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检索条件"机构=Institute of Process Measurement and Sensor Technology"
117 条 记 录,以下是1-10 订阅
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Permanent tracebility of a Nanopositioning and Nanomeasuring Machine
Permanent tracebility of a Nanopositioning and Nanomeasuring...
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2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop
作者: Manske, E. Blumröder, U. Köchert, P. Fröhlich, T. Kissinger, T. Ortlepp, I. Gerhardt, U. Mastylov, R. Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Ilmenau Germany Precision Engineering Division Braunschweig Germany Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Gustav-Kirchhoff-Str. 1 Ilmenau98693 Germany
Due to the frequency stabilization of He-Ne-lasers directly to a frequency comb controlled by a GPS atomic clock disciplined oscillator and their direct coupling with a Nanopositioning and Nanomeasuring Machine, direc... 详细信息
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CENTRE OF GRAVITY MEASURING DEVICE  24
CENTRE OF GRAVITY MEASURING DEVICE
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24th IMEKO TC3 Conference on measurement of Force, Mass and Torque 2022, Together with the 14th TC5 Conference on the measurement of Hardness, the 6th TC16 Conference on Pressure and Vacuum measurement, and the 5th TC22 Conference on Vibration measurement
作者: Pabst, M. Fröhlich, T. Technical University of Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Process Measurement Technology Group Ilmenau Germany
This paper describes a new method to measure the height of the centre of gravity of high-sensitive mass artefacts. A measuring device is presented and tested with mass samples of various shapes and densities. The resu... 详细信息
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Double-pass modulated differential confocal microscopy for closed-loop axial control of direct laser writing  13
Double-pass modulated differential confocal microscopy for c...
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Optical measurement Systems for Industrial Inspection XIII 2023
作者: Belkner, Johannes Stauffenberg, Jaqueline Tenorio, Christian Görner Ortlepp, Ingo Manske, Eberhard Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Max-Planck-Ring 12 Ilmenau98693 Germany
Direct laser writing is a popular method for mask-less lithography that already achieved commercial grade. However, it is still challenging to realize homogeneously exposed structures on 3D-shaped substrates. A common... 详细信息
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Long-term wavelength stabilisation of widely modulated lasers  13
Long-term wavelength stabilisation of widely modulated laser...
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Optical measurement Systems for Industrial Inspection XIII 2023
作者: Wiseman, Kieran B. Kissinger, Thomas Tatam, Ralph P. Centre for Engineering Photonics Cranfield University United Kingdom Institute of Process Measurement and Sensor Technology Technical University of Ilmenau Germany
In this paper, we present a novel technique for stabilisation of widely wavelength modulated lasers (>100pm) over long time scales, where modulation depths exceed the spectral width of standard reference features, ... 详细信息
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Investigation on the lithographic process for a high-precision direct laser writing system  20
Investigation on the lithographic process for a high-precisi...
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Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX 2023
作者: Häcker, Annika-Verena Stauffenberg, Jaqueline Manske, Eberhard Institute of Process Measurement and Sensor Technology Production and Precision Measurement Technology Group Technische Universität Ilmenau Gustav-Kirchhoff-Straße 1 Thuringia Ilmenau98693 Germany
The semiconductor industry is an unbelievable fast-growing field with an exponential growth in the space optimization. But also, other large industrial field are getting smaller in the structure size, for example the ... 详细信息
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Analytical Description of Transversally Symmetric Hinges with Semicircular Contours  16th
Analytical Description of Transversally Symmetric Hinges wi...
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16th International Federation of Theory of Machines and Mechanisms World Congress, IFToMM WC 2023
作者: Jahn, Hannes Fröhlich, Thomas Zentner, Lena TU Ilmenau Department of Mechanical Engineering Mechanics of Compliant Systems Group Ilmenau98693 Germany TU Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Ilmenau98693 Germany
Compliant mechanisms are becoming increasingly important, especially in force measurement and weighing technology, due to their zero backlash, wear resistance, and zero friction. Their deformation under external force... 详细信息
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Investigations on the tracking control and performance of a long stroke vertical nanopositioning drive  22
Investigations on the tracking control and performance of a ...
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22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022
作者: Huaman, Alex S. Gorges, Stephan Katzschmann, Michael Hesse, Steffen Fröhlich, Thomas Manske, Eberhard Ilmenau98693 Germany Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau98693 Germany
This paper presents an approach to equip an existing planar nanoprecision drive system with specially designed lifting and actuating units (LAUs), which can lift several kilograms along a vertical stroke of 10 mm with... 详细信息
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Range Revolved Interferometry for use in high precision positioning systems  39
Range Revolved Interferometry for use in high precision posi...
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39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024
作者: Grabowski, Axel Mittag, Sven Walenda, Carolin Kissinger, Thomas SE & Co. KG Auf der Roemerstrasse 1 Karlsruhe76228 Germany Institute for Process Measurement and Sensor Technology Technical University of Ilmenau Gustav-Kirchhoff-Str. 1 Ilmenau98693 Germany
We presented here a new fiber-based interferometer technology in a functional sample usable for industrial applications. We have shown an evaluation of the basic properties like positional noise, linearity and stabili... 详细信息
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CAPACITIVE CALIBRATION CAPABILITIES IN AN EMFC BALANCE  24
CAPACITIVE CALIBRATION CAPABILITIES IN AN EMFC BALANCE
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24th IMEKO TC3 Conference on measurement of Force, Mass and Torque 2022, Together with the 14th TC5 Conference on the measurement of Hardness, the 6th TC16 Conference on Pressure and Vacuum measurement, and the 5th TC22 Conference on Vibration measurement
作者: Cherkasova, V. Fröhlich, T. Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau PF 10 05 65 Ilmenau98684 Germany
The article describes the possibilities of calibrating the force constant in an electromagnetic force compensation (EMFC) load cell using the electrostatic force compensation principle. The static and dynamic principl... 详细信息
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Test bench for the investigation of road temperature measurement
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measurement: sensors 2025年
作者: Marin, Sebastian Fröhlich, Thomas Augustin, Silke Schalles, Marc Krapf, Gunter Beerel, Joseph Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology IlmenauPF 100 565 Germany
The road temperature is used as an indicator for the winter maintenance service. Consequently, it should be determinated within a known measurement uncertainty. Investigations in road weather stations revealed inconsi... 详细信息
来源: 评论