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23rd IMEKO TC3 Conference on measurement of Force, Mass and Torque 2017: measurement Facing New Challenges

作者： Marangoni, Rafael R. Schleichert, Jan Rahneberg, Ilko Fröhlich, Thomas Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Germany

ISBN: (纸本)9781510844711

An experimental setup for characterizing the dynamic and static behavior of multi-component force and torque sensors is presented. In this setup, a 6-DoF force and torque sensor based on the principle of electromagnetic force compensation (EMFC) is used to apply static and dynamic force and torque vectors to a sensor to be identified. Several characteristics of the sensor under test, such as linearity and dynamic behavior can be evaluated. The system presented here can generate forces and torques with up to 7 N and 0,35 N∙m and has resolutions of 10 μN and 0,3 μN∙m respectively. © 2017 IMEKO-International measurement Federation Secretariat. All Rights Reserved.

关键词： Torque

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Pico litre volume measurement with a laser focus sensor on the nano measuring machine NMM-1 17

Pico litre volume measurement with a laser focus sensor on t...

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17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017

作者： Ortlepp, Ingo Mastylo, Rostyslav Albrecht, Arne Manske, Eberhard Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Germany Technische Universität Ilmenau Institute of Micro- and Nanotechnologies Germany

ISBN: (纸本)9780995775107

A novel approach of measuring small volumes is made in our project. The goal is to utilise the Nano Measuring Machine NMM-1 in combination with a laser focus sensor to determine the volume of small water droplets. The droplet surface is scanned by the focus sensor with picometre resolution. Based on the shape of the scan lines, the actual volume of the droplet can be calculated. However, due to the small distance between the water surface and the glass carrier, the laser focus sensor signal was distorted by undesired reflections from the glass carrier the droplets are deposited on. To reduce these undesired reflections, the BK7 carrier was anti-reflection coated. When a SiO2 layer of appropriate thickness is deposited on the carrier, the reflectance at the water - glass interface can be considerably lowered. This drastically improves the sensor signal, thus enables the correct measurement of the droplets' shapes and hence the calculation of their volume.

关键词： Antireflection coatings

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Multi-component force measurement in micromachining

Multi-component force measurement in micromachining

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作者： Marangoni, Rafael R. Schleichert, Jan Rahneberg, Ilko Mastylo, Rostyslav Manske, Eberhard Fröhlich, Thomas Technische Universität Ilmenau Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology PF 100 565 Ilmenau98684 Germany

An experimental setup for performing micro-scratching tasks and measuring the forces involved in the process is presented in this paper. The main component of the system is a multi-component force and torque sensor based on the principle of electromagnetic force compensation (EMFC). With this device it is possible to perform the micromachining process itself while simultaneously measuring the interaction forces between the tool tip and the test specimen. Experiments were performed with specimens of polished steel, silicon and glass. Planar micro-structures could be produced and tool point interaction forces in the order of some millinewtons were measured during the process. © 2017 Walter de Gruyter Berlin/Boston.

关键词： Micromachining

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Contribution to the mechanical enhancement of load cells in precision weighing technology by means of advanced adjustment strategies 17

Contribution to the mechanical enhancement of load cells in ...

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17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017

作者： Darnieder, Maximilian Marangoni, Rafael R. Theska, René Fröhlich, Thomas Rahneberg, Ilko Institute of Design and Precision Engineering Precision Engineering Group Department of Mechanical Engineering Technische Universität Ilmenau Germany Institute of Process Measurement and Sensor Technology Process Measurement Group Department of Mechanical Engineering Technische Universität Ilmenau Germany

ISBN: (纸本)9780995775107

The accuracy of force measurement systems is predominantly influenced by its stiffness towards deflection. Monolithic mechanical systems in precision weighing technology rely on ultrathin flexure hinges. Further stiffness reduction by a decrease of the minimum hinge thickness is unfavourable. Consequently, the present concept relies on compensation rather than a reduction of the stiffness. Based on precise adjustments, the system's state is altered towards an astatic state. Hereby, the overall stiffness and the tilt sensitivity is reduced. These properties have been determined as major contributions to the measurement error. The results of the theoretical investigations form a basis for future experiments and a further improvement of load cells.

关键词： Stiffness

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Nanonewton Force measurements Based on Electromagnetic Force Compensated Balances (EMFC)

Nanonewton Force Measurements Based on Electromagnetic Force...

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Conference on Precision Electromagnetic measurements

作者： Oliver Dannberg Michael Kuhnel Thomas Frohlich Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau Germany

This paper gives an overview of microbalances that measure forces in the range of nanonewton and their applications. A loading force produces a deflection of the balance that is compensated by an actuator. The current (electromagnetic) or voltage (electrostatic) that is necessary to equalize the balance is a measure for the applied force. The TV-Ilmenau achieved a force resolution of less than 1 nN with a system that is working according to the electromagnetic force compensating principle. The force resolution is dependent on the stiffness of the balance joints and on the resolution of the balance deflection measurement. In order to increase the force resolution, the TV- Ilmenau develops a new system with a lower stiffness and a higher resolution of the position sensor.

关键词： force metrology Kibble balance cantilever calibration electromagnetic force compensation

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Multicomponent Force and Torque measurement in the New SI

Multicomponent Force and Torque Measurement in the New SI

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Conference on Precision Electromagnetic measurements

作者： Rafael R. Marangoni Jan Schleichert Thomas Frohlich Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau Germany

A multicomponent force and torque sensor with an integrated calibration system is shown. The calibration factors for the sensor are determined using voltage, resistance, position, angle and time references. In this way, the force and torque measurements can be traced directly to fundamental physical constants, with many advantages when compared to traditional methods. A prototype designed for measuring forces and torques in a range of 2 N and 0.1 N·m with a relative combined standard uncertainty (k=2) of pmb10~(-4) is currently being implemented. Preliminary experimental results used to evaluate some aspects of the system's performance are presented.

关键词： Force metrology torque metrology multicomponent traceable measurement Kibble balance calibration

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First Results Using the Planck-Balance

First Results Using the Planck-Balance

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Conference on Precision Electromagnetic measurements

作者： C. Rothleitner J. Schleichert S. Vasilyan N. Rogge L. Gunther F. Hilbrunner I. Rahneberg D. Knopf T. Frohlich F. Hartig Physikalisch-Technische Bundesanstalt (PTB) Braunschweig Germany Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau Germany

A table top version of a Kibble balance called the Planck-Balance has been developed by the Physikalisch-Technische Bundesanstalt (PTB) and the Technische Universitat Ilmenau (TUIL). After one year of development, the first measurement results were obtained. The mass of a 10 g mass standard has been determined with a relative type A uncertainty of 3 × 10~(-7). A preliminary uncertainty budget shows a relative combined measurement uncertainty of 1 × 10~(-6). This paper gives a brief overview of the concept of the balance, its measurement principle, its results and a preliminary uncertainty budget.

关键词： Planck-Balance Kibble balance redefinition of the kilogram mass dissemination table top Kibble balance

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Dynamic sensor positioning in large measuring volumes by an inverse kinematic concept

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Journal of Physics: Conference Series 2018年第14期1065卷

作者： Ingo Ortlepp Eberhard Manske Roland Füßl Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau 98693 Ilmenau Germany

The growth in measuring objects and the demand for measurement precision in the sub-nanometer range are the challenges for future nano positioning and nano measuring machines (NPMMs). However, the usual moving stage principle will reach its limits due to the larger moving masses it entails for large measuring volumes. Therefore, an inverse kinematic concept for NPMMs is proposed, which permits to reduce the moving masses to a few kilogram. In this concept, the interferometers and the probe are moved, while the measuring object and the interferometer mirrors are fixed. The probe position is measured and controlled in 6 DOF.

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Nanopositioning and nanomeasuring machine NPMM-200 - Sub-nanometre resolution and highest accuracy in extended macroscopic working areas 17

Nanopositioning and nanomeasuring machine NPMM-200 - Sub-nan...

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17th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2017

作者： Manske, E. Jäger, G. Hausotte, T. Müller, A. Balzer, F. Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Am Ehrenberg Ilmenau98684 Germany Nägelsbachstraße 25 Erlangen91052 Germany Hexagon Metrology GmbH Siegmund-Hiepe-Straße 2-12 Wetzlar35578 Germany

ISBN: (纸本)9780995775107

At the Technische Universität Ilmenau, a new Nanopositioning and Nanomeasuring Machine NPMM 200 with a measuring range of 200 mm × 200 mm × 25 mm and a resolution of 0.02 nm has been developed. In order to achieve both highest nanometre accuracy and largest three-dimensional working space, an extended three-dimensional Abbe comparator principle is applied. The object to be measured is placed on a special mirror plate whose position in all six degrees of freedom is measured by high-precision multi-axis fibre-coupled laser interferometers. By means of an advanced closed-loop control tilt errors induced by the guiding systems can be minimized up to interferometric level. This paper presents the metrological concept, the realized design, the conditioning of environmental parameters as well as some first measuring results.

关键词： Comparators (optical)

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Generating ideal reference geometry for cutting edges

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Journal of Physics: Conference Series 2018年第14期1065卷

作者： Abdullah Karatas Jörg Seewig University of Kaiserslautern Department of Mechanical and Process Engineering Institute for Measurement and Sensor-Technology Gottlieb-Daimler-Str. Building 44 D-67663 Kaiserslautern Germany

In the last years, many different techniques for rating cutting edges were presented. Nevertheless an automatic measurement and indication of quality from cutting edges was covered less attention. Although the state of cutting edges is very important in many cases during the manufacturing process. An automatic indication of quality can roughly be realised in three steps. The step, generating an ideal reference geometry from measured data, will be discussed in this paper. Therefore different types of splines and a robust filtering method is used. The other two steps, mainly measuring and estimating quantification parameters, were discussed in diverse sources.

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