to improve the mechanical strength, wear resistance, and corrosion resistance of the steel by forming nitrides and vanadium nitride films on its surface. The duplex treatments, specifically N400D450 and N450D450, were found to significantly enhance the hardness of AISI 409 stainless steel, with the N450D450 sample achieving a maximum hardness of 1100 HV—a 461.22% increase compared to the untreated steel. This enhancement is attributed to the formation of a thick, uniform nitrided layer followed by a vanadium nitride film. The critical role of processing order was highlighted, with the sequence of nitriding followed by deposition proving more effective than the reverse. Corrosion resistance was markedly improved in the duplex-treated samples. The N450D450 sample exhibited an Ecorr of -198 mV and reduced jcorr values, indicating superior resistance to corrosive environments. These results underscore the synergistic effect of combining nitriding and vanadium deposition, which optimizes the formation of protective surface layers. Overall, this study demonstrates that duplex treatments significantly enhance the surface properties of AISI 409 stainless steel, offering the potential for extended component lifespan and reduced maintenance in industrial applications. The findings suggest that careful control of process parameters and treatment sequence is essential for achieving optimal results. © 2024, The Authors. All rights

关键词： Tribology

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Localization of a Crack in Moving Cylindrical Ferromagnetic Rods by Measuring the Fourier Coefficients of the Leakage Magnetic Flux

Localization of a Crack in Moving Cylindrical Ferromagnetic ...

引用

Magnetic Conference - Short Papers (INTERMAG Short Papers), IEEE International

作者： Kanta Shiku Masafumi Kuromizu Yuji Gotoh Takaaki Nara Graduate School of Information Science and Technology The University of Tokyo bunkyo-ku Japan Division of Materials Science and Production Engineering Graduate School of Engineering Oita University Oita Japan Intelligent Mechanical Systems Program Faculty of Science and Technology Oita University Oita Japan

ISBN: (数字)9798350362213

ISBN: (纸本)9798350362220

Electromagnetic nondestructive inspection for high-speed moving ferromagnetic materials is necessary for manufacturing efficiency. In this paper, we present a novel leakage magnetic flux (LMF) method to estimate the crack position in a moving cylindrical ferromagnetic rod. The method directly measures the first-order Fourier coefficients of the LMF moving with the crack by using only two coils with DC excitation. The location of a crack is estimated by the proposed method, as demonstrated for an S45C cylindrical rod.

关键词： Location awareness Coils Magnetic flux Inspection Ferromagnetic materials Manufacturing Electromagnetics

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Fabrication and bioactivity studies of wollastonite/polycaprolactone composites

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International Journal of Nano and biomaterials 2023年第2期10卷 86-99页

作者： Lakshmi, R. Choudhary, Rajan Senatov, Fedor Kaloshkin, Sergey Kothandam, Shobana Ponnamma, Deepalekshmi Sadasivuni, Kishor Kumar Swamiappan, Sasikumar Department of Chemistry Auxilium College Tamil Nadu Vellore632006 India Faculty of Materials Science and Applied Chemistry Rudolfs Cimdins Riga Biomaterials Innovations and Development Centre of RTU Institute of General Chemical Engineering Riga Technical University Pulka St 3 RigaLV-1007 Latvia Baltic Biomaterials Centre of Excellence Headquarters at Riga Technical University Kipsala Street 6A RigaLV-1048 Latvia National University of Science and Technology "MISiS" Moscow119049 Russia Department of Chemistry School of Advanced Sciences Vellore Institute of Technology Tamil Nadu Vellore632014 India Materials Science and Technology Program Department of Mathematics Statistics and Physics College of Arts and Sciences Qatar University P.O. Box 2713 Doha Qatar Center for Advanced Materials Qatar University P.O. Box 2713 Doha Qatar Department of Chemistry School of Advanced Sciences Vellore Institute of Technology Tamil Nadu Vellore632014 India

Current work investigates the influence of wollastonite on mechanical stability and biomineralisation ability of wollastonite/ polycaprolactone (PCL) composites (WP composites). The solvent casting particulate leaching method was used to prepare these composites. FT-IR spectra indicated the presence of functional groups associated with PCL and wollastonite. Scanning electron microscopy showed aggregated morphology and wollastonite particles were embedded in the PCL matrix. The incorporation of wollastonite leads to a more than three-fold increase in the compressive strength of the composites. Moreover, the composites containing 50% wollastonite exhibited better compressive strength than 80%. This observation suggested that if the concentration of a filler is exceeded beyond its critical concentration then the mechanical stability of the composite will be compromised. The composites revealed good apatite deposition ability. Thus, the biomineralisation ability and compressive strength of PCL can be improved by preparing its composites with bioceramics. © 2023 Inderscience Enterprises Ltd.

关键词： Bioceramics

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Piezoelectric electrostatic superlattices in monolayer MoS2

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Physical Review materials 2024年第1期8卷 014002-014002页

作者： Ashwin Ramasubramaniam Doron Naveh Department of Mechanical and Industrial Engineering University of Massachusetts Amherst 01003 MA United States Materials Science and Engineering Graduate Program University of Massachusetts Amherst 01003 MA United States Faculty of Engineering Bar-Ilan University Ramat Gan 52900 Israel Institute for Nanotechnology and Advanced Materials Bar-Ilan University Ramat Gan 52900 Israel

Modulation of electronic properties of materials by electric fields is central to the operation of modern semiconductor devices, providing access to complex electronic behaviors and greater freedom in tuning the energy bands of materials. Here, we explore one-dimensional superlattices induced by a confining electrostatic potential in monolayer MoS2, a prototypical two-dimensional semiconductor. Using first-principles calculations, we show that periodic potentials applied to monolayer MoS2 induce electrostatic superlattices in which the response is dominated by structural distortions relative to purely electronic effects. These structural distortions reduce the intrinsic band gap of the monolayer substantially while also polarizing the monolayer through piezoelectric coupling, resulting in spatial separation of charge carriers as well as Stark shifts that produce dispersive minibands. Importantly, these minibands inherit the valley-selective magnetic properties of monolayer MoS2, enabling fine control over spin-valley coupling in MoS2 and similar transition-metal dichalcogenides.

关键词： Electronic structure Piezoelectricity Valley degrees of freedom

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engineering H2O2 Self-Supplying Platform for Xdynamic Therapies via Ru-Cu Peroxide Nanocarrier: Tumor Microenvironment-Mediated Synergistic Therapy

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ACS Applied materials and Interfaces 2024年第19期16卷 24172-24190页

作者： Dirersa, Worku Batu Kan, Tzu-Chun Chang, Jungshan Getachew, Girum Ochirbat, Sonjid Kizhepat, Shamsa Wibrianto, Aswandi Rasal, Akash Chen, Hung-An Ghule, Anil Vithal Chou, Tzung-Han Chang, Jia-Yaw Department of Chemical Engineering National Taiwan University of Science and Technology Taipei106335 Taiwan Graduate Institute of Medical Sciences College of Medicine Taipei Medical University Taipei11031 Taiwan International Master/Ph.D. Program in Medicine College of Medicine Taipei Medical University Taipei11031 Taiwan International Ph.D. Program for Cell Therapy and Regeneration Medicine College of Medicine Taipei Medical University Taipei11031 Taiwan Green Nanotechnology Laboratory Department of Chemistry Shivaji University Kolhapur416004 India Department of Chemical and Materials Engineering National Yunlin University of Science and Technology Yunlin64002 Taiwan

Of the most common, hypoxia, overexpressed glutathione (GSH), and insufficient H2O2 concentration in the tumor microenvironment (TME) are the main barriers to the advancment of reactive oxygen species (ROS) mediated Xdynamic therapies (X = photo, chemodynamic, chemo). Maximizing Fenton catalytic efficiency is crucial in chemodynamic therapy (CDT), yet endogenous H2O2 levels are not sufficient to attain better anticancer efficacy. Specifically, there is a need to amplify Fenton reactivity within tumors, leveraging the unique attributes of the TME. Herein, for the first time, we design RuxCu1-xO2-Ce6/CPT (RCpCCPT) anticancer nanoagent for TME-mediated synergistic therapy based on heterogeneous Ru-Cu peroxide nanodots (RuxCu1-xO2 NDs) and chlorine e6 (Ce6), loaded with ROS-responsive thioketal (TK) linked-camptothecin (CPT). The Ru-Cu peroxide NDs (RCp NDs, x = 0.50) possess the highest oxygen vacancy (OV) density, which grants them the potential to form massive Lewis’s acid sites for peroxide adsorption, while the dispersibility and targetability of the NDs were improved via surface modification using hyaluronic acid (HA). In TME, RCpCCPT degrades, releasing H2O2, Ru2+/3+, and Cu+/2+ ions, which cooperatively facilitate hydroxyl radical (•OH) formation and deactivate antioxidant GSH enzymes through a cocatalytic loop, resulting in excellent tumor therapeutic efficacy. Furthermore, when combined with laser treatment, RCpCCPT produces singlet oxygen (1O2) for PDT, which induces cell apoptosis at tumor sites. Following ROS generation, the TK linkage is disrupted, releasing up to 92% of the CPT within 48 h. In vitro investigations showed that laser-treated RCpCCPT caused 81.5% cell death from PDT/CDT and chemotherapy (CT). RCpCCPT in cancer cells produces red-blue emission in images of cells taking them in, which allows for fluorescence image-guided Xdynamic treatment. The overall results show that RCp NDs and RCpCCPT are more biocompatible and have excellent Xdynamic the

关键词： Oxidation

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