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Degradation mechanism of contact resistance during window formation

ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第1期79卷 93-100页

作者： Sekine, M Kakuhara, Y Kikkawa, T Nonmember NEC ULSI Device Development Laboratory Sagamihara Japan 229 Graduated in 1985 from Department of Metal Materials Osaka University where he received his Master's degree in 1988. He joined NEC in 1988. Graduated in 1984 from the Department of Electrical Engineering Aoyama Gakuin University and she received her Master's degree from Shinshu University in 1986. She joined NEC in 1986. She is a member of the Applied Physics Society. Graduated in 1974 from the Department of Electrical Engineering Shizuoka University where he received his Master's degree in 1976. He received his Ph.D. degree from Tokai University. He joined NEC in 1976. He is engaged in research and development of semiconductor LSI device and process. He was a Visiting Researcher at MIT from 1983 to 1984. He is currently a director of multilayer wire formation program ULSI Device Development Institute. He is a member of IEEE ICS and Applied Physics Society.

This paper describes a contact degradation mechanism during window formation followed by selective tungsten chemical vapor deposition (W-CVD). Contact resistances by using selective W-CVD were increased as the overetching rate increased. Surface analysis made it clear that the Si surface at the bottom of contact was damaged and oxygen atoms from dielectrics were introduced during window etching. These damage and oxygen atoms break Si-Si bonds and make Si-O bonds after additional ion implantation. The Si-O bonds degrade the valence-band density of states of the Si surface. Such a damaged surface will not react with WF6. This inactivation is the reason for contact degradation. Controlling the Si surface state by using the chemical dry etching (CDE) technique solves this problem.

关键词： selective W-CVD contact chemical dry etch

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DATA MULTIPLEX SYSTEM (DMS) - ASPECTS OF FLEET INTRODUCTION

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NAVAL ENGINEERS JOURNAL 1988年第6期100卷 41-47页

作者： BLACKWELL, LM Luther M. Blackwell:is presently the Data Multiplex System (DMS) program manager in the Bridge Control Monitoring and Information Transfer Branch of the Naval Sea Systems Command (NavSea). He graduated from the University of Maryland in 1964 receiving his BS degree in electrical engineering. After graduating he was employed in the Bureau of Ships where he held project engineering assignments on various ships entertainment magnetic tape recording fiber optics computer mass memory and information transfer systems. He has also pursued graduate studies in engineering management at The George Washington University.

The Data Multiplex System (DMS) is a general-purpose information transfer system directed toward fulfilling the internal data intercommunication requirements of a variety of naval combatant ships and submarines in the 1990–2000 time frame. The need for a modern data transfer system of the size and capability of DMS has increased as various digital control systems throughout naval ships have adopted distributed processing architectures and reconfigurable control consoles, and as the quantity of remotely sensed and controlled equipment throughout the ship has increased manyfold over what it was in past designs. Instead of miles of unique cabling that must be specifically designed for each ship, DMS will meet information transfer needs with general-purpose multiplex cable that will be installed according to a standard plan that does not vary with changes to the ship's electronics suite. Perhaps the greatest impact of DMS will be the decoupling of ship subsystems from each other and from the ship. Standard multiplex interfaces will avoid the cost and delay of modifying subsystems to make them compatible. The ability to wire a new ship according to a standard multiplex cable plan, long before the ship subsystems are fully defined, will free both the ship and the subsystems to develop at their own pace, will allow compression of the development schedules, and will provide ships with more advanced subsystems. This paper describes the DMS system as it is currently being introduced into the fleet by the U.S. Navy. The results of its design and implementation in the DDG-51 and LHD-1 class ships are also presented.

关键词： Multiplexing Equipment

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Measurement of refractive index distribution of optical waveguides by the propagation mode near-field method employing an improved inverse analysis

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第9期79卷 21-29页

作者： Yabu, T Sawa, S Geshiro, M Faculty of Engineering Osaka Prefecture University Sakai Japan 593 Graduated from the Department of Electronic Engineering Doshisha University in 1989 and received his M.S. degree from Kyoto University in 1991. He withdrew from the doctoral program in 1993 and became a Research Associate at Osaka Prefecture University. He has been engaged in research on optical waveguides. Graduated from the Department of Electrical Engineering Osaka Prefecture in 1962 and joined Mitsubishi Electric remaining there until he left in 1964. He received his M.S. He received his M.S. and Dr. of Eng. degrees from Osaka University in 1967 and 1970 respectively. In 1970 he became an Associate Professor at Ehime University in the Department of Electronic Engineering where he was promoted to Professor in 1976. In 1991 he became Professor of Osaka Prefecture University in the Department of Electrical Engineering and in 1993 Professor in the Department of Electrical and Electronic Systems Engineering. He has been engaged in research on optical waveguides optical integrated circuits optical fibers and planar antennas. He is a member of IEEE Laser Society and the Institute of Electrical Engineers of Japan. Graduated in 1973 from the Department of Communication Engineering Osaka University and received his M.S. and Dr. of Eng. degrees in 1975 and 1978 respectively. In 1979 he became a Research Associate at Ehime University where he was promoted to an Associate Professor in 1984. In 1986–87 he was on leave at the University of Texas at Austin. In 1994 he became an Associate Professor at Osaka Prefecture University. He has been engaged in research on optics and millimeter wave and microwave waveguides. He is a member of IEEE.

A method to estimate the refractive index profile of an optical waveguide exists in which the optical intensity distribution of the only one propagation mode is used. Since this method requires only a microscope and a television camera, setup is extremely simple and inexpensive, thereby making the method practical. The differential processing method and the inverse analysis method have been proposed as methods to use the optical intensity distribution of only one propagation mode. The mechanisms of these methods that use the optical intensity distribution are presented in detail here. As a consequence, a new method that overcomes the difficulties in the previous methods, to be called Improved Inverse Analysis Method with Fewer Parameters, is proposed. Further, by using this proposed method, the index profiles of the step-index type optical fiber and the buried optical waveguide can be estimated in order for validity of the method to be studied.

关键词： optical waveguide refractive index profile image measurement

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Improvement of convergence speed for subband adaptive digital filter using the multirate repeating method

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART III-FUNDAMENTAL ELECTRONIC SCIENCE 1995年第10期78卷 37-45页

作者： Kiya, H Nishikawa, K Ashihara, K Faculty of Technology Tokyo Metropolitan University Hachioji Japan 192-03 Members Kiyoshi Nshikawa graduated in 1990 from the Department of Electrical Engineering Tokyo Metropolitan University where he completed the Master's Program in 1992 and affiliated with Nippon Steel Co. Computer Systems Laboratory. He was a Research Associate in 1993 in the Department of Elect. Inf. Eng. Tokyo Metropolitan University engaged in research onadaptive signal processing and information source coding. He is a member of the IEEE. Associate Member

The subband adaptive system, where the idea of the filter bank is applied to the adaptive filter, has a feature that a higher-order adaptation can be reduced to lower-order adaptations. The reduction of the order of the adaptive filter is related closely to the number of channels and the decimation ratio. The order of adaptive digital filter (ADF) is decreased greatly when the number of subbands is increased, and the decimation ratio is increased up to the maximum value. Then, however, the number of coefficient-updates per unit time is decreased, which results in the deterioration of the convergence Speed. From such a viewpoint, this paper discusses a method to improve the convergence speed, which is deteriorated in the subband adaptive system, due to the decimation. The idea of the proposed method is to utilize effectively the data which have been discarded in the decimation process and to improve the convergence speed. It is called the multirate repeating method. As the first step, the multirate repeating method is applied to the conventional subband adaptive system and the convergence speed is improved. Then a subband adaptive system is introduced in which the multirate repeating method can be utilized more effectively. As a result, a faster convergence is realized while retaining the ADF order-reduction effect, which is an advantage of the subband adaptive system.

关键词： adaptive signal processing subband adaptive system multirate repeating method rational decimation

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Soliton system evaluations using fibers with dispersion and loss fluctuations

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第4期79卷 77-84页

作者： Ishiba, K Komatsu, T Takahara, M Faculty of Engineering Yamanashi University Kofu Japan 400 Graduated in 1994 from the Department of Electronic and Information Engineering where he is currently in the Master's program. He has been engaged in research on optical fiber soliton transmission. Received his B.S. and M.S. degrees in 1993 and 1995 respectively from the Department of Electronic and Information Engineering Yamanashi University. He joined NTT in April 1995. He has been engaged in research on simulation of the optical fiber soliton transmission and on the transmission system with flexibility in transmission speed. Graduated from the Department of Electrical Engineering Yamanashi University in 1965 and received his M.S. degree in 1967. He received his Ph.D. degree later. In 1967 he became a Research Associate of the Department of Electronic Engineering Yamanashi University. In 1991 he became a Professor of Electronic and Information Engineering. He has been engaged in research on special function theory nonlinear circuits optical communication systems and LAN systems. In 1984 he received a Book Award from I.E.I.C.E. In 1990–91 he was on leave at Southampton University. He is a member of IEEE.

In the development of practical multimedia systems, greater capacity is desired in a long-distance large-capacity transmission system. A number of studies have been undertaken to develop a long-distance large-capacity system. Several long-distance transmission experiments for high-density transmission by wavelength demultiplexing method (WDM) have been reported recently. However, more of the experimental examples have reported on soliton transmission than on WDM systems. Hence, the former is considered more advanced. It is necessary to prepare a fiber of a length of approximately 10,000 km for ultralong-distance transmission experiment. Since this is difficult to obtain, repetitive experiments are often the case. However, such an experiment does not disclose the effects of dispersion and loss fluctuation in the fiber. In this paper, the effect of fluctuation in dispersion and loss in the fiber is studied by simulation so that the resilience of the soliton to the variations of the fiber characteristics is evaluated.

关键词： optical soliton dispersion fluctuation loss fluctuation Gordon-Haus jitter

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DESIGN BUDGETING - A BOLD NEW SHIP ACQUISITION STRATEGY ... NOW A PROVEN CONCEPT

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NAVAL ENGINEERS JOURNAL 1981年第2期93卷 67-74页

作者： JARVIS, PS KAZAL, JD CAMPBELL, DB HAFF, MW Mr. Paul S. Jarvis:graduated from Virginia Polytechnic Institute from which he received his B.S. degree in Mechanical Engineering in 1962 and later he received his M.S. degree in Administration from The George Washington University in 1967. He has been in the AEGIS Shipbuilding Program since July 1971 and has served as Ship Systems Engineering Manager for CG 47 since 1977. Mr. Jarvis is a member of Tau Beta Pi and Pi Tau Sigma Engineering Fraternities and the Phi Kappa Phi National Scholastic Society. Mr. J. David Kazal:graduated from Colorado A&M from which he received his B.S. degree in Mechanical Engineering in 1951. Currently he is employed by the Ingalls Shipbuilding Division Litton Systems as a Project Engineer on the CG 47 Class Ship Program. During World War II he served in the U.S. Navy in Submarines. Mr. Kazal is a member of the American Society of Mechanical Engineers (ASME). Mr. Donald B. Campbell Jr.: received his B.S. degree in Electrical Engineering from North Carolina State University in 1961. He has over twenty-three years of professional experience in Ship Electronics System Engineering and was formerly a member of the Electrical Design Division at Newport News Shipbuilding. Additionally he was involved in quantification and evaluation of contractor shipbuilding claims against the U.S. Navy while he was employed by Booz-Allen Applied Research. Currently he is a Senior Member of the Engineering Staff at RCA providing program and engineering coordination for the AEGIS Program. Mr. Maurice W. Haff:received his B.S. degree in Electrical Engineering from Oklahoma State University in 1970. His advanced degrees which he received from The George Washington University are an M.S. degree in Management Engineering (1975) and an M.B.A. degree in International Business (1980). He has eleven years of engineering and management experience gained in a wide range of Navy Programs. While he was involved with “Design Budgeting” for the CG 47 from the beginning of the program as a Project Engineer Mr.

Traditional ship acquisition practices no longer support the requirements of today's shipbuilding programs. These practices require development of major combat and ship systems to be essentially complete prior to issuance by the government of the Request For Proposal (RFP) for ship detail design and construction. With the need for timely delivery of warships equipped with the most modern weapon systems possible, and maximum remaining years of functional effectiveness after delivery becoming increasingly important, new acquisition strategies are essential. “Design Budgeting,” an innovative new Navy acquisition and design strategy, is now a proven concept. Developed and implemented by the AEGIS Shipbuilding Project, it has been explored in depth with the Shipbuilding Industry as an alternative acquisition process that enables Combat System development and ship acquisition to proceed concurrently. Applied for the first time in the acquisition of Ticonderoga (CG-47), its use permitted development of major portions of the AEGIS Combat System (later to be Government Furnished Equipment to the shipbuilder) to continue well into ship detail design and construction without impact on overall schedules. Hundreds of changes to the ship engineering baseline which resulted from continued development and test of Combat System, were incorporated into the shipbuilding contract with no cost increase or delay and disruption of the shipbuilding schedule. Proven, adaptable, and available now, “Design Budgeting” is an acquisition and design strategy than can satisfy the requirements of current and future shipbuilding programs.

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Human systems integration and advanced technology in engineering department workload and manpower reduction

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NAVAL ENGINEERS JOURNAL 2003年第1期115卷 57-65页

作者： Lively, KA Seman, AJ Kirkpatrick, M KENNETH A. LIVELY graduated from the University of Colorado with a BS in applied mathematics and an MS in mathematics in 1976 and from the Massachusetts Institute of Technology with an MS in electrical engineering and the degree ocean engineer in naval architecture and marine engineering in 1984. He retired from the U.S. Navy in 1989 after 23 years of service. Assignments included electrical officer on the USS Constellation (CV 64) project engineer for the DDG 51 machinery control system (NAVSEA) and DDG 51 Technical Director (NAVSEA). He was vice president of the PDI Division of Bird-Johnson Company from July 1989 to November 1998 where he managed various gas turbine and machinery controls related development projects. He joined Anteon Corporation's Systems Engineering Group as senior controls engineer in December 1998 where he provided technical support to the integrated power systems program (NAVSEA PMS 510) and managed the Office of Naval Research Afloat Laboratory. DR. MARK KIRKPATRICK is currently an independent consultant in human factors and work-load/manning analysis and modeling. He holds a Ph.D. degree in experimental psychology from The Ohio State University and has 34 years of experience in applied human factors. From 1982 through 2000 Dr. Kirkpatrick served as the senior vice president of Carlow International. Prior to joining Carlow in 1982 Dr. Kirkpatrick served as a member of the technical staff at North American Rockwell's Missiles Division and as a project director and vice president for Essex Corporation. His areas of expertise include workload simulation task analysis operator-in-the-loop simulation human performance experimentation statistical analysis and human factors T&E. He has directed and/or participated in human factors projects for the U.S. Navy U.S. Army NASA Department of Transportation the U.S. Nuclear Regulatory Commission and private industry. ANTHONY J. SEMAN III is the technical manager for the reduced ship's crew by virtual presence (RSVP) advanced technology d

Aboard current ships, such as the DDG 51, engineering control and damage control activities are manpower intensive. It is anticipated that, for future combatants, the workload demand arising from operation of systems under conditions of normal steaming and during casualty response will need to be markedly reduced via automated monitoring, autonomous control, and other technology initiatives. Current DDG 51 class ships can be considered as a manpower baseline and under Condition III typical engineering control involves seven to eight watchstanders at manned stations in the Central Control Station, the engine rooms and other machinery spaces. In contrast to this manning level, initiatives such as DD 21 and the integrated engineering plant (IEP) envision a partnership between the operator and the automation system, with more and more of the operator's functions being shifted to the automation system as manning levels decrease. This paper describes some human systems integration studies of workload demand reduction and, consequently, manning reduction that can be achieved due to application of several advanced technology concepts. Advanced system concept studies in relation to workload demand are described and reviewed including. Piecemeal applications of diverse automation and remote control technology concepts to selected high driver tasks in current DDG 51 activities. Development of the reduced ship's crew by virtual presence system that will provide automated monitoring and display to operators of machinery health, compartment conditions, and personnel health. The IEP envisions the machinery control system as a provider of resources that are used by various consumers around the ship. Resource needs and consumer priorities are at all times dependent upon the ship's current mission and the availability of equipment pawnbrokers.

关键词： Naval warfare

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Analysis of nonreciprocal mode-conversion properties of magnetooptic channel waveguides using the finite element method

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第10期79卷 32-39页

作者： Zhuang, XP Koshiba, M Tsuji, Y Faculty of Engineering Hokkaido University Sapporo Japan 060 Graduated from the Department of Communication Engineering Guellin Electronic Institute China in 1986. She received her M.S. degree from Hokkaido University in 1991 and was admitted to the doctoral program. She has been engaged in research on the optimum design of magnetooptic waveguides for nonreciprocal optical devices. Graduated in 1971 from the Department of Electronic Engineering Hokkaido University where he received his M.S. degree in 1973 and his Dr. of Eng. degree in 1976. In 1976 he became a Lecturer in the Department of Electronic Engineering Kitami Institute of Technology where he was promoted to Associate Professor in 1977. In 1979 he became an Associate Professor at Hokkaido University where he was promoted to Professor in 1987. He has been engaged in research on optical and wave electronics. In 1987 he received a Best Paper Award. He is the author ofFundamentals of Finite Element Method of Optics and Waves(Morigkata Publ.)Optical Waveguide Analysis(Asakura Publ.)Optical Waveguide Analysis(McGraw-Hill Book Co.) andOptical Waveguide Theory by the Finite Element Method(KTK Scientific Publishing/Kulwer Academic Publishers). He is also co-author of one book and has written chapters in six other books. He is a member of the Institute of Television Engineers of Japan the Institute of Electrical Engineers of Japan the Japan Society for Simulation Technology the Japan Society for Computational Methods in Engineering and the Japan Society of Applied Magnetics and Mechanics. He is also an IEEE Senior Member. Graduated in 1991 from me Department of Electronic Engineering Hokkaido University where he received his M.S. degree in 1993. He is currently in the doctoral program. He has been engaged in research on quantum wave phenomena and computer-aided design of optical and quantum effect devices.

To evaluate nonreciprocal mode conversion characteristics in a magnetooptic channel waveguide, a finite element analysis based on the scalar wave approximation is formulated for the first time. A simple iterative calculation method is conceived for solution of the nonlinear eigenvalue equations finally obtained in which the two polarizations are coupled. Specifically, the maximum isolation ratio in the mode-conversion-type magnetooptic rib guide was evaluated and the validity of the method is confirmed by comparison with published experimental results.

关键词： nonreciprocal optical devices magnetooptic waveguide nonreciprocal mode conversion finite element method numerical analysis

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A device simulation of the BBT effect in flash memory cells and implications for the development of high-reliability memory cells

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第11期79卷 51-57页

作者： Hayashi, T Fukuda, K Ohno, M Nishi, K Kita, A VLSI R&D Center OKI Electric Industry Company Ltd. Hachioji-shi Japan 193 Graduated from the Science University of Tokyo Dept. of Applied Physics in 1986 and joined Oki Electric. Since then he has been engaged in research on the reliability of MOS transistors and silicon oxide films. Since 1994 he has been engaged in the development of flash memory. He is a member of the Applied Physics Society. Graduated from the University of Tokyo Dept. of Applied Physics in 1983 and joined Oki Electric in 1985. Since then he has been engaged in research on the semiconductor process and device simulation. In 1990 he participated in joint research at the Technical University of Aachen. He is a member of the Applied Physics Society. Graduated from the Tokyo University of Agriculture and Technology Dept. of Electrical Engineering in 1980 and completed an MS course in 1983. In 1986 he completed the doctoral course at Shizuoka University. He then joined Oki Electric where he has been engaged in research on ULSI processes. He is now a manager responsible for flash memory at the VLSI R&D Center. He holds a doctorate in engineering. He is a member of the Applied Physics Society. Graduated from the University of Tokyo Dept. of Applied Physics in 1973 and joined Oki Electric. He was engaged in the development of integrated circuit logic simulation technology and bipolar process technology and since 1980 he has been engaged in research on process/device simulation and modeling. Presently he is a senior manager at the VLSI R&D Center. In 1982–1984 he was a Visiting Scholar at MIT. He holds a doctorate in engineering. He is a member of the Applied Physics Society and a senior member of IEEE. Graduated from Tokyo Institute of Technology Dept. of Chemical Engineering in 1978 and completed the MS program in 1930. In that year he joined Oki Electric. Since then he has been engaged in CMOS process design for DRAM and flash memory. He is now a manager at the VLSI R&D Center. He is a member of the Applied Physics Society.

In order to analyze the BBT (band-to-band tunneling) phenomenon in flash memory cells by simulation, a new model is proposed, which improves on the BBT model by introducing the concept of ''average electric field.'' This model agrees well with the measured results in a wide drain N-concentration range. Using this model, the reliability of memory cells is analyzed. It is found that the difference of the amount of BBT generation does not directly affect the endurance characteristics but does affect the disturb characteristics. The same model can be used to analyze problem points of the present cells and to estimate the BBT current of next-generation devices accurately.

关键词： band-to-band tunneling flash memory simulation endurance characteristics

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engineering OPERATIONAL SEQUENCING SYSTEM

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NAVAL ENGINEERS JOURNAL 1970年第6期82卷 65-&页

作者： CALOGERO, R MCMANUS, D Robert Calogero graduated from the University of Maryland with a Bachelor of Science in Electrical Engineering in February 1965. He entered the Magnetic Defense Section of Propulsion Power and Auxiliary Systems Division of the Naval Ship Engineering Center where he had previously served as a summer student engineering aid. In December 1968 he transferred to the Maintenance Management Branch of NAVSHIPS where he assumed responsibility as Manager of the Operational Sequencing System. Calogero is presently in the Engineering Administration Program offered at the George Washington University and is a member of the Association of Senior Engineers of the Naval Ships Systems Command. Donald McManus graduated from the Maine Maritime Academy in 1954 and received his Bachelor of Marine Science Degree Commission in the U. S. Naval Reserve and a USCG Marine Engineer's license. After graduation he sailed as a licensed engineer aboard steam and diesel powered tankers and “dry cargo” vessels engaged in worldwide commercial trade. Upon release from active duty in 1958 he was employed for the next eight and one-half years at the Sun Shipbuilding and Drydock Co. Chester Pa. in various engineering capacities. McManus came to the Naval Ship Engineering Center in December 1966 and is presently employed as a Marine Engineer in the Control Section of Machinery Arrangement and Controls Branch. He is a member of the Association of Senior Engineers of the Naval Ship Systems Command.

The many varied types of engineering plants extent in today's modern Navy requires an ever creasing range and depth of operational knowledge by engineering personnel at all levels of shipboard operations. The engineering Operational Sequencing System (EOSS) provides each of these levels with the required information to enable the engineering plant to respond to any demands placed upon it which are within its design capability. The engineering Operational Sequencing System is a set of systematic and detailed written procedures utilizing charts, instructions and diagrams which provide the information required for the operation of a shipboard propulsion plant. The purpose of this paper will be to define and discuss the EOSS; to describe the system background, current status and future implementation plans.

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