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Comparison of different load changers for EMFC-balances

Comparison of different load changers for EMFC-balances

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21st Conference on measurement of Force, Mass and Torque Together with HARDMEKO 2010 and 2nd Meeting on Vibration measurement, IMEKO TC3, TC5 and TC22 Conferences

作者： Hilbrunner, F. Weis, H. Fröhlich, T. Jäger, G. Ilmenau University of Technology Institute for Process Measurement and Sensor Technology Ilmenau Germany

ISBN: (纸本)9781618390219

In order to further improve the metrological properties of weighing systems based on the principle of electromagnetic force compensation (EMFC) as well as quality assurance, it is necessary to determine the parameters relevant for the dynamic operation, such as measurement time and controller behavior. This determination is carried out by loading the balance system and observing the indication. Typically this is done by a load changer using different metrological weights. This method is inevitable if metrological traceability is required. However, the conventional procedure of load changing also entails several disadvantages. The number of possible load changes per unit time is limited and the force characteristic during loading is usually unknown and relatively difficult to reproduce or manipulate. Furthermore the fast and sudden exchange of the weights causes mechanical vibrations and a movement of the surrounding air, both of which act as additional disturbances. In this paper we propose an alternative loading method, with which these shortcomings can be improved and compare it to a conventional system. This method is based on loading the weighing system in a defined manner using a Lorentz-force, allowing the tester to generate a known, virtually arbitrary force characteristic during loading. It is shown that the Lorentz-force generated load represents a practical alternative to classical weights, offering advantages in reproducibility, dynamics and ability to be automated. Since the proposed method applies a known Lorentz-force to the weighing system it becomes possible to exactly determine the relationship between the force acting on the weighing pan and the resulting behavior of the weighing system.

关键词： Vibrations (mechanical)

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High precission optical position sensor for electromagnetic force compensated balances

High precission optical position sensor for electromagnetic ...

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21st Conference on measurement of Force, Mass and Torque Together with HARDMEKO 2010 and 2nd Meeting on Vibration measurement, IMEKO TC3, TC5 and TC22 Conferences

作者： Diethold, Christian Fröhlich, Thomas Hilbrunner, Falko Jäger, Gerd Ilmenau University of Technology Institute for Process Measurement and Sensor Technology Ilmenau Germany

ISBN: (纸本)9781618390219

This paper discusses an optical position sensor which can be used in balances based on the principle of electromagnetic force compensation (short used EFC) for example. Other applications are zero point detection as well as high precision positioning in the range of ± 200 μm. The position sensor consists of two infrared-LED (IR-LED) which illuminate a single photodiode via an aperture. The aperture is movable and performs a shadowing of the beams, thus shadowing changes due to the position of the aperture. The photodiode detects light from both LED. Both light sources have to be modulated and phase shifted to distinguish them in the photodiode signal. The evaluation of the position of the aperture is done by demodulating the received signal. A major advantage of this method is that the aperture's operating point is in the centre of the beams. Hence higher sensitivity is achievable and the beams can be focused onto the photodiode. Furthermore standard components are used and thus expensive differential photodiodes are no longer necessary.

关键词： Photodiodes

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Vacuum transfer system for loading the sartorius prototype mass comparator CCL1007

Vacuum transfer system for loading the sartorius prototype m...

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21st Conference on measurement of Force, Mass and Torque Together with HARDMEKO 2010 and 2nd Meeting on Vibration measurement, IMEKO TC3, TC5 and TC22 Conferences

作者： Fröhlich, Thomas Fehling, Thomas Heydenbluth, Detlef Geyer, Matthias Schüler, Ralf Ilmenau University of Technology Institute of Process Measurement and Sensor Technology Germany Sartorius AG Göttingen Germany SIOS GmbH Ilmenau Germany

ISBN: (纸本)9781618390219

The Vacuum Transfer System (VTS) is designed for fully automatic loading of weights into the Sartorius Prototype Mass Comparator CCL1007. The system enables the user to transfer weights from air to air/neutral gas, air to vacuum and back, as well as from vacuum to vacuum conditions. A detailed description of the technical parameters and the different operation modes will be presented.

关键词： Comparators (optical)

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Investigations of metrological models for the nanomeasuring and nanopositioning machine with respect to the measurement uncertainty by means of a Monte Carlo simulation

Investigations of metrological models for the nanomeasuring ...

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25th Annual Meeting of the American Society for Precision Engineering, ASPE 2010

作者： Kreutzer, Philipp Füßl, Roland Manske, Eberhard Dorozhovets, Nataliya University of Technology Ilmenau Institute of Process Measurement and Sensor Technology P.O: Box 100 565 D-98684 Ilmenau Germany

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Combination of high-speed surface scanning and tactile 3-D coordinate measurement on the basis of advanced mechatronic and control concepts

Combination of high-speed surface scanning and tactile 3-D c...

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ASPE Spring Topical Meeting on Control of Precision Systems, ASPE 2010

作者： Hausotte, Tino Manske, Eberhard Jäger, Gerd Percle, Brandon Dorozhovets, Nataliya Machleidt, Torsten Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology Ilmenau University of Technology Ilmenau Thuringia Germany Faculty of Computer Science and Automation Computer Graphics Group Ilmenau University of Technology Ilmenau Thuringia Germany

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Novel high-resolution interferometric materials testing device for the determination of the viscoelastic behaviour of high-tech plastics

Novel high-resolution interferometric materials testing devi...

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19th IMEKO World Congress 2009

作者： Kühnel, M. Hilbrunner, F. Jäger, G. Ilmenau University of Technology Institute of Process Measurement and Sensor Technology Ilmenau Germany

ISBN: (纸本)9781615675937

The use of high-tech plastics in the field of mechanical engineering is increasing dramatically. The time-dependent change of strain Ε(t) during constant load (viscoelasticity, creeping) is a fundamental property of plastics and exact knowledge of these properties is required for the design of plastic parts. A novel high-resolution materials testing device is presented in this paper. It offers reaction-free interferometric measurement of the viscoelastic behaviour of plastics at a constant bending load. The resolution of the deflection is 1 nm. Therefore, unlike the three point bending test described in the ISO 899-2:2003 standard [1], the device is suitable for the measurement of viscoelasticity Ε(t) at very small strain values (Εmax

关键词： Viscoelasticity

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Characterisation of the metrological properties of 3-D microprobes 9

Characterisation of the metrological properties of 3-D micro...

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9th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2009

作者： Hofmann, N. Tibrewala, A. Balzer, F.G. Hausotte, T. Manske, E. Jäger, G. Büttgenbach, S. Ilmenau University of Technology Institute for Process Measurement and Sensor Technology Germany Braunschweig University of Technology Institute for Microtechnology Germany

ISBN: (纸本)9780955308277

The paper describes the comparison of the metrological properties of different 3-D microprobes. Various institutes and companies have developed microprobes to meet the demand for measurements of geometrical properties of small mechanical parts. Conventional 3-D probes as used in classical coordinate measuring machines (CMMs) cannot be adapted for these measurement tasks. Unlike 3-D probes used in CMMs, microprobes use probing spheres with diameters of 0.3 mm and below and probing forces smaller than 1 mN. The metrological properties of three different microprobes were characterised: A probe system made by the National Physical Laboratory (United Kingdom) a probe system developed by the institute for Microtechnology (Braunschweig University of technology, Germany) and a probe system made by Xpress Precision Engineering (Netherlands). Furthermore a new microprobe developed by the institute for process measurement and sensor technology (Ilmenau University of technology, Germany) is presented and first measurement results are introduced.

关键词： Coordinate measuring machines

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The Metrological Basis and Operation of Nanopositioning and Nanomeasuring Machine NMM-1

The Metrological Basis and Operation of Nanopositioning and ...

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作者： Jäger, Gerd Manske, Eberhard Hausotte, Tino Büchner, Hans-Joachim Ilmenau University of Technology Faculty of Mechanical Engineering Institute of Process Measurement and Sensor Technology PF 100 565 98684 Ilmenau Germany

After an explanation of the set-up of a nanomeasuring machine NMM-1, its high performance is described with a metrological analysis. This analysis shows some of today's limits of nanopositioning and nanomeasuring engineering. Single, double and triple beam plane mirror interferometers are applied in the nanomeasuring machine in order to measure and control the six degrees of freedom of the 3D nanopositioning stage. The various applications of the nanomeasuring machine are based on the installation of optical and tactile nanoprobes above the 3D nanopositioning stage. The set-up, function and measurement results of some zero-point nanoprobes in combination with the nanomeasuring machine are explained. Zusammenfassung Nach einer Erläuterung des Aufbaus der Nanomessmaschine NMM-1 wird deren hohe Leistungsfähigkeit anhand einer metrologischen Analyse dargestellt. Diese Analyse zeigt einige der heutigen Grenzen der Nanopositionier- und Na- nomesstechnik auf. Planspiegelinterferometer mit einem, zwei oder drei Strahlen werden in der Nanomessmaschine verwendet, um die sechs Freiheitsgrade des 3D- Nanopositioniertisches zu messen und zu regeln. Der Einsatz von optischen und taktilen sensoren ermöglicht die Anwendungen der Nanomessmaschine bei verschiedensten Messaufgaben. Aufbau, Funktion und Mess- ergebnisse einiger Nullpunktsensoren in Verbindung mit der Nanomessmaschine werden erklärt. ©Oldenbourg Wissenschaftsverlag.

关键词： Nanoprobes

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Nanomeasuring and nanopositioning engineering

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6th International Workshop on Advanced Optical Metrology, Fringe 2009

作者： Jäger, Gerd Manske, Eberhard Hausotte, Tino Büchner, Hans-Joachim Ilmenau University of Technology Faculty of Mechnical Engineering Institute of Process Measurement and Sensor Technology P.O. Box 100 565 98684 Ilmenau Germany

ISBN: (纸本)9783642030505

The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of the high-precision nanomeasuring machine having a resolution of 0,1 nm over the range of 25 mm x 25 mm x 5 mm is explained. Single beam-, double beam- and triple beam interferometer arranged with an Abbe offset-free design are installed into the nanomeasuring machine in order to measure and control the six degrees of freedom. The high performance of the machine is described with a metrological analysis. This analysis shows some todays limits of nanopositioning and nanomeasuring engineering. © Springer-Verlag Berlin Heidelberg 2009.

关键词： Degrees of freedom (mechanics)

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Monte carlo simulation to determine the measurement uncertainty of a metrological scanning probe microscope measurement

Monte carlo simulation to determine the measurement uncertai...

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Scanning Microscopy 2009

作者： Kreutzer, Ph. Dorozhovets, N. Manske, E. Fü, R. Jäger, G. Grünwald, R. Technische Universität Ilmenau Institute of Process Measurement and Sensor Technology P.O. Box 100 565 D-98684 Ilmenau Germany

ISBN: (纸本)9780819476548

A proprietary metrological scanning probe microscope (SPM) with an interferometer, developed by the institute of process measurement and sensor technology at the Ilmenau University of technology (IPMS), is used as a stationary probe system in the nanomeasuring and nanopositioning machine (NPMM). Due to the movements of the NPMM, the total microscope measuring range is 25mm × 25mm × 5mm with a positioning resolution of less than 0.1nm. Examples for specimens are step height standards and one-dimensional gratings. The repeatability has been determined at less than 0.5nm for measurements on calibrated step height standards and less than 0.2nm for the gratings. The measurement results of these samples are always directly related to the corresponding measurement uncertainty, which can be calculated using an uncertainty budget. A new traceable method has been developed using a vectorial modular *** this approach, it is possible to quickly insert new sub-models and to individually analyze their effects on the total measurement uncertainty. The analysis of these effects with regard to their uncertainties is done by Monte Carlo Simulation (MCS), because some models have partially or fully nonlinear character of which one example is the interferometer model of the metrological SPM. The complete development and analysis of these models is presented for one specific measurement task. The measurement results and the corresponding measurement uncertainty were obtained by Monte Carlo Simulation. Comparisons with the GUM have shown that the proposed procedure is a good alternative to achieve reasonable measurement results with uncertainty estimation.©2009 SPIE.

关键词： Interferometers

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