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Thin film interferometer using a light source with spectrally non-equidistantly distributed sampling points

Thin film interferometer using a light source with spectrall...

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Optical measurement Systems for Industrial Inspection VI

作者： Hirth, Florian Dudeck, Sven Jakobi, Martin Gerhard, Detlef Koch, Alexander W. Technische Universitaet Muenchen Institute for Measurement Systems and Sensor Technology Theresienstrasse 90 80333 Munich Germany Siemens AG CT PP 4 Germany

ISBN: (纸本)9780819476722

Numerous processes, e.g. in semiconductor and optics producing industries require film thickness observation. These measuring systems depend on different working principles, e.g. spectral reflectometry or ellipsometry. The spectral reflectometry interrogation method can be evaluated by various algorithms depending on resolution and measuring range demanded. All methods require a broad spectral distribution of the light source in order to sample the signal sufficiently for parameter extraction. Spectral sampling is often realized using a spectroscope, which produces equidistant sampling points in frequency space. In contrast to conventional spectrally broad light sources, the one employed here emits several spectral lines, which are non-equidistantly distributed. It also introduces problems like variations of intensity in the output spectrum and narrow wavelength bands, in which the reflected spectrum can be investigated. Non-equidistant sampling points additionally imply problems in conventional analysis algorithms, e.g. a FFT anticipates equidistant sampling points. Narrow wavelength bands imply little information to interrogate at the same spectral resolution of the interrogator. Strong variations of intensity lead to high noise levels at wavelengths with low intensities. Therewith, accuracy, resolution and measuring range are limited. An interrogator based on a Hg-Ar light source, a fiber coupler and a commercial spectroscope is described in this work. Both, accuracy and measuring range, are investigated by simulation and are experimentally proven on a glass on silicon demonstrator. Introducing an advanced algorithm, uncertainties invoked by the source's spectral and intensity distribution are minimized and resolution as well as measuring range are increased. © 2009 SPIE.

关键词： Thin films

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Monte carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement

Monte carlo simulation to determine the measurement uncertai...

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Scanning Microscopy 2009

作者： Kreutzer, Ph. Dorozhovets, N. Manske, E. Fü, R. Jäger, G. Grünwald, R. Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology P.O. Box 100 565 D-98684 Ilmenau Germany

ISBN: (纸本)9780819476548

A proprietary metrological scanning probe microscope (SPM) with an interferometer, developed by the institute of Process measurement and sensor technology at the Ilmenau University of technology (IPMS), is used as a stationary probe system in the nanomeasuring and nanopositioning machine (NPMM). Due to the movements of the NPMM, the total microscope measuring range is 25mm × 25mm × 5mm with a positioning resolution of less than 0.1nm. Examples for specimens are step height standards and one-dimensional gratings. The repeatability has been determined at less than 0.5nm for measurements on calibrated step height standards and less than 0.2nm for the gratings. The measurement results of these samples are always directly related to the corresponding measurement uncertainty, which can be calculated using an uncertainty budget. A new traceable method has been developed using a vectorial modular *** this approach, it is possible to quickly insert new sub-models and to individually analyze their effects on the total measurement uncertainty. The analysis of these effects with regard to their uncertainties is done by Monte Carlo Simulation (MCS), because some models have partially or fully nonlinear character of which one example is the interferometer model of the metrological SPM. The complete development and analysis of these models is presented for one specific measurement task. The measurement results and the corresponding measurement uncertainty were obtained by Monte Carlo Simulation. Comparisons with the GUM have shown that the proposed procedure is a good alternative to achieve reasonable measurement results with uncertainty estimation.©2009 SPIE.

关键词： Interferometers

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Experimental investigation of polarization rotation in twisted optical fibers

Experimental investigation of polarization rotation in twist...

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International Symposium on Optomechatronic Technologies, ISOT

作者： Hala J. El-Khozondar Mathias S. Muller Thorbjorn C. Buck Rifa J. El-Khozondar Alexander W. Koch Institute for Measurement Systems and Sensor Technology Technische Universitä t München Munich Germany Institute for Measurement Systems and Sensor Technology Technische Universitä t München Munich Munich Germany

The twist induced polarization rotation in birefringent optical fibers is well understood and has been treated in the late seventies. We recently derived a formulation of the polarization rotation in twisted optical fibers using a tensorial coupled mode approach, that, other than existing theories, employs a fixed reference frame. This is interesting for fiber sensing applications, where the perturbing effects onto the fiber, such as strains induced by embedding the fiber into a host material, are conventionally given in a fixed laboratory reference frame. Hence, the derived theory can easily be integrated into existing formulations in the laboratory reference frame. In this work we demonstrate the experimental verification of the derived *** mechanically twist an optical fiber using an automated test stand and recording the change in polarization. The results are in close agreement with the theory.

关键词： Optical fiber polarization Optical fibers Optical fiber theory Optical fiber testing Laboratories Birefringence Optical coupling Capacitive sensors Optical materials Automatic testing

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Fiber Bragg grating-based acceleration sensor

Fiber Bragg grating-based acceleration sensor

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International Symposium on Optomechatronic Technologies, ISOT

作者： Mathias S. Muller Thorbjorn C. Buck Alexander W. Koch Institute of Measurement Systems and Sensor Technology Technische Universität München Munich Germany

We present the design process of a fiber Bragg grating based fiber-optic single-axis acceleration sensor with minimized crosstalk. Crosscoupling of non-directional accelerations is minimized by introducing a unique double-membrane fixture of the sensor's mass of inertia leading to an almost diagonal form of the sensors stiffness-matrix. The sensor's resonance frequency, the sensor's sensitivity towards the stiffness of the spring-mass system and the mass of inertia are calculated from an analytical model and are verified by FEM simulation of the sensor. A singleaxis sensor design yielding a resonance frequency of 6.0 kHz with a sensitivity of Deltalambda = 1 pm/g at a non resonant acceleration is proposed.

关键词： Acceleration Fiber gratings Bragg gratings sensor systems Resonance Accelerometers Optical fiber polarization Optical fiber sensors Resonant frequency Optical fibers

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Impact of angle ranges on thickness resolution in thin film reflectometry

Impact of angle ranges on thickness resolution in thin film ...

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International Symposium on Optomechatronic Technologies, ISOT

作者： Florian Hirth Max Rossner Martin Jakobi Alexander W. Koch Institute of Measurement Systems and Sensor Technology Technische Universität München Munich Germany

Thin film reflectometry is a common way to monitor film thicknesses in numerous processes. Semiconductor and optics producing industries, e.g., require film thickness observation. Spectral reflectometry interrogation is one of several methods, which can be assessed by various algorithms depending on resolution and measuring range demands. Incident angle is a crucial parameter to these interrogation methods. Light, under different incident angles, produces different spectral reflectivity functions. These are integrated by a detector, in this case a spectrograph. Therefore, one needs to minimize the range of incident angles onto the measured object in order to increase the resolution of film thickness. Lateral resolution may also be a crucial parameter in some processes. Lateral resolution is a function of the range of incident angle, it increases with increasing angle range. These two crucial facts result in an estimate of measuring error introduced by the angle range under a given maximal lateral resolution. A measuring setup for a range of incident angle measurements is presented, as well as an example interrogation of a thin film under different incident angles.

关键词： Transistors Reflectometry Optical films Semiconductor thin films Semiconductor films Goniometers Monitoring Reflectivity Detectors Thickness measurement

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Comparison of different peak detection algorithms with regards to spectrometic fiber Bragg grating interrogation systems

Comparison of different peak detection algorithms with regar...

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International Symposium on Optomechatronic Technologies, ISOT

作者： Thomas Bodendorfer Mathias S. Muller Florian Hirth Alexander W. Koch Institute of Measurement Systems and Sensor Technology Technische Universität München Munich Germany

The resolution of many optical measurement systems employing ID or 2D array sensors (e.g. CCD-cameras) is limited by the pixel-resolution of the detector. Subpixel algorithms allow to exceed this limit. This paper aims at fiber Bragg grating interrogators, which acquire the sensor signal spectrometrically. The accuracy of measurement of these systems is strongly depending on the used algorithms. Five different algorithms for peak detection are described and compared in theory and experiment. Most of these algorithms can be found both in literature and in different software-libraries (e.g. MATLAB, LabVIEW...) To compare the different algorithms, a single fiber Bragg grating sensor was used to acquire data with a spectrometric measurement system consisting of a lD-CCD-line-array, a superluminescent light source and a reflection grating. The same data was fed the five algorithms, such that the output signals are comparable. To characterize the peak-search algorithms the standard deviation of the output data has been computed for different frame rates and variable wide regions of interest around a FBG-peak. As a result we can provida a concise recommendation which of the analyzed algorithms is suitable for an application in spectrometric fiber Bragg grating interrogators.

关键词： Detection algorithms Spectroscopy sensor arrays Optical sensors Optical arrays sensor systems Fiber gratings Bragg gratings Signal resolution Detectors

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A modified cross-correlation method for white-light optical fiber extrinsic Fabry-Perot interferometric hydrogen sensors

A modified cross-correlation method for white-light optical ...

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2009 International Conference on Optical Instruments and technology, OIT'09

作者： Yang, Zhen Zhang, Min Liao, Yanbiao Lai, Shurong Tian, Qian Li, Qisheng Zhang, Yi Zhuang, Zhi State Key Laboratory of Precision Measurement Technology and Instruments Tsinghua University Beijing China Optical Fiber Sensor Lab Dept. of Electronic Engineering Tsinghua University Beijing China Institute of Systems Engineering CAEP Mianyang Sichuan China

ISBN: (纸本)9780819478948

An extrinsic Fabry-Perot interferometric (EFPI) optical fiber hydrogen sensor based on palladium silver (Pd-Ag) film is designed for hydrogen leakage detection. A modified cross correlation signal processing method for an optical fiber EFPI hydrogen sensor is *** the applying of a special correlating factor which advises the effect on the fringe visibility of the gap length and wavelength, the cross correlation method has a high accuracy which is insensitive to light source power drift or changes in attenuation in the fiber, and the segment search method is employed to reduce computation and demodulating speed is fast. The Fabry-Perot gap length resolution of better than 0.2nm is achieved in a certain concentration of hydrogen. © 2009 SPIE.

关键词： Optical fibers

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An extrinsic Fabry-Perot interferometric optical fiber sensor system for hydrogen detection

An extrinsic Fabry-Perot interferometric optical fiber senso...

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20th International Conference on Optical Fibre sensors

作者： Yang, Zhen Zhang, Min Lei, Ming Yu, Xiujuan Liao, Yanbiao Lai, Shurong Tian, Qian Li, Qisheng Zhang, Yi Zhuang, Zhi State Key Laboratory of Precision Measurement Technology and Instruments Tsinghua University Beijing China Optical Fiber Sensor Lab Dept. of Electronic Engineering Tsinghua University Beijing China Institute of Systems Engineering CAEP Mianyang Sichuan China

ISBN: (纸本)9780819478146

An extrinsic Fabry-Perot interferometric (EFPI) optical fiber hydrogen sensor based on palladium silver (Pd-Ag) film is designed for hydrogen leakage detection. The sensing mechanism of such a sensor is based on the mechanical stress that is induced in the Pd-Ag film when it absorbs hydrogen. The sensor system which is portable and suitable for field detection is formed by a conventional coupler, a low-power LED operating at 850 nm, and a high resolution miniature spectrometer. To obtain the absolute length of the EFPI air gap, a cross-correlation signal processing method is *** sensor is suitable for monitoring concentrations of hydrogen below the lower explosive limit. © 2009 SPIE.

关键词： Binary alloys

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A basic study of ultrasonic shear wave elastography in tissue-mimicking phantoms

A basic study of ultrasonic shear wave elastography in tissu...

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IEEE International Workshop on Medical measurement and Applications (MEMEA)

作者： V. Rengaraju A.F.F. da Silva I. Sack Ch. Kargel Institute for Measurement and Automation Division of Sensor Technology and Measurement Systems Bundeswehr University of Munich Neubiberg Germany Department of Radiology Charité Universitatsmedizin Berlin Campus Mitte Berlin Germany

Since many diseases cause changes in the mechanical properties of soft tissues, it is of interest to image their elasticity. Detection of tumors in early stages is challenging but paramount for the proper treatment of patients and thus to reduce the mortality rate. Elasticity imaging (elastography) has great potential to improve tumor diagnosis and is being developed and tested by several research groups with ultrasound and magnetic resonance imaging (MRI). As opposed to MRI, medical ultrasound is widely available, much more cost-effective and most of all a real-time imaging modality. In this paper we evaluate ultrasonic shear wave elastography, a dynamic approach to determine soft tissue properties. Our feasibility study using tissue-mimicking phantoms demonstrates that low frequency shear wave oscillation amplitudes in the micrometer range can be measured using commercial ultrasound scanners in combination with a particular signal processing method. Stiff tissue regions (tumors) show smaller shear wave amplitudes than the surrounding normal tissue. Not only can the examination time be reduced from about 10-20 minutes (MRI) to a few seconds, it may also soon be possible to detect certain cardiovascular dysfunctions in real-time using ultrasonic shear wave elastography.

关键词： Imaging phantoms Magnetic resonance imaging Ultrasonic imaging Neoplasms Biological tissues Elasticity Diseases Mechanical factors Medical treatment Testing

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Measuring the fat content of liver tissue - Experimental setup -

Measuring the fat content of liver tissue - Experimental set...

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IEEE SSD International Multi-Conference on Systems, Signals and Devices

作者： C. Sehestedt M. Heidary Dastjerdi O. Dirsch U. Dahmen J. Himmel Department of Measurement Engineering and Sensor Technology University of Applied Sciences Koblenz Remagen Germany Institute of Pathology University Hospital Cologne Cologne Germany Department of Transplantation Surgery Huflandstraβe 55 Essen University Essen Germany

Fat content of liver is an essential parameter to decide whether a liver is suitable for transplantation or not. The determination of fat content is often challenging and usually there is not enough time to bring a specimen to a pathologic laboratory. That is why transplantation clinics need a technique to measure the fat content of a graft. In this paper the theoretical basics and an existing laboratory setup are presented.

关键词： Liver Permittivity Frequency measurement Coils Temperature measurement Capacitance Laboratories

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