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Throughput and Quality Optimized Down-Selection of Overlay Measurement Markers for Robust Control of the Maximum Overlay Error in a Pattern Layer in Photolithography Processes

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IEEE Transactions on Semiconductor Manufacturing 2025年第2期38卷 251-262页

作者： Graff, Noah Djurdjanovic, Dragan The University of Texas at Austin Graduate Program in Dynamic Systems & Controls Walker Department of Mechanical Engineering AustinTX78712 United States The University of Texas at Austin Walker Department of Mechanical Engineering AustinTX78712 United States

This paper presents a metaheuristic optimization-based approach for selecting a pre-determined number of measurement markers from the set of available markers that optimizes the performance of the recently introduced robust L∞ norm overlay control algorithm, which robustly minimizes the worst overlay error across a given pattern layer. This optimization is then used in a Design of Experiments (DOE) setting to build a tractable regression model of a customizable objective function encompassing cost effects of quality losses and throughput benefits resulting from the down-selection of markers selected for robust overlay control. Using this model, one can rapidly determine the optimal proportion of markers for any set of cost parameters, and the optimal subset forming this proportion of available markers can be down-selected to maximize performance of the resulting robust overlay controller. Overlay data and models from a semiconductor manufacturing fab were used to evaluate the newly proposed inspection and control strategy. Results clearly indicate that the novel strategic down-selection of measurement markers coupled with robust overlay control could lead to vastly improved throughputs without decreasing quality relative to what can be achieved using traditional Run-to-Run (R2R) control. Feasibility of the novel DOE-based optimization was demonstrated for two scenarios of cost-effect parameters. © 1988-2012 IEEE.

关键词： Throughput

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Improvement of Localization Algorithm for Indoor and Outdoor Navigation of Autonomous Robots

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Journal of Institute of Control, Robotics and systems 2025年第5期31卷 502-509页

作者： Cho, Joonhyuk Kim, Bongsang Moon, Heechang Industrial Convergence Interdepartmental Program Autonomous Vehicle Intelligent Robotics The Graduate School of Hongik University Korea Republic of Mechanical & System Design Engineering Hongik University Korea Republic of

Location estimation for waypoint-based autonomous driving robots primarily relies on SLAM (Simultaneous Localization and Mapping) and GNSS (Global Navigation Satellite System) technologies. GNSS performs well in open areas but struggles with signal issues, while SLAM offers high accuracy in feature-rich environments but faces challenges in open spaces. This study integrates SLAM and GNSS, enabling seamless switching between systems when one encounters difficulties. The combined system ensures consistency by aligning coordinate systems and directional data. Experiments in indoor, forest, and open environments demonstrate that the switching algorithm enables stable autonomous driving in diverse conditions, effectively leveraging the strengths of both systems. © ICROS 2025.

关键词： Global positioning system

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Optimization of Stiffness and Damping Coefficient Using Genetic Algorithm in an Electric Bus with Air Suspension System 6th

Optimization of Stiffness and Damping Coefficient Using Gene...

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6th International Conference on mechanical engineering, ICOME 2023

作者： Hendrowati, Wiwiek Sutantra, INyoman Yuniarto, M. Nur Solichin, Moch. Nurlita, Cony Mechanical Engineering Department Faculty of Industrial Technology and Systems Engineering Institut Teknologi Sepuluh Nopember Jl AriefRahmanHakim Surabaya60111 Indonesia Graduate of the Department of Mechanical Engineering Faculty of Industrial Technology and Systems Engineering Institut Teknologi Sepuluh Nopember Surabaya Indonesia

ISBN: (纸本)9789819778973

Riding comfort is the minimum vibration transferred by the road surface to a passenger, where it is characterized by maximum sprung mass acceleration. International standards determine riding comfort, specifically ISO 2631. This research utilizes a genetic algorithm to obtain optimal stiffness and damping coefficients for the vehicle suspension system. The system modeling is simulated using MATLAB software. Based on the genetic algorithm optimization performed, the optimal stiffness and damping coefficients obtained for the system are 203,800 N/s and 12,771 Ns/m for the front suspension stiffness and damping coefficient, respectively. The rear suspension stiffness and damping coefficient are 310,750 N/s and 10,702 Ns/m, respectively. With the optimized parameters, the dynamic responses of acceleration and displacement in vertical and pitch motions yield more comfortable results. The conclusions are drawn based on the root mean square (RMS) acceleration value for drivers who meet ISO 2631 comfort standards. The driver's system operates comfortably without complaints at low speeds, with only minor complaints at high rates. With the optimized suspension, the driver can sustain over 16 h of operation, whether subjected to sinusoidal road. The optimized parameters result in an improved transient vehicle response, characterized by reduced impact forces and quicker attainment of settling time. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2025.

关键词： Damping

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Design and Performance Comparison of Current References for a 32-bit Microcontroller Using 22nm Technology 16

Design and Performance Comparison of Current References for ...

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16th IEEE Latin American Symposium on Circuits and systems, LASCAS 2025

作者： Barcelos, Eduardo A. Campagnucci, Pamela R. A. N. Munoz, Daniel M. Amaral, Wellington A. Haddad, Sandro A. P. Mechatronics Graduate Program Faculty of Technology Department of Mechanical Engineering Electronics Engineering Undergraduate Program University of Brasilia Faculty of Gama DF Brasilia Brazil

ISBN: (纸本)9798331522124

With the advancement of semiconductor technologies, the need for efficient power management solutions in integrated systems, such as RISC-V architecture-based microcontrollers, becomes increasingly critical. However, there is a lack of studies comparing current reference architectures in terms of performance and robustness, particularly in 22nm technologies. In this paper, we present a comparative analysis of two current reference designs implemented in the same technology-referred to as Reference Design A and Reference Design B. We focus on their approaches to thermal compensation, supply stability, and layout optimizations. Through simulations and experimental tests, we evaluate the performance of each design within a power management system that includes DC-DC converters and LDO regulators. Our results indicate that Design A exhibits superior power supply rejection with a PSRR of -85 dB, while Design B demonstrates enhanced energy efficiency and thermal stability, achieving a nominal current of 5.14 μA and a temperature coefficient of 16.21 ppm. These findings underscore the importance of balancing energy efficiency, thermal stability, and power supply variation rejection when selecting current references for low-power, high-reliability applications, such as those in the Internet of Things (IoT). © 2025 IEEE.

关键词： Integrated circuit layout

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A 22nm CMOS PFM Buck Converter Used in a 32-Bit RISC-V Microcontroller for IoT Applications 16

A 22nm CMOS PFM Buck Converter Used in a 32-Bit RISC-V Micro...

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16th IEEE Latin American Symposium on Circuits and systems, LASCAS 2025

作者： Oliveira, Luiz H. N. Amaral, Wellington A. Haddad, Sandro A. P. Munoz, Daniel M. Barcelos, Eduardo A. Sotero, Vinicius V. M. Jonhson, Emmanuel K. M. Campagnucci, Pamela R. A. N. Lima, Luis V. N. Electronics Engineering Undergraduate Program Faculty of Gama Brazil Mechatronics Graduate Program University of Brasilia Faculty of Technology Department of Mechanical Engineering DF Brasilia Brazil

ISBN: (纸本)9798331522124

The demand for efficient power management solutions in electronic devices has increased significantly, especially for microcontrollers operating in low-power modes. This article presents the design and implementation of a Pulse Frequency Modulation (PFM)-based buck converter for applications in 32-bit microcontrollers using 22nm CMOS technology. The methodology involves the development of a Constant On Time (COT) architecture that maintains a fixed duration for the activation of the high-side MOSFET, using a monostable multivibrator to generate the necessary timing signals. The converter's performance was simulated under various load conditions and process corners to evaluate its efficiency and output characteristics. The results show that the proposed buck converter achieves high efficiency, with peak values above 95%, while maintaining a low output ripple. Specifically, the converter exhibits an efficiency of 93.4% at a load of 1mA, with output ripple voltages as low as 2.20 mV under ideal conditions. The contributions of this work lie in the advancement of PFM converter technology for modern microcontroller applications, demonstrating the potential of 22nm CMOS processes to improve power efficiency and performance. © 2025 IEEE.

关键词： CMOS integrated circuits

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Design and Performance Comparison of Low Dropout Regulators for a 32-bit Microcontroller Using 22nm Technology 16

Design and Performance Comparison of Low Dropout Regulators ...

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16th IEEE Latin American Symposium on Circuits and systems, LASCAS 2025

作者： Johnson, Emmanuel K. M. Lima, Luis Victor N. Campagnucci, Pamela. R. A. N. Haddad, Sandro A. P. Amaral, Wellington A. Munoz, Daniel M. University of Brasilia Mechatronics Graduate Program Department of Mechanical Engineering DF Brasilia Brazil University of Brasilia Faculty of Gama Electronics Engineering Undergraduate Program DF Brasilia Brazil

ISBN: (纸本)9798331522124

This paper presents a comparison between two LDOs (Low Dropout Regulators) developed for a PMIC (Power Management Integrated Circuit) responsible for powering a 32-bit microcontroller based on the RISC-V microarchitecture, designed in 22 nm technology. The microcontroller will be integrated with a radio frequency interface for IoT (Internet of Things) applications. Two LDOs were designed: one with external compensation and the other a capacitor-less LDO. Both operate with an input voltage of 2.5V, an output voltage of 0.8V, and a maximum current of 150mA. The externally compensated LDO exhibited greater stability in response to load variations and a higher PSRR (Power Supply Rejection Ratio), while the capacitor-less LDO demonstrated faster regulation speed and occupied a chip area similar to the externally compensated LDO. © 2025 IEEE.

关键词： Low power electronics

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Effect of Sn addition on electrochemical activity of ribbons of Mg-Al-Ca anode material for rechargeable magnesium batteries fabricated by rapid solidification

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Keikinzoku/Journal of Japan Institute of Light Metals 2025年第1期75卷 9-13页

作者： Fukuta, Yoshitaka Kikura, Kensei Tsukeda, Tadayoshi Aida, Tetsuo Tabata, Hironobu Kurihara, Hideki Suzuki, Mayumi Program of Materials Science and Engineering Studies in Science and Engineering Graduate School of Science and Engineering University of Toyama 3190 Gofuku Toyama-shi Toyama930-8555 Japan Graduate School of Science and Engineering University of Toyama Toyama-shi Toyama Japan Faculty of Sustainable Design Academic Assembly University of Toyama Toyama-shi Toyama Japan CHUETSU METAL WORKS CO. LTD. Nakaniikawagun Toyama Japan Saitama Industrial technology Center Kawaguchi-shi Saitama Japan Department of Mechanical Systems Engineering Faculty of Engineering Toyama Prefectural University Imizu-shi Toyama Japan

Magnesium-based batteries are potential candidates for next-generation rechargeable batteries due to the divalent nature of magnesium cations and the natural abundance of magnesium resources. In this study, the electrochemical activity of Mg-6mass%Al-3mass%Ca anodes combined with Sn was investigated. Thin ribbons of the anode specimens were prepared by a single-roll rapid solidification method. The results showed that the electrochemical activity increased upon adding 1 mass% Sn, while it decreased for 3 mass% Sn. Based on the results of an X-ray diffraction analysis, the addition of Sn led to the formation of Mg2Sn and Ca2Sn phases, which increased the lattice distortion. Scanning electron microscopy observations indicated that these secondary phases were homogeneously distributed for 1 mass% Sn addition, while they were coarsely distributed for 3 mass% Sn. © 2025 The Japan Institute of Light Metals.

关键词： X ray diffraction analysis

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The Effect of Adding Cone Rubber-Mass Dynamic Vibration Absorber to Boring Bar on Reduction of Vibration Response in Machinery Process (Lathe Machine) 6th

The Effect of Adding Cone Rubber-Mass Dynamic Vibration Abso...

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6th International Conference on mechanical engineering, ICOME 2023

作者： Hendrowati, Wiwiek Meidina, Najya Rafa Mechanical Engineering Department Faculty of Industrial Technology and Systems Engineering Institut Teknologi Sepuluh Nopember Jl. Arief Rahman Hakim Surabaya60111 Indonesia Graduate of the Department of Mechanical Engineering Faculty of Industrial Technology and Systems Engineering Institut Teknologi Sepuluh Nopember Jl. Arief Rahman Hakim Surabaya60111 Indonesia

ISBN: (纸本)9789819778973

Boring bars with a large length-to-diameter (L/D) ratio in the machining process can cause excessive vibration or chatter, which reduces product quality. Dynamic vibration absorber (DVA) is a vibration reduction system that can reduce the chatter effect. In this study, DVA has the shape of a cone placed inside a boring bar, which consists of a mass of absorber made of brass covered with rubber. The rubber is varied, namely natural rubber and neoprene rubber. The simulation is carried out with various cutting parameters, including spindle speed, feed rate, and depth of cut. Based on the simulations, the DVA cone's shape allows it to reduce vibrations in all directions and produce the same reduction values on each axis. Customized boring bar L/D 9 with DVA natural rubber and cutting parameter 2 is the variation with the highest vibration response reduction value, namely 88.50% in the x-axis direction, 83.89% in the y-axis, and 88.52% in the z-axis. Customized boring bar L/D 7 is a geometry variation with the best operation because it can reduce vibration in most variations of cutting parameters compared to other variations of boring bars, namely 23 out of 27 cutting parameters. © The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2025.

关键词： Vibration analysis

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Joint optimization of logistics operations and reliability-based replacement policies in a geographically distributed service parts logistic system

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CIRP Annals 2025年

作者： Wang, Po-Han Djurdjanovic, Dragan Graduate Program on Operations Research and Industrial Engineering The University of Texas at Austin AustinTX United States Walker Department of Mechanical Engineering The University of Texas at Austin AustinTX United States

A joint location-inventory-maintenance model is proposed for a geographically distributed Service Parts Logistics problem. The model uses a reliability-based replacement strategy and is formulated as a quadratic Mixed Integer Linear program which jointly optimizes logistic and preventive part replacement decisions. The proposed solution method employs piecewise linearization to provide a level of tractability and scalability to the method. The newly proposed joint location-inventory-maintenance model is evaluated and benchmarked against traditional local optimum-based replacement approaches. It consistently outperformed the benchmark models, with the efficiency of cost effect improvements determined by the relative prevalence of logistics factors versus asset management costs. © 2025

关键词： Piecewise linear techniques

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Design and Performance Comparison of Current References for a 32-bit Microcontroller Using 22nm Technology

Design and Performance Comparison of Current References for ...

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IEEE Latin American Symposium on Circuits and systems (LASCAS)

作者： Eduardo A. Barcelos Pâmela R. A. N. Campagnucci Daniel M. Muñoz Wellington A. Amaral Sandro A. P. Haddad Department of Mechanical Engineering Faculty of Technology Mechatronics Graduate Program Faculty of Gama Electronics Engineering Undergraduate Program University of Brasilia Brasilia DF Brazil

ISBN: (数字)9798331522124

ISBN: (纸本)9798331522131

关键词： Resistance Microcontrollers Power system management Stability criteria Energy efficiency Robustness Circuit stability Thermal analysis Internet of Things Thermal stability

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