检索结果-内蒙古大学图书馆

Throughput and Quality Optimized Down-Selection of Overlay Measurement Markers for Robust Control of the Maximum Overlay Error in a Pattern Layer in Photolithography Processes

引用

IEEE Transactions on Semiconductor Manufacturing 2025年第2期38卷 251-262页

作者： Graff, Noah Djurdjanovic, Dragan The University of Texas at Austin Graduate Program in Dynamic Systems & Controls Walker Department of Mechanical Engineering AustinTX78712 United States The University of Texas at Austin Walker Department of Mechanical Engineering AustinTX78712 United States

This paper presents a metaheuristic optimization-based approach for selecting a pre-determined number of measurement markers from the set of available markers that optimizes the performance of the recently introduced robust L∞ norm overlay control algorithm, which robustly minimizes the worst overlay error across a given pattern layer. This optimization is then used in a Design of Experiments (DOE) setting to build a tractable regression model of a customizable objective function encompassing cost effects of quality losses and throughput benefits resulting from the down-selection of markers selected for robust overlay control. Using this model, one can rapidly determine the optimal proportion of markers for any set of cost parameters, and the optimal subset forming this proportion of available markers can be down-selected to maximize performance of the resulting robust overlay controller. Overlay data and models from a semiconductor manufacturing fab were used to evaluate the newly proposed inspection and control strategy. Results clearly indicate that the novel strategic down-selection of measurement markers coupled with robust overlay control could lead to vastly improved throughputs without decreasing quality relative to what can be achieved using traditional Run-to-Run (R2R) control. Feasibility of the novel DOE-based optimization was demonstrated for two scenarios of cost-effect parameters. © 1988-2012 IEEE.

关键词： Throughput

来源：评论

学校读者我要写书评

暂无评论

Optimization of Stiffness and Damping Coefficient Using Genetic Algorithm in an Electric Bus with Air Suspension System 6th

Optimization of Stiffness and Damping Coefficient Using Gene...

引用

6th International Conference on mechanical engineering, ICOME 2023

作者： Hendrowati, Wiwiek Sutantra, INyoman Yuniarto, M. Nur Solichin, Moch. Nurlita, Cony Mechanical Engineering Department Faculty of Industrial Technology and Systems Engineering Institut Teknologi Sepuluh Nopember Jl AriefRahmanHakim Surabaya60111 Indonesia Graduate of the Department of Mechanical Engineering Faculty of Industrial Technology and Systems Engineering Institut Teknologi Sepuluh Nopember Surabaya Indonesia

ISBN: (纸本)9789819778973

Riding comfort is the minimum vibration transferred by the road surface to a passenger, where it is characterized by maximum sprung mass acceleration. International standards determine riding comfort, specifically ISO 2631. This research utilizes a genetic algorithm to obtain optimal stiffness and damping coefficients for the vehicle suspension system. The system modeling is simulated using MATLAB software. Based on the genetic algorithm optimization performed, the optimal stiffness and damping coefficients obtained for the system are 203,800 N/s and 12,771 Ns/m for the front suspension stiffness and damping coefficient, respectively. The rear suspension stiffness and damping coefficient are 310,750 N/s and 10,702 Ns/m, respectively. With the optimized parameters, the dynamic responses of acceleration and displacement in vertical and pitch motions yield more comfortable results. The conclusions are drawn based on the root mean square (RMS) acceleration value for drivers who meet ISO 2631 comfort standards. The driver's system operates comfortably without complaints at low speeds, with only minor complaints at high rates. With the optimized suspension, the driver can sustain over 16 h of operation, whether subjected to sinusoidal road. The optimized parameters result in an improved transient vehicle response, characterized by reduced impact forces and quicker attainment of settling time. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2025.

关键词： Damping

来源：评论

学校读者我要写书评

暂无评论

The Effect of Adding Cone Rubber-Mass Dynamic Vibration Absorber to Boring Bar on Reduction of Vibration Response in Machinery Process (Lathe Machine) 6th

The Effect of Adding Cone Rubber-Mass Dynamic Vibration Abso...

引用

6th International Conference on mechanical engineering, ICOME 2023

作者： Hendrowati, Wiwiek Meidina, Najya Rafa Mechanical Engineering Department Faculty of Industrial Technology and Systems Engineering Institut Teknologi Sepuluh Nopember Jl. Arief Rahman Hakim Surabaya60111 Indonesia Graduate of the Department of Mechanical Engineering Faculty of Industrial Technology and Systems Engineering Institut Teknologi Sepuluh Nopember Jl. Arief Rahman Hakim Surabaya60111 Indonesia

ISBN: (纸本)9789819778973

Boring bars with a large length-to-diameter (L/D) ratio in the machining process can cause excessive vibration or chatter, which reduces product quality. Dynamic vibration absorber (DVA) is a vibration reduction system that can reduce the chatter effect. In this study, DVA has the shape of a cone placed inside a boring bar, which consists of a mass of absorber made of brass covered with rubber. The rubber is varied, namely natural rubber and neoprene rubber. The simulation is carried out with various cutting parameters, including spindle speed, feed rate, and depth of cut. Based on the simulations, the DVA cone's shape allows it to reduce vibrations in all directions and produce the same reduction values on each axis. Customized boring bar L/D 9 with DVA natural rubber and cutting parameter 2 is the variation with the highest vibration response reduction value, namely 88.50% in the x-axis direction, 83.89% in the y-axis, and 88.52% in the z-axis. Customized boring bar L/D 7 is a geometry variation with the best operation because it can reduce vibration in most variations of cutting parameters compared to other variations of boring bars, namely 23 out of 27 cutting parameters. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2025.

关键词： Vibration analysis

来源：评论

学校读者我要写书评

暂无评论

An Adaptive, Model-Robust, PV Maximum Power Point Tracking Algorithm

引用

IEEE Access 2025年 13卷 76516-76527页

作者： Rashwan, Mohammad Diab, Karim Elsergany, Ahmed Abdel-Hafez, Mamoun F. Hussein, Ala A. American University of Sharjah Mechatronics Graduate Program United Arab Emirates American University of Sharjah Mechanical Engineering Department United Arab Emirates Prince Mohammad Bin Fahd University Electrical Engineering Department United Arab Emirates

Maximizing the output power of photovoltaic (PV) systems is crucial in all PV applications to improve energy efficiency and system performance. Maximum power point tracking (MPPT) is utilized in PV systems to track the voltage that maximizes their output power under varying conditions. In this paper, an enhanced MPPT estimation algorithm is proposed based on the H-adaptive extended Kalman filter (EKF). The proposed method adapts to possible changes in the system’s noise statistics due to variations in irradiance, operating temperature, and system’s aging. The approach is compared to common MPPT estimation techniques;namely the Perturb and Observe (P&O) method and the EKF. The method was validated using experimental data collected from a PV array, to demonstrate practical applicability. Results showcase the adaptability of the proposed approach to variations in the process noise covariance, measurement noise covariance, and the dynamic system scaling factor parameter. These attributes are essential for a sustained extraction of the maximum power from the PV system. © 2013 IEEE.

关键词： Adaptive filters

来源：评论

学校读者我要写书评

暂无评论

Joint optimization of logistics operations and reliability-based replacement policies in a geographically distributed service parts logistic system

引用

CIRP Annals 2025年

作者： Wang, Po-Han Djurdjanovic, Dragan Graduate Program on Operations Research and Industrial Engineering The University of Texas at Austin AustinTX United States Walker Department of Mechanical Engineering The University of Texas at Austin AustinTX United States

A joint location-inventory-maintenance model is proposed for a geographically distributed Service Parts Logistics problem. The model uses a reliability-based replacement strategy and is formulated as a quadratic Mixed Integer Linear program which jointly optimizes logistic and preventive part replacement decisions. The proposed solution method employs piecewise linearization to provide a level of tractability and scalability to the method. The newly proposed joint location-inventory-maintenance model is evaluated and benchmarked against traditional local optimum-based replacement approaches. It consistently outperformed the benchmark models, with the efficiency of cost effect improvements determined by the relative prevalence of logistics factors versus asset management costs. © 2025

关键词： Piecewise linear techniques

来源：评论

学校读者我要写书评

暂无评论

Design and Performance Comparison of Current References for a 32-bit Microcontroller Using 22nm Technology

Design and Performance Comparison of Current References for ...

引用

IEEE Latin American Symposium on Circuits and systems (LASCAS)

作者： Eduardo A. Barcelos Pâmela R. A. N. Campagnucci Daniel M. Muñoz Wellington A. Amaral Sandro A. P. Haddad Department of Mechanical Engineering Faculty of Technology Mechatronics Graduate Program Faculty of Gama Electronics Engineering Undergraduate Program University of Brasilia Brasilia DF Brazil

ISBN: (数字)9798331522124

ISBN: (纸本)9798331522131

With the advancement of semiconductor technologies, the need for efficient power management solutions in integrated systems, such as RISC-V architecture-based microcontrollers, becomes increasingly critical. However, there is a lack of studies comparing current reference architectures in terms of performance and robustness, particularly in 22nm technologies. In this paper, we present a comparative analysis of two current reference designs implemented in the same technology-referred to as Reference Design A and Reference Design B. We focus on their approaches to thermal compensation, supply stability, and layout optimizations. Through simulations and experimental tests, we evaluate the performance of each design within a power management system that includes DC-DC converters and LDO regulators. Our results indicate that Design A exhibits superior power supply rejection with a PSRR of -85 dB, while Design B demonstrates enhanced energy efficiency and thermal stability, achieving a nominal current of 5.14 μA and a temperature coefficient of 16.21 ppm. These findings underscore the importance of balancing energy efficiency, thermal stability, and power supply variation rejection when selecting current references for low-power, high-reliability applications, such as those in the Internet of Things (IoT).

关键词： Resistance Microcontrollers Power system management Stability criteria Energy efficiency Robustness Circuit stability Thermal analysis Internet of Things Thermal stability

来源：评论

学校读者我要写书评

暂无评论

Generative assistant for digital twin simulations 12

Generative assistant for digital twin simulations

引用

12th CIRP Global Web Conference, CIRPe 2024

作者： Boareto, Pedro Antonio De Freitas Rocha Loures, Eduardo Portela Santos, Eduardo Alves Deschamps, Fernando Industrial and Systems Engineering Graduate Program Pontifical Catholic University of Paraná 1155 Imaculada Conceição St. Paraná Curitiba80215-901 Brazil Federal University of Paraná 632 Prefeito Lothário Meissner Av. Paraná Curitiba80210-170 Brazil

One of the key emerging technologies in Industry 4.0 is the Digital Twin (DT). Although it promises increased efficiency, productivity, and innovation, its adoption faces challenges such as high investment costs and the need for workforce requalification. Generative Artificial Intelligence (GAI) emerges as a promising solution, offering capabilities to accelerate development processes and reduce costs. This study aims to leverage GAI to enhance the development of DT and support decision-making in industrial environments by proposing a Generative Assistant for Digital Twin Simulations (GADTS). This proposal generates operational models quickly, offers greater customization, and facilitates the creation of efficient scenario simulations in natural language. The proposal was tested with artificial data. As a result, the development of highly personalized DT simulations with Key Performance Indicators (KPIs) was entirely abstracted into natural language requests. © 2025 Elsevier B.V.. All rights reserved.

关键词： Generative adversarial networks

来源：评论

学校读者我要写书评

暂无评论

A 22nm CMOS PFM Buck Converter Used in a 32-Bit RISC-V Microcontroller for IoT Applications

A 22nm CMOS PFM Buck Converter Used in a 32-Bit RISC-V Micro...

引用

IEEE Latin American Symposium on Circuits and systems (LASCAS)

作者： Luiz H. N. Oliveira Wellington A. Amaral Sandro A. P. Haddad Daniel M. Muñoz Eduardo A. Barcelos Vinícius V. M. Sotero Emmanuel K. M. Jonhson Pâmela R. A. N. Campagnucci Luis V. N. Lima Department of Mechanical Engineering Faculty of Technology Mechatronics Graduate Program University of Brasilia Brasilia DF Brazil Faculty of Gama Electronics Engineering Undergraduate Program

ISBN: (数字)9798331522124

ISBN: (纸本)9798331522131

The demand for efficient power management solutions in electronic devices has increased significantly, especially for microcontrollers operating in low-power modes. This article presents the design and implementation of a Pulse Frequency Modulation (PFM)-based buck converter for applications in 32-bit microcontrollers using 22nm CMOS technology. The methodology involves the development of a Constant On Time (COT) architecture that maintains a fixed duration for the activation of the high-side MOSFET, using a monostable multivibrator to generate the necessary timing signals. The converter's performance was simulated under various load conditions and process corners to evaluate its efficiency and output characteristics. The results show that the proposed buck converter achieves high efficiency, with peak values above 95%, while maintaining a low output ripple. Specifically, the converter exhibits an efficiency of 93.4% at a load of 1mA, with output ripple voltages as low as 2.20 mV under ideal conditions. The contributions of this work lie in the advancement of PFM converter technology for modern microcontroller applications, demonstrating the potential of 22nm CMOS processes to improve power efficiency and performance.

关键词： Semiconductor device modeling Performance evaluation MOSFET Buck converters Microcontrollers Power system management Multivibrators Timing Internet of Things Load modeling

来源：评论

学校读者我要写书评

暂无评论

Towards an Integration of Augmented Reality in industrial Assembly Processes: Issues and Perspectives

引用

Procedia Computer Science 2025年 253卷 1063-1072页

作者： Bruno J. Souza Anderson L. Szejka Roberto Z. Freire Industrial and Systems Engineering Graduate Program Pontifical Catholic University of Parana (PUCPR) Curitiba 80215-901 Brazil Federal University of Technology – Parana (UTFPR) Curitiba 80050-540 Brazil

The evolution of manufacturing has led to Industry 5.0, where human creativity is integrated with advanced technology to achieve efficient and sustainable production. Given the high volume and diversity of assembly tasks, operator assistance systems have become essential tools in the industry, leveraging augmented reality (AR) and other new technologies. This literature review specifically examines 19 papers on AR applications within the context of industrial assembly tasks. The review focuses on identifying the types of AR technologies utilized, the methodologies for implementing AR systems in assembly, and the primary limitations and challenges encountered. The findings indicate a growing field with promising applications in assembly, training, and maintenance, predominantly using AR glasses. Furthermore, a gap is identified indicating the absence of a standardized framework for AR-based assembly assistance systems. Future research should aim at creating a foundational framework for AR system implementation, thereby accelerating the adoption of innovative technologies in the industry.

关键词： Industry 5.0 augmented reality assembly assistance

来源：评论

学校读者我要写书评

暂无评论

Generative a bistant for digital twin simulations 1

Generative a bistant for digital twin simulations

引用

1st International Conference on Digital Sovereignty, ICDS 2024

作者： Boareto, Pedro Antonio De Freitas Rocha Loures, Eduardo Portela Santos, Eduardo Alves Deschamps, Fernando Industrial and Systems Engineering Graduate Program Pontifical Catholic University of Paraná 1155 Imaculada Conceição St. Curitiba Paraná80215-901 Brazil Federal University of Paraná 632 Prefeito Lothário Mei bner Av. Curitiba Paraná80210-170 Brazil

One of the key emerging technologies in Industry 4.0 is the Digital Twin (DT). Although it promises increased efficiency, productivity, and innovation, its adoption faces challenges such as high investment costs and the need for workforce requalification. Generative Artificial Intelligence (GAI) emerges as a promising solution, offering capabilities to accelerate development proce bes and reduce costs. This study aims to leverage GAI to enhance the development of DT and support decision-making in industrial environments by proposing a Generative A bistant for Digital Twin Simulations (GADTS). This proposal generates operational models quickly, offers greater customization, and facilitates the creation of efficient scenario simulations in natural language. The proposal was tested with artificial data. As a result, the development of highly personalized DT simulations with Key Performance Indicators (KPIs) was entirely abstracted into natural language requests. © 2025 Elsevier B.V.. All rights reserved.

关键词： Generative adversarial networks

来源：评论

学校读者我要写书评

暂无评论

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案：

请选择收藏分类：

通借通还

建议与咨询 留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

时间限定

文献类型

馆藏选择

核心期刊

语言

文献类型

帮助

文字说明：

检索规则说明：

检索范例：

分类表

所选分类

限定检索结果

文献类型

馆藏范围

日期分布

学科分类号

主题

机构

作者

语言

请选择保存的检索档案： 新增检索档案 确定 取消

请选择收藏分类： 新增自定义分类 确定 取消

通借通还

建议与咨询留下您的常用邮箱和电话号码，以便我们向您反馈解决方案和替代方法

请选择保存的检索档案：

请选择收藏分类：