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2023 ASPE Winter Topical Meeting: Precision Optical Metrology Workshop

作者： Manske, E. Blumröder, U. Köchert, P. Fröhlich, T. Kissinger, T. Ortlepp, I. Gerhardt, U. Mastylov, R. Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Ilmenau Germany Precision Engineering Division Braunschweig Germany Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Gustav-Kirchhoff-Str. 1 Ilmenau98693 Germany

ISBN: (纸本)9781713870876

Due to the frequency stabilization of He-Ne-lasers directly to a frequency comb controlled by a GPS atomic clock disciplined oscillator and their direct coupling with a Nanopositioning and Nanomeasuring Machine, directly traceable measurements are demonstrated. © (2023) by American Society for Precision Engineering (ASPE) All rights reserved.

关键词： Precision engineering

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CENTRE OF GRAVITY MEASURING DEVICE 24

CENTRE OF GRAVITY MEASURING DEVICE

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24th IMEKO TC3 Conference on measurement of Force, Mass and Torque 2022, Together with the 14th TC5 Conference on the measurement of Hardness, the 6th TC16 Conference on Pressure and Vacuum measurement, and the 5th TC22 Conference on Vibration measurement

作者： Pabst, M. Fröhlich, T. Technical University of Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Process Measurement Technology Group Ilmenau Germany

ISBN: (纸本)9781713870203

This paper describes a new method to measure the height of the centre of gravity of high-sensitive mass artefacts. A measuring device is presented and tested with mass samples of various shapes and densities. The results of the measurements are compared to the geometrical estimated heights of the centre of gravity and further developments of the new instrument are presented. © 2023 *** All Rights Reserved.

关键词： Comparators (optical)

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Double-pass modulated differential confocal microscopy for closed-loop axial control of direct laser writing 13

Double-pass modulated differential confocal microscopy for c...

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Optical measurement Systems for Industrial Inspection XIII 2023

作者： Belkner, Johannes Stauffenberg, Jaqueline Tenorio, Christian Görner Ortlepp, Ingo Manske, Eberhard Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology Max-Planck-Ring 12 Ilmenau98693 Germany

ISBN: (数字)9781510664463

ISBN: (纸本)9781510664456

Direct laser writing is a popular method for mask-less lithography that already achieved commercial grade. However, it is still challenging to realize homogeneously exposed structures on 3D-shaped substrates. A common source of the variation in exposure is a changing distance of the substrate surface with the photoresist towards the plane of the narrowest waist of the exposure beam. To tackle this issue, we propose a differential confocal probe that employs a spatially modulated pinhole. This phase-modulated lock-in principle enables highly resolved depth sensing without ambiguity about the direction of the deviation from the focal plane. However, the modulation contrast must be high enough to achieve this, which is why the measuring beam passes the pinhole twice. This probe is integrated into the nanopositioning and nanomeasuring machine via a position-based controller. We demonstrate the capability to follow 10◦ inclined substrates. © 2023 SPIE.

关键词： Confocal microscopy

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Long-term wavelength stabilisation of widely modulated lasers 13

Long-term wavelength stabilisation of widely modulated laser...

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Optical measurement Systems for Industrial Inspection XIII 2023

作者： Wiseman, Kieran B. Kissinger, Thomas Tatam, Ralph P. Centre for Engineering Photonics Cranfield University United Kingdom Institute of Process Measurement and Sensor Technology Technical University of Ilmenau Germany

ISBN: (数字)9781510664463

ISBN: (纸本)9781510664456

In this paper, we present a novel technique for stabilisation of widely wavelength modulated lasers (>100pm) over long time scales, where modulation depths exceed the spectral width of standard reference features, such as gas absorption lines, by over an order of magnitude. The technique operates by controlling the temporal separation between successive appearances of a gas absorption line on the up and down sweeps of a sinusoidal laser wavelength modulation waveform. The influence of the signal distortions introduced by the laser intensity modulation that are associated with laser diode injection current modulation are also addressed. The technique is applied to a range-resolved interferometric system interrogating a Mach-Zehnder interferometer operating in thermally stable conditions, using an absorption feature from a fibre-coupled gas cell as a reference. Proof-of-principle measurement results achieved using this technique are presented, demonstrating a notional fractional stability of 3.9×10−7 without further correction. © 2023 SPIE.

关键词： Stabilization

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Investigation on the lithographic process for a high-precision direct laser writing system 20

Investigation on the lithographic process for a high-precisi...

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Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX 2023

作者： Häcker, Annika-Verena Stauffenberg, Jaqueline Manske, Eberhard Institute of Process Measurement and Sensor Technology Production and Precision Measurement Technology Group Technische Universität Ilmenau Gustav-Kirchhoff-Straße 1 Thuringia Ilmenau98693 Germany

ISBN: (纸本)9781510665200

The semiconductor industry is an unbelievable fast-growing field with an exponential growth in the space optimization. But also, other large industrial field are getting smaller in the structure size, for example the field of optics. On the other hand, the customer demands get more and more complex and individual. This leads to an enormous growth potential for micro- and nanofabrication with direct laser writing. Under this circumstance the idea for a micro- and nanostructuring possibility with high precision on large areas was born.1 A setup was developed to combine a nanopositioning and nanomeasuring machine (NMM-1) with an extremely high precision and a two-photon based illumination system to realize a high-precision direct laser writing system.2 Besides its high positioning resolution of 0.1 nm and its metrological traceability based on an interferometrical measurement setup, the NMM-1 offers a positioning range of 25mm x 25mm x 5mm34 The aim is to design a direct laser writing setup, which enables a trans-scale fabrication without any stitching or combination of different positioning systems necessary. In order to benefit from this high positional accuracy, studies have been made to investigated the 2 photon absoption process and reduce line widths. The presented research shows investigations, which were made with the developed laser writing setup, to invested illumination dose and the voxel position of the writing laser, in order to improve microstructuring and to reduce structure widths. © 2023 SPIE.

关键词： Lithography

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Analytical Description of Transversally Symmetric Hinges with Semicircular Contours 16th

Analytical Description of Transversally Symmetric Hinges wi...

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16th International Federation of Theory of Machines and Mechanisms World Congress, IFToMM WC 2023

作者： Jahn, Hannes Fröhlich, Thomas Zentner, Lena TU Ilmenau Department of Mechanical Engineering Mechanics of Compliant Systems Group Ilmenau98693 Germany TU Ilmenau Department of Mechanical Engineering Institute of Process Measurement and Sensor Technology Ilmenau98693 Germany

ISBN: (纸本)9783031457081

Compliant mechanisms are becoming increasingly important, especially in force measurement and weighing technology, due to their zero backlash, wear resistance, and zero friction. Their deformation under external forces can be analyzed well with analytical calculations and FEM simulations. Analytically, only mechanisms with symmetrical and longitudinally symmetrical hinges are described. This paper presents a method that allows transversally symmetric hinges to be described analytically. The model must be computed numerically due to the built neutral fiber and the nonlinearities in the used calculation method. The developed method is then compared with FEM calculations in a parameter study and considered to be validated. Finally, outlooks are formulated on how the created method can for instance be used to develop load cells for later calculations. Moreover, it is shown to what extent it is possible to implement this method for general calculations of compliant mechanisms. © 2024, The Author(s), under exclusive license to Springer Nature Switzerland AG.

关键词： Hinges

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Investigations on the tracking control and performance of a long stroke vertical nanopositioning drive 22

Investigations on the tracking control and performance of a ...

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22nd International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2022

作者： Huaman, Alex S. Gorges, Stephan Katzschmann, Michael Hesse, Steffen Fröhlich, Thomas Manske, Eberhard Ilmenau98693 Germany Institute of Process Measurement and Sensor Technology Technische Universität Ilmenau Ilmenau98693 Germany

ISBN: (纸本)9781998999118

This paper presents an approach to equip an existing planar nanoprecision drive system with specially designed lifting and actuating units (LAUs), which can lift several kilograms along a vertical stroke of 10 mm with nanometer precision. These modules contain a pneumatic actuator to counteract the weight force along the entire travel range without introducing significant heat into the measurement space. An additional parallel acting electromagnetic actuator provides the precision positioning forces. As an initial step toward a full 6D system, each LAU is set up individually on a test bench. Using an included laser interferometric measurement system and emulated loads, allows for the development and evaluation of different control strategies within the simulation framework and via real-time experiments. Designing a controller for a single LAU involves an in-depth research into its overactuated nature and the derivation of a detailed model of the drive as well as the motion system. The proposed control strategy achieves subnanometer precision by integrating a feedforward stage for trajectory tracking and an output-feedback stage for stabilization and disturbance rejection. In this context, the output-feedback controller highlights a composite state and disturbance observer. In order to accomplish an adequate tradeoff between performance and robustness, the controller tuning is performed in the time and frequency domain based on systematic LQR/LQG design methods. The effectiveness of the presented control strategy is verified via real-time experimentation, where the overall control scheme allows RMS positioning errors below 0.3 nm which seem to be dominated by the measurement noise. Moreover, it renders very low heat dissipation of about 54 nW to carry a 4 kg payload. © European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 22nd International Conference and Exhibition, EUSPEN 2022. All rights reserved.

关键词： Nanotechnology

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Range Revolved Interferometry for use in high precision positioning systems 39

Range Revolved Interferometry for use in high precision posi...

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39th Annual Meeting of the American Society for Precision Engineering, ASPE 2024

作者： Grabowski, Axel Mittag, Sven Walenda, Carolin Kissinger, Thomas SE & Co. KG Auf der Roemerstrasse 1 Karlsruhe76228 Germany Institute for Process Measurement and Sensor Technology Technical University of Ilmenau Gustav-Kirchhoff-Str. 1 Ilmenau98693 Germany

ISBN: (纸本)9781887706612

We presented here a new fiber-based interferometer technology in a functional sample usable for industrial applications. We have shown an evaluation of the basic properties like positional noise, linearity and stability over 64 hours of measuring time. The unique features of the data processing scheme enable the system to measure with very low periodic errors. Additionally, it has been proven that the detection of more than one surface is doable and even further, that it is capable of measuring and tracking the thickness of optical transparent systems. Furthermore, it is possible to use the system in cryogenic environments. This has been demonstrated by characterizing different piezoelectric materials in a temperature range between room temperature and 4K. The form factor of the sensor heads is very small, enabling the construction of very compact piezo stages. © 2024 Proceedings - ASPE 2024 Annual Meeting. All rights reserved.

关键词： Piezoelectric materials

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CAPACITIVE CALIBRATION CAPABILITIES IN AN EMFC BALANCE 24

CAPACITIVE CALIBRATION CAPABILITIES IN AN EMFC BALANCE

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作者： Cherkasova, V. Fröhlich, T. Institute for Process Measurement and Sensor Technology Technische Universität Ilmenau PF 10 05 65 Ilmenau98684 Germany

ISBN: (纸本)9781713870203

The article describes the possibilities of calibrating the force constant in an electromagnetic force compensation (EMFC) load cell using the electrostatic force compensation principle. The static and dynamic principles of calibration of the Kibble balance for the electrostatic force constant, as well as calibration by means of compensation of the electrostatic force by the electromagnetic force, are considered. The combination of the two compensation principles in the load cell allows the measurement of forces in the range of 20 pN to 2.2 mN and ensures traceability to national standards. The relative uncertainty in the measurement of forces of about 100 nN is estimated to be about 0.001. © 2023 *** All Rights Reserved.

关键词： Calibration

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Test bench for the investigation of road temperature measurement

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measurement: sensors 2025年

作者： Marin, Sebastian Fröhlich, Thomas Augustin, Silke Schalles, Marc Krapf, Gunter Beerel, Joseph Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology IlmenauPF 100 565 Germany

The road temperature is used as an indicator for the winter maintenance service. Consequently, it should be determinated within a known measurement uncertainty. Investigations in road weather stations revealed inconsistencies in the evaluation of the road temperature according to different measurement principles. In order to systematically investigate the differences that occurred in the measured road surface temperature, a test bench that enables simulation of the road temperature and the ambient conditions was built. This test bench will be presented in this article. © 2024

关键词： Surface temperature

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