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检索条件"机构=Institute for Process Measurement and Sensor Technology"
122 条 记 录,以下是1-10 订阅
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Permanent tracebility of a Nanopositioning and Nanomeasuring Machine
Permanent tracebility of a Nanopositioning and Nanomeasuring...
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2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop
作者: Manske, E. Blumröder, U. Köchert, P. Fröhlich, T. Kissinger, T. Ortlepp, I. Gerhardt, U. Mastylov, R. Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Ilmenau Germany Precision Engineering Division Braunschweig Germany Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Gustav-Kirchhoff-Str. 1 Ilmenau98693 Germany
Due to the frequency stabilization of He-Ne-lasers directly to a frequency comb controlled by a GPS atomic clock disciplined oscillator and their direct coupling with a Nanopositioning and Nanomeasuring Machine, direc... 详细信息
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Test bench for the investigation of road temperature measurement
Test bench for the investigation of road temperature measure...
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作者: Marin, Sebastian Fröhlich, Thomas Augustin, Silke Schalles, Marc Krapf, Gunter Beerel, Joseph Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology IlmenauPF 100 565 Germany
The road temperature is used as an indicator for the winter maintenance service. Consequently, it should be determinated within a known measurement uncertainty. Investigations in road weather stations revealed inconsi... 详细信息
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CENTRE OF GRAVITY MEASURING DEVICE  24
CENTRE OF GRAVITY MEASURING DEVICE
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24th IMEKO TC3 Conference on measurement of Force, Mass and Torque 2022, Together with the 14th TC5 Conference on the measurement of Hardness, the 6th TC16 Conference on Pressure and Vacuum measurement, and the 5th TC22 Conference on Vibration measurement
作者: Pabst, M. Fröhlich, T. Technical University of Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Process Measurement Technology Group Ilmenau Germany
This paper describes a new method to measure the height of the centre of gravity of high-sensitive mass artefacts. A measuring device is presented and tested with mass samples of various shapes and densities. The resu... 详细信息
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Calibration of the stiffness of soft cantilevers based on electromagnetic and electrostatic force compensation principles
Calibration of the stiffness of soft cantilevers based on el...
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作者: Cherkasova, Valeriya Li, Zhi Popadic, Radovan Froehlich, Thomas Brand, Uwe Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau Germany Department 5.1 Surface Metrology Physikalisch-Technische Bundesanstalt PTB Braunschweig Germany
This article presents a modified version of a traceable force-displacement measurement device developed at TU Ilmenau. The calibration of forces is carried out by a balance with the electromagnetic and electrostatic p... 详细信息
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Double-pass modulated differential confocal microscopy for closed-loop axial control of direct laser writing  13
Double-pass modulated differential confocal microscopy for c...
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Optical measurement Systems for Industrial Inspection XIII 2023
作者: Belkner, Johannes Stauffenberg, Jaqueline Tenorio, Christian Görner Ortlepp, Ingo Manske, Eberhard Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Max-Planck-Ring 12 Ilmenau98693 Germany
Direct laser writing is a popular method for mask-less lithography that already achieved commercial grade. However, it is still challenging to realize homogeneously exposed structures on 3D-shaped substrates. A common... 详细信息
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Long-term wavelength stabilisation of widely modulated lasers  13
Long-term wavelength stabilisation of widely modulated laser...
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Optical measurement Systems for Industrial Inspection XIII 2023
作者: Wiseman, Kieran B. Kissinger, Thomas Tatam, Ralph P. Centre for Engineering Photonics Cranfield University United Kingdom Institute of Process Measurement and Sensor Technology Technical University of Ilmenau Germany
In this paper, we present a novel technique for stabilisation of widely wavelength modulated lasers (>100pm) over long time scales, where modulation depths exceed the spectral width of standard reference features, ... 详细信息
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An ultrastable metrology laser for traceable length metrology in nanopositioning machines – Towards a 10−12 uncertainty level
An ultrastable metrology laser for traceable length metrolog...
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作者: Blumröder, Ulrike Köchert, Paul Fröhlich, Thomas Ortlepp, Ingo Kissinger, Thomas Manske, Eberhard Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Ilmenau Germany Precision Engineering Division Braunschweig Germany
In this contribution we propose the incorporation of a diode laser stabilized to an ultrastable cavity (ORS) as a metrology laser within the interferometric length measurement system of a nanopositioning and -measurin... 详细信息
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Investigation on the lithographic process for a high-precision direct laser writing system  20
Investigation on the lithographic process for a high-precisi...
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Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX 2023
作者: Häcker, Annika-Verena Stauffenberg, Jaqueline Manske, Eberhard Institute of Process Measurement and Sensor Technology Production and Precision Measurement Technology Group Technische Universität Ilmenau Gustav-Kirchhoff-Straße 1 Thuringia Ilmenau98693 Germany
The semiconductor industry is an unbelievable fast-growing field with an exponential growth in the space optimization. But also, other large industrial field are getting smaller in the structure size, for example the ... 详细信息
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measurement of optical fiber bending stiffness
Measurement of optical fiber bending stiffness
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作者: Cherkasova, Valeriya Hemeling, Christoph Kissinger, Thomas Fröhlich, Thomas Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau PF 10 05 65 Ilmenau98684 Germany
This paper presents traceable measurements of bending stiffness for standard optical SMF-28 fiber. Stiffness values were derived from force-displacement measurements, performed in a setup specifically designed for the... 详细信息
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Analytical Description of Transversally Symmetric Hinges with Semicircular Contours  16th
Analytical Description of Transversally Symmetric Hinges wi...
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16th International Federation of Theory of Machines and Mechanisms World Congress, IFToMM WC 2023
作者: Jahn, Hannes Fröhlich, Thomas Zentner, Lena TU Ilmenau Department of Mechanical Engineering Mechanics of Compliant Systems Group Ilmenau98693 Germany TU Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Ilmenau98693 Germany
Compliant mechanisms are becoming increasingly important, especially in force measurement and weighing technology, due to their zero backlash, wear resistance, and zero friction. Their deformation under external force... 详细信息
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