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IEEE sensorS

作者： K. Kudlaty A. Purde A.W. Koch Institute for Measurement Systems and Sensor Technology Technische Universitat Munchen Munchen Deutschland

It was an object of the presented study to develop an infrared sensor for on-line analysis of the deterioration stage of industrial lubricants. The sensor employs the effect of infrared absorption and Attenuated Total Reflection (ATR). The ATR technique provides the separation of sensitive sensor optics from the hazardous environment. A novel method of signal modulation permits measurements of absorptions at sample and reference wavelength, within one measurement cycle, using a simple one-element pyroelectric detector and Fourier Transform of the detected signal.

关键词： Infrared sensors Lubricants Electromagnetic wave absorption Optical sensors Wavelength measurement Optical reflection Optical attenuators Optical modulation Pyroelectricity Detectors

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PCR Array on Chip - Thermal Characterization

PCR Array on Chip - Thermal Characterization

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Second IEEE International Conference on sensors: IEEE sensors 2003

作者： Iordanov, Ventzeslav P. Malátek, Michal Bastemeijer, Jeroen Young, Ian T. Bossche, Andre Van Dedem, Gijs W.K. Sarro, Pasqualina M. Vellekoop, Michiel J. Electronic Instrumentation Lab. DIMES Delft University of Technology Mekelweg 4 2628 CD Delft Netherlands Dep. of Measurement Faculty of Electrical Eng. Czech Technical University in Prague Technická 2 166 27 Prague 6 Czech Republic Electronic Instrumentation Lab. DIMES Delft University of Technology Delft Netherlands Pattern Recognition Group Faculty of Applied Physics Delft University of Technology Delft Netherlands Kluyver Lab. for Biotechnology Faculty of Applied Physics Delft University of Technology Netherlands DIMES Electron. Components Technol./M.L. Delft University of Technology Delft Netherlands Industrial Sensor Systems Institute IEMW Vienna University of Technology Vienna Austria

This paper presents thermal analysis simulation and verification of a 50-nanoliter-reactor PCR (Polymerase Chain Reaction) well for application in silicon arrays, allowing 5×5 chamber matrix to befitted on a 1cm2square. Every reactor cell is equipped with an integrated heater, temperature sensor and a photo detector. Each well forms a separate unit independently controlled and thermally insulated from the rest. Through micromachining the thermal capacity of each chamber is minimized, enabling rapid (8-10 cycles per minute) PCR cycling. To characterize the thermal behavior, an equivalent lumped element electrical circuit was defined and the results were compared to those obtained by Finite Element Method (FEM) analysis with CoventorWare™. The proposed structure was implemented on a silicon substrate using a standard CMOS process and post-processing. Experiments were performed for verification of the model. Analysis shows that a temperature of about 95°C can be reached (starting from 55°C) by applying 1.5 W of electrical power in the integrated heater over a period of less than 2.5 seconds. The cooling (not active - self cooling) of the device is done in about 1.5 second.

关键词： Arrays

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Application of Binary Alloys in Miniature Fixed‐Point Cells as Secondary Fixed Points in the Temperature Range from 500 °C to 660 °C

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AIP Conference Proceedings 2003年第1期684卷 249-254页

作者： Dirk Boguhn Silke Augustin Frank Bernhard Helge Mammen Moisés Tischler 1Ilmenau Technical University Institute of Process Measurement and Sensor Technology (IPMS) P.O. Box 100565 D‐98684 Ilmenau Germany *Instituto Nacional de Tecnología Industrial (INTI) Departamento de Patrones Nacionales de Medida P.O. Box 157 1650 San Martín Buenos Aires Argentina

In this paper, some special features found during phase transformations of binary alloys which can influence their potential utilization as reproducible temperature fixed points are described. Furthermore, some experiences gained when applying alloys as phase transformation materials in miniature fixed‐point cells are presented. For a number of selected binary alloys, some investigations have been carried out for determining their melting and solidification temperatures as well as their reproducibility under laboratory conditions. In addition, substantial results are presented concerning the influence of the mixing ratio on the phase transformation plateaus which can be measured using miniature fixed‐point cells. So far, miniature fixed‐point thermocouples with binary alloys as fixed‐point material have been successfully applied, even under industrial conditions, for realizing an automatic single‐point recalibration of the temperature measurement system, with even a multiple‐point recalibration being possible when special alloys are used.

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PCR array on chip - thermal characterization

PCR array on chip - thermal characterization

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IEEE sensorS

作者： V.P. Iordanov J. Bastemeijer A. Bossche P.M. Sarro M. Malatek I.T. Young G.W.K. van Dedem M.J. Vellekoop Electronic lnstrumentation Laboratory DIMES Delft University of Technnology Delft Netherlands DIMES Electronic Components Technology and Materials Laboratory Delft University of Technnology Delft Netherlands Dep. of Measurement Faculty of Electrical Eng. Czech Technical University Prague Czech Republic Pattern Recognition Group Faculty of Applied Physics Delft University of Technology Delft Netherlands Kluyvcr Lab. for Biotechnology Faculty of Applied Physics Delft University of Technology Industrial Sensor Systems Institute of IEMW University of Technology Vienna Vienna Austria

This paper presents thermal analysis simulation and verification of a 50-nanoliter-reactor PCR (Polymerase Chain Reaction) well for application in silicon arrays, allowing 5/spl times/5 chamber matrix to be fitted on a 1cm/sup 2/ square. Every reactor cell is equipped with an integrated heater, temperature sensor and a photodetector. Each well forms a separate unit independently controlled and thermally insulated from the rest. Through micromachining the thermal capacity of each chamber is minimized, enabling rapid (8 - 10 cycles per minute) PCR cycling. To characterize the thermal behavior, an equivalent lumped element electrical circuit was defined and the results were compared to those obtained by Finite Element Method (FEM) analysis with CoventorWare/spl trade/. The proposed structure was implemented on a silicon substrate using a standard CMOS process and post-processing. Experiments were performed for verification of the model. Analysis shows that a temperature of about 95/spl deg/C can be reached (starting from 55/spl deg/C) by applying 1.5 W of electrical power in the integrated heater over a period of less than 2.5 seconds. The cooling (not active - self cooling) of the device is done in about 1.5 second.

关键词： Silicon Cooling Analytical models Polymers Inductors Temperature sensors Photodetectors Insulation Micromachining Rapid thermal processing

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Nontactile reliability testing of a micro optical attenuator

Nontactile reliability testing of a micro optical attenuator

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Annual International Symposium on Reliability Physics

作者： C. Rembe H. Aschemann S. aus der Wiesche E.P. Hofer H. Debeda J. Mohr U. Wallrabe Berkeley Sensor and Actuator Center University of California Berkeley Berkeley CA USA Department of Measurement Control and Microtechnology University of Ulm (EBS) Ulm Germany Institute of Microstructure Technology Research Center Karlsruhe Karlsruhe Germany

The reliability investigations presented in this paper have been performed on a micro opto electro mechanical switch developed for switching and attenuation of light propagation in optical fibers. It is demonstrated that high-speed cine photomicrography together with model based evaluation of the image sequences is a powerful diagnostic tool for reliability testing of dynamic processes in micro electro mechanical systems (MEMS).

关键词： Optical attenuators Power system reliability Optical switches Optical propagation Optical fibers Photomicrography Power system modeling Image sequences System testing Mechanical systems

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A solid-phase epitaxy with clean surface formation using SiH4 and evaluation of SOI layer

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第12期79卷 71-78页

作者： Kodama, M Funabashi, H Mitsushima, Y Taga, Y Toyota Central R&D Laboratories Inc. Nagakute Aichi-ken Japan 480-11 Received his B.S. and M.S. degrees in electronics from Gifu University in 1985 and 1987 respectively. He joined Toyota Central R&D Laboratories in 1987 and has been working in the field of LST process technology. Received his B.S. degree in electrical engineering from Nagoya Institute of Technology in 1982. He joined Toyota Central R&D Laboratories in 1982 and has been working in the field of sensor technology. Received his B.S. and Ph.D. degrees in nuclear engineering from Nagoya University in 1975 and 1980 respectively. He joined Sanyo Electric Co. in 1980 and in 1991 he transferred to Toyota Central R&D Laboratories where he has been engaged in research on LSI process technology. Received his B.S. and M.S. degrees in measurement engineering from Nagoya Institute of Technology in 1968 and 1970 respectively. In 1970 he joined Toyota Central R&D Laboratories where he has been engaged in research on the surface interface physics and development of thin film material. He is presently a principal research fellow at the Toyota Central R&D Laboratories.

We investigated a method of solid-phase epitaxy (SPE) using low-vacuum, low-pressure chemical vapor deposition (LPCVD) equipment without the load lock chamber that is usually used for the Si LSI process. This is a new method of clean surface formation in which the Si substrate is heated after seed formation in an atmosphere of SiH4 gas. Using this method, an L-SPE length of 4 mu m was obtained. The reason for the success of this method appears to be that the seed surface cleaned by HF dipping is preserved by the SiH4 gas. To evaluate the quality of the silicon-on-insulator (SOI) layer formed by this method, a MOSFET and a PN diode were experimentally produced. The MOSFET exhibited normal transistor action, which confirmed that the SOI layer had satisfactory quality without any problem in manufacturing the MOSFET. However, it was found that the n value of the forward direction current characteristic of the PN diode was 1.156 and that the SOI layer had more recombination centers than the Si substrate (n = 1.050). (C) 1997 Scripta Technica, Inc.

关键词： SOI MOSFET LPCVD SPE

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Enzyme biosensor based on surface acoustic wave device

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ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS 1996年第7期79卷 69-75页

作者： Kondoh, J Imayama, T Matsui, Y Shiokawa, S Faculty of Engineering Shizuoka University Hamamatsu Japan 432 Received his B.S. and Ph.D. degrees from Shizuoka University in 1990 and 1995 respectively. Since 1993 he has been a Research Fellow of the Japanese Academic Committee. He received the Awaya Award and Ando Memorial Award in 1994. He has been involved in research on chemical and bio-sensors using SAW devices. He is a member of the Acoustic Society the Japanese Society of Applied Physics and the IEEE. Received a B.S. from Shizuoka University in 1995. He joined Toshiba in the same year. He was involved in the research of SAW enzyme sensors. Graduated from Shizuoka Industrial College in 1968. He became a technical officer in Shizuoka University in 1966. He has been involved in the research and development of mechanical sensors ultrasonic actuators and surface plasma on sensors. He is a member of the Japanese Society of Measurement and Automation and Acoustic Society. Received her B.S. from Tohoku University in 1965 her M.S. from Tokyo Electric Communication University in 1968 and her Ph.D. from Tokyo Institute of Technology in 1971. She became a Research Associate in Tokyo Institute of Technology in 1971. She was a research fellow in Bordeaux University France in 1980 ∼ 1981. She became an Associate Professor and Professor of Shizuoka University in 1986 and 1991 respectively. She has been involved in the research of chattering phenomenon in relays holography observation of surface wave measurement of ultrasonic wave in liquid and surface plasmoc sensor. She is a member of the Japanese Society of Applied Physics the Acoustic Society the Japanese Electrical Society and the IEEE.

In a shear horizontal surface acoustic wave (SH-SAW) propagating through a piezoelectric crystal, shear wave and piezoelectric potential due to piezoelectric effect are combined. SH-SAW can be useful for chemical sensing in the liquid phase. When the load liquid and propagation surface are in contact, the change in the electrical property of the liquid can be detected due to the acoustoelectric interaction. This paper describes a new type of acoustoelectric biosensor with an enzyme membrane on the SH-SAW propagating plane for detecting pH change in liquid and reports that the SH-SAW enzyme sensor with urease is highly sensitive in detecting urea. In addition, this paper describes the detection limit, aging characteristic, and high sensitivity of the detector.

关键词： shear horizontal surface wave acoustoelectric interaction enzyme sensor urease high sensitivity

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Contactless interferometric incremental measurement technique

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measurement 1988年第4期6卷 146-150页

作者： Büchner, -Ing H.-J. Jäger, sc techn G. Scientific department of process measurement and sensor technology IImenau Institute of Technology Germany

This paper presents a measurement technique which makes it possible to scan varying interference patterns by using the incremental procedure (forward-backward counting method). The essence of this procedure is that the primary interference pattern is scanned point-shaped (with a very small detector area) and in a locally identical way. The quarter-wave phase shift is realised by polarisation-optical means. By using this measurement procedure one may use plane measuring mirrors without being forced to guide them strictly in parallel. Besides, the contactless scanning of plane and curved surfaces will be possible. © 1988.

关键词： contactless Laser interferometer length measurement plane mirror

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Magnetic DC-properties of LTCC-ferrite material and their temperature dependence

Magnetic DC-properties of LTCC-ferrite material and their te...

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作者： Fulmek, P.L. Haumer, P. Atassi, I. Schweighofer, B. Wegleiter, H. Applied Electronic Materials Institute of Sensor and Actuator Systems Vienna University of Technology Vienna A-1040 Austria Institute of Electrical Measurement and Measurement Signal Processing Graz University of Technology Graz A-8010 Austria

Low temperature co-fired ceramic (LTCC) technology allows to create 3-D ceramic devices from tapes with different electrical and magnetic properties. Recently ferrimagnetic materials became available as LTCC tapes. To magnetically characterise the ferritic LTCC material we have realised ring samples using ESL 40012 LTCC-tapes. The ring core fabrication process and the sample preparation are described in detail. The quasi-static B(H) curve has been measured by inductive methods, and its dependence on temperature between room temperature and the Curie temperature is shown. © 2006 IEEE.

关键词： Ferrimagnetic materials

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Method for the measurement of transient magnetic AC properties of soft ferrites

Method for the measurement of transient magnetic AC properti...

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作者： Fulmek, Paul Holler, Gert Wegleiter, Hannes Schweighofer, Bernhard Haumer, Peter Institute of Sensor and Actuator Systems Vienna University of Technology Vienna A-1040 Austria Institute of Electrical Measurement and Measurement Signal Processing Graz University of Technology Graz A-8010 Austria

NiZn-ferrite materials are commonly used soft ferrites in all sorts of devices utilizing ferrimagnetic properties in a frequency range up to several tens of megahertz. Manufacturer data sheets of material properties usually contain values for the initial permeability for a given amplitude of the flux density for different frequencies, and some numbers for the loss factor. Strictly, these values are reasonable for steady-state processes with harmonic excitations only. Informations about the transient behavior of the material are contained in a single (dis)accommodation factor, if present at all. The phenomena of (dis)accommodation or generally the change of the magnetic properties with time are explained by the magnetic aftereffect (MAE). We describe a measurement system to characterize the transient magnetic properties of ferrite rings, and present some results for a commercial ferrite torus. In contrast to measurement systems working with impedance analyzers (LCR-meter) or with resonant circuits, our system gives results with a much higher time resolution. The behavior of the material can be determined almost from the very first beginning of the excitation. © 2010 IEEE.

关键词： Transient analysis

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