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21st IMEKO World Congress on measurement in Research and Industry

作者： Vorbringer-Dorozhovets, Nataliya Manske, Eberhard Technische Universität Ilmenau Department of Mechanical Engineering Institute for Process Measurement and Sensor Technology PO Box 100 565 IlmenauD-98684 Germany

Long range AFMs suffer mainly from drift due to the relative long measurement times and from tip wear due to the large measured distances. After investigations of the long term stability of the AFMs, in this work, the... 详细信息

关键词： Precision engineering

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Fiber optic graphene sensors for dynamic pressure measurements

Fiber optic graphene sensors for dynamic pressure measuremen...

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Optical sensors, sensors 2015

作者： Liu, Haijun Olson, Douglas A. Douglass, Kevin O. Yu, Miao Sensor Science Division Physical Measurement Laboratory National Institute of Standards and Technology GaithersburgMD20899 United States Department of Mechanical Engineering University of Maryland College ParkMD20742 United States

ISBN: (纸本)9781557520005

关键词： Graphene

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Finite Element Simulation to improve the sensitivity of a MIT

Finite Element Simulation to improve the sensitivity of a MI...

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International Multi-Conference on Systems, Signals and Devices

作者： Maral Heidary Dastjerdi Olfa Kanoun Joerg Himmel University of Applied Sciences Ruhr West Institute of Measurement Engineering and Sensor Technology Germany 45473 Muelheim an der Ruhr Chemnitz University of Technology Chair for Measurement and Sensor Technology Germany 09126 Chemnitz

ISBN: (纸本)9781479917594

In the field of magnetic inductance tomography, signal processing is a real challenge. This is due to the divergent nature of magnetic fields. The sensitivity, i.e. the change in the receiving signal by means of an electrically conductive sample in a measuring volume depends strongly on the positioning of the sample. Objects that are located near the transmitting or receiving coils are very well locatable, where objects in larger distance are hard to detect. In this paper an approach is presented that improves the topology of the magnetic fields in the "magnetic induction tomography" (MIT) by changing geometric constructions and current patterns of coils so far, as to allow a sharper localization of objects within the space. The aim is to level the distribution of the sensitivity in the measuring volume, so that electrically conductive objects with a larger distance between transmitting and receiving unit can be detected with almost the same signal intensity as objects close to the transmitting and receiving unit. The simulation tool Comsol? is used for the geometric modeling making a finite element analysis (FEA). The subsequent signal processing and analysis of the simulation results are implemented in Matlab?. Within this FEA the coil geometries and current patterns are changed numerically, so that the minimum object size, that is still detectable, is, compared to the known MIT, reduced and the sensitivity of the system is improved. To validate the simulation in Comsol~?, first simulation results are compared with analytical models and analyses.

关键词： change receiving Comsol

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Research of periodic amorphous carbon composite films for MEMS IR source fabricated by magnetron sputtering

Research of periodic amorphous carbon composite films for ME...

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IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

作者： Anjie Ming Weibing Liu Lingling Li Xilong Sun Xuan Zheng Weibing Wang Qiulin Tan Jijun Xiong Dapeng Chen Chinese Academy of Sciences Institute of Microelectronics Beijing People's Republic of China National Key Laboratory for Electronic Measurement Technology North University of China Taiyuan People's Republic of China ZhongAo Huicheng Technology Co. Ltd Beijing People's Republic of China Smart Sensor Engineering Center Jiangsu R&D Center for Internet of Things Wuxi People's Republic of China

ISBN: (纸本)9781509019489

In this work, we present a newly titanium-contained periodic amorphous carbon(a-C) composite films by magnetron sputtering process on silicon (100) substrate which has lower intrinsic compressive stress that can be used in electrical modulation pulsed MEMS infrared(IR) source for NDIR gas sensors. The fabrication process, results, performance and results analysis are then carried out.

关键词： Films Micromechanical devices Carbon dioxide Pollution measurement Silicon Gas detectors Magnetic field measurement

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Characterisation of the tool wear during ductile polishing of ceramic tiles using morphological space

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International Journal of Abrasive technology 2016年第3期7卷 216-225页

作者： Sousa, Fábio José Pinheiro Seewig, Jörg Do Nascimento, Rubens Maribondo Chiamulera, Cátia Alarcon, Orestes Estevam Weingärtner, Walter Lindwolf Department of Mechanical Engineering Institute for Manufacturing Technology and Production Systems - FBK University of Kaiserslautern P.O. Box 3049 KaiserslauternD-67653 Germany Department of Mechanical Engineering Institute for Measurement and Sensor-Technology - MTS University of Kaiserslautern P.O. Box 3049 KaiserslauternD-67653 Germany Department of Material Engineering Federal University of Rio Grande Do Norte Natal - RNCEP 59078-900 Brazil Embraer Av. Alcides Cagliari 2281 B-200 Botucatu - SP18606-855 Brazil Department of Mechanical Engineering Federal University of Santa Catarina P.O. Box 476 Florianópolis - SCCEP 88040-900 Brazil

The present work is focused on the wear of the abrasive tools during the industrial polishing process of porcelain stoneware tiles, aiming to extend the validity of using morphological space to quantify the wear when very fine abrasive tools are used. In such morphological space, the horizontal and vertical axes are respectively the skewness (Sk) and the kurtosis (K) of the distribution of heights taken from several surface profiles. Despite the existence of an intrinsic interaction between Sk and K, the approach enables the sequence of geometrical changes suffered by the fickert surface to be quantitatively evaluated. The experimental points obtained were nearly aligned and with a negative slope, just as expected for abrasive wear. Implausibly, the results for fine abrasive fickerts was much more scattered than for those with coarse abrasive particles found in literature. Copyright © 2016 Inderscience Enterprises Ltd.

关键词： Silicon carbide

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CMOS MEMS infrared source based on black silicon

CMOS MEMS infrared source based on black silicon

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IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

作者： Weibing Liu Anjie Ming Yaohui Ren Qiulin Tan Wen Ou Xilong Sun Weibing Wang Dapeng Chen Jijun Xiong National Key Laboratory for Electronic Measurement Technology North University of China Taiyuan People's Republic of China Institute of Microelectronics Chinese Academy of Sciences Beijing CN Smart Sensing R&D Center Chinese Academy of Sciences Beijing People's Republic of China Smart Sensor Engineering Center Jiangsu R&D Center for Internet of Things Wuxi People's Republic of China

ISBN: (纸本)9781509019489

In this work, a MEMS infrared source applied to compact Non-Dispersive Infrared (NDIR) gas sensor is reported. Compared to other related things, the source coats integrated nanostructure black silicon compatible with CMOS technique on the poly-silicon. Hence the emissivity is as high as 98% at 3~5μm wave range; relatively the radiation efficiency is increased by 40% through calculation. Suspension structure and DRIE release process of the back side are used in the design to reduce the heat conduction losses, and the source is only sized 3×3mm 2 suitable for mass production. After being packed, the source can rapidly heat in 20 ms, besides the modulation depth can reach 30% below 50Hz, which all meet the requirements of the NDIR gas sensor.

关键词： Silicon Heating Temperature distribution Temperature measurement Micromechanical devices Frequency modulation

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Miniaturized Photoacoustic Carbon Dioxide sensor with Integrated Temperature Compensation for Room Climate Monitoring

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Procedia engineering 2015年 120卷 283-288页

作者： J. Huber A. Ambs J. Wöllenstein Fraunhofer Institute for Physical Measurement Techniques IPM Department of Gas and Process Technology Group of Integrated Sensor Systems 79110 Freiburg Germany Department of Microsystems Engineering - IMTEK University of Freiburg Germany

A miniaturized photoacoustic spectroscopic gas sensor for room climate monitoring is presented with the measurement range of 0 –5000 ppm. The sensor consists of an innovative photoacoustic detection unit with an integrated mobile phone microphone as pressure sensor. As IR-source a broadband thermal emitter is used. The emitter is modulated with 13 Hz at a maximum temperature of about 750 °C. An electronic unit with a microcontroller on a 3D-PCB design has been developed. The sensor reaches a resolution better than 50 ppm CO 2 . A detailed characterization of the setup has been carried out. An integrated temperature compensation is realized to improve the sensor performance under varying environmental conditions. The potential for further miniaturization and the realization as a low-cost mass market sensor is shown.

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Experimental investigation of the stiffness of planar ball guides 12

Experimental investigation of the stiffness of planar ball g...

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12th International Conference of the European Society for Precision engineering and Nanotechnology, EUSPEN 2012

作者： Heyne, M. Balzer, F. Theska, R. Institute of Design and Precision Engineering Ilmenau University of Technology Germany Institute of Process Measurement and Sensor Technology Ilmenau University of Technology Germany

ISBN: (纸本)9780956679000

One important aim of precision planar ball guides design is a high stiffness. A mathematical appropriate design allows the deployment of three balls only. In order to fulfil the load and stiffness requirements of the guide a much higher number of balls is used. In this overconstrained situation the stiffness is reduced by an unknown value compared to the calculated theoretical result due to manufacturing deviations. The following contribution presents an experimental investigation of planar guides concerning their stiffness.

关键词： Stiffness

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Lorentz Force Velocimetry for Poorly Conducting Fluids-Development and Validation of a Novel Flow Rate measurement Device

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Journal of Iron and Steel Research International 2012年第S2期19卷 613-616页

作者： WEGFRASS Andre RESAGK Christian DIETHOLD Christian FRHLICH Thomas WERNER Michael HALBEDEL Bernd THESS Andre Institute of Thermodynamics and Fluid Mechanics Department of Mechanical EngineeringIlmenau University of Technology Institute of Process Measurement and Sensor Technology Department of Mechanical EngineeringIlmenau University of Technology Institute of Inorganic-nonmetallic Materials Department of Mechanical EngineeringIlmenau University of Technology

The paper demonstrated the feasibility of Lorentz Force Velocimetry for flow rate measurements of weakly conducting electrolytes using experimental results on salt water flow exposed to a permanent magnet *** innovative flow measurement technique allows the non-contact determination of flow rates and relies on the interaction between a magnetic field and a moving conducting *** an electrically conducting fluid moves through the magnetic field a Lorentz force is generated and acts on the measurement *** present report provides an overview about the experimental setups and the first measurement results.

关键词： Lorentz force velocimetry flow measurement electrolytes non-contact measurement

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CALIBRATION OF A NOVEL SIX-DEGREE-OF-FREEDOM FORCE/TORQUE measurement SYSTEM

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International Journal of Modern Physics: Conference Series 2013年第24期ijmpcs卷

作者： JAN SCHLEICHERT ILKO RAHNEBERG THOMAS FRÖHLICH Institute of Process Measurement and Sensor Technology Department of Mechanical Engineering Ilmenau University of Technology P.O. Box 100565 98693 Ilmenau Germany

Multi-component force/torque transducers are used in a large field of scientific and industrial applications like robotics, biomechanics and even fluid mechanics. These sensors need to be calibrated for traceable measurements. As the calibration procedure determines the measurement uncertainty, it plays an important role in sensor development for reaching the required measurement specifications. For the application in local Lorentz Force Velocimetry (Ref. 1) a six degree of freedom force/torque sensor for measurement ranges of ± 0.2 N and ± 5 mNm was developed. This sensor can also be adapted to other applications that require multi-dimensional force/torque feedback in the μN- and μNm-range such as tactile dimensional measurements and micro-manipulation. This paper discusses the calibration and the evaluation of the properties of the calibration device and the calibration procedure of the sensor system. After a brief introduction of the sensor design and its working principle the calibration setup is described and the uncertainty contributions to the forces and torques are calculated. Then the calibration procedure is presented and the resulting output signals of the sensor are depicted. As a result of the calibration, the calibration matrix is given with a discussion of its major components.

关键词： Multi-component force/torque measurement 6-DoF calibration procedures sensor development

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