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Enhancing IC substrate manufacturing through differential geometry and lightweight networks for etching defect detection

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Journal of Manufacturing systems 2025年 80卷 902-915页

作者： Yu, Yongxing Huang, Dan Hu, Yueming School of Automation Science and Engineering South China University of Technology Guangzhou510641 China Engineering Research Center of Precision Electronic Manufacturing Equipment Ministry of Education and Guangdong Provincial Engineering Laboratory for Advanced Chip Intelligent Packaging Equipment South China University of Technology Guangzhou510641 China Department of Automation North China Electric Power University Baoding071003 China Baoding key Laboratory of State Detection and Optimization Regulation for Integrated Energy System North China Electric Power University Baoding071003 China

With the advancement of high-density interconnect technology in semiconductor manufacturing, the precision and complexity of integrated circuit (IC) substrates have significantly increased, placing higher demands on quality control. Efficient and accurate detection of complex etching defects, which often occur during manufacturing, has become critical to preventing potential product defects. A defect detection method is proposed that combines a lightweight network with differential geometry tools to address the issue of etching defects in IC substrates. First, an improved deformable model is used to rapidly extract regular circuit trace contours from complex metallographic images, and morphological processing is applied to enhance the details, achieving precise image segmentation. For under-etching defects between circuit traces, differential processing of the original and segmented images is performed to locate abnormal regions. Subsequently, an optimized lightweight network based on MobileNet, termed OMNet, is designed to achieve the rapid identification of under-etching defects in these regions. For etching defects occurring on circuit traces, the DGEtch method employs a high-precision discrete curvature calculation based on the Frenet frame to evaluate angular discontinuities in contours, enabling accurate detection of etching defects. Experimental results demonstrate that the proposed method achieves an average recall rate of over 95% and maintains a precision above 90%. It exhibits high accuracy and stability in detecting etching defects and consistently outperforms existing models, particularly in handling complex mixed defects. This study provides an effective solution for detecting complicated defects in high-density IC substrate manufacturing. © 2025 The Society of Manufacturing Engineers

关键词： Inspection

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Flexibility characterization and analysis of electric vehicle clusters based on real user behavior data

Flexibility characterization and analysis of electric vehicl...

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作者： Dong, Xiaohong Ren, Yanqi Zhou, Yue Si, Qianyu Dong, Xing Wang, Mingshen State Key Laboratory of Intelligent Power Distribution Equipment and System Hebei University of Technology Tianjin300130 China School of Engineering Cardiff University Wales CardiffCF24 3AA United Kingdom State Grid Jiangsu Electric Power Research Institute Nanjing211103 China

With the increase in electric vehicles (EVs), they have begun to be valued as a new flexibility resource. Characterizing the flexibility of EVs is conducive to fully utilizing their flexibility to support the operation of electric power systems. A flexibility characterization method for EVs based on real user behavior data was proposed. First, the raw data are cleaned to obtain a dataset for each EV user. Then, a clustering algorithm is used to mine the plug-in time habit of each EV user, and an EV flexibility potential index system is proposed to quantify the flexibility of EV users with adjustable capacity, on-grid time, and charging power under the plug-in time habit. Furthermore, based on the flexibility indexes, the EV flexibility region under each plug-in time habit was constructed. Finally by setting the generators reasonably, the flexibility characterization from one EV user to the EV user cluster that includes large EVs is realized with the help of the zonotope similar. The flexibility of 6903 EV users in Nanjing, China, was characterized. The results showed that the similarity was improved by 0.566 by resetting the generator. Simultaneously, the results demonstrate the flexibility of the EV cluster in different periods. For example, there is a capacity adjustment range of approximately 75–150 MWh in 20:00–22:00, and approximately 15–20 MWh in 2:00–4:00 for the power grid to carry out day-ahead dispatching of EVs to assist the operation of the power grid. © 2025

关键词： Electric vehicles Flexibility Flexible region User data Zonotope

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Omnidirectional Wireless power Transfer Based on 2-D Decoupled Combination Coil and Excitation Current Vector Control

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International Journal of Circuit Theory and Applications 2025年第0期

作者： Yao, Xiaodi Guo, Yanjie Wang, Ruimin Wang, Xu Zhang, Yajing Song, Baihao Zhang, Zepeng State Key Laboratory of Intelligent Power Distribution Equipment and System Hebei University of Technology Tianjin China School of Automation Beijing Information Science and Technology University Beijing China

This article presents an excitation current vector control method based on a two-dimensional (2-D) decoupled combination transmitting coil that can generate a three-dimensional (3-D) rotating magnetic field. Through this method, the output power of the omnidirectional wireless power transfer (WPT) system can reach small fluctuations, when the receiving coil rotates at any angle. First, the 2-D combination transmitting coil, consisting of three regular hexagonal coils, is analyzed by the second-order vector potential theory. Then, mutual decoupling among the three regular hexagonal coils is achieved at a specific coil overlapping distance. Moreover, system equivalent circuit model is established, and the relationship between system output power and dual phase shift angles is obtained. Furthermore, an excitation current vector control method is proposed to generate the 3-D rotating magnetic field under different receiving coil rotation conditions. Uniform spatial energy distribution can be obtained through this method, in which the magnetic field amplitude is adjusted by the inverter phase shift angles, and the magnetic field direction is determined by the phase angle differences. Finally, the proposed method is verified based on a developed omnidirectional WPT prototype. Experimental results show that when the receiving coil rotates at any angle, relatively high system transmission efficiencies can be achieved. Meanwhile, the maximum output power fluctuation rate is only 12.3%, which is improved compared to the existing literature. © 2025 John Wiley & Sons Ltd.

关键词： Vectors

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High-Performance wearable flexible humidity sensor based on plasma-treated graphene oxide for medical monitoring and non-contact sensing

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Applied Surface Science 2025年 702卷

作者： He, Bin Xia, Wenjie Deng, Yifan Wu, Jinxin Guo, Zikai Wang, Zhiyuan Zhang, Boyu Feng, Yi State Key Laboratory of Intelligent Power Distribution Equipment and System Hebei University of Technology Tianjin300401 China Hebei Key Laboratory of Bioelectromagnetics and Neural Engineering Tianjin300401 China Tianjin Key Laboratory of Bioelectricity and Intelligent Health Tianjin300401 China College of Chemical Engineering Hebei University of Technology Tianjin300401 China

Graphene oxide (GO) is a humidity sensitive material commonly used in the manufacture of humidity sensors. However, GO-based humidity sensors still face issues such as low sensitivity, slow humidity response speed and poor stability in practical applications. In this paper, a flexible humidity sensor based on plasma graphene oxide (P-GO) was introduced, which used plasma-modified GO film as the humidity-sensitive layer, laser-induced graphene (LIG) with fork-finger structure as the electrode layer, and polydimethylsiloxane (PDMS) as the flexible substrate. It was found that the surface water contact angle of the P-GO film treated with plasma for 180 s decreased from 50° to 10°, reaching a superhydrophilic state. The sensitivity of the flexible humidity sensor based on P-GO was improved by nearly 10 times higher than that of the GO sensor. The mechanism was that the surface of the P-GO film was rougher and the relative contents of the surface oxygen-containing functional groups C-O and C=O increased by 6.28 % and 8.49 %, respectively. Meanwhile, the P-GO-based flexible humidity sensor was found to be able to perform a stable and sensitive response over a wide relative humidity range of 7 %∼97 %, possessing a response/recovery speed of 15 s/9s and exhibiting high stability over 60 days. In addition, the P-GO-based flexible humidity sensor was applied for breath detection and non-contact detection, and was found to have a large potential for application in the medical monitoring field. © 2025

关键词： Polydimethylsiloxane

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Prediction of Distributed Photovoltaic Accommodation Capability Based on Ridge Regression 9th

Prediction of Distributed Photovoltaic Accommodation Capabil...

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9th Purple Mountain Form on Smart Grid Protection and Control, PMF 2024

作者： Ji, Xingquan Zhang, Bowen Zhang, Yumin Sun, Pengkai Zhang, Xiaofeng Liu, Wei dong Shandong University of Science and Technology Qingdao266590 China Key Laboratory of Power System Intelligent Dispatch and Control Shandong University Jinan250061 China Information and Communication Company State Grid Shandong Electric Power Company Jinan250013 China Qingdao Yihe Electric Group Co. Ltd. Qingdao266510 China

ISBN: (纸本)9789819616701

A prediction method of distributed photovoltaic accommodation capability is proposed based on ridge regression. First, the factors influencing the distributed photovoltaic accommodation capacity are analyzed, and the concept of the contribution degree of distributed photovoltaic accommodation is introduced. The gray relation analysis method is used to evaluate the correlation between different factors and distributed photovoltaic accommodation, and a model of factors affecting distributed photovoltaic accommodation is constructed. Then, a prediction model of distributed photovoltaic accommodation capability is established based on ridge regression. The factors with high photovoltaic accommodation contribution degrees are incorporated in the prediction model. The mapping relationship between the driving factors of distributed photovoltaic accommodation and the prediction model is derived, then the development strategies for future photovoltaic accommodation capacity are formulated. Finally, simulation is performed on the SPSSPRO platform, and the results show that the proposed method can predict the distributed photovoltaic accommodation capability accurately and provide strategic suggestions for improving future photovoltaic accommodation capacity. © State Grid Electric power 2025.

关键词： Photovoltaics

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In-situ Gas Sensor of Dissolved Acetylene in Transformer Oil Based on Hollow-core Photonic Bandgap Fiber

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IEEE Transactions on Dielectrics and Electrical Insulation 2025年

作者： Shao, Jianwei Wang, Junhua Jin, Zhanxiang Wang, Ziqing Wang, Chao Pan, Xingya Cai, Changsong Wuhan University Hubei Key Laboratory of Power Equipment and System Security for Integrated Energy School of Electrical Engineering and Automation Wuhan430072 China Shenzhen University of Technology School of Future Technology Shenzhen518118 China Guizhou Electric Power Research Institute of Guizhou Power Grid Co. Ltd Guiyang550002 China

Real-time monitoring of the concentration of characteristic gases can therefore detect abnormal operating conditions of a transformer. This paper proposes an in-situ acetylene detection system based on hollow-core photonic bandgap fibers (HC-PBF) and membrane extraction. Simultaneous oil-gas separation and gas detection are achieved using a double-sided rectangular PTFE gas cell and 5-cm-long hollow core fiber Fabry-Perot interferometers (FPI). The FPI fiber probe exhibits a contrast of 7.06dB. And the saturation equilibrium time for oil-gas separation is 0.8h at 80°C. Furthermore, the in-situ detection system exhibits a linear response to acetylene, with a response coefficient of approximately 0.06916μV/ppm and a high degree of linearity (goodness of fit=0.9951). Moreover, 60s is the optimal averaging time, at which time the noise standard deviation is measured at 0.069V and the detection limit is tested to be 0.973ppm. The sensor, with its compact size, high sensitivity, and lack of power supply, enables in-situ detection in oil and presents a novel approach for online monitoring of dissolved gases in transformer oil. © 1994-2012 IEEE.

关键词： Fabry-Perot interferometers

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Active Adjustable Coil Receiver for Adaptive Output power Based on Wireless power Transfer

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International Journal of Circuit Theory and Applications 2025年

作者： Dai, Zhongyu Wang, Huihui Ma, Yayun Li, Musong Zhou, Yitong Zhang, Xian State Key Laboratory of Intelligent Power Distribution Equipment and System Key Laboratory of Electromagnetic Field and Electrical Apparatus Reliability of Hebei Province Key Laboratory of Flexible DC Transmission Equipment and Technology Demonstration of Hebei Province Electrical Engineering Department Hebei University of Technology Tianjin China State Grid Tangshan Power Supply Company Tangshan China

The wireless power transfer (WPT) system operates under variable load conditions. During different stages of charging, the power required by the load varies. Therefore, the WPT needs to adjust the voltage and power in real-time to meet these differing demands. The power transfer power of WPT can be optimized for variable loads. This paper introduces an active adjustable coil receiver with adaptive output power. The end of the sliding rod is connected to the accessible part of each subcoil. The sliding rod can slide outward from the center of the coil or inward toward the center along the accessible part, determining the number of coil turns to be involved in coupling within the circuit. The proposed design can achieve the stabilized output power of ACR in the range of 10 to 30 W with a transmission distance varying from 5 to 10 cm, 10–38 W with a radial offset distance of 0.6–10 cm and 3–21 W with load of 20–40 (Formula presented.). The receiver can meet the different power requirements of the load and is not sensitive to factors such as transmission distance and offset. The system can reduce the complexity of charging and power supply system design and effectively promote the application of wireless power transmission in the field of multiload equipment. © 2025 John Wiley & Sons Ltd.

关键词： Inductive power transmission

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Leasing Business Model for Trunk Mobile Charging Stations: From the View of Operators

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IEEE Transactions on Transportation Electrification 2025年

作者： He, Kecheng Jia, Hongjie Mu, Yunfei Yu, Xiaodan Zhou, Yue Wu, Jianzhong Dong, Xiaohong Tianjin University State Key Laboratory of Intelligent Power Distribution Equipment and System Tianjin300072 China Lanzhou Jiaotong University School of New energy and Power Engineering Lanzhou730070 China Cardiff University School of Engineering CardiffCF24 3AA United Kingdom Hebei University of Technology State Key Laboratory of Intelligent Power Distribution Equipment and System Tianjin China

Truck mobile charging stations (TMCS) are emerging as an effective solution to bridge the gap between supply and demand for electric vehicle (EV) charging. However, traditional business models face barriers due to high initial costs and low utilization rates, hindering operator participation. To this end, this paper introduces a bi-level optimization model for TMCS leasing to balance the TMCS operator (TMCO) and charging facility operators (CFOs). The upper-level objective maximizes the profit of TMCO, focusing on TMCS fleet size, differentiated pricing for long-term and short-term rentals, and scheduling grid energy arbitrage during idle periods. The lower level aims to maximize the profit of CFOs by determining rental quantities and durations based on leasing offers. A distributionally robust optimization (DRO) approach is employed to address the uncertainties in EV charging demand, using chance constraints with the Wasserstein distance to capture forecast errors. The probabilistic constraints are transformed into tractable linear constraints through conditional value-at-risk (CVaR) approximation. The model is solved by the genetic algorithm (GA) at the upper layer and the nested column-and-constraint generation (NC&CG) algorithm at the lower layer. Case studies show that the model effectively balances the objectives of TMCO and CFOs. With adaptive pricing and TMCS allocation strategies, the model ensures the TMCO’s profitability while improving CFOs’ economics. © 2015 IEEE.

关键词： Charging stations

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Design of Axial Modular-Flux Reversal Permanent Magnet Machines with Different Magnetization Modes

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IEEE Transactions on Transportation Electrification 2025年

作者： Xie, Lujia Wang, Yiwei Su, Peng Shen, Yi Civil Aviation University of China School of Electronic Information and Automation Tianjin300000 China Hebei University of Technology State Key Laboratory of Intelligent Power Distribution Equipment and System Tianjin300401 China

This paper investigates the optimal air gap flux density harmonics interaction mechanism of the axial modular flux reversal permanent magnet (AM-FRPM) machines with different magnetization modes. Based on the PM and armature reaction field analysis, the similarities of harmonic interaction mechanism between two AM-FRPM machines are revealed, and then the stator-slot and rotor-pole combinations with higher output torque can be determined. In addition, the optimal modular part angles are deduced to suppress cogging torque based on effective harmonic cooperation. Furthermore, a comparison between the three chosen AM-FRPM machines and the conventional FRPM machine is conducted, and the characteristics are verified by finite-element analysis and experiments. © 2015 IEEE.

关键词： Permanent magnets

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Adaptive Pixel Pair Generation Strategy for Image Matting Methods Based on Pixel Pair Optimization 19th

Adaptive Pixel Pair Generation Strategy for Image Matting Me...

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19th Chinese Conference on Image and Graphics Technologies and Applications, IGTA 2024

作者： Zheng, Jiamin Wen, Wen Liang, Yihui Feng, Fujian Xu, Xiang School of Computer Guangdong University of Technology Guangzhou510000 China School of Computer Science Zhongshan Institute University of Electronic Science and Technology of China Zhongshan528400 China Guizhou Key Laboratory of Pattern Recognition and Intelligent System Guizhou Minzu University Guiyang550025 China

ISBN: (纸本)9789819799183

Natural image matting plays a crucial role in numerous real-world applications. Image matting methods based on pixel pair optimization is a type of matting algorithm, which has significant advantages in parallel computation, handling images with similar foreground and background, and operating under limited computing time. However, these methods cannot provide high-quality alpha mattes for high-resolution images within limited computational resources. In this paper, we design an adaptive pixel pair generation strategy to solve the above problem. This strategy adaptively generates pixel pair for the unknown pixel according to its estimated alpha value, which promotes diversity of pixel pair and improves the efficiency of pixel pair optimization. It categorizes unknown pixels into three types and additionally incorporates nearby foreground and background pixels to generate pixel pair. Experimental results show that using our strategy can achieve high-quality alpha mattes and competitive matting performance under limited computational resources. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2025.

关键词： Pixels

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