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Yield improvement via minimisation of step height non-uniformity in chemical mechanical planarisation (CMP) with pressure and velocity as control variables

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International Journal of Manufacturing Technology and Management 2005年第5-6期7卷 467-489页

作者： Kadavasal, Muthukkumar S. Chandra, Abhijit Eamkajornsiri, Sutee Bastawros, Ashraf-F. Department of Mechanical Engineering 3038 Black Engineering Building Iowa State University Ames IA 50011 United States Industrial and Manufacturing Systems Engineering Iowa State University Ames IA United States Aerospace Engineering Iowa State University Ames IA United States Human Computer Interaction Programme Iowa State University Ames IA United States Iowa State University Ames United States Aerospace Engineering and Engineering Mechanics Iowa State University United States

Obtaining local and global planarities is one of the prime criteria in dielectric and metal planarisations. Although chemical mechanical planarisation (CMP) helps us achieve these criteria in constant pattern density surfaces, the same is not true for variable pattern density surfaces. This results in formation of global step heights across the die. This paper provides open loop control algorithms for obtaining planarity across a die containing variations in pattern densities. Zonal pressure and/or velocity variations are used as control variables for this purpose. Based on the variation of pattern density and surface heights across the die, the surfaces are separated into zones and the pressure and velocity in individual zones are varied spatially and temporally. It is observed from simulations that the proposed algorithm can significantly improve the local and global planarities. The zonal pressure control improves the upper surface uniformity, whereas zonal velocity control significantly increases step height uniformity. The advantageous features of these two schemes are then combined to simultaneously maximise upper surface uniformity, and minimise step heights across the entire die. Work is currently in progress on physical realisation of these algorithms. Copyright © 2005 Inderscience Enterprises Ltd.

关键词： Metal working

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Making an impact in your community: HCI and us public policy

Making an impact in your community: HCI and us public policy

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Conference on human Factors in Computing Systems, CHI EA 2005

作者： Lazar, Jonathan Bederson, Ben Hochheiser, Harry Johnson, Jeff Karat, Clare-Marie Dept. of Computer and Information Sciences Universal Usability Laboratory Towson University 8000 York Road Towson MD 21252 United States Human-Computer Interaction Lab Dept. of Computer Science University of Maryland College Park MD 20742 United States National Institute on Aging 333 Cassell Drive Baltimore MD 21224 United States UI Wizards Inc. 231 Moscow St. San Francisco CA 94112 United States IBM TJ Watson Research Center 19 Skyline Drive [2N-D24 Hawthorne NY 10532 United States

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Understanding referring expressions involving perceptual grouping

Understanding referring expressions involving perceptual gro...

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International Conference on Cyberworlds

作者： K. Funakoshi S. Watanabe T. Tokunaga N. Kuriyama Department of Computer Science Tokyo Institute Of Technology Meguro Tokyo Japan Department of Human System Science Tokyo Institute of Technology Meguro Tokyo Japan

This paper deals with understanding referring expressions involving perceptual grouping. The ability to use referring expressions is important for conversational agents aimed at real-world interaction. We conducted a psychological experiment to collect referring expressions involving perceptual grouping. A set of methods to identify referents based on the collected data are presented. We were able to identify 78.8% of the referents in the collected expressions

关键词： humans Psychology Information analysis Data mining computer science Algorithm design and analysis

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Comparing interlaced and progressive scans for MPEG coding of medical video

Comparing interlaced and progressive scans for MPEG coding o...

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Annual Northeast Bioengineering Conference

作者： Chengquan Hu R.J. Sclabassi M.L. Scheuer J. Yang J. Xu Q. Liu M. Sun College of Computer Science and Technology Jilin University Changchun China Department of Electrical Engineering University of Pittsburgh Pittsburgh PA USA Department of Electrical Engineering Department of Neurological Surgery Department of Biomedical Engineering University of Pittsburgh Pittsburgh PA USA Department of Neurology University of Pittsburgh Pittsburgh PA USA Human-Computer Interaction Institute Carnegie Mellon University Pittsburgh PA USA

This paper examines MPEG-4 coding efficiency for interlaced and progressively scanned video data recorded during remote patient monitoring. Experiments are performed using both interlaced and progressive coding methods to compress interlaced, deinterlaced and progressively scanned video sequences at different bit rates. Our results show that progressively scanned video outperforms interlaced video in both coding efficiency and video quality. We also found that the use of a deinterlacing algorithm improves video coding performance. In addition, we found that interlaced or progressively scanned video data can be compressed using either progressive or interlaced coding algorithms without significant difference in performance.

关键词： Video compression Video equipment PSNR MPEG 4 Standard Video coding Layout Biomedical engineering Data engineering Patient monitoring Codecs

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The influence of synchrony and sensory modality on the person perception process in computer-mediated groups

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Journal of computer-Mediated Communication 2005年第3期10卷

作者： Nowak, Kristine L. Watt, James Walther, Joseph B. Communication Science Department University of Connecticut United States Rensselaer Social and Behavioral Research Laboratory Rensselaer Polytechnic Institute United States Department of Communication Cornell University United States Human Computer Interaction Lab. University of Connecticut United States Department of Communication Sciences University of Connecticut 850 Bolton Road U-1085 Storrs CT 06269 United States Rensselaer Social and Behavioral Research Laboratory United States Department of Language Literature and Communication Rensselaer Polytechnic Institute United States James Watt LL and C Rensselaer Polytechnic Institute 110 8th Street Troy NY 12180 United States Dept. of Communication Cornell University 336 Kennedy Hall Ithaca NY 14853-4203 United States

This study examined the effects of synchrony and the number of cues on the person perception process in computer-mediated communication. One hundred and forty-two participants in groups of three or four engaged in collaboration over five weeks to develop oral reports, using alternate versions of communication systems or meeting face-to-face. Consistent with the hyperpersonal model, those using low cue media felt their partners were more credible, and reported more social attraction, less uncertainty, and more involvement in the interaction than those using high cue media. People interacting with synchronous media felt increased social attraction, self-reported involvement, and certainty. They also felt that their conversations were more effective, although this effect appeared mainly in low cue groups. Results of an exploratory path analysis suggest that future research should focus on causal chains rather than direct effects, and that intervening variables (such as involvement) may be central to our understanding of the effects of communication technology systems. © 2005 Journal of computer-Mediated Communication.

关键词： Communication systems

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Dynamically deployed support as a potential solution to negative behavioral adaptation

Dynamically deployed support as a potential solution to nega...

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IEEE Symposium on Intelligent Vehicle

作者： R. Kovordanyi K. Ohlsson T. Alm Cognitive technology at the Department of Computer and Information Science Linköping Universitet Sweden Human-machine interaction at the division of Industrial Ergonomics Department of Mechanical Engineering Linköping Universitet Sweden Division of Industriai Ergonomics Department of Mechanical Engineering Linköping Universitet Linkoping Sweden

Advanced driver assistance systems are designed to make driving easier that is, to alleviate the driver's workload, and to increase traffic safety. However, traffic safety is affected by negative behavioral adaptation, meaning that drivers tend to increase speed and pay less attention to driving when supported by an advanced assistance system. We relate behavioral adaptation to reinforcement learning at a subconscious level, and propose that driver assistance is dynamically varied within predetermined safety limits. The aim of employing a dynamic assistance policy is to prevent the driver from noticing a constant improvement in vehicle handling. We conclude by describing ongoing work for empirically evaluating an improved lane departure warning system that uses a dynamic assistance policy.

关键词： Safety Vehicle dynamics Alarm systems Wheels US department of Transportation Learning Vehicle driving Sensor systems Ergonomics Torque

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A Hybrid Algorithm for Compact Neural Network Ensemble

A Hybrid Algorithm for Compact Neural Network Ensemble

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International Conference on Computational Intelligence for Modelling, Control and Automation, and International Conference on Intelligent Agents, Web Technologies and Internet Commerce

作者： M.A.H. Akhand M. Islam K. Murase Department of Human and Artificial Intelligence Systems University of Fukui Japan Department of Computer Science and Engineering Bangladesh University of Engineering and Technology Bangladesh

This paper presents a neural network ensemble creation method where component networks are determined automatically by sequential training. Only previously misclassified patterns by existing component networks are used for training coming component networks sequentially. This training strategy forces coming component networks to work only on the unsolved portion of the input space. As a result coming component networks could easily maintain diversity with existing component networks in the ensemble. Finally all component networks are trained simultaneously, while maintaining error interaction among them through a penalty function. This new method has been tested extensively on several benchmark problems of machine learning and neural networks. Experimental result shows that it can produce compact ensemble structure that exhibits good generalization ability

关键词： Neural networks Diversity reception Artificial neural networks humans Artificial intelligence Sampling methods computer science Benchmark testing Machine learning Diversity methods

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Distributed real-time processing for humanoid robots

Distributed real-time processing for humanoid robots

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IEEE International Conference on Embedded and Real-Time Computing Systems and Applications (RTCSA)

作者： T. Matsui H. Hirukawa Y. Ishikawa N. Yamasaki S. Kagami F. Kanehiro H. Saito T. Inamura Digital Human Research Center AIST Tokyo Japan Research Institute of Intelligent Systems AIST Tsukuba Japan Department of Computer Science University of Tokyo Tokyo Japan Department of Information and Computer Science Keio University Yokohama Japan

A humanoid robot is a real-time system controlled by a complex computer system that requires huge computing power for perception and planning, high energy efficiency for self-contained control, reduction of physical dimensions, and high reliability. This paper proposes a distributed architecture for the humanoid robot control substituting conventional centralized control architectures. In addition to the parallelism that provides scalable computing power at low clock namely at low energy, the distributed architecture contributes to reliable operations by replacing many fragile analog signal wires with a digital network with redundant routes. In order to accomplish a real-time control over the network, RMTP (responsive multi-threaded processor) for parallel and real-time computation has been newly designed. RMTP can synchronize more than thirty nodes distributed over a robot body in less than 5 micro second with a real time network called the responsive link (RL). Architectures of RMTP, RL and Linux-based real-time system software are presented.

关键词： humanoid robots computer architecture Real time systems Control systems Physics computing Power system reliability Centralized control computer networks Concurrent computing Power system planning

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Graduate education in human-computer interaction

Graduate education in human-computer interaction

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Conference on human Factors in Computing Systems, CHI EA 2005

作者： Foley, James Beaudouin-Lafon, Michel Grudin, Jonathan Hollan, James Hudson, Scott Olson, Judy Verplank, Bill Laboratoire de Recherche en Informatique Bât 490 Université Paris Sud 91405 Orsay Cedex France GVU Center and College of Computing Georgia Institute of Technology Atlanta GA 30332-0280 United States Microsoft Research Bellevue WA United States Department of Cognitive Science University of California San Diego CA 92093-0515 United States Human-Computer Interaction Institute Carnegie Mellon University Pittsburgh PA 15213-3891 United States School of Information Univ. of Michigan Ann Arbor MI 48109-1092 United States Visiting Scholar Stanford University Department of Computer Science Stanford CA 94305-9035 United States

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Shape reconstruction of human foot from multi-camera images based on PCA of human shape database

Shape reconstruction of human foot from multi-camera images ...

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International Conference on 3D Imaging, Modeling, Processing, Visualization and Transmission (3DIMPVT)

作者： Jiahui Wang H. Saito M. Kimura M. Mochimaru T. Kanade Department of Information and Computer Science Keio University Japan Digital Human Research Center National Institute for Advanced Industrial Science and Technology Japan

Recently, researches and developments for measuring and modeling of human body are taking much attention. Our aim is to capture accurate shape of human foot, using 2D images acquired by multiple cameras, which can capture dynamic behavior of the object. In this paper, 3D active shape models is used for accurate reconstruction of surface shape of human foot. We apply principal component analysis (PCA) of human shape database, so that we can represent human's foot shape by approximately 12 principal component shapes. Because of the reduction of dimensions for representing the object shape, we can efficiently recover the object shape from multi-camera images, even though the object shape is partially occluded in some of input views. To demonstrate the proposed method, two kinds of experiments are presented: high accuracy reconstruction of human foot in a virtual reality environment with CG multi-camera images and in real world with eight CCD cameras. In those experiments, the recovered shape error with our method is around 2mm, while the error is around 4mm with volume intersection method.

关键词： humans Image reconstruction Foot Principal component analysis Image databases Active shape model Research and development Biological system modeling Cameras Surface reconstruction

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